Chemical liquid bath film deposition equipment facilitating feeding of large-size solar substrates

Abstract

The utility model belongs to the technical field of solar module coating, and relates to chemical liquid bath film deposition equipment convenient for feeding a large-size solar substrate, which comprises a rack, a feeding position positioned on one side of the rack, a swinging unit positioned in the rack and a deposition box driven by the swinging unit to swing around a horizontal shaft in a reciprocating manner, an adsorption platform and a plurality of ejector pins stretching out and drawing back on the adsorption platform are arranged in the deposition box. According to the utility model, the MGV can be utilized to move the substrate to the upper part of the adsorption platform from a feeding position, the substrate is jacked up by the ejector pin, the MGV is withdrawn, then the substrate descends to be adsorbed by the adsorption platform, coating liquid is injected into the deposition box until the coating liquid submerges the upper surface of the substrate, the deposition box is closed, and the substrate is deposited. And then the swing unit enables the deposition box to swing back and forth around the horizontal axis within a certain angle range, so that chemical liquid film deposition on the upper surface of the substrate is realized. And large-size solar substrates are convenient to feed, and the falling risk is low.

Description

Technical Field

[0001] The utility model relates to the technical field of solar module coating, in particular to a chemical liquid bath deposition device which is convenient for loading large-size solar substrates. Background Art

[0002] In the process of thin film solar cells, a buffer layer composed of, for example, CdS, ZnS, InS, etc. is usually formed by chemical bath deposition, because the chemical bath deposition method can form a thin and uniform film and has a low manufacturing cost.

[0003] Chinese patent CN103184439A discloses a chemical bath deposition device and method for manufacturing thin-film solar cells. The device drives the frame to swing through a swing mechanism to maintain the reaction solution covering the substrate, thereby achieving the deposition of the coating material. The substrate holder is arranged on the frame through the first sealing member, and the substrate and the substrate holder are tightly fitted by vacuum attraction. It is not specified here how the substrate is placed on the substrate holder. For small-sized substrates, it can be placed manually in the substrate holder, but for large-sized substrates, it is often necessary to move them with the help of MGV (manual guided vehicle), and how MGV places the substrate on the substrate holder is a problem, because the material fork of MGV cannot pour the substrate on the substrate holder. Even if manual intervention is involved, the substrate is still at risk of falling and breaking.

[0004] Therefore be necessary to improve equipment to solve the above problems. Summary of the invention

[0005] The main purpose of the utility model is to provide a chemical liquid bath deposition device which is convenient for loading large-sized solar substrates. The device can utilize a retractable ejector pin to assist the transfer of the substrate from a forklift to an adsorption platform, thereby facilitating the transfer of large-sized solar substrates and reducing the risk of breakage.

[0006] The utility model achieves the above-mentioned purpose through the following technical scheme: a chemical liquid bath deposition device that is convenient for loading large-size solar substrates, including a frame, a swing unit located in the frame, and a deposition box driven by the swing unit to swing around the X-axis, an adsorption platform is provided in the deposition box, the frame is provided with a loading position for MGV to approach on the Y-side of the deposition box, a pin assembly is provided in the adsorption platform, and the pin assembly includes a lifting mechanism and a plurality of pins that are driven by the lifting mechanism to extend and retract up and down within the range of the adsorption platform.

[0007] Specifically, guide rollers for guiding the MGV to move along the Y direction are arranged in pairs on both sides of the loading position.

[0008] Specifically, a liquid supply unit is further provided in the frame, and the liquid supply unit includes a plurality of solution tanks and a liquid supply pump for transporting the solutions in the solution tanks to the deposition box.

[0009] Specifically, the sedimentation box is provided with an upper cover that can be opened and closed.

[0010] Specifically, the swing unit includes two coaxial rotating shafts located at both ends of the deposition box, each rotating shaft is rotatably arranged on a rotating shaft seat, one of the rotating shafts rotates driven by a swing motor, and the rotating shaft seat and the swing motor are respectively fixed on the frame.

[0011] Specifically, movable casters are provided at the four bottom corners of the frame.

[0012] The beneficial effects of the technical solution of the utility model are:

[0013] The utility model can use MGV to move the substrate from the loading position to the top of the adsorption platform, lift the substrate through the ejector pin, MGV withdraws, and then the substrate is lowered to be sucked by the adsorption platform, the deposition box is injected with coating liquid until it covers the upper surface of the substrate, the deposition box is closed, and then the swing unit makes the deposition box swing back and forth around the horizontal axis within a certain angle range, thereby realizing chemical liquid deposition on the upper surface of the substrate. It is convenient to load large-size solar substrates with low risk of falling. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a top view of the chemical liquid bath deposition equipment and the MGV during substrate transfer in the embodiment;

[0015] Figure 2 It is a left view of the chemical liquid bath deposition equipment and MGV during substrate transfer in the embodiment;

[0016] Figure 3 It is a cross-sectional view of the chemical liquid bath deposition equipment of the embodiment.

[0017] The numbers in the figure represent:

[0018] 1-Chemical liquid bath deposition equipment,

[0019] 11-frame, 111-guide roller, 112-mobile caster,

[0020] 12-swing unit, 121-rotating shaft, 122-rotating shaft seat, 123-swing motor,

[0021] 13-deposition box, 131-adsorption platform, 132-thrust pin assembly, 1321-thrust pin, 133-upper cover,

[0022] 14-liquid supply unit, 141-solution tank, 142-liquid supply pump;

[0023] 2-MGV, 21-Material fork. DETAILED DESCRIPTION

[0024] The utility model is further described in detail below in conjunction with specific embodiments.

[0025] Example:

[0026] like Figures 1 to 3 As shown, the utility model is a chemical liquid bath deposition device 1 which is convenient for loading large-size solar substrates, including a frame 11, a swing unit 12 located in the frame 11, and a deposition box 13 driven by the swing unit 12 to swing around the X-axis, an adsorption platform 131 is provided in the deposition box 13, the frame 11 is provided with a loading position for MGV 2 to approach on the Y-side of the deposition box 11, an ejector assembly 132 is provided in the adsorption platform 131, and the ejector assembly 132 includes a lifting mechanism (not marked) and a plurality of ejectors 1321 which are driven by the lifting mechanism to extend and retract up and down within the range of the adsorption platform 131.

[0027] The substrate is moved into the equipment by the material fork 21 on the MGV 2. When the MGV 2 stops at the loading position, the material fork 21 sends the substrate into the deposition box 13 and is located above the adsorption platform 131. Then the ejector pin 1321 rises to lift the lower surface of the substrate and then detaches from the material fork 21, and the MGV 2 can withdraw from the loading position. After the material fork 21 completely leaves the deposition box 13, the ejector pin 1321 will drop again, and the substrate will fall onto the adsorption platform 131. The adsorption platform 131 actually has many suction holes. When the substrate is in place, the adsorption platform 131 can absorb the substrate. Then start the swing deposition. It is convenient to load large-sized solar substrates with low risk of falling.

[0028] like Figure 2 and Figure 3 As shown, guide rollers 111 are arranged in pairs on both sides of the loading position to guide the MGV 2 to move along the Y direction.

[0029] The guide roller 111 enables the MGV 2 to move into the loading position at an appropriate angle, and at this time the material fork 21 can be located above the adsorption platform 131 without interfering with the lifting and lowering of the ejector pin 1321 , thereby ensuring that the substrate can be transferred to the adsorption platform 131 .

[0030] like Figure 3 As shown, a liquid supply unit 14 is also provided in the frame 11 , and the liquid supply unit 14 includes a plurality of solution tanks 141 and a liquid supply pump 142 for transporting the solution in the solution tanks 141 to the deposition box 13 .

[0031] The solution in the sedimentation box 13 is supplied from a solution tank 141 . The solution tank 141 is located at a lower position of the frame 11 , so it needs to be transported to the sedimentation box 13 by a liquid supply pump 142 .

[0032] like Figure 3 As shown, the sedimentation box 13 is provided with an upper cover 133 which can be opened and closed.

[0033] The upper cover 133 can isolate the inside and outside of the sedimentation box 13 during the swinging process, thereby preventing the solution from gradually leaking out during the swinging process and affecting the environment.

[0034] like Figure 1 and Figure 3 As shown, the swing unit 12 includes two coaxial rotating shafts 121 located at both ends of the deposition box 13, each rotating shaft 121 is rotatably set on a rotating shaft seat 122, and one of the rotating shafts 121 rotates under the drive of the swing motor 123, and the rotating shaft seat 122 and the swing motor 123 are respectively fixed on the frame 11.

[0035] The two rotating shafts 121 are connected to the deposition box 13 as a whole, and the rotating shafts 121 do not need to pass through the interior of the deposition box 13. The swing motor 123 drives the deposition box 13 to swing repeatedly within a range of 90 degrees, so that the solution continuously contacts the upper surface of the substrate. The amplitude of the swing can be adjusted as needed.

[0036] like Figure 2 and Figure 3 As shown, movable casters 112 are provided at the four bottom corners of the frame 11 .

[0037] The movable casters 112 enable the chemical liquid bath deposition device 1 to be relatively easily pushed to a suitable position for operation.

[0038] The working process of this equipment is as follows: MGV2 moves the substrate from the loading position to the top of the adsorption platform 131, lifts the substrate through the ejector pin 132, MGV2 withdraws, and then the substrate descends to be sucked by the adsorption platform 131, the coating liquid is injected into the deposition box 13 until it covers the upper surface of the substrate, the upper cover 133 is closed, and then the swing unit 2 makes the deposition box 13 swing back and forth around the horizontal axis within a certain angle range, thereby realizing the chemical liquid deposition on the upper surface of the substrate.

[0039] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A chemical liquid bath deposition device for convenient loading of large-sized solar substrates, comprising a frame, a swing unit located in the frame, and a deposition box driven by the swing unit to swing around the X-axis, wherein an adsorption platform is provided in the deposition box, characterized in that: The frame is provided with a loading position for MGV to approach on one side of the deposition box in the Y direction, and a ejector assembly is provided in the adsorption platform. The ejector assembly includes a lifting mechanism and a plurality of ejectors driven by the lifting mechanism to extend and retract up and down within the range of the adsorption platform.

2. The chemical liquid bath film deposition equipment according to claim 1, characterized in that: Guide rollers for guiding the MGV to move along the Y direction are arranged in pairs on both sides of the loading position.

3. The chemical liquid bath film deposition equipment according to claim 1, characterized in that: A liquid supply unit is also arranged in the frame, and the liquid supply unit comprises a plurality of solution tanks and a liquid supply pump for conveying the solution in the solution tanks to the deposition box.

4. The chemical liquid bath film deposition equipment according to claim 1, characterized in that: The sedimentation box is provided with an upper cover which can be opened and closed.

5. The chemical liquid bath film deposition equipment according to claim 1, characterized in that: The swing unit includes two coaxial rotating shafts located at both ends of the deposition box, each rotating shaft is rotatably arranged on a rotating shaft seat, one of the rotating shafts rotates under the drive of the swing motor, and the rotating shaft seat and the swing motor are respectively fixed on the frame.

6. The chemical liquid bath film deposition equipment according to claim 1, characterized in that: The four bottom corners of the frame are provided with movable casters.

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