Visual device for realizing appearance detection of five surfaces of chip

Abstract

The utility model provides a visual device for realizing appearance detection of five surfaces of a chip, which relates to the technical field of semiconductor packaging test equipment and comprises a camera shooting lamp box, a chip inlet is arranged in the middle of the top surface of the camera shooting lamp box, and a transparent protective cover is arranged at the bottom of the chip inlet. A camera is arranged at the bottom of the camera shooting lamp box, a camera bottom plate penetrates through the bottom of the camera shooting lamp box, a camera mounting plate is arranged at the bottom of one side of the camera, and a camera lifting module is arranged on the side, opposite to the camera, of the camera mounting plate; the three-prism reflectors, the annular light source and the transparent protective cover are adopted, a user puts a chip into the transparent protective cover, the four sets of three-prism reflectors reflect the front face, the back face and the two sides of the chip, the camera lens at the bottom can shoot and recognize the bottom face and the four sets of side faces of the chip at a time, the steps of detecting the appearance of the five faces of the chip are simplified, and the detection efficiency is improved. And the chip appearance detection efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor packaging and testing equipment, in particular to a visual device for realizing five-side appearance detection of a chip. Background Art

[0002] In electronics, chips are a way of miniaturizing circuits (mainly semiconductor devices, but also passive components, etc.), and are often manufactured on the surface of semiconductor wafers. Chip appearance inspection is an important part of semiconductor process manufacturing, because there will be many graphic defects, dirt, breakage, defects and other poor appearances during the chip manufacturing process. In order to improve the yield of subsequent process links and product reliability, 100% microscopic inspection of the appearance part is required.

[0003] When performing appearance inspection on existing chips, the chip needs to be rotated for inspection, which is inefficient, or multiple cameras are used, which increases the inspection cost. Utility Model Content

[0004] The technical problem to be solved by the utility model is to overcome the troublesome problem of multi-side detection of chips, and propose a visual device for realizing five-side appearance detection of chips.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a visual device for realizing five-sided appearance inspection of a chip, comprising a camera shooting light box, a chip insertion port is provided in the middle of the top surface of the camera shooting light box, a transparent protective cover is placed at the bottom of the chip insertion port, a group of triangular prism reflectors are provided on the front and back sides and both sides of the transparent protective cover, the transparent protective cover is threadedly connected to the camera shooting light box, a camera is provided at the bottom of the camera shooting light box, the camera bottom plate passes through the bottom of the camera shooting light box, a camera mounting plate is provided at the bottom of one side of the camera, a camera lifting module is provided on the side of the camera mounting plate facing away from the camera, and a connecting block is provided between the camera lifting module and the camera shooting light box.

[0006] Preferably, a camera lens is provided on the top of the camera, and the camera lens is threadedly connected to the camera.

[0007] Preferably, an annular light source is provided on the top of the camera lens, and the annular light source is threadedly connected to the camera lens.

[0008] Preferably, a mounting bracket is provided on the side of the camera lifting module facing away from the camera mounting plate, the mounting bracket is L-shaped, and two groups of mounting holes are provided on the top surface of the mounting bracket.

[0009] Preferably, the camera lifting module is composed of two sets of electric guide rails and two sets of sliders, and the sliders are threadedly connected to the camera mounting plate.

[0010] Preferably, two groups of data interfaces are provided at the bottom of one side of the camera lifting module, and the data interfaces are electrically connected to the camera lifting module.

[0011] Preferably, the camera shooting light box is in the shape of a rectangular parallelepiped, and the height of the camera is smaller than the height of the camera shooting light box.

[0012] Beneficial Effects

[0013] In the utility model, a triangular prism reflector, an annular light source and a transparent protective cover are adopted. The user puts the chip into the transparent protective cover through the chip insertion port. The transparent protective cover supports the chip. The four groups of triangular prism reflectors reflect the front and back sides and both sides of the chip, so that the camera lens at the bottom can shoot and identify the bottom surface and four groups of side surfaces of the chip at one time, which simplifies the steps of five-side appearance inspection of the chip and improves the efficiency of chip appearance inspection. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is an axonometric drawing of the utility model;

[0015] Figure 2 It is a cross-sectional view of the utility model.

[0016] Legend:

[0017] 1. Camera lifting module; 101. Electric guide rail; 102. Slider; 2. Mounting bracket; 3. Camera shooting light box; 4. Chip insertion port; 5. Prism reflector; 6. Ring light source; 7. Camera lens; 8. Video camera; 9. Camera mounting plate; 10. Data interface; 11. Transparent protective cover; 12. Connecting block. DETAILED DESCRIPTION

[0018] In order to make the technical means, creative features, objectives and effects of the present invention easy to understand, the present invention is further described below in conjunction with specific embodiments and drawings, but the following embodiments are only preferred embodiments of the present invention, not all. Based on the embodiments in the implementation mode, other embodiments obtained by those skilled in the art without creative work are all within the protection scope of the present invention.

[0019] The specific embodiments of the present utility model are described below in conjunction with the accompanying drawings. Specific embodiment one:

[0021] Reference Figure 1-2The present embodiment provides a visual device for realizing five-sided appearance inspection of a chip, including a camera shooting light box 3, a chip insertion port 4 is provided in the middle of the top surface of the camera shooting light box 3, a transparent protective cover 11 is placed at the bottom of the chip insertion port 4, a group of triangular reflectors 5 are provided on the front, back and both sides of the transparent protective cover 11, the transparent protective cover 11 is threadedly connected to the camera shooting light box 3, a camera 8 is provided at the bottom of the camera shooting light box 3, the camera 8 shoots and identifies the bottom and side of the chip, the camera shooting light box 3 is a rectangular parallelepiped, the height of the camera 8 is less than the height of the camera shooting light box 3, a camera lens 7 is provided on the top of the camera 8, the camera lens 7 is used to control the shooting focal length of the camera 8, the camera lens 7 is threadedly connected to the camera 8, a ring light source 6 is provided on the top of the camera lens 7, the ring light source 6 is used to provide a stable and specific shooting light environment, the ring light source 6 is threadedly connected to the camera lens 7, and the bottom plate of the camera 8 passes through the bottom of the camera shooting light box 3 A camera mounting plate 9 is provided at the bottom of one side of the camera 8, and a camera lifting module 1 is provided on the side of the camera mounting plate 9 facing away from the camera 8. The camera lifting module 1 drives the camera 8 to move longitudinally through the camera mounting plate 9. The camera lifting module 1 is composed of two groups of electric guide rails 101 and two groups of sliders 102. The sliders 102 move longitudinally along the electric guide rails 101. The sliders 102 are threadedly connected to the camera mounting plate 9. A connecting block 12 is provided between the camera lifting module 1 and the camera shooting light box 3. A mounting bracket 2 is provided on the side of the camera lifting module 1 facing away from the camera mounting plate 9. The mounting bracket 2 is L-shaped, and two groups of mounting holes are provided on the top surface of the mounting bracket 2. The mounting bracket 2 can be fixed at a specified position by passing screws through the mounting holes. Two groups of data interfaces 10 are provided at the bottom of one side of the camera lifting module 1. One end of the data interface 10 is connected to an external motion controller for controlling the electric guide rail 101. The data interface 10 is electrically connected to the camera lifting module 1.

[0022] The user puts the chip into the transparent protective cover 11 through the chip insertion port 4, the transparent protective cover 11 supports the chip, the annular light source 6 lights up to provide a stable and specific shooting light environment, and the four groups of prism reflectors 5 reflect the front and back sides and both sides of the chip, so that the camera lens 7 at the bottom can shoot and identify the bottom surface and four groups of side surfaces of the chip at one time, which simplifies the steps of the appearance inspection of the five sides of the chip and improves the efficiency of the appearance inspection of the chip. After the inspection is completed, the inspected chip is taken out through the chip insertion port 4 and a new chip is put in for inspection. Specific embodiment 2:

[0024] Reference Figure 1-2The present embodiment provides a visual device for realizing five-sided appearance inspection of a chip, including a camera shooting light box 3, a chip insertion port 4 is provided in the middle of the top surface of the camera shooting light box 3, a transparent protective cover 11 is placed at the bottom of the chip insertion port 4, a camera 8 is provided at the bottom of the camera shooting light box 3, a camera mounting plate 9 is provided at the bottom of one side of the camera 8, a camera lifting module 1 is provided at the side of the camera mounting plate 9 facing away from the camera 8, the camera lifting module 1 is composed of two groups of electric guide rails 101 and two groups of sliders 102, the sliders 102 are threadedly connected to the camera mounting plate 9, a connecting block 12 is provided between the camera lifting module 1 and the camera shooting light box 3, when the chip size is too large or too small, the height of the camera 8 can be adjusted by the camera lifting module 1, so that the camera 8 can perform more accurate inspection of the chip, and due to the presence of the prism reflector 5, the optical path length of the front and back sides and the two sides is increased, after the bottom surface image is inspected, the camera lifting module 1 slightly adjusts the height of the camera 8 to inspect the images on the four sides.

[0025] In summary:

[0026] A prism reflector 5, an annular light source 6, and a transparent protective cover 11 are used. The user puts the chip into the transparent protective cover 11 through the chip insertion port 4. The transparent protective cover 11 supports the chip. The four groups of prism reflectors 5 reflect the front, back and both sides of the chip, so that the camera lens 7 at the bottom can shoot and identify the bottom surface and four groups of side surfaces of the chip at one time, which simplifies the steps of five-side appearance inspection of the chip and improves the efficiency of chip appearance inspection.

[0027] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0028] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only preferred examples of the utility model and are not used to limit the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection of the utility model is defined by the attached claims and their equivalents.

Claims

1. A visual device for realizing five-side appearance inspection of a chip, comprising a camera shooting light box (3), characterized in that: A chip insertion port (4) is provided in the middle of the top surface of the camera shooting light box (3), a transparent protective cover (11) is placed at the bottom of the chip insertion port (4), a group of triangular prism reflectors (5) are provided on the front, back and both sides of the transparent protective cover (11), the transparent protective cover (11) is threadedly connected to the camera shooting light box (3), a camera (8) is provided at the bottom of the camera shooting light box (3), a bottom plate of the camera (8) passes through the bottom of the camera shooting light box (3), a camera mounting plate (9) is provided at the bottom of one side of the camera (8), a camera lifting module (1) is provided on the side of the camera mounting plate (9) facing away from the camera (8), and a connecting block (12) is provided between the camera lifting module (1) and the camera shooting light box (3).

2. A visual device for realizing five-side appearance inspection of a chip according to claim 1, characterized in that: A camera lens (7) is provided on the top of the camera (8), and the camera lens (7) is threadedly connected to the camera (8).

3. The visual device for realizing five-side appearance inspection of a chip according to claim 2, characterized in that: An annular light source (6) is provided on the top of the camera lens (7), and the annular light source (6) is threadedly connected to the camera lens (7).

4. The visual device for realizing five-side appearance inspection of a chip according to claim 1, characterized in that: The camera lifting module (1) is provided with a mounting bracket (2) on the side facing away from the camera mounting plate (9); the mounting bracket (2) is L-shaped, and the top surface of the mounting bracket (2) is provided with two groups of mounting holes.

5. The visual device for realizing five-side appearance inspection of a chip according to claim 1, characterized in that: The camera lifting module (1) is composed of two groups of electric guide rails (101) and two groups of sliders (102), and the sliders (102) are threadedly connected to the camera mounting plate (9).

6. The visual device for realizing five-side appearance inspection of a chip according to claim 1, characterized in that: Two groups of data interfaces (10) are provided at the bottom of one side of the camera lifting module (1), and the data interfaces (10) are electrically connected to the camera lifting module (1).

7. The visual device for realizing five-side appearance inspection of a chip according to claim 1, characterized in that: The camera shooting light box (3) is in the shape of a rectangular parallelepiped, and the height of the camera (8) is smaller than the height of the camera shooting light box (3).

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