Machining system

Abstract

The utility model discloses a processing system which is used for processing ceramic chips and comprises a moving part, at least two processing parts and at least two discharging parts. The moving part comprises a mechanical arm which is used for clamping a ceramic wafer. The machining part comprises a laser head and a machining station, the laser head is used for machining the ceramic wafers, and the machining station is used for containing the ceramic wafers. The at least two discharging parts comprise material piece stations, and the material piece stations are used for containing ceramic pieces. The mechanical arm can move the ceramic chips from the material chip station to the machining station and move the ceramic chips from the machining station to the material chip station. According to the ceramic wafer machining device, the multiple discharging parts are arranged, feeding and discharging of ceramic wafers are achieved through the material piece stations of the multiple discharging parts, the mechanical arm of the moving part moves the ceramic wafers to the machining stations or the discharging material piece stations, and machining of the ceramic wafers is achieved through the laser head and the multiple machining stations. Therefore, a plurality of ceramic chips can be processed at the same time through one moving part, the processing efficiency is improved, and the cost is saved.

Description

Technical Field

[0001] The present application relates to the technical field of automation equipment in the semiconductor industry, and in particular to a processing system. Background Art

[0002] Currently in the ceramic sheet manufacturing industry, usually one device has one processing station, and the ceramic sheet is manually placed on the station, and after laser processing, the ceramic sheet is manually removed from the processing station, and this cycle is repeated.

[0003] CN218799912U discloses a self-cleaning ceramic sheet automatic laser processing device; the adsorption fixture is assembled above the moving end of the Y-axis module, the loading pile and the unloading platform are respectively arranged on both sides of the Y-axis module, and the waste collection box is separately arranged at the front end of the Y-axis module close to the base; the handling component is fixed on the base in a cross-connection and is located above the loading pile and the unloading platform; the laser component is installed on the column frame, and the execution end of the laser component is installed on the moving end of the Z-axis module; the cleaning component is installed on the base and is located at the closing tray, the tray fixing place and above the tray pile; the utility model has a compact overall structure, integrates waste discharge and cleaning functions, adopts a one-stop solution structure, meets market demand, and improves the efficiency of ceramic sheet plus laser processing; the additional cleaning component can effectively clean the processed products in a multi-faceted manner and improve the production quality of the products. However, the device only has one processing system, and can only process one ceramic sheet at a time, which is inefficient. Therefore, how to improve the processing efficiency of ceramic sheets has become an urgent problem to be solved. Utility Model Content

[0004] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a processing system that can improve the processing efficiency of ceramic sheets.

[0005] According to a processing system of an embodiment of the present application, which is used for processing ceramic sheets, the system includes a moving part, at least two processing parts and at least two discharge parts. The moving part includes a manipulator, and the manipulator is used to clamp the ceramic sheet. The processing part includes a laser head and a processing station, and the laser head is used to process the ceramic sheet, and the processing station is used to place the ceramic sheet. At least two discharge parts include a sheet station, and the sheet station is used to place the ceramic sheet. Among them, the manipulator can move the ceramic sheet from the sheet station to the processing station, and move the ceramic sheet from the processing station to the sheet station.

[0006] A processing system according to an embodiment of the present application is used for processing ceramic sheets, and is provided with multiple unloading parts. The loading and unloading of ceramic sheets are realized through the sheet stations of the multiple unloading parts. The manipulator of the moving part moves the ceramic sheet to the processing station or the sheet station for unloading, and the processing of the ceramic sheet is realized through the laser head and the multiple processing stations. Therefore, multiple ceramic sheets can be processed at the same time through one moving part, which improves the processing efficiency and saves the cost.

[0007] In some embodiments, the discharge portion further includes a lifting member, the lifting member extends in a vertical direction, the sheet station is movably disposed on the lifting member, and the sheet station can move along the extension direction of the lifting member.

[0008] In some embodiments, the discharge portion further includes a magnetic attraction component, which is detachably connected to the sheet station and is used to fix the sheet station.

[0009] In some embodiments, the web station is provided with a width adjustment button, and the width adjustment button is used to adjust the size of the web station.

[0010] In some embodiments, the web station is further provided with a position sensor, and the position sensor is used to detect the position of the web station.

[0011] In some embodiments, the robot arm includes a cylinder and a suction cup, wherein the cylinder is used to provide suction force for the suction cup, and the suction cup is used to adsorb the ceramic sheet.

[0012] In some embodiments, the moving part includes a moving axis, the moving axis extends in a horizontal direction, and the manipulator is movably disposed on the moving axis and can move along the extension direction of the moving axis.

[0013] In some embodiments, the processing station is provided with a positioning member, and the positioning member is used to abut against the peripheral surface of the ceramic sheet to fix the ceramic sheet.

[0014] In some embodiments, the processing station is further provided with a negative pressure port, and the negative pressure port is used to absorb impurities.

[0015] In some embodiments, the processing part further includes a positioning sensor, and the positioning sensor is used to detect the position of the laser head.

[0016] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The present application is further described below in conjunction with the accompanying drawings and embodiments, wherein:

[0018] Figure 1 A schematic diagram of the structure of a processing system according to an embodiment of the present application;

[0019] Figure 2 for Figure 1 Schematic diagram of the structure of the robot;

[0020] Figure 3 for Figure 1 The structural diagram of the middle processing department;

[0021] Figure 4 for Figure 3 Schematic diagram of another perspective of the middle processing section;

[0022] Figure 5 for Figure 1 Schematic diagram of the structure of the middle unloading section.

[0023] Reference numerals: processing system 1, ceramic sheet 2;

[0024] Moving part 10, manipulator 11, cylinder 111, suction cup 112, moving axis 12, processing part 20, laser head 21, processing station 22, positioning part 221, negative pressure port 222, positioning sensor 23, discharge part 30, sheet station 31, width adjustment button 311, position sensor 312, lifting part 32, magnetic part 33, horizontal direction X, vertical direction Y. DETAILED DESCRIPTION

[0025] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0026] In the description of the present application, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0027] In the description of this application, "several" means more than one, "more" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0028] In the description of this application, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this application based on the specific content of the technical solution.

[0029] In the description of the present application, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0030] Figure 1 A schematic diagram of the structure of a processing system according to an embodiment of the present application; Figure 2 for Figure 1 Schematic diagram of the structure of the robot; Figure 3 for Figure 1 The structural diagram of the middle processing department; Figure 4 for Figure 3 Schematic diagram of another perspective of the middle processing section; Figure 5 for Figure 1 Schematic diagram of the structure of the middle unloading section.

[0031] Please refer to Figures 1 to 5 . An embodiment of the present application provides a processing system 1 for processing a ceramic sheet 2, comprising a moving part 10, at least two processing parts 20 and at least two discharge parts 30. The moving part 10 comprises a manipulator 11, and the manipulator 11 is used to clamp the ceramic sheet 2. The processing part 20 comprises a laser head 21 and a processing station 22, the laser head 21 is used to process the ceramic sheet 2, and the processing station 22 is used to place the ceramic sheet 2. At least two discharge parts 30 comprise a sheet station 31, and the sheet station 31 is used to place the ceramic sheet 2. Among them, the manipulator 11 can move the ceramic sheet 2 from the sheet station 31 to the processing station 22, and move the ceramic sheet 2 from the processing station 22 to the sheet station 31.

[0032] In some embodiments, the moving part 10 may include a robot arm 11 , and the shape of the gripper of the robot arm 11 may match the shape of the ceramic sheet 2 , so as to facilitate gripping the ceramic sheet 2 .

[0033] In some embodiments, the robot arm 11 can also move the ceramic sheet 2 by adsorption, rather than being limited to clamping.

[0034] In some embodiments, the number of the processing parts 20 may be two. That is, the number of the laser heads 21 may be two, and the number of the processing stations 22 may also be two, and the number of the laser heads 21 matches the number of the processing stations 22, so that the laser heads 21 can perform laser processing on the ceramic sheet 2 on the corresponding processing station 22.

[0035] In some embodiments, there may be two discharge sections 30 , and each discharge section 30 may include two sheet processing stations 31 , one sheet processing station 31 is used for loading the ceramic sheet 2 , and one sheet processing station 31 is used for unloading the ceramic sheet 2 .

[0036] In some embodiments, the processing system 1 can process multiple ceramic sheets 2 at the same time, and the robot 11 can move the processed ceramic sheets 2 to the unloading sheet station 31, and at the same time move the ceramic sheets 2 on the loading sheet station 31 to the processing station 22.

[0037] In some embodiments, the number of the moving part 10 may be one, that is, the number of the robot 11 is one. By moving one robot 11 between each sheet station 31, the number of robots 11 is saved, that is, the cost is saved.

[0038] A processing system 1 of an embodiment of the present application is used for processing a ceramic sheet 2, and is provided with a plurality of discharge sections 30. The ceramic sheet 2 is loaded and unloaded through the plurality of sheet stations 31 of the discharge sections 30. The manipulator 11 of the moving section 10 moves the ceramic sheet 2 to the processing station 22 or the sheet station 31 for unloading, and the ceramic sheet 2 is processed through the laser head 21 and the plurality of processing stations 22. Therefore, a plurality of ceramic sheets 2 can be processed simultaneously through a single moving section 10, which improves the processing efficiency and saves the cost.

[0039] Please refer to Figures 1 to 5 In some embodiments, the unloading portion 30 further includes a lifting member 32 , the lifting member 32 extends along the vertical direction Y, the web station 31 is movably disposed on the lifting member 32 , and the web station 31 can move along the extension direction of the lifting member 32 .

[0040] In some embodiments, the lifting member 32 may extend along the vertical direction Y.

[0041] In some embodiments, the vertical direction Y may be represented by the direction indicated by the letter Y in the figure.

[0042] In some embodiments, the lifting member 32 may be a lead screw or a guide rail, and the sheet station 31 may be disposed on the lifting member 32 and may be lifted or lowered by a driving motor.

[0043] In some embodiments, a warehouse is provided below the sheet station 31. When loading is required, the sheet station 31 is moved downward by the lifting member 32. After loading is completed, the sheet station 31 is moved to a position for the robot 11 to pick up the material by the lifting member 32.

[0044] In some embodiments, a warehouse is provided below the sheet station 31. After the robot 11 moves the processed ceramic sheet 2 to the sheet station 31, the lifting member 32 moves the sheet station 31 to the position of the warehouse, and then the unloading is completed.

[0045] By movably arranging the sheet station 31 on the lifting member 32, the convenience of loading and unloading is improved, the efficiency is improved, and manpower is saved.

[0046] Please refer to Figures 1 to 5 In some embodiments, the unloading portion 30 further includes a magnetic member 33 , which is detachably connected to the sheet station 31 and is used to fix the sheet station 31 .

[0047] In some embodiments, the magnetic member 33 may be an electromagnetic device, which can be attracted to the web station 31 after being powered on, thereby fixing the web station 31. The magnetic member 33 may be fixedly disposed at the uppermost end or other position of the lifting member 32.

[0048] In some embodiments, when the sheet station 31 is located at the loading position, the magnetic suction component 33 is activated to fix the sheet station 31. When the sheet station 31 needs to be moved, such as loading and unloading or manually cleaning the sheet station 31, the magnetic suction component 33 is turned off.

[0049] The magnetic attraction member 33 is detachably connected to the sheet station 31 , which improves convenience and also improves the accuracy of the position of the sheet station 31 , making it easier for the robot 11 to pick up materials.

[0050] Please refer to Figures 1 to 5 In some embodiments, the web station 31 is provided with a width adjustment button 311 , and the width adjustment button 311 is used to adjust the size of the web station 31 .

[0051] In some embodiments, the sheet station 31 generally has a containing bin adapted to the ceramic sheet 2. By setting a width adjustment button 311, the size of the containing bin is changed, that is, the distance between the surrounding walls of the containing bin is changed, thereby achieving a change in size to adapt to ceramic sheets 2 of more sizes, thereby improving practicality and applicability.

[0052] Please refer to Figures 1 to 5 In some embodiments, the web station 31 is further provided with a position sensor 312 , and the position sensor 312 is used to detect the position of the web station 31 .

[0053] In some embodiments, the material station 31 is provided with a position sensor 312 for detecting the position of the material station 31 to determine whether the material station 31 is in the correct position, which facilitates the robot 11 to pick up and put down materials, reduces the probability of errors occurring during the material picking up and putting down of the robot 11, and improves reliability.

[0054] Please refer to Figures 1 to 5 In some embodiments, the robot 11 includes a cylinder 111 and a suction cup 112 , the cylinder 111 is used to provide suction for the suction cup 112 , and the suction cup 112 is used to absorb the ceramic sheet 2 .

[0055] In some embodiments, the cylinder 111 and the suction cup 112 may be connected to each other so that the cylinder 111 can provide suction force to the suction cup 112 .

[0056] In some embodiments, the ceramic sheet 2 is adsorbed by the suction cup 112, so that the robot 11 is more stable in the process of moving the ceramic sheet 2, which reduces the probability of the ceramic sheet 2 falling and improves reliability.

[0057] Please refer to Figures 1 to 5 In some embodiments, the moving part 10 includes a moving shaft 12 , the moving shaft 12 extends along a horizontal direction X, and the manipulator 11 is movably disposed on the moving shaft 12 and can move along the extending direction of the moving shaft 12 .

[0058] In some embodiments, the horizontal direction X may be represented by the direction indicated by the letter X in the figure.

[0059] In some embodiments, the moving shaft 12 may be a lead screw or a guide rail.

[0060] In some embodiments, the movable axis 12 can connect each processing station 22 and the sheet station 31 in the horizontal direction X, so that the robot 11 can move the ceramic sheet 2 from the sheet station 31 to the processing station 22, and move the ceramic sheet 2 from the processing station 22 to the sheet station 31.

[0061] In some embodiments, the moving part 10 may also be provided with a motor, and the motor drives the manipulator 11 to move on the moving axis 12 .

[0062] By providing the moving shaft 12 , the movement of the manipulator 11 is guided, thereby improving the reliability of the movement of the manipulator 11 .

[0063] Please refer to Figures 1 to 5 In some embodiments, the processing station 22 is provided with a positioning member 221 , and the positioning member 221 is used to abut against the peripheral surface of the ceramic sheet 2 to fix the ceramic sheet 2 .

[0064] In some embodiments, the positioning member 221 may be a metal rod or a metal sheet, or other glass or plastic disposed on the surface of the processing station 22. There may be multiple positioning members 221, and the multiple positioning members 221 jointly support the circumference of the ceramic sheet 2.

[0065] In some embodiments, the positioning member 221 can form a positioning groove protruding from the processing station 22, wherein the peripheral wall of the positioning groove is not completely closed, so that the robot 11 can remove the ceramic sheet 2 on the processing station 22. The robot 11 can move the ceramic sheet 2 from the sheet station 31 to the positioning groove of the processing station 22.

[0066] By providing the positioning member 221 to fix the ceramic sheet 2 , the risk of the ceramic sheet 2 moving during the processing and thus causing processing errors is reduced, thereby improving reliability.

[0067] Please refer to Figures 1 to 5 In some embodiments, the processing station 22 is further provided with a negative pressure port 222, and the negative pressure port 222 is used to absorb impurities.

[0068] In some embodiments, a negative pressure port 222 can be provided on the surface of the processing station 22 for placing the ceramic sheet 2. When the laser head 21 processes the ceramic sheet 2, the negative pressure port 222 is opened, so that impurities generated during the processing of the ceramic sheet 2 are sucked away by negative pressure, thereby improving the cleanliness and reducing the risk of impurities affecting the processing quality of the ceramic sheet 2.

[0069] Please refer to Figure 1 and Figure 3 In some embodiments, the processing unit 20 further includes a positioning sensor 23 , and the positioning sensor 23 is used to detect the position of the laser head 21 .

[0070] In some embodiments, the processing part 20 may be provided with a lead screw or a slide rail, the laser head 21 may be provided on the lead screw or the slide rail, and the laser head 21 may be driven to move in the vertical direction Y by a motor.

[0071] In some embodiments, an air blowing port may be provided next to the laser head 21, and the air blowing port may be opened when processing the ceramic sheet to blow away impurities generated during the processing.

[0072] In some embodiments, the positioning sensor 23 is used to detect the position of the laser head 21 to confirm that the laser head 21 is located at an accurate processing position, thereby improving the reliability of processing.

[0073] The embodiments of the present application are described in detail above in conjunction with the accompanying drawings, but the present application is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the present application. In addition, the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

Claims

1. A processing system for processing ceramic sheets, characterized in that: include: A moving part, comprising a manipulator, wherein the manipulator is used to clamp the ceramic sheet; At least two processing parts, including a laser head and a processing station, wherein the laser head is used to process the ceramic sheet, and the processing station is used to place the ceramic sheet; At least two material discharging parts, including a sheet station, a magnetic suction member and a lifting member, wherein the sheet station is used to place the ceramic sheet, the lifting member extends in a vertical direction, the sheet station is movably arranged on the lifting member, the sheet station can move along the extension direction of the lifting member, and the magnetic suction member is detachably connected to the sheet station and is used to fix the sheet station; The robot arm is capable of moving the ceramic sheet from the sheet station to the processing station, and moving the ceramic sheet from the processing station to the sheet station.

2. The processing system according to claim 1, characterized in that: The sheet station is provided with a width adjustment button, and the width adjustment button is used to adjust the size of the sheet station.

3. The processing system according to claim 2, characterized in that: The web station is also provided with a position sensor, and the position sensor is used to detect the position of the web station.

4. The processing system according to claim 1, characterized in that: The manipulator comprises a cylinder and a suction cup, wherein the cylinder is used to provide suction force for the suction cup, and the suction cup is used to adsorb the ceramic sheet.

5. The processing system according to claim 4, characterized in that: The moving part comprises a moving shaft, the moving shaft extends in a horizontal direction, and the manipulator is movably arranged on the moving shaft and can move along the extending direction of the moving shaft.

6. The processing system according to claim 1, characterized in that: The processing station is provided with a positioning piece, and the positioning piece is used to abut against the peripheral surface of the ceramic sheet to fix the ceramic sheet.

7. The processing system according to claim 6, characterized in that: The processing station is also provided with a negative pressure port, and the negative pressure port is used to absorb impurities.

8. The processing system according to claim 7, characterized in that: The processing unit further includes a positioning sensor, and the positioning sensor is used to detect the position of the laser head.

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