Membrane connection mechanism

Abstract

The utility model provides a film connecting mechanism, which is used for bonding at least two adjacent sections of films cut on a film placing mechanism, and comprises a frame body detachably arranged on the film placing mechanism; the unwinding module is arranged on the frame body and comprises a motor and an unwinding shaft driven by the motor; the plurality of film guide wheels are rotationally arranged on the frame body and are used for conveying adhesive films; the film pressing mechanism is arranged on the frame body in a swinging mode and located at the tail end in the film conveying direction, the film pressing mechanism comprises a film pressing wheel and a clamping wheel arranged to abut against the film pressing wheel all the time, and the adhesive film is arranged in a gap between the clamping wheel and the film pressing wheel in a penetrating mode and pushed by the film pressing mechanism to be bonded to the surfaces of at least two adjacent cut film sections. According to the film connecting mechanism provided by the invention, the adhesive film can be pushed by the film pressing mechanism to be pasted between the two cut adjacent sections of bottom film layers, so that the connection relation of the two cut adjacent sections of bottom film layers is recovered, and the bottom film layers and the protective layers needing to be torn off are conveniently torn off before film pasting.

Description

Technical Field

[0001] The present application belongs to the field of semiconductor device technology, and more specifically, to a membrane connection mechanism. Background Art

[0002] In the wafer lamination process, the protective film tape generally includes a top film layer, a protective layer and a bottom film layer, and the protective layer is used to bond to the wafer surface. In the lamination process, the bottom film layer needs to be torn off first, and then the protective layer is bonded to the wafer surface, and then the top film layer and the protective layer are cut and torn off.

[0003] To facilitate the film lamination operation, pre-cutting is performed on the protective film tape in some process techniques, that is, the bottom mold layer and the protective layer on the side of the protective film tape facing the wafer surface are pre-cut. During the bonding process after pre-cutting, only the bonding area is retained on the protective layer. Therefore, after the protective layer is bonded to the wafer surface, only the top film layer on the back of the protective layer needs to be torn off.

[0004] However, in the process of tearing off the base film layer after pre-cutting, since the projection area corresponding to the adhesive area of ​​the protective layer on the base film layer is cut and separated from other areas, it will cause inconvenience in tearing off the base film layer. Utility Model Content

[0005] The purpose of the embodiments of the present application is to provide a film connection mechanism to solve the technical problem in the prior art that the bottom film layer is inconvenient to tear off after pre-cutting.

[0006] To achieve the above-mentioned purpose, the technical solution adopted in the embodiment of the present application is to provide a film connecting mechanism for bonding at least two adjacent sections of film cut on a film placing mechanism, which comprises:

[0007] A frame body, used for being detachably arranged on the film placing mechanism;

[0008] An unwinding module is arranged on the frame, and comprises a motor and an unwinding shaft driven by the motor;

[0009] A plurality of film guide wheels are rotatably disposed on the frame and used for conveying the film;

[0010] The film pressing mechanism is swingably arranged on the frame and located at the end in the film conveying direction. The film pressing mechanism includes a film pressing wheel and a clamping wheel arranged to always press against the film pressing wheel. The adhesive film passes through the gap between the clamping wheel and the film pressing wheel and is pushed by the film pressing mechanism to be bonded to the surface of at least two adjacent sections of the cut film.

[0011] Optionally, a cutting blade is provided on one end of the film pressing mechanism away from the unwinding module.

[0012] Optionally, the film pressing mechanism includes a first swing arm swingably arranged on the frame, a cylinder is arranged on the frame, and a connecting rod mechanism is connected between the piston end of the cylinder and the first swing arm.

[0013] Optionally, the axial direction of the cylinder is parallel or approximately parallel to the length direction of the first rocker arm.

[0014] Optionally, the film pressing mechanism further comprises a second swing arm swingably arranged on the frame, an elastic member is connected between the second swing arm and the frame, the clamping wheel is arranged on the second swing arm, and the elastic member is used to make the clamping wheel press against the film pressing wheel.

[0015] Optionally, an arc groove is provided on the first swing rod along its swing direction, and a bolt fixedly connected to the frame body is passed through the arc groove.

[0016] Optionally, the frame includes a fixed frame and a movable frame, the fixed frame is fixedly arranged on the film unwinding mechanism, the movable frame is slidably arranged on the fixed frame along the length direction of the fixed frame, and the unwinding module, the film guide wheel and the film pressing mechanism are all arranged on the movable frame.

[0017] Optionally, a locking structure is provided between the fixed frame and the movable frame, and the locking structure is used to lock the fixed frame and the movable frame.

[0018] The membrane connection mechanism provided in the embodiment of the present application has at least the following beneficial effects:

[0019] The unwinding module is used to release the adhesive film, and the film pressing mechanism can be swingably set, so that the adhesive film passed between the clamping wheel and the film pressing wheel can be pushed by the film pressing mechanism to be pasted between the two adjacent cut bottom film layers, so that the two adjacent cut bottom film layers are restored to a connection relationship, so as to facilitate the tearing off of the bottom film layer and the protective layer that needs to be torn off before film pasting. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0021] Figures 1 to 3 A three-dimensional diagram of a membrane connection mechanism in some embodiments of the present application;

[0022] Figure 4 Schematic diagram of the adhesive film being bonded to the film tape in some embodiments of the present application;

[0023] Figure 5 Schematic diagram of bonding the adhesive film and the film tape in some embodiments of the present application. DETAILED DESCRIPTION

[0024] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments.

[0025] It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0026] It should be noted that when an element is referred to as being “fixed to” or “disposed on” another element, it may be directly on the other element or indirectly on the other element.

[0027] When an element is referred to as being “connected to” another element, it can be directly connected to the other element or indirectly connected to the other element.

[0028] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0029] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features.

[0030] In the description of the present application, “plurality” means two or more than two, unless otherwise clearly and specifically defined.

[0031] Please also read Figures 1 to 4 , the membrane connection mechanism provided in the embodiment of the present application is now described.

[0032] It should be noted that the membrane connection mechanism described in the present application is suitable for use in a pre-cutting process.

[0033] Understandably, reference Figure 5, the film strip B includes a top film layer B3, a protective layer B2 and a bottom film layer B1. During the film pasting process, the bottom film layer B1 is torn off first, and after the protective layer B2 is pasted to the wafer surface, the top film layer B3 is torn off. In the pre-cutting process, the cutting tool cuts the bottom film layer B1 and the protective layer B2 at the same time. After cutting, a phase-separated pasting area B21 and a waste film area B22 are formed on the protective layer B2, and a phase-separated first area B11 and a second area B12 are formed on the bottom film layer B1 corresponding to the pasting area B21 and the waste film area B22. It should be understood that after the pre-cutting is completed, the pasting area B21 and the waste film area B22 are still adhered to the top film layer B3, the first area B11 is adhered to the pasting area B21, and the second area B12 is adhered to the waste film area B22. Before film sticking, the first area B11 and the second area B12 on the base film layer B1 and the waste film area B22 on the protective layer B2 are torn off. More specifically, the second area B12 is torn off together with the waste film area B22.

[0034] The film connection structure of the present application is used to bond the adjacent first area B11 and second area B12 on the cut bottom film layer B1, so that when the bottom film B1 layer is torn off, there is no need to tear off the first area B11 and the second area B12 separately, thereby simplifying the film tearing process.

[0035] Specifically, refer to Figures 1 to 3 The film connecting mechanism of the present application includes a frame 100, an unwinding module 200, a film guide wheel 300 and a film pressing mechanism 400.

[0036] The frame 100 is used to be mounted on a film placing mechanism 500 on a film laminating device.

[0037] The unwinding module 200 is disposed on the frame 100 , and includes a motor and an unwinding shaft driven by the motor. The unwinding shaft is used to wind the adhesive film A, and the motor is used to control the unwinding speed of the adhesive film A.

[0038] A plurality of film guide wheels 300 are provided, and each of the film guide wheels 300 is sequentially arranged in the conveying direction of the adhesive film A to guide the conveying of the adhesive film A.

[0039] The film pressing mechanism 400 is used to push and stick the adhesive film A to the first area B11 and the second area B12 cut on the bottom film layer, so that the first area B11 and the second area B12 are restored to a connection relationship, so that when the bottom film layer B1 is torn off, the first area B11 and the second area B12 do not need to be torn off separately, and the second area B12 can be torn off from the top film layer B3 together with the waste film area B22. Specifically, the film pressing mechanism 400 is swingably disposed on the frame 100 and is located at the end in the conveying direction of the adhesive film A. It can swing relative to the frame 100 so that its film pressing end can approach or move away from the first area B11 and the second area B12 formed by the cut film strip B on the film placing mechanism 500.

[0040] The film pressing mechanism 400 is rotatably disposed on the frame 100 at one end away from the film tape B, and is driven to swing by a driving device, which may be a motor or a cylinder 480, but is not limited thereto.

[0041] Furthermore, the film pressing mechanism 400 includes a film pressing wheel 410 and a clamping wheel 420. The clamping wheel 420 is configured to always press against the film pressing wheel 410, so that the adhesive film A can pass through the gap between the clamping wheel 420 and the film pressing wheel 410 and can remain flat before being attached to the bottom film layer. In some embodiments, the clamping wheel 420 can be pulled by an elastic member 460 to always press against the film pressing wheel 410.

[0042] refer to Figure 4 Specifically, the membrane connection mechanism of the embodiment of the present application has the following operation process:

[0043] The film tape B on the film unwinding mechanism 500 is pre-cut and maintained in a conveying state; the film pressing mechanism 400 swings relative to the frame 100 so that its film pressing end gradually approaches the film tape B until the front end of the film A is adhered to the surface of the first area B11 or the second area B12 on the film tape B; after the film A is adhered to the first area B11 or the second area B12, the unwinding module 200 starts to synchronously unwind the film A, and the unwinding speed is consistent with the conveying speed of the film tape B, so that the film A can be continuously adhered to the film tape B and cover each first area B11 and the second area B12.

[0044] In some embodiments, a cutting blade 430 is provided at one end of the film pressing mechanism 400 away from the unwinding module 200. Specifically, there is a certain distance between the cutting blade 430 and the film pressing wheel 410, which is used to accurately control the distance between the front end of the film A and the film pressing wheel 410 when the film A is pulled out after a roll of the film A is used up and a new roll of the film A 600 is placed, so as to avoid the distance between the front end of the film A and the film pressing wheel 410 being too long or too short to affect the bonding quality of the film A on the film tape B.

[0045] On the basis of the above embodiments, in a further embodiment, the film pressing mechanism 400 includes a first rocker arm 440 swingably arranged on the frame 100, and the first rocker arm 440 is rotatably arranged on the frame 100 at one end away from the film band B; a cylinder 480 is arranged on the frame 100, and a connecting rod mechanism 470 is connected between the piston end of the cylinder 480 and the first rocker arm 440.

[0046] For further reference, Figure 2 , the axis direction of the cylinder 480 is parallel or substantially parallel to the length direction of the first swing rod 440. It should be noted that, in this embodiment, the aforementioned connecting rod mechanism 470 is a two-rod mechanism, and one of the connecting rods is a crank. In this way, since the axis of the cylinder 480 is parallel to the length direction of the swing rod, the height of the frame 100 in the direction perpendicular to the length direction of the swing rod can be reduced, so as to improve the space utilization of the frame 100 and effectively reduce the volume of the frame 100.

[0047] refer to Figure 2 In some embodiments, the clamping wheel 420 is movably disposed on the first swing rod 440, and an elastic member 460 is connected between the clamping wheel 420 and the first swing rod 440, and the elastic member 460 can be a spring.

[0048] refer to Figure 2 In other embodiments, the film pressing mechanism 400 further includes a second swing rod 450 swingably disposed on the frame 100, an elastic member 460 is connected between the second swing rod 450 and the frame 100, the clamping wheel 420 is disposed on the second swing rod 450, and the elastic member 460 is used to make the clamping wheel 420 press against the film pressing wheel 410. Similarly, the elastic member 460 can be a spring.

[0049] refer to Figure 1 In some embodiments, a limiting structure is provided between the first swing arm 440 and the frame 100 to limit the swing direction of the first swing arm 440. Specifically, the limiting structure is an arc groove 441 provided on the first swing arm 440 along its swing direction, and a bolt passing through the arc groove 441 and fixedly connected to the frame 100.

[0050] Based on the above embodiments, Figures 1 to 3 In a further embodiment, the frame 100 includes a fixed frame 110 and a movable frame 120. The fixed frame 110 is used to be fixedly arranged on the film unwinding mechanism 500, and the movable frame 120 is movably arranged on the fixed frame 110 along the length direction of the fixed frame 110. The unwinding module 200, the film guide wheel 300 and the film pressing mechanism 400 are all arranged on the movable frame 120. In this way, when a roll of film A is used up, the movable frame 120 can be adjusted relative to the fixed frame 110 to facilitate placing a new roll of film A 600 on the unwinding shaft.

[0051] In some embodiments, the movable connection mechanism between the fixed frame 110 and the movable frame 120 includes but is not limited to a snap connection, a sliding connection, a screw connection, etc.

[0052] refer to Figures 1 to 3 In some specific embodiments, the connection between the fixed frame 110 and the movable frame 120 is a sliding connection, and the included angle between the sliding direction between the two and the conveying direction of the adhesive film A pasted on the film strip B is an acute angle, and during the sliding process of the movable frame 120, the axis of the adhesive film A and the axis of the film strip B are always located on the same vertical plane. In this way, after the movable frame 120 slides to the working position, the front end of the adhesive film A is also moved to the bottom of the film strip B, and the adhesive film A and the film strip B can be bonded by swinging the film pressing mechanism 400, and the adhesive film A and the film strip B can be prevented from accidentally touching during the whole process.

[0053] Specifically, refer to Figures 1 to 3 A slide rail 140 is provided between the fixed frame 110 and the movable frame 120, and a locking structure is provided between the fixed frame 110 and the movable frame 120. The locking structure may be an abutment plate 131 provided on one of the fixed frame 110 and the movable frame 120, and a locking bolt 132 provided on the other of the fixed frame 110 and the movable frame 120. After the movable frame 120 is moved to the working position, the locking bolt 132 is tightened to abut against the abutment plate 131, thereby achieving locking and fixing of the movable frame 120.

[0054] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A film connecting mechanism, used for bonding at least two adjacent sections of film cut on a film placing mechanism, characterized in that: include: A frame body, used for being detachably arranged on the film placing mechanism; An unwinding module is arranged on the frame, and comprises a motor and an unwinding shaft driven by the motor; A plurality of film guide wheels are rotatably disposed on the frame and used for conveying the film; The film pressing mechanism is swingably arranged on the frame and located at the end in the film conveying direction. The film pressing mechanism includes a film pressing wheel and a clamping wheel arranged to always press against the film pressing wheel. The adhesive film passes through the gap between the clamping wheel and the film pressing wheel and is pushed by the film pressing mechanism to be bonded to the surface of at least two adjacent sections of the cut film.

2. The membrane connection mechanism according to claim 1, characterized in that: A cutting blade is arranged on one end of the film pressing mechanism away from the unwinding module.

3. The membrane connection mechanism according to claim 1 or 2, characterized in that: The film pressing mechanism comprises a first swing rod swingably arranged on the frame, a cylinder is arranged on the frame, and a connecting rod mechanism is connected between the piston end of the cylinder and the first swing rod.

4. The membrane connection mechanism according to claim 3, characterized in that: The axial direction of the cylinder is parallel or substantially parallel to the length direction of the first rocker rod.

5. The membrane connection mechanism according to claim 3, characterized in that: The film pressing mechanism also includes a second swing rod swingably arranged on the frame, an elastic member is connected between the second swing rod and the frame, the clamping wheel is arranged on the second swing rod, and the elastic member is used to make the clamping wheel press against the film pressing wheel.

6. The membrane connection mechanism according to claim 3, characterized in that: An arc groove is arranged on the first swing rod along its swing direction, and a bolt fixedly connected to the frame body is passed through the arc groove.

7. The membrane connection mechanism according to claim 1 or 2, characterized in that: The frame body includes a fixed frame and a movable frame, the fixed frame is fixedly arranged on the film unwinding mechanism, the movable frame is slidably arranged on the fixed frame along the length direction of the fixed frame, and the unwinding module, the film guide wheel and the film pressing mechanism are all arranged on the movable frame.

8. The membrane connection mechanism according to claim 7, characterized in that: A locking structure is provided between the fixed frame and the movable frame, and the locking structure is used to lock the fixed frame and the movable frame.

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