Multi-support inclined quartz boat

Abstract

The utility model provides a multi-support inclined quartz boat, which comprises a fixed frame and an upper transverse plate, the upper end of the surface of the fixed frame is symmetrically connected with the upper transverse plate, the lower end of the surface of the fixed frame is symmetrically connected with a lower transverse plate, two sides of the fixed frame are symmetrically connected with support plates, and the lower surface of the lower transverse plate is symmetrically connected with support blocks. Upper chutes are symmetrically formed in the side face of the upper transverse plate, lower chutes are symmetrically formed in the side face of the lower transverse plate, through grooves are formed in the bottoms of the lower chutes, and meanwhile the wafers are movably connected into the upper chutes and the lower chutes. According to the quartz boat, the upper transverse plate, the lower transverse plate, the upper inclined groove, the lower inclined groove and the through groove are matched, so that the flowing fluency of airflow in the quartz boat can be enhanced, and the growth quality of a film can be enhanced in an auxiliary manner.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor material preparation, in particular to a multi-support inclined quartz boat. Background Art

[0002] Quartz boats are widely used in the integrated circuit chip manufacturing industry of the microelectronics industry. Quartz boats are wafer carriers commonly used in integrated circuit chip production lines, and are generally used in important processes such as ion implantation and LPCVD. Most of the existing technologies design the quartz boat to be a structure that places the wafer vertically. Although this can reduce the contact area between the wafer and the slot to a certain extent, the wafer is placed vertically in the quartz boat during production and processing, and the thin film surface of the wafer is easily in contact with the slot, which blocks the airflow at that part of the wafer, affects the edge deposition thickness, and also causes defects such as sticking and sticking marks on the thin film.

[0003] After searching, the prior art disclosed (Announcement No.: CN216250668U) a quartz boat structure with inclined grooves, which records "support columns are arranged on both sides of the bottom of the support frame, and the support frame includes a base arranged in the horizontal direction, and the base is used to carry the wafer. A frame wall with a certain angle with the base is respectively provided on both sides of the base; the two frame walls are symmetrically arranged relative to the base, and an upper groove rod along the horizontal direction is respectively arranged on the upper part of the two frame walls, and an upper placement groove is opened on the side of the upper groove rod, and the upper placement groove is composed of a plurality of inclined inclined grooves. Two lower groove rods arranged oppositely are arranged at the lower part of the base; a plurality of protrusions are opened on the upper part of the lower groove rod, and the protrusions are composed of an inclined surface and a brim located on the top of the inclined surface."; This quartz boat changes the vertical placement groove into an inclined The placement groove is provided, and a brim protrusion is added, the brim protrusion does not contact the film surface of the chip, and the lowest end of the film surface and the end edge of the brim protrusion are on a vertical plane; in the LPCVD deposition process, the deposition gas will not be blocked by the brim protrusion, and deposition can still be achieved on the edge of the film surface. Another function of the brim protrusion is to prevent the deposition gas from being deposited into the area below the brim protrusion. However, the boat teeth of the quartz boat mostly adopt a square groove structure. Compared with other parts, the part where the chip is inserted into the boat teeth has poorer smoothness for the process gas to pass through, and even blocks part of the airflow. The poor airflow causes a difference in film thickness between these positions of the chip and other positions after deposition, forming the so-called boat tooth mark; during the placement process, the edge of the chip is easily scratched by the quartz boat, and the chip will shake slightly in the quartz boat during the process of entering the boat, all of which will leave scratches. Utility Model Content

[0004] In order to overcome the defects of the prior art, a multi-support inclined quartz boat is provided to solve the problems raised in the above background technology.

[0005] In order to achieve the above-mentioned purpose, a multi-support inclined quartz boat is provided, comprising: a fixed frame and an upper cross plate, the upper end of the surface of the fixed frame is symmetrically connected to the upper cross plate, and the lower end of the surface of the fixed frame is symmetrically connected to the lower cross plate, and the two sides of the fixed frame are symmetrically connected to the support plates, and the lower surface of the lower cross plate is symmetrically connected to the support block, the upper cross plate side surface is symmetrically provided with upper inclined grooves, and the lower cross plate side surface is symmetrically provided with lower inclined grooves, and a through groove is provided at the bottom of the lower inclined groove, and the chip is movably connected in the upper inclined groove and the lower inclined groove.

[0006] Preferably, there are two groups of fixing frames, both of which are isosceles trapezoidal structures, and openings are provided in the middle of both groups of fixing frames, and the openings are isosceles trapezoidal structures.

[0007] Preferably, the two groups of support plates fixedly connected on both sides of the fixing frame are both L-shaped structures, and the lower surfaces of the bent parts of the support plates are fixedly connected to the friction layer, and the friction layer is square in structure.

[0008] Preferably, there are two groups of upper transverse plates, both groups of upper transverse plates are of right-angled triangular prism structure, and multiple groups of upper inclined grooves are arranged in parallel and equidistantly on opposite sides of the two groups of upper transverse plates, and the upper inclined grooves are of right-angled trapezoidal structure, and the edges at the openings at the lower ends of the upper inclined grooves are of arc-shaped structure.

[0009] Preferably, there are two groups of lower transverse plates, both of which are triangular prism structures, and multiple groups of lower inclined grooves are arranged in parallel and at equal intervals on the obliquely upward side of the lower transverse plate, and the lower inclined grooves are generally fan-shaped in structure. At the same time, the axial section of the lower inclined groove is a right-angled trapezoidal structure, and the inclination angles of the lower inclined groove and the upper inclined groove are consistent.

[0010] Preferably, the bottom of the lower inclined groove is an arc-shaped structure, and a plurality of through grooves are arranged at equal intervals around the bottom of the lower inclined groove along the circumferential direction, and the through grooves are rectangular structures, and the size of the through grooves is adapted to the axial length of the corresponding position of the bottom of the lower inclined groove.

[0011] Preferably, the lower surface of the lower cross plate is parallel to and evenly spaced from each other with multiple groups of support blocks fixedly connected thereto, the outer side surfaces of the support blocks are in an arc-shaped structure, and the support blocks and the lower inclined grooves are staggered, while the spacing between adjacent lower cross plates is smaller than the spacing between adjacent upper cross plates.

[0012] Compared with the prior art, the beneficial effects of the utility model are as follows: through the cooperation of the support plate, the upper cross plate, the lower cross plate and the support block, the quartz boat has multiple support points, and through the cooperation of the upper inclined groove and the lower inclined groove, it can also assist in enhancing the stability of the chip after placement, and at the same time, the inclined surface structure of the upper inclined groove and the lower inclined groove enables the chip to be smoothly inserted into the interior of the quartz boat, and the setting of the inclined surface structure prevents the thin film growth surface of the chip from directly contacting the quartz boat, and the cooperation of the upper inclined groove, the lower inclined groove and the through groove can effectively reduce the probability of poor airflow of the process gas in the quartz boat, ensure the consistency of the film thickness on the surface of the chip, reduce the probability of boat tooth marks, and when the chip shakes slightly, it will not cause damage to the thin film growth surface of the chip, thereby ensuring the growth quality of the thin film. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a front view schematic diagram of an embodiment of the utility model.

[0014] Figure 2 It is a side view schematic diagram of an embodiment of the utility model.

[0015] Figure 3 It is a schematic top view of an embodiment of the utility model.

[0016] Figure 4 For the utility model embodiment Figure 1 An enlarged schematic diagram of point A.

[0017] In the figure: 1, wafer; 2, fixed frame; 3, upper horizontal plate; 4, upper inclined groove; 5, lower horizontal plate; 6, support plate; 7, support block; 8, lower inclined groove; 9, through groove. DETAILED DESCRIPTION

[0018] Reference Figures 1 to 4 As shown, the utility model provides a multi-support inclined quartz boat, including: a fixed frame 2 and an upper cross plate 3, the upper end of the surface of the fixed frame 2 is symmetrically connected to the upper cross plate 3, and the lower end of the surface of the fixed frame 2 is symmetrically connected to the lower cross plate 5, and the two sides of the fixed frame 2 are symmetrically connected to the support plates 6, and at the same time, the lower surface of the lower cross plate 5 is symmetrically connected to the support block 7, the upper cross plate 3 has symmetrically opened upper inclined grooves 4 on the side, and the lower cross plate 5 has symmetrically opened lower inclined grooves 8 on the side, and a through groove 9 is opened at the bottom of the lower inclined groove 8, and the chip 1 is movably connected in the upper inclined groove 4 and the lower inclined groove 8.

[0019] In this embodiment, when the quartz boat needs to be used to load the wafer 1, the lower end of the wafer 1 is fitted against the inclined surface of the upper chute 4, so that the overall inclination angle of the wafer 1 is consistent with the inclination angle of the inclined surface of the upper chute 4. The worker guides the wafer 1 to slide obliquely downward with the help of gravity, so that the lower end of the wafer 1 can be embedded in the lower chute 8 again, and the lower surface of the wafer 1 can fit the bottom of the lower chute 8, thereby ensuring that multiple groups of wafers 1 can be neatly loaded in the quartz boat. During the flow of process gas, the upper chute 4 and the lower chute 8 are properly spaced from the front of the wafer 1, thereby ensuring the smoothness of the airflow. In addition, the through groove 9 opened at the bottom of the lower chute 8 can further enhance the flow effect of the airflow, reduce the probability of boat tooth marks at the front edge of the wafer 1, and improve the quality of the film.

[0020] As a preferred implementation, there are two groups of fixing frames 2, both of which are isosceles trapezoidal structures, and openings are opened in the middle of both groups of fixing frames 2, which are isosceles trapezoidal structures.

[0021] In this embodiment, if Figure 1 and Figure 2 The structural setting of the fixed frame 2 can not only help enhance the flow effect of the airflow, but also help reduce the overall weight of the quartz boat.

[0022] As a preferred embodiment, the two groups of support plates 6 fixedly connected on both sides of the fixed frame 2 are both L-shaped structures, and the lower surface of the bent portion of the support plate 6 is fixedly connected to the friction layer, and the friction layer is a square structure.

[0023] In this embodiment, if Figure 1 and Figure 2 The setting of the friction layer can help enhance the friction resistance between the support plate 6 and the placement surface, and then can help enhance the stability of the quartz boat when it is placed, and reduce the probability of the quartz boat tipping over.

[0024] As a preferred embodiment, there are two groups of upper horizontal plates 3, both groups of upper horizontal plates 3 are of right-angled triangular prism structure, and multiple groups of upper inclined grooves 4 are arranged in parallel and equidistantly on opposite sides of the two groups of upper horizontal plates 3, and the upper inclined grooves 4 are of right-angled trapezoidal structure, and the edges of the lower openings of the upper inclined grooves 4 are of arc-shaped structure.

[0025] In this embodiment, if Figure 1 , Figure 2 and Figure 3 The size of the upper opening of the upper inclined groove 4 is larger than that of the lower opening, and the edge of the lower opening of the upper inclined groove 4 is in an arc-shaped structure, so the probability of accidental collision between the upper inclined groove 4 and the front side of the wafer 1 can be reduced, and the probability of accidental damage to the front side of the wafer 1 can also be reduced. At the same time, the number and position of the upper inclined grooves 4 opened in the two groups of upper horizontal plates 3 correspond to each other.

[0026] As a preferred embodiment, there are two groups of lower transverse plates 5, both of which are triangular prism structures, and multiple groups of lower inclined grooves 8 are arranged in parallel and equidistantly on one side of the lower transverse plate 5 that is inclined upward, and the lower inclined grooves 8 are fan-shaped in structure as a whole. At the same time, the axial section of the lower inclined grooves 8 is a right-angled trapezoidal structure, and the inclination angles of the inclined surfaces of the lower inclined grooves 8 and the upper inclined grooves 4 are consistent.

[0027] In this embodiment, if Figure 1 , Figure 2 and Figure 3 The inclined surface of the upper inclined groove 4 and the inclined surface of the lower inclined groove 8 are in the same inclined surface, and the number and position of the lower inclined grooves 8 opened by the two groups of lower cross plates 5 correspond one to one, and the number of the upper inclined grooves 4 and the lower inclined grooves 8 correspond one to one.

[0028] As a preferred embodiment, the bottom of the lower inclined groove 8 is an arc-shaped structure, and a plurality of groups of through grooves 9 are arranged at equal intervals around the bottom of the lower inclined groove 8 along the circumferential direction, and the through grooves 9 are rectangular structures, and the size of the through grooves 9 is adapted to the axial length of the corresponding position of the bottom of the lower inclined groove 8.

[0029] In this embodiment, if Figure 2 , Figure 3 and Figure 4 The arc surface structure at the bottom of the lower chute 8 fits the arc surface of the wafer 1, which can help enhance the stability of the wafer 1 after it is loaded into the quartz boat, and can also effectively reduce the probability of direct contact between the lower chute 8 and the front side of the wafer 1, and reduce the probability of damage to the front side of the wafer 1. At the same time, the opening of the through groove 9 allows the interior of the lower chute 8 to have good air flow, which can reduce the probability of boat tooth marks on the front side of the wafer 1 at the edge of the lower chute 8, thereby helping enhance the quality of the thin film generated on the front side of the wafer 1.

[0030] As a preferred embodiment, the lower surface of the lower cross plate 5 is fixedly connected with multiple groups of support blocks 7 in parallel and at equal intervals, and the outer side surface of the support block 7 is an arc-shaped structure, and the support block 7 and the lower inclined groove 8 are staggered. At the same time, the spacing between adjacent lower cross plates 5 is smaller than the spacing between adjacent upper cross plates 3.

[0031] In this embodiment, if Figure 1 , Figure 2 and Figure 3 The setting of the support block 7 can effectively enhance the stability of the quartz boat when it is placed, thereby reducing the probability of accidental shaking of the quartz boat and the chip 1. At the same time, the position setting of the upper horizontal plate 3 and the lower horizontal plate 5 enables the chip 1 to be supported at multiple points in the quartz boat, thereby helping to enhance the stability of the chip 1 after loading.

[0032] The multi-support inclined quartz boat of the utility model can enhance the smoothness of airflow in the quartz boat through the cooperation of the upper horizontal plate 3, the lower horizontal plate 5, the upper inclined groove 4, the lower inclined groove 8 and the through groove 9, and can also assist in enhancing the quality of thin film growth. At the same time, the arrangement of the support block 7 and the support plate 6 can effectively enhance the stability of the quartz boat when it is placed, and avoid the problem of shaking or tipping over of the quartz boat.

Claims

1. A multi-support inclined quartz boat, comprising: A fixed frame (2) and an upper transverse plate (3), characterized in that: the upper end of the surface of the fixed frame (2) is symmetrically connected to the upper transverse plate (3), and the lower end of the surface of the fixed frame (2) is symmetrically connected to the lower transverse plate (5), and the two sides of the fixed frame (2) are symmetrically connected to the support plate (6), and at the same time, the lower surface of the lower transverse plate (5) is symmetrically connected to the support block (7), the upper transverse plate (3) has symmetrical upper inclined grooves (4) on the side, and the lower transverse plate (5) has symmetrical lower inclined grooves (8) on the side, and a through groove (9) is provided at the bottom of the lower inclined groove (8), and the chip (1) is movably connected in the upper inclined groove (4) and the lower inclined groove (8).

2. The multi-support inclined quartz boat according to claim 1, characterized in that: There are two groups of fixed frames (2), both groups of fixed frames (2) are in an isosceles trapezoidal structure, and both groups of fixed frames (2) have openings in the middle, the openings are in an isosceles trapezoidal structure.

3. The multi-support inclined quartz boat according to claim 1, characterized in that: The two groups of support plates (6) fixedly connected on both sides of the fixed frame (2) are both L-shaped structures, and the lower surfaces of the bent parts of the support plates (6) are fixedly connected to the friction layer, which is in a square structure.

4. The multi-support inclined quartz boat according to claim 1, characterized in that: There are two groups of upper transverse plates (3), both of which are of right-angled triangular prism structure, and multiple groups of upper inclined grooves (4) are arranged in parallel and at equal intervals on opposite sides of the two groups of upper transverse plates (3), and the upper inclined grooves (4) are of right-angled trapezoidal structure, and the edges of the lower openings of the upper inclined grooves (4) are of arc-shaped structure.

5. The multi-support inclined quartz boat according to claim 1, characterized in that: There are two groups of lower transverse plates (5), both of which are triangular prism structures, and a plurality of groups of lower inclined grooves (8) are arranged in parallel and at equal intervals on one side of the lower transverse plate (5) obliquely upward, and the lower inclined grooves (8) are in a fan-shaped ring structure as a whole, and the axial section of the lower inclined grooves (8) is in a right-angled trapezoidal structure, and the inclined surface of the lower inclined groove (8) and the inclined surface of the upper inclined groove (4) have the same inclination angle.

6. The multi-support inclined quartz boat according to claim 1, characterized in that: The bottom of the lower inclined groove (8) is in an arc-shaped structure, and a plurality of groups of through grooves (9) are arranged at equal intervals around the bottom of the lower inclined groove (8) along the circumferential direction, and the through grooves (9) are in a rectangular structure, and the size of the through grooves (9) is adapted to the axial length of the corresponding position of the bottom of the lower inclined groove (8).

7. The multi-support inclined quartz boat according to claim 1, characterized in that: The lower surface of the lower transverse plate (5) is parallel to and fixedly connected with a plurality of groups of support blocks (7) at equal intervals, and the outer side surfaces of the support blocks (7) are in an arc-shaped structure, and the support blocks (7) and the lower inclined grooves (8) are staggeredly distributed, and the spacing between adjacent lower transverse plates (5) is smaller than the spacing between adjacent upper transverse plates (3).

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