Six-layer furnace body combined rack of high-precision PECVD (plasma enhanced chemical vapor deposition) equipment

By designing a high-precision PECVD equipment 6-layer furnace combined rack with adjustable support components and shock-absorbing components, the problem in the existing technology that the rack cannot adjust the support position and cannot buffer the vibration of the furnace body is solved, and the problem of different types of PECVD equipment is realized. Flexible support and effective shock absorption protection of the length specification furnace body.

CN222377677UActive Publication Date: 2025-01-21SHENZHEN JIUXING IND TECH CO LTD
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Patent Information

Application Number
CN202421095781.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-05-15
Publication Date
2025-01-21
Estimated Expiration
2034-05-15

AI Technical Summary

Technical Problem

The frames in the prior art cannot adjust the support position, which leads to inconvenience in supporting furnace bodies of different lengths and specifications, and cannot effectively buffer the vibration of the furnace body and the collision of external objects, which easily leads to damage to the furnace body.

Method used

A high-precision PECVD equipment 6-layer furnace combined frame is designed, using adjustable support components and shock-absorbing components. The support component realizes the relative position adjustment of the support block through the moving groove, connecting block, screw rod and drive motor; the shock-absorbing component buffers the vibration of the furnace body through the hydraulic rod and buffer spring.

Benefits of technology

It achieves flexible support for furnace bodies of different lengths and specifications, and uses shock-absorbing components to effectively buffer the vibration of the furnace body and collisions with foreign objects, thus avoiding damage to the furnace body.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a six-layer furnace body combined rack of high-precision PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment, and belongs to the field of semiconductor processing. Comprising a mounting seat and a furnace body mounted at the top of the mounting seat, the supporting assembly comprises a moving groove formed in the top of the mounting base, two connecting blocks arranged in the moving groove in a sliding mode, moving blocks arranged at the bottoms of the connecting blocks and corresponding to the moving groove, supporting blocks arranged at the tops of the connecting blocks, a driving motor arranged on the side wall of the mounting base and a lead screw arranged at the output end of the driving motor. Threaded holes matched with the lead screws are formed in the two connecting blocks correspondingly, and the damping assembly is arranged at the bottom of the mounting base and used for buffering the shaking furnace body. The supporting position can be freely adjusted according to the size of the furnace body, furnace bodies with different length specifications can be conveniently supported, buffering protection can be conducted on the furnace body when the furnace body vibrates in use or is collided by foreign objects, and the service life of the furnace body is prolonged.
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Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a 6-layer furnace body combined frame of high-precision PECVD equipment. Background Art

[0002] PECVD, also known as plasma enhanced chemical vapor deposition technology, is a method for preparing semiconductor thin film materials and other material films by using glow discharge in a deposition chamber to ionize the material and then chemically deposit it on a substrate. The activity of chemical vapor reaction substances is enhanced through plasma activation, the surface reaction rate is increased, and the film deposition temperature is significantly reduced through high-energy ions. The 6-layer furnace body of the high-precision PECVD equipment requires a special frame to support it when in use.

[0003] When the existing frame is in use, the support position of the frame is fixed and cannot be adjusted, which is very inconvenient when it is necessary to support furnace bodies of different lengths. In addition, when the furnace body vibrates during operation or is hit by foreign objects, the furnace body is easily damaged because there is no buffering measure. Utility Model Content

[0004] The purpose of the utility model is to solve the problems in the prior art that the frame cannot adjust the support position, is not convenient for supporting furnace bodies of different length specifications, and cannot provide buffer protection for the shaking furnace body, and proposes a 6-layer furnace body combined frame for high-precision PECVD equipment.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A 6-layer furnace body combined frame of a high-precision PECVD device comprises a mounting seat and a furnace body mounted on the top of the mounting seat, and further comprises:

[0007] A support assembly, the support assembly comprising a moving groove opened on the top of the mounting seat, two connecting blocks slidably arranged inside the moving groove, a moving block arranged at the bottom of the connecting block and corresponding to the moving groove, a supporting block arranged on the top of the connecting block, a driving motor arranged on the side wall of the mounting seat, and a screw rod arranged at the output end of the driving motor, wherein the two connecting blocks are each provided with a threaded hole matched with the screw rod, and the threaded holes in the two connecting blocks are threaded in opposite directions, and the outer wall of the mounting seat is provided with a movable hole for installing the screw rod;

[0008] The shock absorbing assembly is arranged at the bottom of the mounting seat and is used for buffering the shaking furnace body.

[0009] As a preferred technical solution of the present application, the support block is an arc-shaped structure, and an anti-slip pad is provided on the top of the support block.

[0010] As a preferred technical solution of the present application, a first support frame is provided at the bottom of the mounting seat, a second support frame is provided at both ends of the first support frame, and support legs are provided at both ends of the second support frame.

[0011] As a preferred technical solution of the present application, the shock absorbing assembly includes four protective shells arranged in a rectangular shape on the top of the mounting seat, a hydraulic rod installed between the protective shell and the supporting leg, and a buffer spring installed on the outer wall of the hydraulic rod.

[0012] As a preferred technical solution of the present application, a rotating rod extending into the interior of the supporting leg is movably installed inside the second supporting frame, cams are provided at both ends of the rotating rod, a mounting block is slidably connected to the inner wall of the supporting leg below the cam, a moving wheel is installed inside the mounting block, and a rotating component for driving the rotating rod to rotate is provided on the mounting seat.

[0013] As a preferred technical solution of the present application, the rotating assembly includes a moving rod slidably arranged inside the first support frame, a return spring arranged between the moving rod and the inner wall of the first support frame, a tooth groove arranged at the top of the moving rod, a gear arranged on the rod wall of the rotating rod and meshing with the tooth groove, and a pressing assembly arranged on the mounting seat for squeezing the moving rod to move.

[0014] As a preferred technical solution of the present application, the pressing assembly includes a mounting shaft arranged on the outer wall of the mounting seat, a mounting rod movably arranged on the mounting shaft, a push rod arranged on the upper surface of the mounting rod, an anti-slip sleeve arranged on the outer wall of the push rod, and a push block arranged at the bottom of the mounting rod, and the push block is in contact with the end face of the movable rod at one end away from the mounting rod.

[0015] As a preferred technical solution of the present application, a mounting block is slidably mounted inside the supporting leg and at the bottom of the cam, and a moving wheel is mounted inside the mounting block.

[0016] Compared with the prior art, the utility model provides a 6-layer furnace body combined frame of high-precision PECVD equipment, which has the following beneficial effects:

[0017] 1. The 6-layer furnace body combined frame of the high-precision PECVD equipment is provided with a support block, a connecting block, a screw, a driving motor and a movable groove. By turning on the driving motor, the screw can be driven to rotate. When the screw rotates, the two support blocks provided with the connecting blocks can be driven to slide in the movable groove, so that the two support blocks are gradually approached or gradually moved away, which is convenient for adjusting the relative positions of the two support blocks according to the size of the furnace body, and then convenient for supporting furnace bodies of different lengths, solving the problem that the support position of the equipment cannot be adjusted in the prior art and is not convenient for supporting furnace bodies of different lengths.

[0018] 2. The high-precision PECVD equipment has a 6-layer furnace body combined frame. Through the furnace body, hydraulic rods and buffer springs, when the furnace body vibrates during operation or shakes due to impact from external objects, the hydraulic rods and buffer springs can slow down the shaking of the furnace body, thus solving the problem in the prior art that the furnace body cannot be slowed down and is easily damaged by direct collision with the frame.

[0019] 3. The 6-layer furnace body combined frame of the high-precision PECVD equipment is provided with a rotating rod, a cam, a mounting block and a moving wheel. When the frame needs to be transferred, the moving rod can be driven to move by the set pressing assembly, and the moving rod will drive the rotating rod to rotate through the tooth groove, so that the cam can rotate to press the mounting block downward to make the moving wheel contact with the ground. At this time, the frame can be pushed to transfer position by the moving wheel. When it is transferred to the appropriate position, the moving rod is driven to move in the opposite direction by the pressing assembly, so that the cam can be reversed and the mounting block can be reset to retract the moving wheel again. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0021] Figure 2 It is a front structural schematic diagram of the utility model;

[0022] Figure 3 It is a schematic diagram of the explosion structure of the utility model;

[0023] Figure 4 For the utility model Figure 3 The enlarged structural diagram at A in the middle;

[0024] Figure 5 For the utility model Figure 3 Enlarged structural diagram at B in the middle.

[0025] In the figure:

[0026] 1. Mounting seat; 101. Moving groove; 2. Support block; 201. Connecting block; 202. Moving block; 203. Anti-skid pad; 204. Screw rod; 205. Screw hole; 206. Movable hole; 207. Driving motor; 3. Furnace body; 4. First supporting frame; 401. Second supporting frame; 402. Moving rod; 403. Rotating rod; 404. Gear; 405. Tooth groove; 406. Support leg; 407. Cam; 408. Mounting block; 409. Moving wheel; 5. Protective shell; 501. Hydraulic rod; 502. Buffer spring; 6. Mounting shaft; 601. Mounting rod; 602. Push block; 603. Push rod; 604. Anti-skid sleeve. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model; it is obvious that the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments, and all other embodiments obtained by ordinary technicians in this field based on the embodiments of the utility model without making creative work are within the scope of protection of the utility model.

[0028] Example:

[0029] Reference Figure 1 , Figure 2 and Figure 3 A 6-layer furnace body combined frame of a high-precision PECVD equipment includes a mounting base 1 and a furnace body 3 installed on the top of the mounting base 1, and also includes a support component and a shock-absorbing component. The support component includes a moving groove 101 opened on the top of the mounting base 1, two connecting blocks 201 slidably arranged inside the moving groove 101, a moving block 202 arranged at the bottom of the connecting block 201 and corresponding to the moving groove 101, a support block 2 arranged on the top of the connecting block 201, a driving motor 207 arranged on the side wall of the mounting base 1, and a screw rod 204 arranged at the output end of the driving motor 207, wherein the two connecting blocks 201 are both provided with threaded holes matching the screw rod 204, and the threaded holes in the two connecting blocks 201 are threaded in opposite directions. The outer wall of the mounting base 1 is provided with a movable hole 206 for installing the screw rod 204, which is arranged at the bottom of the mounting base 1 to buffer the shaking furnace body 3.

[0030] When the support position needs to be adjusted, the drive motor 207 is turned on, and the lead screw 204 is driven to rotate by the drive motor 207. When the lead screw 204 rotates, the two connecting blocks 201 are driven to slide in the movable groove 101, and the two support blocks 2 are driven to move relative to each other, gradually moving away or gradually approaching, and the relative position between the two support blocks 2 is adjusted. At this time, according to the size of the furnace body 3, the support block 2 is moved to a suitable support position, and then the furnace body 3 is installed on the top of the support block 2, so that furnace bodies 3 of different lengths can be supported; and when the furnace body 3 vibrates during operation or is hit by external objects and shakes, the shock-absorbing component can be used to buffer and protect the furnace body 3 to prevent the furnace body 3 from shaking and directly colliding with the frame and being damaged.

[0031] Reference Figure 3 , a 6-layer furnace body combined frame of a high-precision PECVD equipment, further, the support block 2 is an arc-shaped structure, and an anti-slip pad 203 is provided on the top of the support block 2.

[0032] When in use, the arc-shaped support block 2 can better contact with the lower surface of the furnace body 3, which is convenient for stably supporting the furnace body 3. The anti-slip pad 203 can play an anti-slip role, further improving the stability of the support of the furnace body 3.

[0033] Reference Figure 1 , Figure 2 , Figure 3 and Figure 4 , a 6-layer furnace body combined frame of a high-precision PECVD equipment. Furthermore, a first support frame 4 is arranged at the bottom of the mounting seat 1, and a second support frame 401 is arranged at both ends of the first support frame 4, and support legs 406 are arranged at both ends of the second support frame 401.

[0034] When in use, the entire device can be supported by the support legs 406 .

[0035] Reference Figure 1 and Figure 3 , a 6-layer furnace body combined frame of a high-precision PECVD equipment. Furthermore, the shock-absorbing assembly includes four protective shells 5 arranged in a rectangular distribution on the top of the mounting seat 1, a hydraulic rod 501 installed between the protective shell 5 and the supporting leg 406, and a buffer spring 502 installed on the outer wall of the hydraulic rod 501.

[0036] When the furnace body 3 is in use, when it shakes, the hydraulic rod 501 at the bottom thereof will be squeezed. The hydraulic rod 501 and the buffer spring 502 can provide a buffering protection for the furnace body 3 .

[0037] Reference Figure 1 , Figure 3 and Figure 5 , a 6-layer furnace body combined frame of a high-precision PECVD equipment. Furthermore, a rotating rod 403 extending to the inside of a supporting leg 406 is movably installed inside the second supporting frame 401, and cams 407 are arranged at both ends of the rotating rod 403. The inner wall of the supporting leg 406 located below the cam 407 is slidably connected with a mounting block 408, and a moving wheel 409 is installed inside the mounting block 408. A rotating component for driving the rotating rod 403 to rotate is provided on the mounting seat 1.

[0038] The rotating assembly includes an internal moving rod 402 slidably arranged in the first support frame 4, a return spring arranged between the moving rod 402 and the inner wall of the first support frame 4, a tooth groove 405 arranged at the top of the moving rod 402, a gear 404 arranged on the rod wall of the rotating rod 403 and meshing with the tooth groove 405, and a pressing assembly arranged on the mounting seat 1 for squeezing the moving rod 402 to move.

[0039] The pressing assembly includes a mounting shaft 6 arranged on the outer wall of the mounting seat 1, a mounting rod 601 movably arranged on the mounting shaft 6, a push rod 603 arranged on the upper surface of the mounting rod 601, an anti-slip sleeve 604 arranged on the outer wall of the push rod 603, and a push block 602 arranged at the bottom of the mounting rod 601, and one end of the push block 602 away from the mounting rod 601 contacts the end surface of the moving rod 402.

[0040] When the equipment needs to be moved, the push rod 603 is pulled outward by the installation shaft 6. When the push rod 603 is pulled outward, the push block 602 can be moved inward to push the moving rod 402 forward. When the moving rod 402 moves, the cooperation between the tooth groove 405 and the gear 404 can drive the rotating rod 403 to rotate, and the rotating rod can drive the cam 407 to rotate at the same time. When the cam 407 rotates, the moving wheel 409 is pushed downward by the rotation of the cam 407, so that the moving wheel 409 can be controlled to open by the push rod 603. At this time, the mounting seat 1 can be pushed to drive the equipment to move its position. When the equipment position transfer is completed, the push rod 603 is pushed in the opposite direction to drive the moving rod 402 to move in the opposite direction, and then the rotating rod 403 can be driven to reverse and reset, thereby driving the cam 407 to reverse and reset, and the mounting block 408 and the moving wheel 409 are retracted into the support leg 406 again, so that the support leg 406 contacts the ground and the equipment is fixed on the ground.

[0041] Specifically, when the utility model is working / in use: if the device needs to be moved, the push rod 603 is pulled outward to move the push block 602 inward, and the moving rod 402 is pushed forward. At this time, the tooth groove 405 on the moving rod 402 drives the rotating rod 403 to rotate, and at the same time drives the cam 407 to rotate. When the cam 407 rotates, the moving wheel 409 is pushed downward, and the device can be pushed to move by the push rod 603. When the device moves to a suitable position, the push rod 603 is pushed inward, and the moving wheel 409 can enter the support The driving motor 207 is then turned on inside the support leg 406, and the driving motor 207 drives the screw rod 204 to rotate. When the screw rod 204 rotates, it drives the two support blocks 2 to move. According to the size of the furnace body 3, the support block 2 is moved to a suitable supporting position, which is convenient for furnace bodies 3 of different lengths. When the furnace body 3 vibrates during use or is hit by foreign objects, the furnace body 3 will shake. At this time, the hydraulic rod 501 and the buffer spring 502 can slow down the shaking of the furnace body 3, which is convenient for buffering and protecting the furnace body 3.

[0042] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A 6-layer furnace body combined frame of a high-precision PECVD device, comprising a mounting base (1) and a furnace body (3) mounted on the top of the mounting base (1), characterized in that: Also includes: A support assembly, the support assembly comprising a movable groove (101) provided at the top of a mounting seat (1), two connecting blocks (201) slidably provided inside the movable groove (101), a movable block (202) provided at the bottom of the connecting block (201) and corresponding to the movable groove (101), a support block (2) provided at the top of the connecting block (201), a driving motor (207) provided on the side wall of the mounting seat (1), and a screw rod (204) provided at the output end of the driving motor (207), wherein the two connecting blocks (201) are provided with threaded holes matching the screw rod (204), and the threaded holes in the two connecting blocks (201) are threaded in opposite directions; and the outer wall of the mounting seat (1) is provided with a movable hole (206) for installing the screw rod (204); The shock absorbing component is arranged at the bottom of the mounting seat (1) and is used to cushion the shaking furnace body (3).

2. The high-precision PECVD equipment 6-layer furnace body combined frame according to claim 1 is characterized in that: The support block (2) is an arc-shaped structure, and an anti-slip pad (203) is provided on the top of the support block (2).

3. The high-precision PECVD equipment 6-layer furnace body combined frame according to claim 1 is characterized in that: A first support frame (4) is arranged at the bottom of the mounting seat (1), second support frames (401) are arranged at both ends of the first support frame (4), and supporting legs (406) are arranged at both ends of the second support frame (401).

4. The high-precision PECVD equipment 6-layer furnace body combined frame according to claim 3 is characterized in that: The shock absorbing assembly comprises four protective shells (5) arranged on the top of the mounting seat (1) and distributed in a rectangular shape, a hydraulic rod (501) installed between the protective shells (5) and the supporting legs (406), and a buffer spring (502) installed on the outer wall of the hydraulic rod (501).

5. The high-precision PECVD equipment 6-layer furnace body combined frame according to claim 3 is characterized in that: A rotating rod (403) extending into the interior of the supporting leg (406) is movably installed inside the second supporting frame (401), cams (407) are arranged at both ends of the rotating rod (403), a mounting block (408) is slidably connected to the inner wall of the supporting leg (406) below the cam (407), a moving wheel (409) is installed inside the mounting block (408), and a rotating component for driving the rotating rod (403) to rotate is provided on the mounting seat (1).

6. The high-precision PECVD equipment 6-layer furnace body combined frame according to claim 5, characterized in that: The rotating assembly comprises an internal moving rod (402) slidably arranged on the first support frame (4), a return spring arranged between the moving rod (402) and the inner wall of the first support frame (4), a tooth groove (405) arranged on the top of the moving rod (402), a gear (404) arranged on the rod wall of the rotating rod (403) and meshing with the tooth groove (405), and a pressing assembly arranged on the mounting seat (1) for pressing the moving rod (402) to move.

7. A 6-layer furnace body combined frame of a high-precision PECVD equipment according to claim 6, characterized in that: The pressing assembly comprises a mounting shaft (6) arranged on the outer wall of the mounting seat (1), a mounting rod (601) movably arranged on the mounting shaft (6), a push rod (603) arranged on the upper surface of the mounting rod (601), an anti-slip sleeve (604) arranged on the outer wall of the push rod (603), and a push block (602) arranged at the bottom of the mounting rod (601), wherein one end of the push block (602) away from the mounting rod (601) contacts the end surface of the moving rod (402).