Raw material sampling device for photoresist production

Abstract

The utility model belongs to the technical field of photoresist production, and particularly relates to a raw material sampling device for photoresist production, which comprises a main pipe, a sliding rod is connected onto the main pipe in a sliding manner, the end part of the sliding rod is fixedly connected with a bottom plate, the surface of the main pipe is rotationally connected with an auxiliary pipe through threads, a suction pipe is arranged on the surface of the auxiliary pipe, and the bottom plate is fixedly connected with the suction pipe. A pressing plate is arranged on the inner wall of the auxiliary pipe, a liquid storage bag is fixedly connected to the other side of the pressing plate, the outer wall of the main pipe is in a step shape, the main pipe is attached to the pressing plate, and a liquid inlet through hole is formed in the surface of the pressing plate. In addition, only the auxiliary pipe in the sampling device needs to be independently cleaned, so that the sampling efficiency is improved, and meanwhile, the sampled raw materials can be more conveniently stored through the liquid storage bag.

Description

Technical Field

[0001] The utility model relates to the technical field of photoresist production, in particular to a raw material sampling device used for photoresist production. Background Art

[0002] Photoresist, also known as photoresist, refers to a thin film material that changes its solubility when exposed to ultraviolet light, electron beam, ion beam, X-ray, etc. It is a light-sensitive mixed liquid composed of photosensitive resin, sensitizer and solvent. During the photolithography production process, its raw materials need to be sampled and tested to ensure the pass rate of photoresist during production.

[0003] When in use, the traditional photoresist raw material sampling device can only collect individually. When multiple raw materials need to be sampled, the sampling device needs to be replaced to re-sample other raw materials. The process is cumbersome, and the used samplers are inconvenient to store. At the same time, the frequent cleaning of the rubber cartridge is labor-intensive, which leads to low sampling efficiency. Therefore, in view of the above problems, a raw material sampling device for photoresist production is proposed. Utility Model Content

[0004] In order to make up for the shortcomings of the prior art, the traditional photoresist raw material sampling device can only collect separately when in use, and then the sampling device is replaced to re-sample other raw materials. The process is cumbersome, and the frequent cleaning of the rubber cartridge is labor-intensive, which leads to low sampling efficiency. The utility model proposes a raw material sampling device for photoresist production.

[0005] The technical solution adopted by the utility model to solve its technical problems is as follows: the utility model is a raw material sampling device for photoresist production, comprising a main pipe, a sliding rod is slidably connected to the main pipe, the end of the sliding rod is fixedly connected to a bottom plate, the surface of the main pipe is rotatably connected to a sub-pipe through a thread, the surface of the sub-pipe is provided with a suction pipe, the inner wall of the sub-pipe is provided with a pressing plate, the other side of the pressing plate is fixedly connected to a liquid storage bag, the outer wall of the main pipe is stepped, the main pipe is fitted with the pressing plate, and the surface of the pressing plate is provided with a liquid inlet through hole, when the raw material of the photoresist needs to be sampled and tested, the liquid storage bag is first placed in the sub-pipe, so that the pressing plate is fitted on the inner wall of the sub-pipe, and the liquid inlet through hole is in contact with the suction pipe The main pipe is connected to the auxiliary pipe by thread, and the main pipe presses the pressure plate, and then the sampling device is placed in the raw material barrel. At this time, the slide bar is moved away from the auxiliary pipe, so that the slide bar drives the bottom plate to move, so that the negative pressure generated in the main pipe stretches the liquid storage bag, and at the same time, the raw materials in the raw material barrel are sucked into the liquid storage bag, so as to realize the sampling of the raw materials. Then the main pipe and the auxiliary pipe are rotated and separated, the liquid storage bag is taken out, and a new liquid storage bag is replaced, and the sampling is repeated. By replacing the liquid storage bag, repeated replacement of the sampling device can be avoided, and only the auxiliary pipe in the sampling device needs to be cleaned separately. While improving the sampling efficiency, the liquid storage bag makes it more convenient to preserve the sampled raw materials.

[0006] Preferably, a slot is provided on the secondary tube, and an insert block is fixedly connected to the surface of the pressure plate relative to the position of the slot. A push plate is slidably connected to the slot via a spring. The push plate is annular, and the outer ring wall and the inner ring wall of the push plate are both in contact with the side wall of the slot. By inserting the insert block into the slot, the raw material can be prevented from entering the secondary tube cavity. At the same time, when the main tube is screwed into the secondary tube, the main tube will squeeze the push plate to retract into the slot and squeeze the spring. By cooperating with the spring and the push plate, the matching effect between the main tube and the secondary tube threads can be improved when the main tube is screwed. When the liquid storage bag is removed, the push plate can push the pressure plate out, which is convenient for disassembly of the liquid storage bag.

[0007] Preferably, an elastic membrane is fixedly connected to the liquid inlet hole on the surface of the pressure plate, a plurality of elastic shrinkage holes are opened on the surface of the elastic membrane, a sealing gasket is fixedly connected to the surface of the bottom plate, a rubber strip is fixedly connected to the surface of the elastic membrane, and the rubber strip is fitted with the side wall of the slot. The elastic membrane can prevent the raw material in the liquid storage bag from flowing out under gravity, and the rubber strip can further improve the sealing effect between the plug block and the slot.

[0008] Preferably, a clamping block is fixedly connected to the surface of the bottom plate, and two of the clamping blocks are symmetrically arranged. A limiting plate is fixedly connected to the surface of the liquid storage bag, and a notch is provided on the surface of the limiting plate relative to the position of the clamping block. The clamping block is made of elastic material and has an arc angle on the surface. When the bottom plate moves toward the limiting plate, the clamping block will be stuck in the notch. When the sliding rod drives the bottom plate away from the auxiliary pipe, the limiting plate can be driven by the clamping block, and the limiting plate drives the liquid storage bag to stretch. The liquid storage bag can be pulled out by cooperating with the notch, which makes it more convenient to disassemble the liquid storage bag. At the same time, the movement direction of the liquid storage bag can be guaranteed by the limiting plate. At the same time, when the raw material in the liquid storage bag is squeezed out, the pressure plate and the limiting plate are directly used to squeeze each other, so as to facilitate the extrusion and detection of the raw material.

[0009] Preferably, the main pipe and the auxiliary pipe are both made of transparent material, the end of the slide rod away from the pressure plate is fixedly connected to a knob, and the surface of the knob is provided with an anti-slip groove. The main pipe and the auxiliary pipe made of transparent material can directly observe the sampling situation in the liquid storage bag.

[0010] Preferably, a connecting shaft is fixedly connected to the surface of the auxiliary pipe, and two connecting shafts are provided. A pair of connecting shafts are symmetrically arranged with the central axis of the auxiliary pipe. A rotating shaft is rotatably connected inside the connecting shaft, and a support frame is fixedly connected to the other end of the rotating shaft. The support frame is "U"-shaped, and the main pipe can be supported and placed by the support frame to avoid contamination, and the rotatable connection is convenient for storage.

[0011] Preferably, the surface of the rotating shaft is slidably connected with a card bead through an elastic member, and the inner wall of the connecting shaft is provided with a groove relative to the position of the card bead. The card bead can be used to position the rotation angle of the main pipe, so as to adjust the center of gravity and avoid tipping when the raw material content in the main pipe is different.

[0012] The utility model is beneficial in that:

[0013] 1. The utility model uses a main pipe and a sub-pipe to cooperate with a liquid storage bag. When it is necessary to sample and test the raw materials of the photoresist, the liquid storage bag is first placed in the sub-pipe, so that the pressure plate fits against the inner wall of the sub-pipe, and the liquid inlet hole is connected to the straw. At this time, the slide bar is moved so that the negative pressure generated in the main pipe stretches the liquid storage bag, and the raw materials in the raw material barrel are sucked into the liquid storage bag, so as to achieve sampling of the raw materials. Then the liquid storage bag is taken out. By replacing the liquid storage bag, repeated replacement of the sampling device can be avoided, and only the sub-pipe in the sampling device needs to be cleaned separately. While improving the sampling efficiency, the liquid storage bag makes it more convenient to store the sampled raw materials.

[0014] 2. The utility model adopts a structural design in which the main pipe and the auxiliary pipe are made of transparent materials, so that the sampling situation in the liquid storage bag can be directly observed. The main pipe can be supported and placed by the support frame to avoid contamination, and the rotation connection is convenient for storage. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0016] Figure 1 It is a schematic diagram of the main structure of the first embodiment;

[0017] Figure 2 It is a schematic diagram of a partial cross-sectional structure of the auxiliary pipe of the first embodiment;

[0018] Figure 3 For Example 1 Figure 2 Schematic diagram of the structure at A in the middle;

[0019] Figure 4 For Example 1 Figure 2 Schematic diagram of the structure at B in the middle;

[0020] Figure 5 It is a structural schematic diagram of the bracket of Example 2;

[0021] Figure 6 For Example 2 Figure 5 Schematic diagram of the structure at C in the middle.

[0022] In the figure: 1. main pipe; 2. sliding rod; 3. knob; 4. auxiliary pipe; 5. straw; 6. plastic storage bag; 7. bottom plate; 8. plastic inlet; 9. pressing plate; 10. pushing plate; 11. card slot; 12. insert block; 13. rubber strip; 14. card slot; 15. card block; 16. support frame; 17. rotating shaft; 18. connecting shaft; 19. card bead. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] Embodiment 1

[0025] See also Figure 1-4As shown, a raw material sampling device for photoresist production includes a main pipe 1, a slide bar 2 is slidably connected to the main pipe 1, and a bottom plate 7 is fixedly connected to the end of the slide bar 2. The surface of the main pipe 1 is rotatably connected to a sub-pipe 4 through a thread, and a suction pipe 5 is arranged on the surface of the sub-pipe 4. A pressing plate 9 is arranged on the inner wall of the sub-pipe 4, and a liquid storage bag 6 is fixedly connected to the other side of the pressing plate 9. The outer wall of the main pipe 1 is stepped, and the main pipe 1 is fitted with the pressing plate 9. A liquid inlet through hole is opened on the surface of the pressing plate 9. When working, when it is necessary to sample and test the raw materials of the photoresist, the liquid storage bag 6 is first placed in the sub-pipe 4, so that the pressing plate 9 is fitted on the inner wall of the sub-pipe 4, and the liquid inlet through hole is connected to the suction pipe 5, and then the main pipe 1 is placed in the sub-pipe 4. The main pipe 1 is screwed to the auxiliary pipe 4 through a thread, and the main pipe 1 presses the pressure plate 9, and then the sampling device is placed in the raw material barrel. At this time, the slide bar 2 is moved away from the auxiliary pipe 4, so that the slide bar 2 drives the bottom plate 7 to move, so that the negative pressure generated in the main pipe 1 stretches the liquid storage bag 6, and at the same time, the raw materials in the raw material barrel are sucked into the liquid storage bag 6, so as to realize the sampling of the raw materials. Then the main pipe 1 and the auxiliary pipe 4 are rotated and separated, the liquid storage bag 6 is taken out, and a new liquid storage bag 6 is replaced, and the sampling is repeated. By replacing the liquid storage bag 6, repeated replacement of the sampling device can be avoided, and only the auxiliary pipe 4 in the sampling device needs to be cleaned separately. While improving the sampling efficiency, the liquid storage bag 6 makes it more convenient to preserve the sampled raw materials.

[0026] The auxiliary pipe 4 is provided with a slot 11, and an insert block 12 is fixedly connected to the surface of the pressure plate 9 relative to the position of the slot 11. A push plate 10 is slidably connected to the slot 11 through a spring. The push plate 10 is annular, and the outer ring wall and the inner ring wall of the push plate 10 are both in contact with the side wall of the slot 11. During operation, the raw material can be prevented from entering the cavity of the auxiliary pipe 4 by inserting the insert block 12 into the slot 11. At the same time, when the main pipe 1 is screwed into the auxiliary pipe 4, the main pipe 1 will squeeze the push plate 10 to retract into the slot 11 and squeeze the spring. By cooperating with the push plate 10, the matching effect between the threads of the main pipe 1 and the auxiliary pipe 4 can be improved when the main pipe 1 is screwed. When the liquid storage bag 6 is removed, the push plate 10 can push the pressure plate 9 out, which is convenient for disassembly of the liquid storage bag 6.

[0027] An elastic membrane 8 is fixedly connected to the liquid inlet hole on the surface of the pressure plate 9, and a plurality of elastic shrinkage holes are opened on the surface of the elastic membrane 8. A sealing gasket is fixedly connected to the surface of the bottom plate 7, and a rubber strip 13 is fixedly connected to the surface of the elastic membrane 8, and the rubber strip 13 fits with the side wall of the slot 11. During operation, the elastic membrane 8 can prevent the raw material in the liquid storage bag 6 from flowing out under gravity, and the rubber strip 13 can further improve the sealing effect between the plug 12 and the slot 11.

[0028] The surface of the bottom plate 7 is fixedly connected with a block 15, and the block 15 is provided with two and symmetrically arranged. The surface of the liquid storage bag 6 is fixedly connected with a limit plate 20. The surface of the limit plate 20 is provided with a notch 14 relative to the position of the block 15. The block 15 is made of elastic material and has an arc angle on the surface. During operation, when the bottom plate 7 moves in the direction of the limit plate 20, the block 15 will be stuck in the notch 14. When the slide bar 2 drives the bottom plate 7 away from the auxiliary pipe 4, the block 15 can drive the limit plate 20, and the limit plate 20 drives the liquid storage bag 6 to stretch. The block 15 cooperates with the notch 14 to pull out the liquid storage bag 6, which is more convenient for disassembling the liquid storage bag 6. At the same time, the limit plate 20 can ensure the movement direction of the liquid storage bag 6. At the same time, when the raw material in the liquid storage bag 6 is squeezed out, the pressing plate 9 and the limit plate 20 are directly used to squeeze each other, so as to facilitate the extrusion and detection of the raw material.

[0029] Both the main pipe 1 and the auxiliary pipe 4 are made of transparent material. The end of the slide rod 2 away from the pressure plate 9 is fixedly connected to the knob 3, and the surface of the knob 3 is provided with an anti-slip groove. When working, the main pipe 1 and the auxiliary pipe 4 made of transparent material can directly observe the sampling situation away from the liquid storage bag 6.

[0030] Embodiment 2

[0031] See also Figure 5 - Figure 6 As shown, compared with Example 1, as another implementation of the utility model, the surface of the auxiliary pipe 4 is fixedly connected with a connecting shaft 18, and two connecting shafts 18 are provided, and a pair of connecting shafts 18 are symmetrically arranged with the central axis of the auxiliary pipe 4, and a rotating shaft 17 is rotatably connected inside the connecting shaft 18, and the other end of the rotating shaft 17 is fixedly connected with a support frame 16, and the support frame 16 is "U" shaped; when working, the main pipe 1 can be supported and placed by the support frame 16 to avoid contamination, and the rotatable connection is convenient for storage.

[0032] The surface of the rotating shaft 17 is slidably connected with a clamping bead 19 through an elastic member, and the inner wall of the connecting shaft 18 is provided with a groove relative to the position of the clamping bead 19; when working, the rotation angle of the main pipe 1 can be positioned by the clamping bead 19, so as to adjust the center of gravity and avoid tipping when the raw material content in the main pipe 1 is different.

[0033] Working principle: when it is necessary to sample and test the raw materials of the photoresist, first put the liquid storage bag 6 into the auxiliary tube 4, so that the pressure plate 9 is attached to the inner wall of the auxiliary tube 4, and the liquid inlet through hole is connected to the suction tube 5, then the main tube 1 is screwed to the auxiliary tube 4 through the thread, and the main tube 1 presses the pressure plate 9 tightly, and then the sampling device is put into the raw material barrel, at this time, the slide bar 2 is moved away from the auxiliary tube 4, so that the slide bar 2 drives the bottom plate 7 to move, so that the negative pressure generated in the main tube 1 stretches the liquid storage bag 6, and at the same time, the raw materials in the raw material barrel are sucked into the liquid storage bag 6, so as to realize the sampling of the raw materials, and then the main tube 1 is rotated and separated from the auxiliary tube 4, the liquid storage bag 6 is taken out, and a new liquid storage bag 6 is replaced, and repeated sampling is performed. By replacing the liquid storage bag 6, repeated replacement of the sampling device can be avoided, and only the auxiliary tube 4 in the sampling device needs to be cleaned separately, which improves the sampling efficiency and makes it more convenient to store the sampled raw materials through the liquid storage bag 6;

[0034] By inserting the insert block 12 into the slot 11, the raw material can be prevented from entering the cavity of the auxiliary tube 4. At the same time, when the main tube 1 is screwed into the auxiliary tube 4, the main tube 1 will squeeze the push plate 10 to retract into the slot 11 and squeeze the spring. The spring cooperates with the push plate 10, and the matching effect between the threads of the main tube 1 and the auxiliary tube 4 can be improved when the main tube 1 is screwed. When the liquid storage bag 6 is removed, the push plate 10 can push the pressure plate 9 out to facilitate the removal of the liquid storage bag 6. The elastic membrane 8 can prevent the raw material in the liquid storage bag 6 from flowing out under gravity. The rubber strip 13 can further improve the sealing effect between the insert block 12 and the slot 11.

[0035] When the bottom plate 7 moves in the direction of the limiting plate 20, the clamping block 15 will be stuck in the notch 14. When the slide bar 2 drives the bottom plate 7 away from the auxiliary pipe 4, the clamping block 15 can drive the limiting plate 20, and the limiting plate 20 drives the liquid storage bag 6 to stretch. The clamping block 15 cooperates with the notch 14, and the liquid storage bag 6 can be pulled out, which is more convenient for disassembling the liquid storage bag 6. At the same time, the movement direction of the liquid storage bag 6 can be guaranteed by the limiting plate 20. At the same time, when the raw material in the liquid storage bag 6 is squeezed out, the pressing plate 9 and the limiting plate 20 are directly used to squeeze each other, so as to facilitate the extrusion and detection of the raw material. The main pipe 1 and the auxiliary pipe 4 made of transparent material can directly observe the situation of the liquid storage bag 6 away from the sampling.

[0036] The main pipe 1 can be supported and placed by the support frame 16 to avoid contamination, and the rotating connection is convenient for storage. The rotation angle of the main pipe 1 can be positioned by the card bead 19. When the raw material content in the main pipe 1 is different, the center of gravity can be adjusted to avoid tipping.

[0037] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0038] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, and these changes and improvements fall within the scope of the utility model to be protected.

Claims

1. A raw material sampling device for photoresist production, characterized in that: The invention comprises a main pipe (1), a sliding rod (2) is slidably connected to the main pipe (1), the end of the sliding rod (2) is fixedly connected to a bottom plate (7), the surface of the main pipe (1) is rotatably connected to a secondary pipe (4) by means of a thread, the surface of the secondary pipe (4) is provided with a straw (5), the inner wall of the secondary pipe (4) is provided with a pressing plate (9), the other side of the pressing plate (9) is fixedly connected to a liquid storage bag (6), the outer wall of the main pipe (1) is in a step shape, the main pipe (1) is fitted with the pressing plate (9), and the surface of the pressing plate (9) is provided with a liquid inlet through hole.

2. A raw material sampling device for photoresist production according to claim 1, characterized in that: The auxiliary pipe (4) is provided with a slot (11); a plug block (12) is fixedly connected to the surface of the pressure plate (9) relative to the position of the slot (11); a push plate (10) is slidably connected to the slot (11) via a spring; the push plate (10) is annular, and the outer ring wall and the inner ring wall of the push plate (10) are both in contact with the side wall of the slot (11).

3. A raw material sampling device for photoresist production according to claim 2, characterized in that: An elastic membrane (8) is fixedly connected to the liquid inlet through hole on the surface of the pressure plate (9), and a plurality of elastic shrinkage holes are opened on the surface of the elastic membrane (8). A sealing gasket is fixedly connected to the surface of the bottom plate (7), and a rubber strip (13) is fixedly connected to the surface of the elastic membrane (8), and the rubber strip (13) is in contact with the side wall of the card slot (11).

4. A raw material sampling device for photoresist production according to claim 3, characterized in that: A clamping block (15) is fixedly connected to the surface of the bottom plate (7), two clamping blocks (15) are provided and are symmetrically arranged, a limiting plate (20) is fixedly connected to the surface of the liquid storage bag (6), a notch (14) is provided on the surface of the limiting plate (20) at a position relative to the clamping block (15), and the clamping block (15) is made of elastic material and has a circular arc angle on its surface.

5. A raw material sampling device for photoresist production according to claim 4, characterized in that: The main pipe (1) and the auxiliary pipe (4) are both made of transparent material. The end of the sliding rod (2) away from the pressure plate (9) is fixedly connected to a knob (3), and an anti-slip groove is provided on the surface of the knob (3).

6. A raw material sampling device for photoresist production according to claim 5, characterized in that: A connecting shaft (18) is fixedly connected to the surface of the auxiliary tube (4), and two connecting shafts (18) are provided. A pair of connecting shafts (18) are symmetrically arranged with respect to the central axis of the auxiliary tube (4). A rotating shaft (17) is rotatably connected inside the connecting shaft (18), and the other end of the rotating shaft (17) is fixedly connected to a support frame (16), and the support frame (16) is "U"-shaped.

7. A raw material sampling device for photoresist production according to claim 6, characterized in that: The surface of the rotating shaft (17) is slidably connected with a clamping bead (19) via an elastic member, and the inner wall of the connecting shaft (18) is provided with a groove at a position corresponding to the clamping bead (19).

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