Dust removal structure for bearing, bearing system and cleaning equipment

Abstract

The utility model relates to a dust removal structure for a bearing, a rotating shaft is supported on the bearing, and the dust removal structure comprises a bearing seat, a bearing cover, a negative pressure assembly and a supply assembly. The bearing seat is provided with a mounting space, a through hole and an opening, the through hole and the opening are communicated with the mounting space, the bearing is mounted in the mounting space, and the rotating shaft extends into the mounting space through the through hole and extends out of the opening; the bearing cover is connected to the opening of the bearing seat, a gap communicated with the mounting space is formed between the bearing cover and the rotating shaft, the bearing cover is provided with a first channel and an input groove which are mutually independent, the first channel is communicated with the mounting space, and the input groove is communicated with the gap; the negative pressure assembly is communicated with the first channel; the supply assembly is in communication with the input slot. By adopting the dust removal structure, the negative pressure assembly generates negative pressure in the first channel, and the first channel is communicated with the mounting space, so that wear particles generated by friction between the bearing and the rotating shaft in the mounting space are sucked away, and the wear particles are prevented from polluting the wafer. The utility model further relates to a bearing system and cleaning equipment.

Description

Technical Field

[0001] The present application belongs to the technical field of bearing structures, and specifically relates to a dust removal structure, a bearing system and a cleaning device for a bearing. Background Art

[0002] Cleaning refers to the use of physical or chemical methods to remove surface impurities or self-oxides before oxidation, photolithography, epitaxy, diffusion and other processes in the semiconductor process to obtain a surface that meets the cleanliness requirements. At present, the cleaning of semiconductor wafers is mainly divided into manual cleaning and single-chip cleaning machine cleaning. When using a single-chip cleaning machine for cleaning, the wafer is placed on a cleaning disk, and the solution is sprayed onto the surface of the wafer. The cleaning disk drives the wafer to rotate for cleaning. The centrifugal force generated by the rotation allows the solution to pass through the surface of the wafer and be thrown out to achieve the cleaning effect. The cleaning disk in the single-chip cleaning machine rotates through bearings and shafts. During the rotation, the bearings will rub against the shaft, thereby generating wear particles, which will contaminate the wafer. Utility Model Content

[0003] The technical problem to be solved by the present application is that the friction between the bearings and the rotating shaft in the existing cleaning machine generates wear particles that contaminate the wafers, and a dust removal structure, a bearing system and a cleaning device for the bearings are provided that can remove the wear particles and avoid contaminating the wafers.

[0004] The technical solution proposed in this application is:

[0005] A dust removal structure for a bearing, a rotating shaft is supported on the bearing, and the dust removal structure comprises:

[0006] A bearing seat, comprising an installation space and a through hole and an opening connected to the installation space, wherein the bearing is installed in the installation space, and the rotating shaft extends into the installation space through the through hole and extends out from the opening;

[0007] A bearing cover connected to the opening of the bearing seat, and a gap communicating with the installation space is formed between the bearing cover and the rotating shaft, and the bearing cover is provided with a mutually independent first channel and an input groove, the first channel is communicated with the installation space, and the input groove is communicated with the gap;

[0008] a negative pressure component, connected to the first channel;

[0009] A supply assembly is communicated with the input tank.

[0010] Furthermore, the bearing seat is provided with a second channel connected with the first channel, and the second channel runs through the bearing seat to be connected with the negative pressure component.

[0011] Furthermore, the bearing cover is further provided with a plurality of first communicating holes connected with the first channel, the first communicating holes penetrate the bearing cover and are connected with the installation space, and the plurality of first communicating holes are arranged at intervals along the circumference of the rotating shaft.

[0012] Furthermore, the bearing cover is also provided with a uniform channel and a plurality of second connecting holes, the uniform channel is located on the outer side of the first channel away from the rotating shaft, the uniform channel is connected to the negative pressure component, each of the second connecting holes is connected to the uniform channel and the first channel, and the plurality of second connecting holes are arranged at intervals along the circumference of the rotating shaft.

[0013] Furthermore, the bearing cover is also provided with an input hole, which is communicated with the input groove and passes through the bearing cover to be communicated with the supply assembly.

[0014] Furthermore, the dust removal structure also includes a connecting joint, which is communicated with the first channel, and the negative pressure component is connected to the connecting joint.

[0015] Furthermore, the dust removal structure also includes a locking piece, which passes through the bearing cover and is connected to the bearing seat.

[0016] A bearing system comprises a rotating shaft, a bearing and the dust removal structure for the bearing as described above.

[0017] A cleaning device comprises the bearing system as described above.

[0018] Furthermore, the rotating shaft is hollow and a liquid spraying pipe is provided inside the rotating shaft.

[0019] With the dust removal structure, the negative pressure component generates negative pressure in the first channel, and the first channel is connected to the installation space, so as to absorb the wear particles generated by the friction between the bearing and the rotating shaft in the installation space, and prevent the wear particles from contaminating the wafer. In addition, the supply component can provide a sealing medium into the input groove, and the sealing medium flows into the first channel through the gap and the installation space, thereby realizing medium sealing of the installation space, further preventing the wear particles from being discharged from the gap, and also preventing foreign impurities from entering the installation space to cause bearing wear. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The accompanying drawings are used to provide further understanding of the present application and constitute a part of the specification. They are used to explain the present application together with the embodiments of the present application and do not constitute a limitation of the present application.

[0021] Figure 1 A structural schematic diagram of a bearing system provided in one embodiment of the present application;

[0022] Figure 2 for Figure 1 A partially exploded schematic diagram of the bearing system shown;

[0023] Figure 3 for Figure 1 A top view structural schematic diagram of the bearing system shown;

[0024] Figure 4 for Figure 3 The cross-sectional structural diagram of the bearing system at AA is shown;

[0025] Figure 5 for Figure 4 An enlarged schematic diagram of the structure at B shown;

[0026] Figure 6 for Figure 1 A schematic diagram of the structure of the bearing cap in the bearing system shown;

[0027] Figure 7 for Figure 6 A schematic structural diagram of the bearing cover from another angle shown;

[0028] Figure 8 for Figure 7 A schematic cross-sectional view of the bearing cap at CC shown;

[0029] Fig. 9 for Figure 6 A structural schematic diagram of the bearing cover at another angle shown;

[0030] Fig.10 for Fig. 9 The cross-sectional structure diagram of the bearing cover at DD is shown.

[0031] Description of labels:

[0032] 10. Rotating shaft; 20. Bearing; 30. Bearing seat; 40. Bearing cover; 31. Installation space; 32. Opening; 11. Gap; 41. First channel; 42. Input slot; 43. Input hole; 44. First connecting hole; 45. Connecting portion; 46. Abutting portion; 461. Abutting surface; 462. Inclined surface; 47. Uniform channel; 48. Second connecting hole; 33. Second channel; 49. Connecting channel; 50. Connecting joint; 60. Locking piece. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0034] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0035] An embodiment of the present application provides a cleaning device, which is used to clean a wafer. Specifically, the cleaning device drives the wafer to rotate, and during the rotation of the wafer, a liquid medicine is sprayed onto the surface of the wafer, and the centrifugal force generated by the rotation allows the liquid medicine to pass through the surface of the wafer and be thrown out to achieve a cleaning effect.

[0036] Furthermore, the cleaning device includes a bearing system and a cleaning disc. Figure 1 and Figure 2 The bearing system includes a rotating shaft 10 and a bearing 20. The rotating shaft 10 is supported by the bearing 20 and connected to the cleaning disk to realize the rotation of the cleaning disk. The cleaning disk is used to carry the wafer. Furthermore, the rotating shaft 10 is hollow, and a liquid spraying pipe is provided inside the rotating shaft 10 to spray the cleaning liquid to the bottom of the wafer through the liquid spraying pipe to realize the cleaning of the bottom of the wafer.

[0037] Please also see Figures 3 to 5 In one embodiment, the bearing system further includes a dust removal structure for the bearing 20 , and the dust removal structure includes a bearing seat 30 and a bearing cover 40 .

[0038] The bearing seat 30 has an installation space 31 and a through hole and an opening 32 connected to the installation space 31. The bearing 20 is installed in the installation space 31. The shaft 10 extends into the installation space 31 through the through hole and supports the bearing 20 in the installation space 31, and then extends out from the opening 32. The bearing cover 40 is connected to the opening 32 of the bearing seat 30, and a gap 11 connected to the installation space 31 is formed between the bearing cover 40 and the shaft 10. The bearing cover 40 is provided with mutually independent first channels 41 (see Figure 7 ) and an input groove 42, the first channel 41 is connected to the installation space 31, and the input groove 42 is connected to the gap 11.

[0039] It can be understood that the through hole and the opening 32 are respectively located on two opposite sides of the installation space 31 , so that the rotating shaft 10 passes through the installation space 31 .

[0040] Furthermore, the dust removal structure also includes a negative pressure component and a supply component. The negative pressure component is connected to the first channel 41 , and the supply component is connected to the input slot 42 . A sealing medium is provided in the input slot 42 .

[0041] With the dust removal structure described above, the negative pressure component generates negative pressure in the first channel 41, and the first channel 41 is connected to the installation space 31, so as to absorb the wear particles generated by the friction between the bearing 20 and the rotating shaft 10 in the installation space 31, and prevent the wear particles from contaminating the wafer. In addition, the supply component can provide a sealing medium into the input groove 42, and the sealing medium flows into the first channel 41 through the gap 11 and the installation space 31, thereby achieving medium sealing of the installation space 31, further preventing the wear particles from being discharged from the gap 11, and also preventing foreign impurities from entering the installation space 31 to cause the bearing 20 to wear.

[0042] It is understandable that the dust removal structure can be applied to other equipment in addition to the above-mentioned cleaning equipment, which is not limited here. In addition, it should be noted that in this embodiment, the sealing medium is water. In other embodiments, the sealing medium can also be other liquids or gases, which are not limited here.

[0043] See also Figures 6 to 10 In one embodiment, the bearing cover 40 is further provided with an input hole 43, which is communicated with the input groove 42 and passes through the bearing cover 40 to communicate with the supply assembly. Figure 1 In the illustrated embodiment, the input hole 43 penetrates through a surface of the bearing cover 40 facing away from the bearing seat 30 .

[0044] In one embodiment, the input groove 42 is formed on the inner side wall of the bearing cover 40 facing the rotating shaft 10 to facilitate the input of the sealing medium into the gap 11. Furthermore, the input groove 42 is an annular groove so that the sealing medium is input around the rotating shaft 10 to further improve the sealing performance. Preferably, there are multiple input holes 43, and the multiple input holes 43 are arranged at intervals along the circumference of the rotating shaft 10 to increase the input flow rate of the sealing medium while preventing the sealing medium from flowing too fast in the input hole 43.

[0045] In one embodiment, the bearing cover 40 is further provided with a first communication hole 44 communicating with the first channel 41, and the first communication hole 44 penetrates the bearing cover 40 and communicates with the installation space 31, so that the wear particles and the sealing medium in the installation space 31 are sucked into the first channel 41 through the first communication hole 44, and then discharged through the first channel 41. Further, the bearing cover 40 is provided with a plurality of first communication holes 44, and the plurality of first communication holes 44 are arranged at intervals along the circumference of the rotating shaft 10, so as to improve the adsorption strength to the installation space 31, and ensure that the wear particles and the sealing medium in the installation space 31 are sucked out.

[0046] It can be understood that, in this embodiment, the first channel 41 is connected to the installation space 31 through the first connecting hole 44. One end of the first connecting hole 44 is connected to the first channel 41, and the other end passes through the side surface of the bearing cover 40 facing the bearing seat 30 to communicate with the installation space 31. The first channel 41 is an annular channel surrounding the rotating shaft 10. If the number of the first connecting holes 44 is too small, for example, there is only one, the suction force near the first connecting hole 44 is strong, and the suction force far away from the first connecting hole 44 is weak, resulting in the wear particles and sealing medium far away from the first connecting hole 44 in the installation space 31. It is difficult to suck out; if a reasonable number of multiple first connecting holes 44 are provided, and the multiple first connecting holes 44 are evenly spaced along the circumference of the rotating shaft 10, it can be ensured that the wear particles and sealing medium at any position in the installation space 31 can be sucked out through the first connecting holes 44.

[0047] Of course, in other embodiments, the first channel 41 may also be disposed on a side surface of the bearing cover 40 facing the bearing seat 30, and the first channel 41 penetrates the bearing cover 40, that is, the first channel 41 is an annular groove, and is located on a side surface of the bearing cover 40 facing the bearing seat 30, so as to communicate with the installation space 31. At the same time, the provision of the annular groove can also ensure that the suction force is evenly distributed, ensuring that the wear particles and sealing medium at any position in the installation space 31 are sucked in.

[0048] In one embodiment, the bearing cover 40 includes a connecting portion 45 and an abutting portion 46. The connecting portion 45 is connected to a side surface of the bearing seat 30 having an opening 32. The abutting portion 46 can pass through the opening 32 and extend into the installation space 31, and abut against the bearing 20 in the installation space 31 to fix the bearing 20.

[0049] Furthermore, the abutting portion 46 has an abutting surface 461 and an inclined surface 462 connected to the abutting surface 461, the abutting surface 461 is used to abut against the bearing 20, and the inclined surface 462 is arranged at intervals relative to the axial direction of the rotating shaft 10 to form an adsorption space with the bearing 20. The first communicating hole 44 passes through the inclined surface 462 to communicate with the adsorption space, and the adsorption space is a part of the installation space 31, so the first communicating hole 44 is communicated with the installation space 31.

[0050] In one embodiment, the bearing cover 40 is further provided with a uniform channel 47 and a plurality of second communication holes 48. The uniform channel 47 is located outside the first channel 41 away from the rotating shaft 10. The uniform channel 47 is connected to the negative pressure component. The plurality of second communication holes 48 are all connected to the uniform channel 47 and the first channel 41, and the plurality of second communication holes 48 are arranged at intervals along the circumference of the rotating shaft 10. In this way, the negative pressure component first generates negative pressure in the uniform channel 47, and then generates negative pressure in the first channel 41 through the second communication holes 48, so that the negative pressure distribution in the first channel 41 is more uniform, and then the adsorption force of the first channel 41 on the installation space 31 is more uniformly distributed.

[0051] Specific to Figure 1 In the illustrated embodiment, the first channel 41 and the uniform channel 47 are both annular channels and are coaxially arranged with the rotating shaft 10. The radial dimension of the uniform channel 47 is larger than the radial dimension of the first channel 41. At the same time, a plurality of second communication holes 48 are evenly spaced along the circumference of the rotating shaft 10 to further improve the uniformity of the negative pressure distribution.

[0052] In one embodiment, the bearing seat 30 is further provided with a second channel 33, the second channel 33 is connected to the first channel 41, and the second channel 33 runs through the bearing seat 30 to communicate with the negative pressure component. It is understandable that one end of the second channel 33 is connected to the first channel 41, and the other end runs through the bearing seat 30 and communicates with the negative pressure component. Figure 1 In the illustrated embodiment, the bearing cover 40 is further provided with a connecting channel 49, one end of which is connected to the uniform channel 47, and the other end is used to connect to the second channel 33 on the bearing seat 30, and the end of the second channel 33 away from the connecting channel 49 is connected to the negative pressure component.

[0053] In one embodiment, the dust removal structure further includes a connection joint 50, the connection joint 50 is in communication with the first channel 41, and the negative pressure assembly is connected to the connection joint 50 to achieve communication with the first channel 41. Specifically, the connection joint 50 is in communication with one end of the second channel 33 that passes through the bearing seat 30. Of course, in other embodiments, the connection joint 50 can also be directly connected to the bearing cover 40 and communicated with the first channel 41 on the bearing cover 40.

[0054] In one embodiment, the dust removal structure further includes a locking member 60, which passes through the bearing cover 40 and is connected to the bearing seat 30 to lock and fix the bearing cover 40 to the side of the opening 32 on the bearing seat 30. Specifically, the locking member 60 is a screw, and the number of the locking members 60 is multiple.

[0055] In order to facilitate understanding of the technical solution of this application, Figure 1 and Figure 2 The action of the dust removal structure in the above embodiment is described as follows:

[0056] During the rotation of the shaft 10, the negative pressure assembly is activated, and the wear particles in the installation space 31 are sucked into the first connecting hole 44 under the action of the negative pressure, and then transported along the first channel 41, the second connecting hole 48, the uniform channel 47, the connecting channel 49, the second channel 33 and the connecting joint 50 until discharged. At the same time, the supply assembly inputs the sealing medium into the input groove 42 through the input hole 43, and the sealing medium is input into the gap 11 between the bearing cover 40 and the shaft 10 around the shaft 10 through the input groove 42, and then enters the installation space 31, and then can be transported and discharged along the above path with the wear particles, thereby realizing the sealing of the installation space 31, further preventing the wear particles from being discharged, and also preventing the entry of foreign impurities.

[0057] It is understandable that if Figure 1 As shown, when a rotating shaft 10 is supported by two bearings 20 , a corresponding dust removal structure can be provided for each bearing 20 , which is not limited here.

[0058] Although the embodiments of the present application have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A dust removal structure for a bearing, wherein a rotating shaft is supported on the bearing, characterized in that: The dust removal structure comprises: A bearing seat, comprising an installation space and a through hole and an opening connected to the installation space, wherein the bearing is installed in the installation space, and the rotating shaft extends into the installation space through the through hole and extends out from the opening; A bearing cover connected to the opening of the bearing seat, and a gap communicating with the installation space is formed between the bearing cover and the rotating shaft, and the bearing cover is provided with a mutually independent first channel and an input groove, the first channel is communicated with the installation space, and the input groove is communicated with the gap; a negative pressure component, connected to the first channel; A supply assembly is communicated with the input tank.

2. The dust removal structure for bearings according to claim 1, characterized in that: The bearing seat is provided with a second channel connected with the first channel, and the second channel runs through the bearing seat to be connected with the negative pressure component.

3. The dust removal structure for bearings according to claim 1, characterized in that: The bearing cover is further provided with a plurality of first communicating holes connected with the first passage, the first communicating holes penetrate the bearing cover and are connected with the installation space, and the plurality of first communicating holes are arranged at intervals along the circumference of the rotating shaft.

4. The dust removal structure for a bearing according to claim 3, characterized in that: The bearing cover is also provided with a uniform channel and a plurality of second connecting holes. The uniform channel is located on the outer side of the first channel away from the rotating shaft. The uniform channel is connected to the negative pressure component. Each of the second connecting holes is connected to the uniform channel and the first channel, and the plurality of second connecting holes are arranged at intervals along the circumference of the rotating shaft.

5. The dust removal structure for bearings according to claim 1, characterized in that: The bearing cover is also provided with an input hole, which is communicated with the input groove and passes through the bearing cover to be communicated with the supply assembly.

6. The dust removal structure for bearings according to claim 1, characterized in that: The dust removal structure also includes a connecting joint, which is communicated with the first channel, and the negative pressure component is connected to the connecting joint.

7. The dust removal structure for bearings according to claim 1, characterized in that: The dust removal structure also includes a locking member, which passes through the bearing cover and is connected to the bearing seat.

8. A bearing system, characterized in that: It comprises a rotating shaft, a bearing and a dust removal structure for the bearing as described in any one of claims 1 to 7.

9. A cleaning device, characterized in that: Comprising the bearing system of claim 8.

10. The cleaning device according to claim 9, characterized in that: The rotating shaft is hollow and a liquid spraying pipe is arranged inside the rotating shaft.

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