Vacuum chamber for vacuum evaporation coating

Abstract

The utility model discloses a vacuum chamber for vacuum evaporation coating, which belongs to the field of vacuum evaporation coating and comprises a workbench and a cabin door, a vacuum cabin is fixed on one side of the upper surface of the workbench, the interior of the vacuum cabin is hollow, the front side of the vacuum cabin is open, and extension plates A are symmetrically arranged on two sides of the front surface of the vacuum cabin. Extension plates B are symmetrically arranged on the two sides of the cabin door, one extension plate B is hinged to one extension plate B, the cabin door seals the opening in the front side of the vacuum cabin body, a butt joint groove is formed in the surface of the front side of the extension plate A, an inflation sealing rubber ring is embedded in the surface of the inner side of the extension plate B, and the inflation sealing rubber ring is matched with the butt joint groove. The inflatable sealing ring is arranged between the cabin door and the cabin body, and after the cabin door is closed, the sealing ring can be inflated through an internal mechanism, so that the sealing ring is enlarged, the sealing performance with the cabin body is improved, and the coating effect is ensured.

Description

Technical Field

[0001] The utility model relates to the field of vacuum evaporation coating, and more specifically to a vacuum chamber for vacuum evaporation coating. Background Art

[0002] Vacuum evaporation coating machine is a supporting equipment that assists people in vacuum coating. The method of evaporating metals, alloys or compounds in a vacuum and depositing them on the coated object is called vacuum coating method. Vacuum evaporation is referred to as evaporation. It is a process of heating the coating material in a certain way under vacuum conditions to vaporize it and deposit it on the surface of the workpiece to form a solid film. When in use, it needs to be processed in a sealed vacuum chamber. At the same time, in order to facilitate loading and unloading, the surface of the vacuum chamber will be provided with corresponding cabinet doors. When the cabinet doors are opened and closed reciprocatingly, the sealing between the cabinet doors and the vacuum chamber will decrease, thereby affecting the coating effect. Utility Model Content

[0003] 1. Technical issues to be solved

[0004] In view of the problems existing in the prior art, the purpose of the utility model is to provide a vacuum chamber for vacuum evaporation coating, which can improve the sealing between the door and the chamber and ensure the coating effect.

[0005] 2. Technical solution

[0006] To solve the above problems, the utility model adopts the following technical solutions.

[0007] A vacuum chamber for vacuum evaporation coating comprises a workbench and a hatch, wherein a vacuum cabin body is fixed to one side of the upper surface of the workbench, the interior of the vacuum cabin body is hollow and the front side is open, extension plates A are symmetrically arranged on both sides of the front surface of the vacuum cabin body, and extension plates B are symmetrically arranged on both sides of the hatch, wherein one of the extension plates B is hinged on one of the extension plates B, and the hatch seals the front opening of the vacuum cabin body, a docking groove is arranged on the front surface of the extension plate A, and an inflatable sealing rubber ring is inlaid on the inner surface of the extension plate B, and the inflatable sealing rubber ring is adapted to the docking groove, wherein a handle is arranged on the outer side of the other extension plate B, an extrusion cavity is arranged inside the handle, a one-way valve A is installed at the bottom of the extrusion cavity, a connecting pipe is connected to the output end of the extrusion cavity, and the end of the connecting pipe facing away from the extrusion cavity is connected to the inflatable sealing rubber ring, and a one-way valve B is installed on the inner side of the connecting pipe.

[0008] Furthermore, a mounting hole is provided on the upper surface of the handle, and a pressing head is slidably installed on the upper inner side of the mounting hole, and the pressing head protrudes from the upper surface of the handle.

[0009] Furthermore, a connecting rod is provided at the bottom of the pressing head, and the connecting rod passes through the lower surface of the mounting hole. A piston head is provided at the bottom of the connecting rod, and the piston head slides inside the extrusion cavity.

[0010] Furthermore, a spring is sleeved on the surface of the connecting rod, the spring is placed inside the mounting hole, and the top of the spring is in contact with the lower surface of the pressing head.

[0011] Furthermore, an exhaust valve is installed on the surface of the inflatable sealing rubber ring, the exhaust valve exceeds the outer surface of the extension plate B, and the exhaust valve is placed above the handle.

[0012] Furthermore, a transparent observation window is provided on the surface of the cabin door, a storage rack is provided inside the vacuum cabin body, and a storage rack rotating motor is provided on the top of the vacuum cabin body.

[0013] Furthermore, an operation panel is arranged on one end of the upper surface of the workbench away from the vacuum chamber body, and a display is arranged on the top of the operation panel.

[0014] 3. Beneficial effects

[0015] Compared with the prior art, the utility model has the following advantages: the utility model provides a vacuum chamber for vacuum evaporation coating, in which an inflatable sealing ring is arranged between the cabin door and the cabin body; after the cabin door is closed, the sealing ring can be inflated through an internal mechanism to make it larger, thereby improving the sealing with the cabin body and ensuring the coating effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0017] Figure 2 It is a schematic diagram of a horizontal top-sectional structure of the cabin body and the cabin door of the utility model in an open state;

[0018] Figure 3 It is a schematic diagram of the longitudinal cross-sectional structure of the handle of the utility model.

[0019] Explanation of the numbers in the figure: 1. Workbench; 2. Display; 3. Operation panel; 4. Vacuum chamber; 5. Rack rotating motor; 6. Hatch door; 7. Extension plate A; 8. Docking slot; 9. Transparent observation window; 10. Extension plate B; 11. Handle; 12. Inflatable sealing rubber ring; 13. Mounting hole; 14. Extrusion cavity; 15. One-way valve A; 16. Connecting pipe; 17. One-way valve B; 18. Pressing head; 19. Connecting rod; 20. Spring; 21. Piston head; 22. Exhaust valve. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model; it is obvious that the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments, and all other embodiments obtained by ordinary technicians in this field based on the embodiments of the utility model without making creative work are within the scope of protection of the utility model.

[0021] Example:

[0022] See also Figure 1-Figure 3 As shown, a vacuum chamber for vacuum evaporation coating comprises a workbench 1 and a hatch 6, a vacuum chamber 4 is fixed to one side of the upper surface of the workbench 1, the interior of the vacuum chamber 4 is hollow and the front side is open, extension plates A7 are symmetrically arranged on both sides of the front surface of the vacuum chamber 4, extension plates B10 are symmetrically arranged on both sides of the hatch 6, one of the extension plates B10 is hinged on one of the extension plates B10, the hatch 6 can be rotated around its mounting axis to be opened or closed, the hatch 6 seals the front side opening of the vacuum chamber 4, a docking groove 8 is arranged on the front side surface of the extension plate A7, an inflatable sealing rubber ring 12 is inlaid on the inner surface of the extension plate B10, and the inflatable sealing rubber ring 12 is connected to the docking groove 8 Adaptation, through the cooperation of the two to improve the sealing between the cabin door 6 and the vacuum cabin body 4, wherein a handle 11 is arranged on the outside of another extension plate B10, an extrusion cavity 14 is opened inside the handle 11, a one-way valve A15 is installed at the bottom of the extrusion cavity 14, and a connecting pipe 16 is connected to the output end of the extrusion cavity 14, and the end of the connecting pipe 16 away from the extrusion cavity 14 is connected to the inflatable sealing rubber ring 12, thereby realizing the inflation of the inflatable sealing rubber ring 12 to make it larger and improve the sealing, and a one-way valve B17 is installed on the inside of the connecting pipe 16, and the one-way valve B17 allows air to flow only through the extrusion cavity 14 to the inflatable sealing rubber ring 12 and cannot flow in the opposite direction.

[0023] Please refer to Figure 3 As shown, a mounting hole 13 is provided on the upper surface of the handle 11, and a pressing head 18 is slidably installed on the upper inner side of the mounting hole 13. The pressing head 18 exceeds the upper surface of the handle 11, and a connecting rod 19 is provided at the bottom of the pressing head 18. The connecting rod 19 passes through the lower surface of the mounting hole 13, and a piston head 21 is provided at the bottom of the connecting rod 19. The piston head 21 slides inside the extrusion cavity 14, and a spring 20 is sleeved on the surface of the connecting rod 19. The spring 20 is placed inside the mounting hole 13, and the top of the spring 20 contacts the lower surface of the pressing head 18. The elastic force of the spring 20 can be used to reciprocately press downward on the pressing head 18 from the outside to achieve inflation of the inflatable sealing rubber ring 12.

[0024] Among them, an exhaust valve 22 is installed on the surface of the inflatable sealing rubber ring 12, and the exhaust valve 22 exceeds the outer surface of the extension plate B10. The exhaust valve 22 is placed above the handle 11 to manually exhaust the inflatable sealing rubber ring 12 to facilitate opening the hatch 6. The exhaust valve 22 is a push-type valve to facilitate manual control from the outside.

[0025] Please refer to Figure 1 As shown, a transparent observation window 9 is provided on the surface of the cabin door 6 to facilitate observation from the outside, a storage rack is provided inside the vacuum cabin body 4 , and a storage rack rotating motor 5 is provided on the top of the vacuum cabin body 4 .

[0026] An operation panel 3 is arranged on one end of the upper surface of the workbench 1 away from the vacuum chamber 4 , and a display 2 is arranged on the top of the operation panel 3 .

[0027] Working principle: Place the coated workpiece on the storage rack inside the vacuum chamber 4, and close the door 6. After it is completely closed, one side of the inflatable sealing rubber ring 12 cooperates with the docking groove 8 to improve the sealing performance. At the same time, due to the presence of the spring 20, the pressing head 18 always has an upward force. After closing, you can hold the handle 11 and press the pressing head 18 back and forth with your thumb to drive the piston head 21 to slide back and forth up and down inside the extrusion chamber 14. When the piston head 21 moves up, external air can be inhaled through the one-way valve A15. Conversely, when it moves downward, the gas inside the extrusion chamber 14 can be filled into the inflatable sealing rubber ring 12 through the connecting pipe 16, so that the inflatable sealing rubber ring 12 is inflated to improve the sealing performance between the door 6 and the vacuum chamber 4. The one-way valve A15 and the one-way valve B17 can ensure that the reciprocating pressing of the pressing head 18 is always in the direction of air flow. When the door 6 is opened, the exhaust valve 22 can be pressed to deflate the inflatable sealing rubber ring 12.

[0028] The above is only a preferred specific implementation of the utility model; however, the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solution and improved ideas of the utility model within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model.

Claims

1. A vacuum chamber for vacuum evaporation coating, comprising a workbench (1) and a door (6), characterized in that: A vacuum chamber (4) is fixed on one side of the upper surface of the workbench (1). The interior of the vacuum chamber (4) is hollow and the front side is open. Extension plates A (7) are symmetrically arranged on both sides of the front surface of the vacuum chamber (4). Extension plates B (10) are symmetrically arranged on both sides of the cabin door (6). One of the extension plates B (10) is hinged to one of the extension plates B (10). The cabin door (6) is sealed to the front opening of the vacuum chamber (4). A docking groove (8) is provided on the front surface of the extension plate A (7). The inner surface of the extension plate B (10) is inlaid with an inflatable A sealing rubber ring (12), wherein the inflatable sealing rubber ring (12) is adapted to the docking groove (8), wherein a handle (11) is arranged on the outside of the other extension plate B (10), an extrusion cavity (14) is provided inside the handle (11), a one-way valve A (15) is installed at the bottom of the extrusion cavity (14), a connecting pipe (16) is connected to the output end of the extrusion cavity (14), an end of the connecting pipe (16) away from the extrusion cavity (14) is connected to the inflatable sealing rubber ring (12), and a one-way valve B (17) is installed inside the connecting pipe (16).

2. A vacuum chamber for vacuum evaporation coating according to claim 1, characterized in that: The upper surface of the handle (11) is provided with a mounting hole (13), and a pressing head (18) is slidably mounted on the upper inner side of the mounting hole (13), and the pressing head (18) protrudes from the upper surface of the handle (11).

3. A vacuum chamber for vacuum evaporation coating according to claim 2, characterized in that: A connecting rod (19) is provided at the bottom of the pressing head (18), and the connecting rod (19) passes through the lower surface of the mounting hole (13). A piston head (21) is provided at the bottom of the connecting rod (19), and the piston head (21) slides inside the extrusion cavity (14).

4. A vacuum chamber for vacuum evaporation coating according to claim 3, characterized in that: A spring (20) is sleeved on the surface of the connecting rod (19), and the spring (20) is placed inside the mounting hole (13). The top of the spring (20) contacts the lower surface of the pressing head (18).

5. The vacuum chamber for vacuum evaporation coating according to claim 4, characterized in that: An exhaust valve (22) is installed on the surface of the inflatable sealing rubber ring (12), the exhaust valve (22) exceeds the outer surface of the extension plate B (10), and the exhaust valve (22) is placed above the handle (11).

6. The vacuum chamber for vacuum evaporation coating according to claim 1, characterized in that: A transparent observation window (9) is provided on the surface of the cabin door (6), a storage rack is provided inside the vacuum cabin body (4), and a storage rack rotating motor (5) is provided on the top of the vacuum cabin body (4).

7. The vacuum chamber for vacuum evaporation coating according to claim 1, characterized in that: An operation panel (3) is arranged at one end of the upper surface of the workbench (1) facing away from the vacuum chamber (4), and a display (2) is arranged on the top of the operation panel (3).

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