Vacuum sintering furnace

Abstract

The utility model relates to the technical field of vacuum sintering, in particular to a vacuum sintering furnace which comprises a second gate valve, a third gate valve, a fourth gate valve, a fifth gate valve, at least two first anti-blocking mechanisms, a second preheating area, a welding area and a cooling area. A first gate valve is arranged at the inlet end of the first preheating area, a second gate valve is arranged at the inlet end of the second preheating area, a third gate valve is arranged at the outlet end of the second preheating area, a third gate valve is arranged at the inlet end of the welding area, a fourth gate valve is arranged at the outlet end of the welding area, and a fourth gate valve is arranged at the inlet end of the cooling area. The fifth gate valve is arranged at the outlet end of the cooling area, and the first anti-clamping mechanisms are arranged on the two sides of the interiors of the inlet ends of the second preheating area, the welding area and / or the cooling area. The vacuum sintering furnace is not prone to plate clamping in the conveying process, and therefore production efficiency is high.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum sintering, in particular to a vacuum sintering furnace. Background Art

[0002] The vacuum gate valve is a valve used to isolate the vacuum pipe and block the airflow. It is an important vacuum component. When packaging semiconductor chips, it needs to be done in a vacuum environment, which can generally be achieved in the form of a vacuum reflow oven. The vacuum reflow oven in the prior art is equipped with multiple temperature zones, which are divided into a preheating zone, a welding zone and a cooling zone. Among them, the preheating zone is protected by nitrogen and is not a completely low-oxygen environment; the welding zone is a vacuum environment. After the chip is welded, the door connecting the welding zone and the cooling zone is opened, and the chip enters the cooling zone from the welding zone. At the same time, the door connecting the welding zone and the preheating zone is opened, and the preheated chip is sent to the welding zone for welding. The transmission process of the vacuum sintering furnace in the prior art is prone to card jamming, resulting in low production efficiency. Summary of the invention

[0003] The utility model provides a vacuum sintering furnace, which is used to solve the problem in the prior art that a plate is easily stuck during the transmission process of the vacuum sintering furnace, resulting in low production efficiency.

[0004] The utility model provides a vacuum sintering furnace, comprising a second gate valve, a third gate valve, a fourth gate valve, a fifth gate valve, at least two first anti-jamming mechanisms, a second preheating zone, a welding zone and a cooling zone; the second gate valve is arranged at the inlet end of the second preheating zone, the third gate valve is arranged at the outlet end of the second preheating zone, the third gate valve is arranged at the inlet end of the welding zone, the fourth gate valve is arranged at the outlet end of the welding zone, the fourth gate valve is arranged at the inlet end of the cooling zone, the fifth gate valve is arranged at the outlet end of the cooling zone, and the first anti-jamming mechanisms are arranged on both sides of the inner sides of the inlet ends of the second preheating zone, the welding zone and / or the cooling zone.

[0005] According to the vacuum sintering furnace of the utility model, it also includes a first preheating zone and a first gate valve. The first preheating zone is arranged in the upper workstation area of ​​the second preheating zone. The first gate valve is arranged at the inlet end of the first preheating zone, and the second gate valve is arranged at the outlet end of the first preheating zone.

[0006] According to the vacuum sintering furnace of the present invention, it further comprises at least one lifting mechanism, and the lifting mechanism is arranged below the first preheating zone, the second preheating zone, the welding zone and / or the cooling zone.

[0007] According to the vacuum sintering furnace of the utility model, power wheels and guide wheels are arranged on both sides of the interior of the first preheating zone, the second preheating zone, the welding zone and the cooling zone.

[0008] According to the vacuum sintering furnace of the utility model, transmission mechanisms are provided on both sides of the outside of the first preheating zone, the second preheating zone, the welding zone and the cooling zone, and the transmission mechanisms drive the power wheels.

[0009] According to the vacuum sintering furnace of the utility model, the first anti-jamming mechanism includes an inlet guide block, an inlet limit block and an inlet adjustment block; the inlet adjustment block is arranged below the inlet limit block, and the inlet guide block is arranged on the side of the inlet adjustment block close to the inlet direction.

[0010] According to the vacuum sintering furnace of the utility model, the first anti-jamming mechanism also includes a clamping mechanism, and the clamping mechanism drives the inlet limit block.

[0011] According to the vacuum sintering furnace of the utility model, the transmission mechanism is a roller, a gear, a belt or a chain.

[0012] According to the vacuum sintering furnace of the utility model, the first preheating zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage;

[0013] The second preheating zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage;

[0014] The welding zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece welding stage;

[0015] The cooling zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece cooling stage.

[0016] According to the vacuum sintering furnace of the utility model, it also includes at least two second anti-jamming mechanisms, which are arranged on both sides of the inside of the outlet end of the second preheating zone, the welding zone and / or the cooling zone.

[0017] The first anti-jamming mechanism of the present application is arranged at the inlet end, which guides the workpiece on the one hand and adjusts the incoming workpiece on the other hand. The second anti-jamming mechanism is arranged at the outlet end, which guides and adjusts the workpiece when it exits, greatly reducing the occurrence of jamming. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 It is a schematic diagram of the main structure of a vacuum sintering furnace;

[0020] Figure 2 It is a schematic diagram of the three-dimensional structure of the second preheating zone;

[0021] Figure 3 The three-dimensional structure diagram of the lower cavity of the second preheating zone Figure 1 ;

[0022] Figure 4 The three-dimensional structure diagram of the lower cavity of the second preheating zone Figure 2 ;

[0023] Figure 5 is a schematic diagram of the three-dimensional structure of the first anti-jamming mechanism;

[0024] Figure 6 It is a structural schematic diagram of an enlarged view of local A;

[0025] 1. First gate valve; 2. Second gate valve; 3. Third gate valve; 4. Fourth gate valve; 5. Fifth gate valve; 6. First preheating zone; 7. Second preheating zone; 8. Welding zone; 9. Cooling zone; 71. Sealed cavity upper cover; 72. Sealed cavity lower body; 73. First anti-stuck mechanism; 74. Second anti-stuck mechanism; 75. Lifting mechanism; 76. Guide wheel; 77. Power wheel; 78. Heating plate; 79. Heat sink; 80. Stop mechanism; 731. Clamping mechanism; 732. Mounting seat; 733. Push rod; 734. Inlet adjustment block; 735. Inlet limit block; 736. Inlet guide block; 737. Sealing tube; 741. Outlet guide block; 742. Outlet adjustment block; 743. Outlet limit block. DETAILED DESCRIPTION

[0026] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0027] In the description of the embodiments of the present utility model, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present utility model. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0028] In the description of the embodiments of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific circumstances.

[0029] In the embodiments of the present invention, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0030] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model embodiment. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0031] Combine the following Figure 1-6 A vacuum sintering furnace according to an embodiment of the utility model is described, comprising a second gate valve 2, a third gate valve 3, a fourth gate valve 4, a fifth gate valve 5, at least two first anti-jamming mechanisms 73, a second preheating zone 7, a welding zone 8 and a cooling zone 9; the second gate valve 2 is arranged at the inlet end of the second preheating zone 7, the third gate valve 3 is arranged at the outlet end of the second preheating zone 7, the third gate valve 3 is arranged at the inlet end of the welding zone 8, the fourth gate valve 4 is arranged at the outlet end of the welding zone 8, the fourth gate valve 4 is arranged at the inlet end of the cooling zone 9, the fifth gate valve 5 is arranged at the outlet end of the cooling zone 9, and first anti-jamming mechanisms 73 are arranged on both sides of the inner part of the inlet end of the second preheating zone 7, the welding zone 8 and / or the cooling zone 9.

[0032] In some embodiments, it also includes a first preheating zone 6 and a first gate valve 1. The first preheating zone 6 is arranged in the upper workstation area of ​​the second preheating zone 7. The first gate valve 1 is arranged at the inlet end of the first preheating zone 6, and the second gate valve 2 is arranged at the outlet end of the first preheating zone 6.

[0033] In some embodiments, at least one lifting mechanism 75 is also included, and a lifting mechanism 75 is provided below the first preheating zone 6, the second preheating zone 7, the welding zone 8 and / or the cooling zone 9. The lifting mechanism 75 can lift and lower the heating plate 78. A stop mechanism 80 is provided at the exit end of the first preheating zone 6, the second preheating zone 7, the welding zone 8 and / or the cooling zone 9 to stop the jig being transmitted, that is, when the workpiece is placed on the jig, the workpiece is also stopped. A heat dissipation water tank 79 is provided outside the cavity of the first preheating zone 6, the second preheating zone 7, the welding zone 8 and / or the cooling zone 9.

[0034] In some embodiments, power wheels 77 and guide wheels 76 are provided on both sides of the first preheating zone 6 , the second preheating zone 7 , the welding zone 8 and the cooling zone 9 .

[0035] In some embodiments, transmission mechanisms are provided on both sides of the outside of the first preheating zone 6 , the second preheating zone 7 , the welding zone 8 and the cooling zone 9 , and the transmission mechanisms drive the power wheels 77 .

[0036] In some embodiments, the first anti-stuck mechanism 73 includes an import guide block 736, an import limit block 735 and an import adjustment block 734; an import adjustment block 734 is arranged below the import limit block 735, and an import guide block 736 is arranged on the side of the import adjustment block 734 close to the import direction. The angle between the import guide block 736 and the import adjustment block 734 is 5-15 degrees. Prevent the fixture from being stuck by the import guide block 736. The sides of the import limit block 735 and the sides of the import adjustment block 734 are misaligned, and the import limit block 735 limits the vertical movement range of the fixture, preventing the seesaw from occurring, thereby reducing the jamming situation. The clamping mechanism 731 can play a role in timely adjustment. The import adjustment block 734 is parallel and tangent to the guide wheel 76, ensuring smooth operation when the workpiece comes in.

[0037] In some embodiments, the first anti-stuck mechanism 73 also includes a clamping mechanism 731 and a mounting seat 732, the clamping mechanism 731 drives the import stop block 735, the clamping mechanism 731 is fixed on the mounting seat 732, and the mounting seat 732 is fixed on the cavity. The clamping mechanism 731 is preferably a clamping cylinder or a motor, and the clamping mechanism 731 pushes the push rod 733 to clamp and adjust the workpiece. In order to enhance the sealing, the push rod 733 moves in the sealing tube 737. The first anti-stuck mechanism 73 does not use the clamping mechanism 731 in some embodiments. The import guide block 736 of the first anti-stuck mechanism 73 guides the entry of the workpiece to prevent the workpiece from being stuck due to the tilt of the operation when entering. The angle between the import guide block 736 and the import adjustment block 734 is 5-15 degrees, which ensures that the workpiece is stuck during the adjustment process when entering. If the angle is too large, it is easy to get stuck.

[0038] In some embodiments, the transmission mechanism is a roller, a gear, a belt, or a chain.

[0039] In some embodiments, the first preheating zone 6 is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage;

[0040] The second preheating zone 7 is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage; that is, the second gate valve 2, the third gate valve 3, the sealed cavity upper cover 71 and the sealed cavity lower cavity 72 form a sealed environment.

[0041] The welding zone 8 is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece welding stage;

[0042] The cooling zone 9 is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece cooling stage.

[0043] In some embodiments, at least two second anti-stuck mechanisms 74 are also included, and the second anti-stuck mechanisms 74 are arranged on both sides of the inner end of the second preheating zone 7, the welding zone 8 and / or the cooling zone 9. The second anti-stuck mechanism 74 includes an outlet guide block 741, an outlet limit block 743 and an outlet adjustment block 742. The angle between the outlet guide block 741 and the outlet adjustment block 742 is 5-15 degrees. One end of the outlet guide block 741 abuts against the guide wheel 76, and the other end of the outlet guide block 741 abuts against the outlet adjustment block 742. The outlet guide block 741 guides the workpiece when it comes out. The second anti-stuck mechanism 74 is set at the outlet end to prevent the workpiece from getting stuck when it comes out. That is to say, when the workpiece enters, it is easy to get stuck, and when the workpiece comes out, it is also easy to get stuck. The second anti-stuck mechanism 74 prevents the workpiece from getting stuck when it comes out, and the adjusted workpiece prevents the occurrence of the situation of the next station getting stuck. The guide wheel 76 is parallel and tangent to the outlet adjustment block 742, ensuring that the workpiece runs smoothly when it goes out.

[0044] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A vacuum sintering furnace, characterized in that: It includes a second gate valve, a third gate valve, a fourth gate valve, a fifth gate valve, at least two first anti-stuck mechanisms, a second preheating zone, a welding zone and a cooling zone; the second gate valve is arranged at the inlet end of the second preheating zone, the third gate valve is arranged at the outlet end of the second preheating zone, the third gate valve is arranged at the inlet end of the welding zone, the fourth gate valve is arranged at the outlet end of the welding zone, the fourth gate valve is arranged at the inlet end of the cooling zone, the fifth gate valve is arranged at the outlet end of the cooling zone, and the first anti-stuck mechanisms are arranged on both sides of the inner sides of the inlet ends of the second preheating zone, the welding zone and / or the cooling zone.

2. The vacuum sintering furnace according to claim 1, characterized in that: It also includes a first preheating zone and a first gate valve. The first preheating zone is arranged in the upper station area of ​​the second preheating zone. The first gate valve is arranged at the inlet end of the first preheating zone, and the second gate valve is arranged at the outlet end of the first preheating zone.

3. The vacuum sintering furnace according to claim 2, characterized in that: It also includes at least one lifting mechanism, and the lifting mechanism is arranged below the first preheating zone, the second preheating zone, the welding zone and / or the cooling zone.

4. The vacuum sintering furnace according to claim 2, characterized in that: Power wheels and guide wheels are arranged on both sides of the first preheating zone, the second preheating zone, the welding zone and the cooling zone.

5. The vacuum sintering furnace according to claim 4, characterized in that: Transmission mechanisms are provided on both sides of the outside of the first preheating zone, the second preheating zone, the welding zone and the cooling zone, and the transmission mechanisms drive the power wheel.

6. The vacuum sintering furnace according to claim 1, characterized in that: The first anti-jamming mechanism comprises an inlet guide block, an inlet limit block and an inlet adjustment block; the inlet adjustment block is arranged below the inlet limit block, and the inlet guide block is arranged on the side of the inlet adjustment block close to the inlet direction.

7. The vacuum sintering furnace according to claim 6, characterized in that: The first anti-stuck mechanism further includes a clamping mechanism, and the clamping mechanism drives the inlet limit block.

8. The vacuum sintering furnace according to claim 5, characterized in that: The transmission mechanism is a roller, a gear, a belt or a chain.

9. The vacuum sintering furnace according to claim 4, characterized in that: The first preheating zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage; The second preheating zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage; The welding zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece welding stage; The cooling zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece cooling stage.

10. The vacuum sintering furnace according to claim 1, characterized in that: It also includes at least two second anti-jamming mechanisms, which are arranged on both sides of the inside of the outlet end of the second preheating zone, the welding zone and / or the cooling zone.

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