Air inlet spraying system of horizontal diffusion furnace

Abstract

The utility model provides a horizontal diffusion furnace air inlet spraying system, which relates to the technical field of diffusion furnaces, and comprises a diffusion furnace main body, an air inlet spraying assembly is arranged at the top of one side of the diffusion furnace main body, the air inlet spraying assembly comprises a first air inlet pipe and a spraying box, one end of the first air inlet pipe is inserted into the top of one side of the diffusion furnace main body, and the other end of the first air inlet pipe is inserted into the spraying box. The spraying box is connected to the other end of the first air inlet pipe, a water pump is arranged on one side of the top of the spraying box, a liquid pumping pipe is connected to one side of the water pump, and a liquid outlet pipe is connected to the other side of the water pump. The water pump can be started to spray the spraying liquid to the air during air inlet through the liquid outlet pipe and the atomizing nozzle, so that the air can enter the diffusion furnace main body and is uniformly distributed, and the uniform flow and distribution of the sprayed gas in the furnace are ensured; the problem that the spraying effect is not uniform enough due to the fact that an existing diffusion furnace body directly sprays the interior of the furnace is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of diffusion furnaces, in particular to an air intake spraying system for a horizontal diffusion furnace. Background Art

[0002] The diffusion furnace is one of the important process equipment in the front process of the semiconductor production line. It is mainly used for diffusion, oxidation, annealing, alloying and sintering in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices and optical fibers.

[0003] The design of the air inlet is also one of the key factors in the performance of the diffusion furnace. A reasonable air inlet design can ensure the uniform distribution of gas in the furnace, thereby improving the stability and efficiency of the process. The existing diffusion furnace air intake generally introduces the gas into the furnace evenly and directly sprays the inside of the diffusion furnace through the pipe body. This spraying method cannot fully blend the air and the medicine, and direct spraying cannot ensure the uniformity of the temperature and atmosphere in the furnace. Its practicality needs to be improved. Utility Model Content

[0004] The utility model aims to solve the problem that direct spraying on a diffusion furnace cannot ensure the uniformity of the temperature and atmosphere in the furnace and the practicality needs to be improved, and proposes a horizontal diffusion furnace air intake spraying system.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a horizontal diffusion furnace air intake spray system, comprising a diffusion furnace body, an air intake spray assembly is arranged on the top of one side of the diffusion furnace body, the air intake spray assembly comprises a first air intake pipe and a spray box, one end of the first air intake pipe is plugged into the top of one side of the diffusion furnace body, the spray box is connected to the other end of the first air intake pipe, a water pump is arranged on one side of the top of the spray box, one side of the water pump is connected to a liquid extraction pipe, and the other side of the water pump is connected to a liquid outlet pipe, a feed port is arranged on the top of one side of the spray box close to the liquid outlet pipe, the bottom end of the liquid outlet pipe is connected to a connecting pipe, the bottom of the connecting pipe is connected to four groups of atomizing nozzles, and the outer surface of one side of the spray box is connected to a second air intake pipe.

[0006] Preferably, the water pump is electrically connected to an external power source via a control switch, and the bottom end of the liquid extraction pipe penetrates the spray box and is plugged into the bottom of the spray box.

[0007] Preferably, a suction fan is provided on one side of the surface of the first air inlet pipe close to the diffusion furnace body, and the four groups of atomizing nozzles are arranged in a line.

[0008] Preferably, a filter assembly is provided on one side of the second air inlet pipe, the filter assembly comprises a filter box and a slot, and the slot is provided on the surface of the filter box.

[0009] Preferably, a dustproof net is provided inside the card slot, a handle is connected to the top center of the dustproof net, and a third air inlet pipe is connected to the outer surface of one side of the filter box.

[0010] Preferably, the dustproof net is slidably connected to the filter box via the slot, and the outer surfaces on both sides of the dustproof net are in contact with the inner surface wall of the slot.

[0011] Compared with the prior art, the advantages and positive effects of the utility model are:

[0012] 1. The utility model can start the water pump to spray the air during the air intake operation through the liquid outlet pipe and the atomizing nozzle, so that the air can enter the diffusion furnace body and be evenly distributed, ensuring the uniform flow and distribution of the gas in the furnace after spraying, and avoiding the problem of uneven spraying effect caused by the existing diffusion furnace body directly spraying the furnace.

[0013] 2. The utility model can isolate dust and impurities from the air through the dustproof net while taking in air, thereby improving the quality of the intake air. The dustproof net can be pulled out for cleaning and can be used repeatedly, thereby effectively improving the intake air quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 A three-dimensional diagram of an air inlet spray system for a horizontal diffusion furnace is provided for the utility model;

[0015] Figure 2 A partial stereoscopic diagram of an air inlet spray system for a horizontal diffusion furnace is provided for the utility model;

[0016] Figure 3 The utility model provides a spray box cross-sectional view of a horizontal diffusion furnace air inlet spray system;

[0017] Figure 4 The utility model provides an exploded diagram of a filter box of an air intake spray system of a horizontal diffusion furnace.

[0018] Legend:

[0019] 1. Diffusion furnace body; 2. Air intake spray assembly; 201. First air intake pipe; 202. Spray box; 203. Water pump; 204. Feed inlet; 205. Liquid extraction pipe; 206. Liquid outlet pipe; 207. Connecting pipe; 208. Atomizing nozzle; 209. Second air intake pipe; 3. Filter assembly; 301. Filter box; 302. Card slot; 303. Dust screen; 304. Handle; 305. Third air intake pipe. DETAILED DESCRIPTION

[0020] In order to more clearly understand the above-mentioned purpose, features and advantages of the utility model, the utility model is further described below in conjunction with the accompanying drawings and embodiments. It should be noted that the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

[0021] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways than those described herein. Therefore, the present invention is not limited to the specific embodiments of the following disclosure.

[0022] Embodiment 1, as Figure 1-3 As shown, the utility model provides an air intake spray system for a horizontal diffusion furnace, comprising a diffusion furnace body 1, an air intake spray assembly 2 is arranged on the top of one side of the diffusion furnace body 1, the air intake spray assembly 2 comprises a first air intake pipe 201 and a spray box 202, one end of the first air intake pipe 201 is plugged into the top of one side of the diffusion furnace body 1, the spray box 202 is connected to the other end of the first air intake pipe 201, a water pump 203 is arranged on one side of the top of the spray box 202, one side of the water pump 203 is connected to a liquid extraction pipe 205, and the other side of the water pump 203 is connected to a liquid outlet pipe 206, the spray A feed port 204 is provided at the top of one side of the shower box 202 near the liquid outlet pipe 206, a connecting pipe 207 is connected to the bottom end of the liquid outlet pipe 206, four groups of atomizing nozzles 208 are connected to the bottom of the connecting pipe 207, a second air inlet pipe 209 is connected to the outer surface of one side of the spray box 202, the water pump 203 is electrically connected to the external power supply through the control switch, the bottom end of the liquid extraction pipe 205 passes through the spray box 202 and is plugged into the bottom of the spray box 202, a suction fan is provided on one side of the surface of the first air inlet pipe 201 near the diffusion furnace body 1, and the four groups of atomizing nozzles 208 are arranged in a line.

[0023] The effect achieved by the entire embodiment 1 is that, when the diffusion furnace main body 1 is operated to take in air, the spray liquid can be first added to the bottom of the spray box 202 through the feed port 204, and then the water pump 203 is turned on by the control switch, so that the water pump 203 can extract the spray liquid through the liquid extraction pipe 205, and infuse the liquid to the connecting pipe 207 through the liquid outlet pipe 206, and then the air in the spray box 202 is sprayed through the atomizing nozzle 208, and then the air can enter the diffusion furnace main body 1 through the first air intake pipe 201 for uniform distribution, ensuring the uniform flow and distribution of the gas in the furnace after spraying, and the spray liquid is usually selected from solutions that can chemically react with impurities in the intake air according to the process requirements, and the specific type and concentration of the spray liquid need to be determined according to the process requirements and the intake air composition of the diffusion furnace, thus avoiding the problem of uneven spraying effect caused by the existing diffusion furnace main body 1 directly spraying the furnace, and improving the uniformity of the temperature and atmosphere in the furnace.

[0024] Embodiment 2, as Figure 1 , Figure 2 and Figure 4 As shown, a filter assembly 3 is provided on one side of the second air inlet pipe 209, and the filter assembly 3 includes a filter box 301 and a slot 302. The slot 302 is provided on the surface of the filter box 301, and a dustproof net 303 is provided inside the slot 302. A handle 304 is connected to the top center position of the dustproof net 303, and the outer surface of one side of the filter box 301 is connected to the third air inlet pipe 305. The dustproof net 303 is slidably connected to the filter box 301 through the slot 302, and the outer surfaces of both sides of the dustproof net 303 are in contact with the inner surface wall of the slot 302.

[0025] The effect achieved by the entire embodiment 2 is that after air intake, the air will first enter the third air intake pipe 305 and be filtered through the dustproof net 303 to filter out dust and other impurities. When the dustproof net 303 needs to be cleaned after long-term use, the handle 304 can be grasped and pulled upward to slide the dustproof net 303 out of the slot 302, and then the dustproof net 303 can be cleaned. After the dustproof net 303 is cleaned, the dustproof net 303 can be inserted into the slot 302 for continued use, which can improve the air intake quality and improve the stability and efficiency of the process.

[0026] Working principle: When performing air intake operation, the water pump 203 can be turned on to spray liquid on the air during intake through the liquid outlet pipe 206 and the atomizing nozzle 208, so that the air can enter the diffusion furnace body 1 and be evenly distributed, ensuring the uniform flow and distribution of the gas in the furnace after spraying, avoiding the problem of uneven spraying effect caused by the existing diffusion furnace body 1 directly spraying the furnace, and improving the uniformity of the temperature and atmosphere in the furnace. At the same time as the air is intake, the dust and impurities in the air can be isolated through the dustproof net 303, thereby improving the quality of the intake air, and the dustproof net 303 can be pulled out for cleaning and can be used repeatedly, effectively improving the intake quality.

[0027] The above description is only a preferred embodiment of the present invention and does not limit the present invention in other forms. Any technician familiar with the profession may use the technical content disclosed above to change or modify it into an equivalent embodiment with equivalent changes and apply it to other fields. However, any simple modification, equivalent change and modification made to the above embodiment based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still falls within the protection scope of the technical solution of the present invention.

Claims

1. A horizontal diffusion furnace air inlet spray system, comprising a diffusion furnace body (1), characterized in that: An air inlet spray assembly (2) is provided on the top of one side of the diffusion furnace body (1); The air intake spray assembly (2) comprises a first air intake pipe (201) and a spray box (202); one end of the first air intake pipe (201) is plugged into the top of one side of the diffusion furnace body (1); the spray box (202) is connected to the other end of the first air intake pipe (201); a water pump (203) is provided on one side of the top of the spray box (202); one side of the water pump (203) is connected to a liquid extraction pipe (205); the other side of the water pump (203) is connected to a liquid outlet pipe (206); a feed port (204) is provided on the top of one side of the spray box (202) close to the liquid outlet pipe (206); the bottom end of the liquid outlet pipe (206) is connected to a connecting pipe (207); the bottom of the connecting pipe (207) is connected to four groups of atomizing nozzles (208); and the outer surface of one side of the spray box (202) is connected to a second air intake pipe (209).

2. The horizontal diffusion furnace air inlet spray system according to claim 1, characterized in that: The water pump (203) is electrically connected to an external power source via a control switch, and the bottom end of the liquid extraction pipe (205) penetrates the spray box (202) and is then plugged into the bottom of the spray box (202).

3. The horizontal diffusion furnace air inlet spray system according to claim 2, characterized in that: A suction fan is provided on one side of the surface of the first air inlet pipe (201) close to the diffusion furnace body (1), and the four groups of atomizing nozzles (208) are arranged in a line.

4. The horizontal diffusion furnace air inlet spray system according to claim 1, characterized in that: A filter assembly (3) is provided on one side of the second air inlet pipe (209), the filter assembly (3) comprising a filter box (301) and a slot (302), and the slot (302) is provided on the surface of the filter box (301).

5. The horizontal diffusion furnace air inlet spray system according to claim 4, characterized in that: A dustproof net (303) is provided inside the card slot (302), a handle (304) is connected to the top center of the dustproof net (303), and a third air inlet pipe (305) is connected to an outer surface of one side of the filter box (301).

6. The horizontal diffusion furnace air inlet spray system according to claim 5, characterized in that: The dustproof net (303) is slidably connected to the filter box (301) via the slot (302), and the outer surfaces on both sides of the dustproof net (303) are in contact with the inner surface wall of the slot (302).

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