Crystal furnace and sapphire substrate production system

Abstract

The utility model provides a crystal furnace and a sapphire substrate production system. The crystal furnace comprises a furnace body, a heat preservation screen assembly, a supporting piece and a sheath. The heat preservation screen assembly is arranged on the bottom wall in the furnace body. The supporting piece is arranged in the heat preservation screen assembly in the furnace body in a penetrating mode in the height direction of the furnace body, the first end of the supporting piece abuts against the bottom wall of the furnace body, and the second end of the supporting piece penetrates out of the heat preservation screen assembly to form a bearing end. The sheath and the supporting piece are coaxially arranged between the heat preservation screen assembly and the supporting piece, the heat conductivity coefficient of the sheath is smaller than that of the heat preservation screen assembly and that of the supporting piece, and the melting point of the sheath is higher than the working temperature of the furnace body.

Description

Technical Field

[0001] The present disclosure relates to the technical field of crystal production, and in particular to a crystal furnace and a sapphire substrate production system. Background Art

[0002] Sapphire, commonly known as corundum, is mainly composed of Al2O3 (aluminum oxide). It is composed of three oxygen atoms and two aluminum atoms combined in the form of covalent bonds. It has good optical, thermal, dielectric and excellent mechanical properties. It is a multifunctional crystal material with excellent comprehensive performance. It is widely used in optical lenses, medical equipment, watch mirrors, windows in the aerospace field, display screens of smart products, cameras, camera covers, Home buttons and other fields.

[0003] At present, the most recognized process for growing large-size, high-quality sapphire single crystals for LED substrates is the kyber growth method. The crystal furnace used in the kyber growth method is equipped with a heat preservation screen at the bottom to maintain the temperature in the upper furnace body, and a pillar is set through the heat preservation screen to support the crucible.

[0004] However, since the insulation screen and the pillars are made of tungsten-molybdenum, long-term exposure to high temperature will cause the tungsten-molybdenum grains to grow and the surrounding impurities to volatilize, causing the pillars and the insulation screen to stick to each other and be unable to be disassembled for repair and maintenance, resulting in a shortened service life of the crystal furnace and increased replacement costs. Utility Model Content

[0005] A technical problem to be solved by the present disclosure is that the bottom heat preservation screen and the support in the existing crystal furnace will become adhered under long-term high temperature and cannot be disassembled for repair and maintenance, resulting in a shortened service life of the crystal furnace and an increased replacement cost.

[0006] In order to solve the above technical problems, the present disclosure provides a crystal furnace, which includes:

[0007] furnace body;

[0008] A heat preservation screen assembly, wherein the heat preservation screen assembly is arranged on the bottom wall of the furnace body;

[0009] A support member, wherein the support member is disposed in the heat preservation screen assembly in the furnace body along the height direction of the furnace body, wherein a first end of the support member abuts against a bottom wall of the furnace body, and a second end of the support member passes through the heat preservation screen assembly to form a supporting end;

[0010] A sheath is coaxially arranged between the heat preservation screen assembly and the support member, the heat conductivity of the sheath is smaller than the heat preservation screen assembly and the support member, and the melting point of the sheath is higher than the working temperature of the furnace body.

[0011] In some embodiments, in the aforementioned crystal furnace, the jacket is spaced apart from the thermal insulation screen assembly and the support member in the first direction;

[0012] Wherein, the first direction is perpendicular to the height direction of the furnace body.

[0013] In some embodiments, the aforementioned crystal furnace further comprises a heat insulating member;

[0014] The heat insulating member is arranged on the bottom wall in the furnace body, and the side of the heat insulating member facing the top of the furnace body has a supporting surface, and the supporting surface is used to support the thermal insulation screen assembly, the support member and the sheath.

[0015] In some embodiments, in the aforementioned crystal furnace, the thermal conductivity of the thermal insulation member is smaller than the thermal conductivity of the thermal insulation screen assembly and the support member;

[0016] The thermal insulation has a specified thickness.

[0017] In some embodiments, in the aforementioned crystal furnace, one end of the jacket facing the second end of the support member is located between the first end of the thermal insulation screen assembly and the second end of the support member;

[0018] Wherein, the first end of the thermal insulation screen assembly is an end of the thermal insulation screen assembly away from the bottom of the furnace body.

[0019] In some embodiments, in the aforementioned crystal furnace, the orthographic projection of the thermal insulation member along the height direction of the furnace body at most covers the orthographic projection of the support member and the jacket along the height direction of the furnace body.

[0020] In some embodiments, the aforementioned crystal furnace, wherein the thermal insulation screen assembly includes a plurality of thermal insulation plates spaced apart along the height direction of the furnace body, the thermal insulation plates are provided with a first through hole, and the first through holes on the plurality of thermal insulation plates are coaxially arranged along the height direction of the furnace body for passing the support member and the sleeve.

[0021] In some embodiments, in the aforementioned crystal furnace, the thermal insulation screen assembly further includes a plurality of connectors and a plurality of stoppers;

[0022] The insulation board is provided with a plurality of spaced second through holes, and the plurality of second through holes on the insulation board are coaxially arranged in the height direction of the furnace body, so that the connecting member can be passed through the insulation screen assembly along the height direction of the furnace body;

[0023] The limiting member is sleeved on the connecting member between adjacent thermal insulation boards to support the adjacent thermal insulation boards.

[0024] In some embodiments, in the aforementioned crystal furnace, the heat preservation screen assembly and the support member are one of tungsten, molybdenum, and tungsten-molybdenum alloy;

[0025] The sheath is made of ceramic.

[0026] A second aspect of the present application provides a sapphire substrate production system, which includes at least one of the aforementioned crystal furnaces.

[0027] Through the above technical scheme, the crystal furnace provided by the present invention is provided with a sheath with a low thermal conductivity coefficient between the thermal insulation screen assembly and the support member, and the stable characteristics of the sheath at high temperatures are used as an isolation member, so that the sheath can isolate the thermal insulation screen assembly and the support member under long-term high temperature conditions to avoid adhesion between the two, thereby providing feasibility and convenience for subsequent disassembly and maintenance, thereby increasing the service life of the crystal furnace and effectively reducing the replacement cost; and effectively solving the problem that the bottom thermal insulation screen and the support in the existing crystal furnace will adhere under long-term high temperature and cannot be disassembled for repair and maintenance, resulting in a shortened service life of the crystal furnace and increased replacement costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0029] Figure 1 It is a schematic structural diagram of a heat preservation screen assembly, a support member and a sheath in a crystal furnace disclosed in an embodiment of the present disclosure;

[0030] Figure 2 This disclosure Figure 1 A top view of the structure in FIG.

[0031] Figure 3 This disclosure Figure 1 Schematic diagram of the cross section of the structure.

[0032] Description of reference numerals:

[0033] 1. Insulation screen assembly; 11. Insulation board; 12. First through hole; 13. Connector; 14. Limiter; 15. Second through hole; 2. Support member; 21. Supporting end; 3. Sheath; 4. Insulation member; a. First direction. DETAILED DESCRIPTION

[0034] The following is a further detailed description of the embodiments of the present disclosure in conjunction with the accompanying drawings and examples. The detailed description of the following embodiments and the accompanying drawings are used to exemplarily illustrate the principles of the present disclosure, but cannot be used to limit the scope of the present disclosure. The present disclosure can be implemented in many different forms and is not limited to the specific embodiments disclosed herein, but includes all technical solutions that fall within the scope of the claims.

[0035] The present disclosure provides these embodiments to make the present disclosure thorough and complete, and to fully express the scope of the present disclosure to those skilled in the art. It should be noted that unless otherwise specifically stated, the relative arrangement of the parts and steps, the composition of the materials, the numerical expressions and the numerical values ​​set forth in these embodiments should be interpreted as being merely exemplary, and not as limiting.

[0036] It should be noted that, in the description of the present disclosure, unless otherwise specified, the meaning of "multiple" is greater than or equal to two; the terms "upper", "lower", "left", "right", "inner", "outer", etc., indicating the orientation or positional relationship, are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present disclosure. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0037] In addition, the words "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different parts. "Vertical" does not mean vertical in the strict sense, but is within the tolerance range. "Parallel" does not mean parallel in the strict sense, but is within the tolerance range. "Include" or "comprising" and similar words mean that the elements before the word include the elements listed after the word, and do not exclude the possibility of including other elements.

[0038] It should also be noted that in the description of the present disclosure, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present disclosure can be understood according to the specific circumstances. When a specific device is described as being located between a first device and a second device, there may or may not be an intermediate device between the specific device and the first device or the second device.

[0039] All terms used in the present disclosure have the same meanings as those understood by those of ordinary skill in the art to which the present disclosure belongs, unless otherwise specifically defined. It should also be understood that terms defined in general dictionaries, for example, should be interpreted as having meanings consistent with their meanings in the context of the relevant technology, and should not be interpreted in an idealized or extremely formal sense, unless explicitly defined as such herein.

[0040] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered part of the specification.

[0041] At present, the most recognized process for growing large-size, high-quality sapphire single crystals for LED substrates is the kyber growth method. The crystal furnace used in the kyber growth method is equipped with tungsten-molybdenum materials and pillars at the bottom. The insulation screen maintains the temperature in the upper furnace body, and pillars are set through the insulation screen to support the crucible.

[0042] However, since the insulation screen and the pillars are made of tungsten-molybdenum, long-term exposure to high temperature will cause the tungsten-molybdenum grains to grow, and the surrounding impurities will also evaporate and adhere, causing the pillars and the insulation screen to stick to each other and cannot be disassembled for repair and maintenance, resulting in a shortened service life of the crystal furnace and increased replacement costs.

[0043] The crystal furnace provided in this embodiment has a sheath provided in the furnace body in conjunction with the bottom heat preservation screen assembly and the pillar, and uses the sheath with a low thermal conductivity to isolate the pillar and the bottom heat preservation screen, so that under high-temperature process conditions, the pillar and the bottom heat preservation screen cannot contact each other, and even if the material is deformed, it will not stick together, which provides convenience for the disassembly and maintenance of the bottom heat preservation screen and the pillar. This effectively solves the problem that the bottom heat preservation screen and the pillar in the existing crystal furnace will stick together under long-term high temperature and cannot be disassembled for maintenance, resulting in a shortened service life of the crystal furnace and increased replacement costs.

[0044] Example 1

[0045] Reference Figure 1 , Attachment Figure 2 and attached Figure 3This embodiment discloses a crystal furnace, which includes a furnace body (not shown in the figure), a heat preservation screen assembly 1, a support member 2 and a jacket 3; the heat preservation screen assembly 1 is arranged on the bottom wall inside the furnace body; the support member 2 is arranged in the heat preservation screen assembly 1 along the height direction of the furnace body inside the furnace body, the first end of the support member 2 abuts against the bottom wall of the furnace body, and the second end of the support member 2 passes through the heat preservation screen assembly to form a supporting end 21; the jacket 3 is coaxially arranged between the heat preservation screen assembly 1 and the support member 2, the thermal conductivity of the jacket 3 is smaller than the thermal conductivity of the heat preservation screen assembly 1 and the support member 2, and the melting point of the jacket 3 is higher than the working temperature of the furnace body.

[0046] Specifically, in order to solve the problem that the bottom insulation screen and the support in the existing crystal furnace will adhere to each other under long-term high temperature and cannot be disassembled for maintenance, resulting in a shortened service life of the crystal furnace and increased replacement costs, the present embodiment provides a crystal furnace, which arranges a sheath 3 between the insulation screen assembly 1 and the support 2 in the furnace body, and utilizes the characteristics of the sheath 3 having a small thermal conductivity coefficient and a melting point higher than the working temperature of the furnace body to ensure that under long-term high-temperature process conditions, the sheath 3 can play an isolating role between the insulation screen assembly 1 and the support 2 to prevent the insulation screen assembly 1 and the support 2 from adhering to each other.

[0047] Among them, the furnace body is a furnace structure that provides a storage space and a heating space, so that the crucible can be accommodated in the furnace body for heating and crystal growth. The shape and size of the furnace body can be designed and adjusted according to actual needs with reference to existing crystal furnaces, and no further details are given here. A heating device is arranged around the center of the furnace body, and corresponding heat preservation screen components are arranged on the bottom wall, top wall and side wall of the furnace body to enclose the heat generated by the heating device inside the furnace body to prevent it from diffusing outward from the furnace wall. The above settings can be easily understood by those skilled in the art, and no further details are given here.

[0048] Among them, the heat preservation screen assembly 1 is a rigid structure. In this embodiment, it is mainly aimed at the heat preservation structure arranged at the bottom of the furnace body. It extends upward from the bottom of the furnace body to a certain height to be able to block the furnace wall of the furnace body from the heated space, and prevent heat from leaking out through the bottom furnace wall; the heat preservation screen assembly 1 can be, but is not limited to, one of tungsten, molybdenum, and tungsten-molybdenum alloys, and effectively guarantees the heat preservation effect in the furnace body through its high temperature resistance, good low thermal expansion coefficient, good high temperature strength and other characteristics. The shape of the heat preservation screen assembly 1 is not limited here, as long as it is compatible with the shape of the furnace body.

[0049] Among them, the support member 2 is a rigid structure, which can be but not limited to a columnar, block-shaped, cylindrical, frame-type structure, etc. In this embodiment, a cylindrical structure is preferred, which can not only ensure the support strength but also reduce the material cost and weight; the support member 2 is used to support the crucible (not shown in the figure), and the support member 2 needs to have the properties of high temperature resistance, wear resistance, good low thermal expansion coefficient, and high high temperature strength. In this embodiment, the material of the support member 2 can be but not limited to tungsten, molybdenum, and tungsten-molybdenum alloy; the support member 2 is arranged in the thermal insulation screen assembly 1 and a support end 21 is reserved at the upper end. The support end 21 can be plate-shaped, bowl-shaped, grid-shaped, frame-type, etc., as long as it can stably support the crucible. The shape of the support member 2 is not limited, and can be designed and adjusted according to actual needs, such as: cylindrical, prismatic, gourd-shaped, etc.

[0050] Among them, the sheath 3 is a rigid structure, which is sleeved outside the support 2 and is spaced between the support 2 and the heat preservation screen assembly 1 as a barrier structure. The thermal conductivity of the sheath 3 is less than the thermal conductivity of the heat preservation screen assembly 1 and the support 2, and the melting point of the sheath 3 is higher than the working temperature of the furnace body. For example, zirconium oxide ceramic material is selected, and the melting point is about 2600 degrees. The working temperature of the crystal furnace is generally about 2200 degrees. Therefore, in the furnace body under long-term high temperature conditions, the sheath 3 will not be deformed or the grains will grow, thereby effectively preventing the heat preservation screen assembly 1 and the support 2 from sticking together. The shape of the sheath 3 is not limited here, as long as it is compatible with the support. In this embodiment, the sheath 3 can be designed to fit the heat preservation screen assembly 1 and the support 2 to ensure the heat preservation and insulation effect. The sheath 3 can also be designed to be spaced from the heat preservation screen assembly 1 and the support 2 to ensure the spacing effect and subsequent detachability.

[0051] According to the above, the crystal furnace provided by the present invention is provided with a sheath 3 with a small thermal conductivity coefficient between the thermal insulation screen assembly 1 and the support member 2, and the stable characteristics of the sheath 3 at high temperatures are used as an isolation member, so that the sheath 3 can isolate the thermal insulation screen assembly 1 and the support member 2 under long-term high temperature conditions to avoid adhesion between the two, thereby providing feasibility and convenience for subsequent disassembly and maintenance, thereby increasing the service life of the crystal furnace and effectively reducing the replacement cost; and effectively solving the problem that the bottom thermal insulation screen and the support in the existing crystal furnace will adhere under long-term high temperature and cannot be disassembled for repair and maintenance, resulting in a shortened service life of the crystal furnace and increased replacement costs.

[0052] The term "and / or" in this article is merely a description of the association relationship of associated objects, identifying three possible relationships. For example, A and / or B is specifically understood as: A and B can be included at the same time, A can exist alone, or B can exist alone, and any of the above three situations can be met.

[0053] In some embodiments, in the crystal furnace provided in this embodiment, the jacket 3 is spaced apart from the thermal insulation screen assembly 1 and the support member 2 in a first direction a; wherein the first direction a is perpendicular to the height direction of the furnace body.

[0054] Specifically, in order to ensure the barrier effect of the jacket 3, in this embodiment, the jacket 3 is set to be spaced from the thermal insulation screen assembly 1 and the support member 2 in the first direction a. The jacket 3 and the support member 2 only need to be supported on the bottom wall of the furnace body, and no additional connection structure is required to avoid the generation of additional impurities under high-temperature process conditions; at the same time, in order to ensure the heat insulation effect and prevent the heat above the thermal insulation screen assembly 1 from leaking through the gap, in this embodiment, the spacing distance between the jacket 3 and the support member 2 is set to 1-5mm, and the spacing distance between the jacket 3 and the thermal insulation screen assembly 1 is set to 1-5mm. The first direction a is the radial direction of the actual furnace body, and the jacket 3 is spaced from the support member 2 and the thermal insulation screen assembly 1 all around the furnace body in the height direction.

[0055] In some embodiments, refer to the attached Figure 3 The crystal furnace provided in this embodiment also includes a heat insulating member 4; the heat insulating member 4 is arranged on the bottom wall inside the furnace body, and the heat insulating member 4 has a supporting surface on the side facing the top of the furnace body, and the supporting surface is used to support the thermal insulation screen assembly 1, the support member 2 and the sleeve 3.

[0056] Specifically, the crystal furnace generally has a large energy consumption. The support member 2 passes through the heat preservation screen assembly 1 and contacts the bottom wall of the furnace body, which will then conduct the heat above the heat preservation screen assembly 1 to the bottom wall and cause heat leakage, increasing unnecessary energy consumption of the crystal furnace and increasing production costs. In this embodiment, for example, to prevent the heat in the furnace body from leaking out through the support member 2, a heat insulation member 4 is provided. In this embodiment, the thermal conductivity of the heat insulation member 4 is less than that of the heat preservation screen assembly 1 and the support member 2. For example, materials such as aluminum oxide and zirconium oxide can be used, which can reduce or even block the heat of the support member 2 from being transferred to the bottom wall of the furnace body, reduce the heat leakage in the furnace body, and thus reduce the energy consumption of the crystal furnace. The heat insulation member 4 can be, but is not limited to, a plate-shaped, block-shaped or other structural form, and the supporting surface thereon is a flat supporting surface to ensure stable support for the heat preservation screen assembly 1, the support member 2 and the sheath 3. It is understandable that the supporting surface in this embodiment can only support the support member 2, or can simultaneously support the thermal insulation screen assembly 1, the support member 2 and the sheath 3. It is understandable that the thermal insulation member 4 in this embodiment has a specified thickness, such as 20-100 mm, which can ensure both the support strength to avoid cracking and the thermal insulation effect.

[0057] Further, in some embodiments, in the crystal furnace provided in this embodiment, one end of the jacket 3 facing the second end of the support member 2 is located between the first end of the thermal insulation screen assembly 1 and the second end of the support member 2; wherein the first end of the thermal insulation screen assembly 1 is the end of the thermal insulation screen assembly 1 that is away from the bottom of the furnace body.

[0058] Specifically, in order to ensure the service life of the sheath, in this embodiment, one end of the sheath 3 facing the second end of the support member 2 is arranged to be located between the first end of the thermal insulation screen assembly 1 and the second end of the support member 2, and is preferably arranged to be flush with the upper surface of the thermal insulation screen assembly 1, thereby ensuring the barrier effect for the support member 2 and the thermal insulation screen assembly 1, and making the top end of the sheath 3 away from the crucible, that is, away from the high-temperature heat source area, thereby avoiding the cracking or damage of the sheath 3 due to thermal stress generated by long-term overheating, affecting its service life.

[0059] In some embodiments, refer to the attached Figure 3 In the crystal furnace provided in this embodiment, in a specific implementation, the orthographic projection of the thermal insulation member 4 along the height direction of the furnace body at most covers the orthographic projection of the support member 2 and the jacket 3 along the height direction of the furnace body.

[0060] Specifically, in order to ensure the supporting effect of the thermal insulation member 4 and not affect the thermal insulation screen in other directions (not shown in the figure), in this embodiment, the size of the thermal insulation member 4 is set so that the orthographic projection along the height direction of the furnace body at most covers the orthographic projection of the support member 2 and the sheath 3 along the height direction of the furnace body, that is, it is as small as possible under the premise of ensuring support for the support member 2 and the sheath 3, so as to avoid affecting the setting and installation of the thermal insulation screen on the inner wall of the furnace body.

[0061] In some embodiments, refer to the attached Figure 1 and attached Figure 3 In the crystal furnace provided in this embodiment, in a specific implementation, the thermal insulation screen assembly 1 includes a plurality of thermal insulation plates 11 arranged at intervals along the height direction of the furnace body, and a first through hole 12 is provided on the thermal insulation plate 11. The first through holes 12 on the plurality of thermal insulation plates 11 are coaxially arranged along the height direction of the furnace body for passing the support member 2 and the sheath 3.

[0062] Specifically, in order to achieve the heat preservation and insulation effect of the heat preservation screen assembly 1, in this embodiment, the heat preservation screen assembly 1 is set to include a plurality of heat preservation plates 11. The heat preservation plates 11 can be selected from, but not limited to, tungsten, molybdenum, or tungsten-molybdenum alloys. They can be used to perform heat preservation and insulation by using their own properties of high temperature resistance, wear resistance, good low thermal expansion coefficient, and high high temperature strength. They can also use the spaced heat preservation plates 11 to form a buffer and insulation area between adjacent heat preservation plates 11 to improve the heat preservation and insulation effect. In this embodiment, the number of heat preservation plates 11 can be designed and adjusted according to actual needs, such as 10-20 layers, and the spacing between the heat preservation plates 11 can also be designed and adjusted according to the size of the furnace body and the actual heat preservation needs, such as 5-10 mm. The shape and size of the first through hole 12 can be matched with the sheath 3, which will not be described here. The setting position of the first through hole 12 can be designed and adjusted according to actual needs, such as the center of the heat preservation plate 11, to ensure that the crucible is evenly heated in the furnace body and to avoid uneven heating caused by uneven distance between the crucible and the circumferential side wall of the furnace body. Of course, it is understandable that the size and shape of the first through hole 12 on each insulation board 11 are the same, which simplifies the molding process of the insulation board 11 while ensuring that the sheath 3 and the support member 2 are accommodated.

[0063] In some embodiments, refer to the attached Figure 1 , Attachment Figure 2 and attached Figure 3 In the crystal furnace provided in this embodiment, in a specific implementation, the thermal insulation screen assembly 1 also includes a plurality of connecting members 13 and a plurality of limiting members 14; a plurality of spaced second through holes 15 are provided on the thermal insulation plate 11, and the second through holes 15 of the plurality of thermal insulation plates 11 are coaxially arranged in the height direction of the furnace body, so that the connecting member 13 can be passed through the thermal insulation screen assembly 1 along the height direction of the furnace body; the limiting member 14 is sleeved on the connecting member 13 between adjacent thermal insulation plates 11 for supporting adjacent thermal insulation plates 11.

[0064] Specifically, in order to realize the spacing of several insulation boards 11 in the height direction of the furnace body, a connector 13 and a limiter 14 are provided in the present embodiment. Both the connector 13 and the limiter 14 are rigid structures resistant to high temperatures. The present embodiment can be, but is not limited to, selected from the same material as the insulation board 11; the connector 13 can be a rod-shaped, columnar, plate-shaped, cylindrical, frame-shaped or other structure. The connector 13 is simultaneously inserted into the second through holes 15 of several insulation boards 11 as a limiter structure of all insulation boards 11 in the radial direction of the furnace body to ensure the coaxiality between the insulation boards 11 and prevent them from rotating with respect to the sheath 3 or the support 2. The distribution of several connectors 13 is not limited and can be, for example, Figure 2The support member 2 is shown to be distributed in a divergent manner; the stopper 14 is a cylindrical structure, and the specific shape can be designed and adjusted according to actual needs, such as a cylinder, a polygonal cylinder, etc. The connector 13 is movably sleeved on the connector 13, and the two ends of the connector 13 respectively contact an insulation board 11, thereby forming a structure as a spacing between adjacent insulation boards 11 to ensure the support distance and support strength. It can be understood that, corresponding to the above structure, it is necessary to ensure that the heat insulation member is set as small as possible under the premise of supporting the support member 2, the sheath 3 and the connector 13, so as to avoid affecting the setting and installation of the insulation screen on the inner wall of the furnace body.

[0065] Example 2

[0066] This embodiment provides a sapphire substrate production system, which includes at least one of the above-mentioned crystal furnaces.

[0067] Specifically, the crystal furnace is the crystal furnace in Example 1. For its structure and working principle, please refer to the detailed description of Example 1 and will not be elaborated on here. When used in the kyvo method to grow single crystals, the crystal furnace provided in this embodiment is provided with a sheath 3 with a small thermal conductivity between the thermal insulation screen assembly 1 and the support 2. The stable characteristics of the sheath 3 at high temperatures are used as an isolation member, so that the sheath 3 can isolate the thermal insulation screen assembly 1 and the support 2 under high temperature conditions for a long time to avoid adhesion between the two, thereby providing feasibility and convenience for subsequent disassembly and maintenance, thereby improving the service life of the crystal furnace and effectively reducing the replacement cost.

[0068] So far, various embodiments of the present disclosure have been described in detail. In order to avoid obscuring the concept of the present disclosure, some details known in the art are not described. Based on the above description, those skilled in the art can fully understand how to implement the technical solution disclosed here.

[0069] Although some specific embodiments of the present disclosure have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present disclosure. It should be understood by those skilled in the art that the above embodiments may be modified or some technical features may be replaced by equivalents without departing from the scope and spirit of the present disclosure. In particular, the various technical features mentioned in the various embodiments may be combined in any manner as long as there is no structural conflict.

Claims

1. A crystal furnace, characterized in that: It includes: furnace body; A heat preservation screen assembly (1), wherein the heat preservation screen assembly (1) is arranged on the bottom wall of the furnace body; A support member (2), wherein the support member (2) is arranged in the furnace body and penetrates the heat preservation screen assembly (1) along the height direction of the furnace body, the first end of the support member (2) abuts against the bottom wall of the furnace body, and the second end of the support member (2) penetrates the heat preservation screen assembly (1) to form a supporting end; A jacket (3), wherein the jacket (3) and the support member (2) are coaxially arranged between the heat preservation screen assembly (1) and the support member (2), the thermal conductivity of the jacket (3) is smaller than the thermal conductivity of the heat preservation screen assembly (1) and the support member (2), and the melting point of the jacket (3) is higher than the working temperature of the furnace body.

2. The crystal furnace according to claim 1, characterized in that: The protective sleeve (3) is spaced apart from the thermal insulation screen assembly (1) and the support member (2) in the first direction (a); Wherein, the first direction (a) is perpendicular to the height direction of the furnace body.

3. The crystal furnace according to claim 1, characterized in that: Also includes a heat insulating member (4); The heat insulating member (4) is arranged on the bottom wall inside the furnace body, and the heat insulating member (4) has a supporting surface on one side facing the top of the furnace body, and the supporting surface is used to support the thermal insulation screen assembly (1), the support member (2) and the sheath (3).

4. The crystal furnace according to claim 3, characterized in that: The thermal conductivity of the thermal insulation member (4) is smaller than the thermal conductivity of the thermal insulation screen assembly (1) and the support member (2); The thermal insulation member (4) has a specified thickness.

5. The crystal furnace according to claim 3, characterized in that: The orthographic projection of the heat insulating member (4) along the height direction of the furnace body at most covers the orthographic projections of the support member (2) and the protective sleeve (3) along the height direction of the furnace body.

6. The crystal furnace according to claim 1, characterized in that: One end of the sheath (3) facing the second end of the support member (2) is located between the first end of the thermal insulation screen assembly (1) and the second end of the support member (2); The first end of the thermal insulation screen assembly (1) is an end of the thermal insulation screen assembly (1) that is away from the bottom of the furnace body.

7. The crystal furnace according to claim 1, characterized in that: The heat preservation screen assembly (1) comprises a plurality of heat preservation plates (11) arranged at intervals along the height direction of the furnace body, the heat preservation plates (11) being provided with first through holes (12), and the first through holes (12) on the plurality of heat preservation plates (11) being coaxially arranged along the height direction of the furnace body for passing the support member (2) and the sheath (3).

8. The crystal furnace according to claim 7, characterized in that: The thermal insulation screen assembly (1) further comprises a plurality of connecting members (13) and a plurality of limiting members (14); The insulation board (11) is provided with a plurality of spaced second through holes (15), and the second through holes (15) of the insulation board (11) are coaxially arranged in the height direction of the furnace body, so that the connecting member (13) can be inserted into the insulation screen assembly (1) along the height direction of the furnace body; The limiting member (14) is sleeved on the connecting member (13) between adjacent thermal insulation boards (11) and is used to support the adjacent thermal insulation boards (11).

9. The crystal furnace according to claim 1, characterized in that: The heat preservation screen assembly (1) and the support member (2) are made of one of tungsten, molybdenum, and tungsten-molybdenum alloy; The sheath (3) is made of ceramic.

10. A sapphire substrate production system, characterized in that: It includes: At least one crystal furnace according to any one of claims 1 to 9.

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