Wafer boat box

Abstract

The embodiment of the utility model provides a wafer box. The wafer box comprises a box body and an automatic locking device arranged on the box body, the inner side wall of the box body is provided with a slot for inserting a wafer, and the front end of the box body is provided with an opening for the wafer to enter and exit; the automatic locking device comprises a baffle, a fixing plate, a linkage assembly and a pressing rod assembly. The fixing plate is arranged on the outer side wall of the box body, the pressing rod assembly is arranged on the outer side bottom wall of the box body, and the baffles are rotatably arranged on the two sides of the opening; the first end of the linkage assembly is movably connected with the baffle, and the second end of the linkage assembly is movably connected with the pressing rod assembly. When the box body is in the inclined position, the pressing rod assembly moves downwards to drive the linkage assembly to drive the baffle to rotate in the direction away from the opening, and the baffle is closed. When the box body is located at the normal placement position, the pressing rod assembly moves upwards so as to drive the linkage assembly to drive the baffle to rotate towards the opening, and the baffle is opened. When the wafer boat box inclines, the baffle plate can be automatically closed to prevent the wafer from falling off and prevent the wafer from being damaged.

Description

Technical Field

[0001] The disclosed embodiments belong to the technical field of semiconductor equipment, and specifically relate to a wafer boat box. Background Art

[0002] Semiconductor packaging chips need to go through the following processes: wafer testing, grinding, cutting, picking, and glassing. Gluing will be done before grinding, and a wafer boat box is needed for the gluing process. The conventional wafer boat has an opening cover to prevent the wafer from falling out of the boat.

[0003] The current wafer boat box has the following problems. When the cover is opened, the edge of the wafer with film on it may easily collide with the shock-absorbing component of the wafer boat box cover during the opening process, causing the edge film of the wafer to be lifted; and if the cover is not used, the wafer may slide out of the wafer boat box due to tilting during transportation, causing the wafer to be damaged and cracked.

[0004] In view of the above problems, it is necessary to propose a wafer boat box with a reasonable design that can effectively improve the above problems. Utility Model Content

[0005] The embodiment of the present disclosure aims to solve at least one of the technical problems existing in the prior art and provides a wafer boat box.

[0006] The embodiment of the present disclosure provides a wafer boat box, comprising a box body and an automatic locking device arranged on the box body;

[0007] The inner side wall of the box body is provided with a plurality of slots for inserting wafers, and the front end of the box body is provided with an opening for the wafers to enter and exit;

[0008] The automatic locking device comprises a baffle, a fixing plate, a linkage assembly and a pressure rod assembly;

[0009] The fixing plate is arranged on two outer side walls of the box body, the pressure rod assembly is arranged on the outer bottom wall of the box body, and the baffle is rotatably arranged on both sides of the opening along the height direction of the box body;

[0010] The first end of the linkage assembly is movably connected to the baffle, and the second end of the linkage assembly is movably connected to the pressure rod assembly; wherein,

[0011] When the box body is in the tilted position, the pressure rod assembly moves downward to drive the linkage assembly to drive the baffle to rotate away from the opening, so that the baffle is closed;

[0012] When the box body is in a normal placement position, the pressure rod assembly moves upward to drive the linkage assembly to drive the baffle to rotate toward the opening direction, so that the baffle is opened.

[0013] Optionally, the linkage assembly includes a first linkage rod, a second linkage rod and a sliding assembly;

[0014] The sliding assembly is arranged on the fixed plate and slides along the in-and-out direction of the wafer;

[0015] The first end of the first linkage rod is movably connected to the pressure rod assembly, and the second end of the first linkage rod is movably connected to the sliding assembly;

[0016] The first end of the second linkage rod is movably connected to the baffle, and the second end of the second linkage rod is movably connected to the sliding assembly.

[0017] Optionally, the sliding assembly includes a sliding block and two sliding rods, and the fixing plate is provided with a groove;

[0018] The two slide bars are arranged in the groove in a relative manner along the height direction of the box body, and the two ends of the slider are slidably arranged on the slide bars respectively; wherein,

[0019] The second end of the first linkage rod is movably connected to the slider, and the second end of the second linkage rod is movably connected to the slider.

[0020] Optionally, the pressure rod assembly includes a pressure rod and two connecting rods, and the fixing plate is provided with a limiting hole;

[0021] The pressure rod is arranged on the outer bottom wall of the box body;

[0022] The first end of the connecting rod is fixedly connected to the pressing rod, and the second end of the connecting rod is movably inserted into the limiting hole.

[0023] Optionally, a limiting block is provided at the second end of the connecting rod, and when the connecting rod is movably inserted into the limiting hole, the limiting block moves in the groove;

[0024] The limiting block is movably connected to the first end of the first linkage rod.

[0025] Optionally, the pressure rod assembly further includes at least one counterweight block, and the counterweight block is arranged on the pressure rod.

[0026] Optionally, an outer side wall of the box body is provided with a mounting groove, and the fixing plate is fixedly installed in the mounting groove.

[0027] Optionally, it further includes a fixed shaft, a first end of which is movably connected to the baffle, and a second end of which is fixedly connected to the box body.

[0028] Optionally, a handle is further included, and the handle is arranged on two outer side walls of the box body.

[0029] Optionally, the handle includes a first holding portion arranged along the wafer entry and exit direction, and a second holding portion bent and extended from the first holding portion toward the top wall of the box body.

[0030] The wafer boat box of the disclosed embodiment is provided with an automatic locking device on the box body, and the automatic locking device includes a baffle, a fixing plate, a linkage assembly and a pressure rod assembly; when the box body is in a tilted position, the pressure rod assembly moves downward to drive the linkage assembly to drive the baffle to rotate in a direction away from the opening, so that the baffle is closed; when the box body is in a normal placement position, the pressure rod assembly moves upward to drive the linkage assembly to drive the baffle to rotate in a direction toward the opening, so that the baffle is opened. By providing an automatic locking device, when the operator tilts the wafer boat box during transportation, the baffle can be automatically closed to prevent the wafer from falling and avoid damage and breakage of the wafer caused by sliding; the baffle can be automatically switched to open or closed without any safety hazards, and the normal loading and unloading operations of the wafer are not affected while protecting the wafer; the structure is simple, the operation is convenient, the handling efficiency is improved, and the cost is saved. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 This is a schematic structural diagram of a wafer boat box according to an embodiment of the present disclosure;

[0032] Figure 2 This is a schematic diagram of the structure of an automatic locking device in a wafer boat box according to an embodiment of the present disclosure;

[0033] Figure 3 It is a schematic diagram of the position of the baffle when the wafer boat box of one embodiment of the present disclosure is in a tilted position;

[0034] Figure 4 It is a schematic diagram of the assembly of the baffle and linkage assembly of one embodiment of the present disclosure;

[0035] Figure 5 It is a structural schematic diagram of a slider assembly according to an embodiment of the present disclosure;

[0036] Figure 6 It is a schematic structural diagram of a box body in one embodiment of the present disclosure. DETAILED DESCRIPTION

[0037] In order to enable those skilled in the art to better understand the technical solutions of the embodiments of the present disclosure, the embodiments of the present disclosure are further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0038] like Figure 1 As shown, an embodiment of the present disclosure provides a wafer boat box 100 , including a box body 110 and an automatic locking device A disposed on the box body 110 .

[0039] The inner wall of the box body 110 is provided with a plurality of slots 111 for inserting wafers, and the front end of the box body 110 is provided with an opening 112 for the wafers to enter and exit.

[0040] like Figure 2 As shown, the automatic locking device includes a baffle 120 , a fixing plate 130 , a linkage assembly 140 and a pressure rod assembly 150 .

[0041] The fixing plate 130 is disposed on two outer side walls of the box body 110 , the pressure rod assembly 150 is disposed on the outer bottom wall of the box body 110 , and the baffle 120 is rotatably disposed on both sides of the opening 112 along the height direction of the box body 110 .

[0042] Specifically, Figure 1 and Figure 2 As shown, there are two fixing plates 130 , which are respectively arranged on the left and right outer walls. There are also two baffles 120 , which are arranged on the inner wall of the box body 110 and located on the left and right sides of the opening 112 .

[0043] The first end of the linkage assembly 140 is movably connected to the baffle 120, and the second end of the linkage assembly 140 is movably connected to the pressure rod assembly 150.

[0044] like Figure 3 As shown, when the box body 110 is in the tilted position, the pressure rod assembly 150 moves downward to drive the linkage assembly 140 to drive the baffle 120 to rotate away from the opening 112, so that the baffle 120 is closed. In other words, the closed baffle 120 is equivalent to the traditional open cover, which can effectively prevent the wafer from falling and save materials, and can also reduce the intensity of the wafer edge collision and reduce the situation where the film on the edge of the wafer is lifted.

[0045] When the box body 110 is in the normal placement position, the pressure rod assembly 150 moves upward to drive the linkage assembly 140 to drive the baffle 120 to rotate toward the opening direction, so that the baffle 120 opens and no longer plays a blocking role, and normal wafer loading and unloading operations can be achieved.

[0046] It should be noted that the width of the baffle 120 is not specifically limited in this embodiment, as long as it can prevent the wafer from falling when the baffle 120 is closed, and the width can be selected according to actual needs.

[0047] Specifically, when the operator moves the wafer boat box 100 so that the box body 110 is in an inclined position, the bottom wall of the box body 110 is suspended in the air. At this time, the pressure rod assembly 150 moves downward under the action of gravity. The downward movement of the pressure rod assembly 150 drives the linkage assembly 140 to move. The movement of the linkage assembly 140 drives the baffle 120 to rotate away from the opening 112, so that the baffle 120 is automatically closed, thereby preventing the wafer from falling from the slot 111.

[0048] When the operator completes the transport and places the wafer boat box 100 to the normal placement position, the pressure rod assembly 150 will be lifted and then move upward. The upward movement of the pressure rod assembly 150 drives the linkage assembly 140 to move. The movement of the linkage assembly 140 drives the baffle 120 to rotate toward the opening direction, so that the baffle 120 automatically opens and no longer serves as a blocking function, so that normal loading and unloading operations of the wafers can be achieved.

[0049] The wafer boat box of the disclosed embodiment is provided with an automatic locking device on the box body, and the automatic locking device includes a baffle, a fixing plate, a linkage assembly and a pressure rod assembly; when the box body is in a tilted position, the pressure rod assembly moves downward to drive the linkage assembly to drive the baffle to rotate in a direction away from the opening, so that the baffle is closed; when the box body is in a normal placement position, the pressure rod assembly moves upward to drive the linkage assembly to drive the baffle to rotate in a direction toward the opening, so that the baffle is opened. By providing an automatic locking device, when the operator tilts the wafer boat box during transportation, the baffle can be automatically closed to prevent the wafer from falling and avoid damage and breakage of the wafer caused by sliding; the baffle can be automatically switched to open or closed without any safety hazards, and the normal loading and unloading operations of the wafer are not affected while protecting the wafer; the structure is simple, the operation is convenient, the handling efficiency is improved, and the cost is saved.

[0050] For example, Figure 4 As shown, the linkage assembly 140 includes a first linkage rod 141, a second linkage rod 142 and a sliding assembly.

[0051] The sliding assembly is disposed on the fixing plate 130 and slides along the wafer in and out direction.

[0052] The first end of the first linkage rod 141 is movably connected to the pressure rod assembly 150 , and the second end of the first linkage rod 141 is movably connected to the sliding assembly.

[0053] The first end of the second linkage rod 142 is movably connected to the baffle 120 , and the second end of the second linkage rod 142 is movably connected to the sliding assembly.

[0054] For example, Figure 5 As shown, the sliding assembly includes a sliding block 143 and two sliding rods 144 , and the fixing plate 130 is provided with a groove 131 .

[0055] Two slide bars 144 are relatively arranged in the groove 131 along the height direction of the box body 110, and both ends of the slider 143 are slidably arranged on the slide bars 144. Among them, the second end of the first linkage rod 141 is movably connected to the slider 143, and the second end of the second linkage rod 142 is movably connected to the slider 143.

[0056] It should be noted that the connection between the first end of the first linkage rod 141 and the pressure rod assembly 150 may be, but not limited to, a hinge connection, a pin connection, etc. The connection between the second end of the first linkage rod 141 and the slider 143 may also be, but not limited to, a hinge connection, a pin connection, etc. The connection between the first end of the second linkage rod 142 and the baffle 120 may also be, but not limited to, a hinge connection, a pin connection, etc. The connection between the second end of the second linkage rod 142 and the slider 143 may also be, but not limited to, a hinge connection, a pin connection, etc.

[0057] Specifically, when the box body 110 is in a tilted position, the pressure rod assembly 150 moves downward under the action of gravity, and the downward movement of the pressure rod assembly 150 drives the first linkage rod 141 to move downward, and the first linkage rod 141 drives the slider 143 to slide along the slide rod 144 toward the opening 112, and the sliding of the slider 143 drives the second linkage rod 142 to move toward the opening 112, and then under the linkage action of the second linkage rod 142, the baffle 120 is driven to rotate away from the opening 112, so that the baffle 120 is closed to prevent the wafer from falling.

[0058] When the box body 110 is in a normal placement position, the pressure rod assembly 150 is lifted and then moves upward. The upward movement of the pressure rod assembly 150 drives the first linkage 141 to move upward. The first linkage rod 141 drives the slider 143 to slide along the slide rod 144 in the direction away from the outlet 112. The sliding of the slider 143 drives the second linkage rod 142 to move away from the outlet 112, and then under the linkage action of the second linkage rod 142, the baffle 120 is driven to rotate toward the opening 112, so that the baffle 120 is opened and no longer plays a blocking role, so that the normal loading and unloading operations of the wafer can be realized.

[0059] In this embodiment, through the linkage of the first linkage rod, the second linkage rod and the slider, the up and down movement of the pressure rod assembly is converted into the rotation of the baffle, and then the opening and closing of the baffle is realized, so that the wafer can be prevented from falling when the wafer boat box is transported, avoiding damage and breakage of the wafer caused by slipping; the baffle can automatically switch to open or closed, without any safety hazards, and the wafer is well protected.

[0060] For example, Figure 2 As shown, the pressure rod assembly 150 includes a pressure rod 151 and two connecting rods 152 , and the fixing plate 130 is provided with a limiting hole 132 .

[0061] The pressing rod 151 is disposed on the outer bottom wall of the box body 110 . The first end of the connecting rod 152 is fixedly connected to the pressing rod 151 , and the second end of the connecting rod 152 is movably inserted into the limiting hole 132 .

[0062] Specifically, when the pressure rod 151 moves downward, the connecting rod 152 also moves downward, and the second end of the connecting rod 152 moves downward along the limiting hole 132. When the pressure rod 151 moves upward, the connecting rod 152 also moves upward, and the second end of the connecting rod 152 moves upward along the limiting hole 132, and the limiting hole 132 limits the end of the second end of the connecting rod 152.

[0063] For example, Figure 2 and Figure 4 As shown, a limiting block 153 is disposed at the second end of the connecting rod 152. When the connecting rod 152 is movably inserted into the limiting hole 132, the limiting block 153 moves in the groove 131. The limiting block 153 is movably connected to the first end of the first linkage rod 141.

[0064] Specifically, Figure 5 As shown, the limit block 153 is fixed on the connecting rod 152, and when the connecting rod 152 moves downward, the bottom wall of the groove 131 limits the limit block 153. In other words, the limit block 153 can limit the distance that the connecting rod 152 moves downward.

[0065] Exemplarily, the compression rod assembly 150 further includes at least one counterweight 154, which is disposed at the bottom of the compression rod 151. Figure 2 As shown, in this embodiment, the number of the counterweight blocks 154 is 2. This embodiment does not specifically limit the number of the counterweight blocks 154 and can be selected according to actual needs.

[0066] In this embodiment, by arranging a counterweight block on the pressure rod, the counterweight of the pressure rod assembly can be increased, so that the pressure rod assembly can be better moved downward under the action of gravity when the wafer boat is transported, thereby better enabling the baffle to close automatically.

[0067] For example, Figure 6 As shown, the left and right outer side walls of the box body 110 are provided with mounting grooves 113 , and a fixing plate 130 is fixedly installed in the mounting grooves 113 .

[0068] For example, Figure 2 As shown, the wafer boat box 100 further includes a fixed shaft 160 , a first end of the fixed shaft 160 is movably connected to the baffle 120 , and a second end of the fixed shaft 160 is fixedly connected to the box body 110 .

[0069] Specifically, Figure 2 As shown, each baffle 120 is fixed with a fixed shaft 160 at both ends, and the second end of the fixed shaft 160 at the upper end of the baffle 120 is fixedly connected to the top wall of the box body 110. The second end of the fixed shaft 160 at the lower end of the baffle 120 is fixedly connected to the bottom wall of the box body 110.

[0070] In this embodiment, the baffle can be fixed on the box body through the fixed shaft, and the baffle can be rotated around the fixed shaft.

[0071] For example, Figure 1 As shown, the wafer boat box 100 further includes a handle 170, which is disposed on the left and right outer walls of the box body 110. By disposing the handle 170 on both the left and right outer walls of the box body 110, the wafer boat box 100 can be more stably picked up or put down when transporting the wafer boat box 100.

[0072] Furthermore, if Figure 6 As shown, the handle 170 includes a first gripping portion 171 arranged along the wafer in-and-out direction, and a second gripping portion 172 extending from the first gripping portion 171 to the top wall of the box body 110. In other words, the first gripping portion 171 and the second gripping portion 172 form an L-shape, which allows more gripping angles to be selected when transporting the wafer boat box, making it more convenient to use.

[0073] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the embodiments of the present disclosure, but the embodiments of the present disclosure are not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the embodiments of the present disclosure, and these modifications and improvements are also considered to be within the protection scope of the embodiments of the present disclosure.

Claims

1. A wafer boat box, characterized in that: It comprises a box body and an automatic locking device arranged on the box body; The inner side wall of the box body is provided with a plurality of slots for inserting wafers, and the front end of the box body is provided with an opening for the wafers to enter and exit; The automatic locking device comprises a baffle, a fixing plate, a linkage assembly and a pressure rod assembly; The fixing plate is arranged on two outer side walls of the box body, the pressure rod assembly is arranged on the outer bottom wall of the box body, and the baffle is rotatably arranged on both sides of the opening along the height direction of the box body; The first end of the linkage assembly is movably connected to the baffle, and the second end of the linkage assembly is movably connected to the pressure rod assembly; wherein, When the box body is in the tilted position, the pressure rod assembly moves downward to drive the linkage assembly to drive the baffle to rotate away from the opening, so that the baffle is closed; When the box body is in a normal placement position, the pressure rod assembly moves upward to drive the linkage assembly to drive the baffle to rotate toward the opening direction, so that the baffle is opened.

2. The wafer boat box according to claim 1, characterized in that: The linkage assembly comprises a first linkage rod, a second linkage rod and a sliding assembly; The sliding assembly is arranged on the fixed plate and slides along the in-and-out direction of the wafer; The first end of the first linkage rod is movably connected to the pressure rod assembly, and the second end of the first linkage rod is movably connected to the sliding assembly; The first end of the second linkage rod is movably connected to the baffle, and the second end of the second linkage rod is movably connected to the sliding assembly.

3. The wafer boat box according to claim 2, characterized in that: The sliding assembly includes a sliding block and two sliding rods, and the fixing plate is provided with a groove; The two slide bars are arranged in the groove in a relative manner along the height direction of the box body, and the two ends of the slider are slidably arranged on the slide bars respectively; wherein, The second end of the first linkage rod is movably connected to the slider, and the second end of the second linkage rod is movably connected to the slider.

4. The wafer boat box according to claim 3, characterized in that: The pressure rod assembly includes a pressure rod and two connecting rods, and the fixing plate is provided with a limiting hole; The pressure rod is arranged on the outer bottom wall of the box body; The first end of the connecting rod is fixedly connected to the pressing rod, and the second end of the connecting rod is movably inserted into the limiting hole.

5. The wafer boat box according to claim 4, characterized in that: A limiting block is disposed at the second end of the connecting rod, and when the connecting rod is movably inserted into the limiting hole, the limiting block moves in the groove; The limiting block is movably connected to the first end of the first linkage rod.

6. The wafer boat box according to claim 4, characterized in that: The compression rod assembly further comprises at least one counterweight block, and the counterweight block is arranged on the compression rod.

7. The wafer boat box according to any one of claims 1 to 6, characterized in that: The outer side wall of the box body is provided with a mounting groove, and the fixing plate is fixedly installed in the mounting groove.

8. The wafer boat box according to any one of claims 1 to 6, characterized in that: It also includes a fixed shaft, a first end of which is movably connected to the baffle, and a second end of which is fixedly connected to the box body.

9. The wafer boat box according to any one of claims 1 to 6, characterized in that: It also includes a handle, which is arranged on two outer side walls of the box body.

10. The wafer boat box according to claim 9, characterized in that: The handle includes a first holding portion arranged along the wafer in-and-out direction, and a second holding portion bent and extended from the first holding portion toward the top wall of the box body.

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