Switching device and optical system

Abstract

The utility model provides a switching device and an optical system. The switching device comprises a fixing plate, an objective lens mounting plate, a driving assembly, a lighting system and at least two objective lenses, the objective lens mounting plate is connected with the fixing plate, and the objective lenses are mounted on the objective lens mounting plate. The illumination system comprises a plurality of illumination modules, the illumination modules and the objective lenses are arranged in a one-to-one correspondence mode, the illumination modules and the objective lenses are oppositely and fixedly arranged, and the driving assembly is used for driving the objective lens mounting plate and the illumination modules to move relative to the fixing plate. The switching device provided by the utility model can be compatible with different images, the illumination intensity and uniformity are increased, the utilization rate of a light source is improved, and the switching device provided by the utility model can be applied to the field of high-precision illumination control.

Description

Technical Field

[0001] The utility model relates to the technical field of microscopes, in particular to a switching device and an optical system. Background Art

[0002] In semiconductor inspection and measurement equipment, the objective lens is the core component of the microscope. The objective lens converter is a mechanism used to install the objective lens in the microscope. By rotating the objective lens converter, the magnification of each objective lens can be switched, which in turn affects the image quality.

[0003] There are mainly two types of objective lens switching structures, rotary objective lens switching and linear objective lens switching. In the current application scenarios, both rotary objective lens switching and linear objective lens switching use the same paraxial illumination. However, in this case, it is difficult for objectives of different magnifications to be compatible with each imaging using the same paraxial illumination.

[0004] Therefore, it is necessary to improve the existing technology. Utility Model Content

[0005] In the prior art, both rotary objective lens switching and linear objective lens switching use the same paraxial illumination. However, in this case, it is difficult for objective lenses of different magnifications to be compatible with each imaging using the same paraxial illumination. Therefore, the utility model provides a switching device and an imaging system for solving the above problems.

[0006] The present application provides a switching device, which includes a fixed plate, an objective lens mounting plate, a driving component, an illumination system and at least two objective lenses, wherein the objective lens mounting plate is connected to the fixed plate, the objective lens is mounted on the objective lens mounting plate, the illumination system includes a plurality of illumination modules, the illumination modules are arranged in a one-to-one correspondence with the plurality of objective lenses, the illumination modules are relatively fixedly arranged with respect to the objective lenses, and the driving component is used to drive the objective lens mounting plate and the illumination module to move relative to the fixed plate along a preset direction, wherein the preset direction at least includes a component of an arrangement direction of the objective lenses.

[0007] Optionally, the switching device further comprises a switching plate, wherein the switching plate is movably connected to the fixing plate along a preset direction, and the objective lens mounting plate is mounted on the switching plate.

[0008] Optionally, the mounting plate has an objective lens hole, the objective lens passes through the objective lens hole, and the side wall is threadedly connected to the objective lens hole.

[0009] Optionally, the switching device also includes a measuring device for measuring the relative distance between the switching plate and the fixed plate, and the measuring device is a grating ruler; a through hole is set in the middle of the fixed plate, and the driving component is used to drive the objective lens mounting plate to move according to the position of the measuring device so that the objective lens is set corresponding to the through hole.

[0010] Optionally, the fixing plate is provided with a through hole, and the length of the through hole is greater than the stroke of the switching plate.

[0011] Optionally, the objective lens passes through the through hole from the objective lens mounting plate.

[0012] Optionally, the lighting module is sleeved on the objective lens, and the lighting module is a ring-shaped structure.

[0013] Optionally, the lighting module is connected to the objective lens via screws; or, the lighting module is attached to a housing of the objective lens close to the bottom.

[0014] The technical solution of the present invention also provides an optical system, comprising the above-mentioned switching device and a detection component; the detection component is used to detect the light beam collected by the objective lens.

[0015] Optionally, when the fixing plate is provided with a through hole, the detection component detects the light beam collected by the objective lens through the through hole.

[0016] Optionally, the optical system further includes:

[0017] a coaxial light source and a beam splitter, wherein the coaxial light source is used to emit a light beam to the beam splitter; and

[0018] The beam splitter is used to reflect the light beam emitted by the light source to the objective lens and allow the light beam collected by the objective lens to pass through to the detection component, or the beam splitter is used to transmit the light beam emitted by the light source to the objective lens and allow the light beam collected by the objective lens to be reflected to the detection component.

[0019] In one implementation, the optical system also includes: a coaxial light source, which is used to emit a light beam to a beam splitter; and a beam splitter, which is used to reflect the light beam emitted by the light source to the objective lens and allow the light beam collected by the objective lens to pass through to the detection component, or the beam splitter is used to project the light beam emitted by the light source to the objective lens and allow the light beam collected by the objective lens to be reflected to the detection component.

[0020] Beneficial effects: The switching device and imaging system provided by the utility model, by setting up the lighting system, through a one-to-one correspondence between the plurality of lighting modules and the objective lens, make it possible to simultaneously switch different lighting modules when switching objective lenses of different magnifications during optical detection, thereby ensuring that each specific area can be illuminated by a specific lighting module, thereby achieving a one-to-one correspondence between objective lens switching and lighting; being compatible with different imaging, increasing the intensity and uniformity of lighting, and improving the utilization rate of light sources, the switching device provided by the utility model can be applied to the field of high-precision lighting control. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figures 1 to 5 It is a structural schematic diagram of a switching device according to an embodiment of the utility model;

[0022] Figure 6 to Figure 7 It is a structural schematic diagram of a switching device according to a second embodiment of the utility model.

[0023] Among them, the numbers in the figure are indicated as follows: 100, switching device; 10, fixing plate; 11, through hole; 12, moving axis; 20, switching plate; 21, mounting hole; 22, groove; 23, guide rod; 24, mounting groove; 25, locking block; 30, objective lens mounting plate; 40, scale grating; 41, reference zero position excitation body; 42, limit switch; 50, objective lens; 61, lighting module; 62, screw; 70, drive assembly.

[0024] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0025] It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0026] Those skilled in the art will appreciate that, unless expressly stated, the singular forms "one", "said", "above", and "the" used herein may also include plural forms. It should be further understood that the term "comprising" used in the specification of the present utility model refers to the presence of the features, integers, steps, operations, elements, units, modules, and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, units, modules, components, and / or groups thereof. It should be understood that when we refer to an element as being "connected" or "coupled" to another element, it may be directly connected or coupled to the other element, or there may be intermediate elements. In addition, the "connection" or "coupling" used herein may include wireless connection or wireless coupling. The term "and / or" used herein includes all or any unit and all combinations of one or more associated listed items.

[0027] Those skilled in the art will understand that, unless otherwise defined, all terms (including technical terms and scientific terms) used herein have the same meaning as the general understanding of ordinary technicians in the field to which the utility model belongs. It should also be understood that terms such as those defined in general dictionaries should be understood to have the same meaning as the meaning in the context of the prior art, and will not be interpreted with idealized or overly formal meanings unless specifically defined as here.

[0028] Figures 1 to 5 It is a structural diagram of an embodiment of a switching device of the present application.

[0029] Combined with reference Figure 1 to Figure 5 , Figure 1 and Figure 4 This is a schematic diagram of the overall structure of the switching device of an embodiment of the utility model at different angles. Figure 2 yes Figure 1 The overall structural diagram of the switching device from another angle is shown. Figure 3 yes Figure 1 The structural diagram of the fixed plate shown in FIG. Figure 5 yes Figure 1 Schematic diagram of connection between the objective lens and the lighting module.

[0030] Please refer to Figure 1 and Figure 2 The utility model provides a switching device 100, which includes a fixed plate 10, an objective lens mounting plate 30, a driving assembly (not shown), an illumination system and at least two objective lenses 50. The objective lens mounting plate 30 is connected to the fixed plate 10, and the objective lens 50 is mounted on the objective lens mounting plate 30. The illumination system includes a plurality of illumination modules 61, and the illumination modules 61 are arranged in a one-to-one correspondence with the plurality of objective lenses 50. The driving assembly 70 is used to drive the objective lens mounting plate 30 and the illumination module 61 to move relative to the fixed plate 10 along a preset direction, and the preset direction at least includes a component of the objective lens arrangement direction.

[0031] In this embodiment, the switching device further comprises a switching plate 20, the switching plate 20 is movably connected to the fixed plate 10 along the objective lens arrangement direction, and the objective lens mounting plate 30 is mounted on the switching plate 20. In other embodiments, the switching plate 20 is fixedly connected to the fixed plate 10, and the objective lens mounting plate 30 is movably connected to the switching plate 20.

[0032] In this embodiment, the switching plate 20 is connected to the fixing plate 10 via a linear guide rail (not shown), and the objective lens mounting plate 30 is mounted on the switching plate 20 .

[0033] In this embodiment, the switching plate 20 has a mounting hole, and the objective lens mounting plate is located in the mounting hole. The switching device also includes a connecting member, and the two ends of the connecting member are fixedly connected to the switching plate 20 and the fixed plate 10 respectively. Specifically, the connecting member is located on a side of the switching plate 20 close to the fixed plate 10, and the objective lens mounting plate is connected to the connecting member by screws. The connecting member is connected to the connecting member by screws or the connecting member and the objective lens mounting plate are integrated into a structure.

[0034] In other embodiments, the connecting member may also be located on a side of the switching plate facing away from the fixing plate.

[0035] In this embodiment, the switching plate includes a mounting hole 21, and the objective lens mounting plate 30 is embedded in the mounting hole 21 to achieve a fixed connection with the switching plate 20. The objective lens mounting plate 30 is fixed to the objective lens 50 by screws. Specifically, the side wall of the mounting hole 21 is connected to the side wall of the objective lens 50 by screws.

[0036] In this embodiment, the fixing plate has a through hole 11, which is a strip hole. Specifically, both ends of the strip hole are arc-shaped. In other embodiments, the strip hole can be rectangular. And the length of the through hole is greater than the stroke of the switching plate.

[0037] The objective lens passes through the through hole 11 from the objective lens mounting plate. The objective lens passes through the through hole 11 from the objective lens mounting plate, which can reduce the distance between the objective lens and the image-side optical element, thereby allowing the image-side optical element to have a smaller working distance and increase the adjustable range.

[0038] refer to Figure 2 and Figure 3 In this embodiment, the driving device 70 is fixedly connected to the fixed plate, a driving shaft is fixed on the switching plate 20, the driving device 70 drives the driving shaft to move along a preset direction, and the driving shaft drives the switching plate 20 to move.

[0039] The switching device also includes multiple groups of moving shaft groups, each moving shaft group includes two moving shafts 12, and the two moving shafts 12 in each moving shaft group are respectively fixed to the fixed plate and the switching plate; the two moving shafts 12 in each moving shaft group are arranged in parallel, and the two moving shafts 12 respectively have a slide groove and a slider, and the slide groove is used to accommodate the slider, and when the switching plate and the fixed plate move relative to each other, the slider moves in the slide groove to ensure the stability of the movement.

[0040] In this embodiment, the number of groups of the movable axes is two. In other embodiments, the number of groups of the movable axes may be greater than or equal to three.

[0041] In this embodiment, the preset direction is the same as the objective lens arrangement direction. In this embodiment, multiple objective lenses are arranged along the same straight line. In other embodiments, the objective lenses can be arranged along different directions. The number of preset directions is two, and the number of driving devices is two.

[0042] In this embodiment, the switching device 100 further includes a measuring device (refer to Figure 7 ), used to measure the relative distance between the switching plate and the fixed plate; in this embodiment, the measuring device is a grating ruler, and in other embodiments, the measuring device can also be a laser ranging device or a triangulation device.

[0043] The grating ruler comprises a scale grating 40 and a grating reading head (not shown in the figure); the scale grating 40 and the grating reading head are respectively fixed to the fixed plate and the switching plate; specifically, in this embodiment, the scale grating is located on the switching plate, and the grating reading head is located on the fixed plate; the grating reading head comprises: a light source assembly, an indicator grating, and a photoelectric element; the light source assembly is used to emit measuring light to the indicator grating and the scale grating, and the photoelectric element is used to detect the measuring light reflected or projected by the indicator grating and the scale grating, and determine the relative distance between the fixed plate and the switching plate according to the detected measuring light.

[0044] In this embodiment, the driving device is relatively fixedly connected to the fixing plate, a driving shaft is fixed to the switching plate, and the driving device drives the driving shaft to move along the arrangement direction of the objective lenses.

[0045] The driving assembly 70 is a linear motor. The grating ruler reads the signal on the grating stripes through the photoelectric element, so that when the objective lens mounting plate 30 moves, the grating ruler detects the change of the signal, and analyzes the signal read by the grating ruler to determine the moving distance and direction of the objective lens mounting plate 30 relative to the initial position, and then judges whether the position of the objective lens mounting plate 30 meets the requirements or needs to be adjusted. The switching device 100 judges the position of the objective lens mounting plate 30 through the grating ruler, and controls the linear motor to drive the objective lens mounting plate 30 to move linearly, so as to realize the switching of the objective lens 50.

[0046] In this embodiment, a groove 22 is provided on the switching plate 20, and the grating ruler is installed in the groove 22. The grating ruler is installed in the groove 22 on the upper surface of the switching plate 20, and a reference zero position excitation body 41 is installed at one end of the grating ruler, and a limit switch 42 is installed at the other end. During the installation and initialization stage, the zero position excitation body 41 generates a magnetic field signal of a reference position, which is used to determine the starting position and zero point of the grating ruler, and provide an accurate reference point in actual measurement. The limit switch 42 is used to detect the measuring range of the grating ruler. When the moving object reaches the limit position of the grating ruler, the limit switch 42 will trigger and send a signal, thereby preventing the object from exceeding the measuring range and protecting the equipment from damage. The grating ruler is used to measure the precise position of the motor, and the motor can realize precise motion control based on this position information. The combination of the grating ruler and the stepping motor can realize high-precision position and motion control. The reference zero position excitation body 41 and the limit switch 42 are arranged along the moving direction of the switching plate.

[0047] In this embodiment, the scale grating 40 is located in the groove. The indicator grating is located between the light source assembly and the straight line where the reference zero excitation magnet 41 and the limit switch 42 are located; the photoelectric element is located on one side of the original scale grating 40 of the straight line where the reference zero excitation magnet 41 and the limit switch 42 are located.

[0048] In the present embodiment, the lighting module 61 is sleeved on each of the object lenses 50, and the lighting module is a ring structure. In other embodiments, the lighting module 61 can be rectangular or arranged by a plurality of sub-light sources around the object lenses 50. Wherein, the lighting module 61 is an independently controlled lighting unit, and the lighting unit can be an LED or other types of light sources, which can independently control brightness and position. Each lighting unit is connected to a control system, and the control system is a centralized controller or an independent controller of each lighting unit. Specifically, the lighting module 61 is movably connected to the shell of the object lens 50, or the lighting module 61 is movably connected to the object lens mounting plate 30, so as to adjust the distance and angle of the lighting module 61 and the object lens 50. Specifically, the lighting module 61 is movably connected to the shell of the object lens 50 along the optical axis direction of the object lens, or the lighting module 61 is movably connected to the object lens mounting plate 30 along the optical axis of the object lens.

[0049] refer to Figure 5 The lighting module 61 is detachably connected to the housing of the objective lens 50. In this embodiment, the lighting module 61 is connected to the objective lens 50 by screws 62, and each lighting module 61 includes LEDs arranged on both sides of the objective lens 50.

[0050] In another embodiment, the lighting module 61 is attached to the housing near the bottom of each objective lens 50. In this case, the lighting module 61 is a SMD LED. When the objective lens needs to be switched, the host computer gives a switching instruction, which includes the direction and distance that the driving component is to travel. The driving component drives the objective lens mounting plate 30 to move. After reaching the specified position, the objective lens mounting plate 30 stops moving, and the objective lens 50 to be switched is in a preset position.

[0051] The through hole 11 on the fixing plate 10 is coaxial, and the lens switching is completed. At this time, the lighting module 61 coaxial with the through hole 11 illuminates the sample and collects the light reflected by the sample through the corresponding objective lens.

[0052] Figure 6 and Figure 7 It is a structural diagram of the second embodiment of the switching device of the present application.

[0053] The similarities between this embodiment and the previous embodiment are not described in detail here, and the differences include:

[0054] like Figure 6 As shown, in this embodiment, a through hole 11 is set in the middle of the fixing plate 10, and the linear motor is used to drive the objective lens mounting plate 30 to move according to the position of the grating ruler 40, so that the objective lens 50 is set corresponding to the through hole 11. In another embodiment of the present application, Figure 5 As shown, Figure 5 1 is a schematic diagram of the structure of a fixed plate of another embodiment of the switching device of the present application. The fixed plate 10 has a through hole 11, and the through hole 11 is circular. The fixed plate 10 is installed with two linear guides (not shown in the figure), wherein the two linear guides are parallel to each other. In addition, in order to ensure that the switching plate 20 can slide normally and each lens can form an image normally, a certain degree of parallelism must be ensured between the two linear guides. Specifically, the through hole is circular, and the sum of the size of the objective lens and the spacing between adjacent objective lenses is greater than the size of the through hole.

[0055] In this embodiment, the cross section of the objective lens close to the switching plate is lower than the fixed plate. Specifically, the cross section of the objective lens close to the switching plate is flush with a side of the switching plate close to the fixed plate.

[0056] like Figure 7 As shown, in this embodiment, the guide rod 23 is installed on the switching plate 20, and the switching plate 20 is provided with a mounting groove 24 on the other side of the groove 22, and the guide rod 23 is arranged on the mounting groove 24. The guide rod 23 plays a supporting and guiding role, and the guide rod 23 ensures that the switching plate motor maintains a stable working state during operation, so that the motor works more stably and reliably under high speed and high precision conditions.

[0057] The switching plate 20 may also be provided with a guide groove, and the fixed plate is provided with a sliding block matched with the guide groove, and the sliding block moves in the guide groove.

[0058] The switching plate 20 may also be provided with a snap-fit ​​block 25, and the snap-fit ​​block 25 is used to assist in fixing the switching plate 20 and the fixing plate. The utility model also provides an imaging system, which includes the switching device described in the utility model, as well as a detection component, a coaxial light source and a beam splitter. The objective lens switching device is used to adjust and replace objective lenses of different focal lengths to obtain images of different magnifications; the detection component is used to detect the light beam collected by the objective lens and convert it into an electrical signal; the switching device and Figures 1 to 5 The switching device embodiments shown are the same and will not be described in detail here.

[0059] An embodiment of the present application further provides an optical system, comprising: a switching device and a detection component; the detection component is used to detect the light beam collected by the objective lens.

[0060] The switching device described in this embodiment is Figure 1 to Figure 5 The switching device of one embodiment shown or Figure 6 and Figure 7 The switching devices of the two embodiments shown are the same. Figure 1 to Figure 5 The switching device of one embodiment shown or Figure 6 and Figure 7 The switching devices of the two embodiments shown can be referred to herein.

[0061] The fixing plate 10 is provided with a through hole 11 , the switching plate 20 is provided with a mounting hole 21 , and the detection assembly detects the light beam collected by the objective lens 50 through the through hole 11 .

[0062] The optical system also includes: a coaxial light source, which is used to emit a light beam to a beam splitter; a beam splitter, which is used to reflect the light beam emitted by the light source to the objective lens and allow the light beam collected by the objective lens 50 to pass through to the detection component, or the beam splitter is used to project the light beam emitted by the light source to the objective lens 50 and allow the light beam collected by the objective lens to be reflected to the detection component.

[0063] The switching device and optical system provided by the utility model, by setting the lighting system, and setting a plurality of the lighting modules in one-to-one correspondence with the objective lens, can make it possible to switch different lighting modules simultaneously when switching objective lenses of different magnifications during optical detection, thereby ensuring that each specific area can be illuminated by a specific lighting module, and realizing a one-to-one correspondence between objective lens switching and lighting; it can be compatible with different imaging, increase the intensity and uniformity of lighting, and improve the utilization rate of light sources. The switching device provided by the utility model can be applied to the field of high-precision lighting control.

[0064] The above description is only a preferred embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A switching device, characterized in that: It includes a fixed plate, an objective lens mounting plate, a driving component, an illumination system and at least two objective lenses, wherein the objective lens mounting plate is connected to the fixed plate, the objective lenses are mounted on the objective lens mounting plate, the illumination system includes a plurality of illumination modules, the illumination modules are arranged in a one-to-one correspondence with the plurality of objective lenses, the illumination modules are relatively fixedly arranged with respect to the objective lenses, and the driving component is used for driving the objective lens mounting plate and the illumination module to move along a preset direction relative to the fixed plate, wherein the preset direction at least includes a component of an arrangement direction of the objective lenses.

2. The switching device according to claim 1, characterized in that: The switching device further comprises a switching plate, which is movably connected to the fixing plate along a preset direction, and the objective lens mounting plate is mounted on the switching plate.

3. The switching device according to claim 2, characterized in that: The mounting plate has an objective lens hole, the objective lens passes through the objective lens hole, and the side wall is threadedly connected to the objective lens hole.

4. The switching device according to claim 2, characterized in that: The switching device also includes a measuring device for measuring the relative distance between the switching plate and the fixed plate, and the measuring device is a grating ruler; a through hole is set in the middle of the fixed plate, and the driving component is used to drive the objective lens mounting plate to move according to the position of the measuring device so that the objective lens is set corresponding to the through hole.

5. The switching device according to claim 2, characterized in that: The fixing plate is provided with a through hole, and the length of the through hole is greater than the stroke of the switching plate.

6. The switching device according to claim 5, characterized in that: The objective lens passes through the through hole from the objective lens mounting plate.

7. The switching device according to claim 1, characterized in that: The lighting module is sleeved on the objective lens, and the lighting module is a ring-shaped structure.

8. The switching device according to claim 7, characterized in that: The lighting module is connected to the objective lens via screws; or, the lighting module is attached to a housing of the objective lens near the bottom.

9. An optical system, characterized in that: A switching device comprising any one of claims 1 to 8, and a detection component; The detection component is used to detect the light beam collected by the objective lens.

10. The optical system according to claim 9, characterized in that When the fixing plate is provided with a through hole, the detection component detects the light beam collected by the objective lens through the through hole.

11. The optical system according to claim 9, characterized in that The optical system further comprises: a coaxial light source and a beam splitter, wherein the coaxial light source is used to emit a light beam to the beam splitter; and The beam splitter is used to reflect the light beam emitted by the light source to the objective lens and allow the light beam collected by the objective lens to pass through to the detection component, or the beam splitter is used to transmit the light beam emitted by the light source to the objective lens and allow the light beam collected by the objective lens to be reflected to the detection component.

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