Auxiliary jig for installing cavity of thin film deposition equipment

Abstract

The utility model provides an auxiliary jig for mounting a cavity of thin film deposition equipment. The auxiliary jig comprises a first correcting ring, a second correcting ring, a first connecting piece, a second connecting piece, a third connecting piece and a fourth connecting piece, each of the first correcting ring and the second correcting ring comprises a semicircular fixing structure, and the two fixing structures are enclosed to form a cylindrical cavity; one end of the first correcting ring is connected with one end of the second correcting ring through a first connecting piece; the other end of the first correcting ring is connected with the other end of the second correcting ring through a second connecting piece; the first connecting piece and / or the second connecting piece are / is a detachable connecting piece; one end of the third connecting piece is connected with the first correcting ring, and the other end is provided with a buckle; one end of the fourth connecting piece is connected with the second correcting ring, and the other end is provided with a buckle. By using the auxiliary jig, the mounting efficiency of the cavity can be obviously improved, time and labor are saved, smooth butt joint of the air inlet pipe and the cavity is ensured, the equipment maintenance efficiency is improved, and the normal operation time of equipment is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer manufacturing, in particular to an auxiliary fixture for installing a cavity of a thin film deposition device. Background Art

[0002] like Figure 1-Figure 3 As shown, the thin film deposition equipment includes a chamber 1 (tube) for growing a film on a wafer, and the chamber 1 needs to be replaced during equipment maintenance. The chamber 1 is usually made of quartz and has a large volume. The height of the chamber 1 is about 2 meters and the diameter is about 1 meter. When installing the chamber 1, two or three people are required to place the chamber 1 on the fixture 2, and then slowly adjust the position of the chamber 1. When the chamber 1 and the fixture 2 are roughly coaxial, that is, when the axis of the chamber 1 and the axis of the fixture 2 are roughly coincident, use a vernier caliper or a feeler gauge to measure whether the gaps between the outer wall of the chamber 1 and the inner wall of the fixture 2 are all about 1 cm. If so, it means that the chamber 1 and the fixture 2 are coaxial. At this time, the chamber 1 can be lifted and installed in the thin film deposition equipment. If the chamber 1 and the fixture 2 are not coaxial, the chamber 1 cannot be docked with the gas nozzle of the equipment after being lifted, and the chamber 1 needs to be lowered and the position of the chamber 1 relative to the fixture 2 is readjusted.

[0003] However, currently when adjusting the position of cavity 1 relative to fixture 2, the operator visually inspects that cavity 1 and fixture 2 are roughly coaxial, and then uses a vernier caliper or feeler gauge to measure whether multiple gaps between the outer wall of cavity 1 and the inner wall of fixture 2 are all about 1 cm. This requires repeated adjustments of the position of cavity 1 relative to fixture 2 and multiple measurements of the gap size before cavity 1 can be adjusted into place, resulting in low installation efficiency of cavity 1. Utility Model Content

[0004] The utility model provides an auxiliary fixture for installing a cavity of a thin film deposition device, so as to solve the technical problem of low cavity installation efficiency.

[0005] In order to solve the above technical problems, the utility model provides an auxiliary fixture for installing a cavity of a thin film deposition device, comprising a first correction ring, a second correction ring, a first connecting piece, a second connecting piece, a third connecting piece and a fourth connecting piece;

[0006] The first correction ring and the second correction ring both include a semicircular fixing structure, and the two fixing structures enclose a cylindrical cavity;

[0007] One end of the first correcting ring and one end of the second correcting ring are connected via the first connecting member;

[0008] The other end of the first correction ring and the other end of the second correction ring are connected through the second connecting member;

[0009] The first connecting member and / or the second connecting member is a detachable connecting member;

[0010] One end of the third connecting member is connected to the first correcting ring, and the other end is provided with a buckle;

[0011] One end of the fourth connecting member is connected to the second correcting ring, and the other end is provided with a buckle.

[0012] Optionally, a rotating rod is provided at one end of the third connecting member; a notch is provided on the first correcting ring, fixing holes are provided at both ends of the notch, and both ends of the rotating rod are rotatably provided in the corresponding fixing holes.

[0013] Optionally, the fourth connecting member has the same structure as the third connecting member, and the second correcting ring has the same structure as the first correcting ring.

[0014] Optionally, one end of the third connecting member is connected to the middle position of the first correcting ring, and one end of the fourth connecting member is connected to the middle position of the second correcting ring.

[0015] Optionally, the diameter of the cylindrical cavity is equal to the outer diameter of the cavity to be installed.

[0016] Optionally, the first connecting member and the second connecting member are both detachable connecting members, and the first connecting member and the second connecting member are both bolts and nuts.

[0017] Optionally, the first connecting member and the second connecting member are both detachable connecting members, and the first connecting member and the second connecting member are both spring clips.

[0018] Optionally, the first connecting member is a detachable connecting member, the second connecting member is a non-detachable connecting member, the first connecting member is a spring buckle, and the second connecting member is a hinge.

[0019] Optionally, the first correction ring includes an outer layer and an inner layer connected to each other, and the hardness of the outer layer is greater than the hardness of the inner layer.

[0020] Optionally, the second correction ring includes an outer layer and an inner layer connected to each other, and the hardness of the outer layer is greater than the hardness of the inner layer.

[0021] The utility model provides an auxiliary fixture for installing a cavity of a thin film deposition device, wherein a first correction ring and a second correction ring are connected through a first connecting member and a second connecting member, and the connected first correction ring and the second correction ring are fixed on an existing fixture through a third connecting member and a fourth connecting member. In the process of the buckles of the third connecting member and the fourth connecting member being snapped into the existing fixture, the first correction ring and the second correction ring after the cavity is connected are moved to the center position of the existing fixture, so that the axes of the auxiliary fixture, the existing fixture and the cavity coincide, indicating that the cavity is adjusted in place, and the cavity can be lifted to install the cavity in the thin film deposition device. The unexpected effect brought by the auxiliary fixture is that it is no longer necessary to repeatedly adjust the position of the cavity relative to the fixture and measure the gap size multiple times before the cavity is adjusted in place. The use of the auxiliary fixture can significantly improve the installation efficiency of the cavity, save time and manpower, ensure the smooth docking of the air intake pipe and the cavity, and improve the equipment maintenance efficiency and the normal operation time of the equipment. It avoids the economic loss caused by the collision between the cavity and the inner wall of the machine due to the displacement of the cavity position during the repeated lifting and lowering of the cavity. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a structural schematic diagram of a cavity and a fixture in the prior art.

[0023] Figure 2 yes Figure 1 Schematic diagram of the structure of the cavity.

[0024] Figure 3 yes Figure 1 Schematic diagram of the structure of the fixture.

[0025] Figure 4 It is a structural schematic diagram of an auxiliary fixture for installing a cavity of a thin film deposition device provided by an embodiment of the utility model when in use.

[0026] Figure 5 yes Figure 4 Schematic diagram of the right side.

[0027] Figure 6 yes Figure 4 Schematic diagram of the structure of the auxiliary fixture.

[0028] [Description of reference numerals is as follows]:

[0029] Cavity-1, fixture-2;

[0030] Auxiliary fixture-10, first correction ring-11, second correction ring-12, first connecting piece-13, second connecting piece-14, third connecting piece-15, fourth connecting piece-16. DETAILED DESCRIPTION

[0031] In order to make the purpose, advantages and features of the present invention clearer, the following is a further detailed description of an auxiliary fixture for installing a cavity of a thin film deposition device proposed by the present invention in conjunction with the accompanying drawings. It should be noted that the accompanying drawings are all in a very simplified form and are not in precise proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention.

[0032] In the description of the present invention, the terms "first", "second", etc. are added for the convenience of description and reference, and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined by the terms "first", "second", etc. may explicitly or implicitly include one or more of the features.

[0033] like Figure 6 As shown, this embodiment provides an auxiliary fixture 10 for installing a cavity 1 of a thin film deposition device, comprising a first correction ring 11, a second correction ring 12, a first connecting piece 13, a second connecting piece 14, a third connecting piece 15 and a fourth connecting piece 16; the first correction ring 11 and the second correction ring 12 both include a semicircular fixing structure, and the two fixing structures enclose a cylindrical cavity; one end of the first correction ring 11 and one end of the second correction ring 12 are connected through the first connecting piece 13; the other end of the first correction ring 11 and the other end of the second correction ring 12 are connected through the second connecting piece 14; the first connecting piece 13 and / or the second connecting piece 14 are detachable connecting pieces; one end of the third connecting piece 15 is connected to the first correction ring 11, and the other end is provided with a buckle; one end of the fourth connecting piece 16 is connected to the second correction ring 12, and the other end is provided with a buckle.

[0034] like Figure 4-Figure 6 As shown, the method of using the auxiliary fixture 10 is as follows: place the cavity 1 of the thin film deposition equipment on the existing fixture 2; clamp the first correction ring 11 and the second correction ring 12 on the cylindrical outer wall of the cavity 1, and connect the first correction ring 11 and the second correction ring 12 through the first connector 13 and the second connector 14; clamp the buckle of the third connector 15 and the fourth connector 16 on the existing fixture 2. Since the axes of the auxiliary fixture 10, the existing fixture 2 and the cavity 1 coincide, it means that the cavity 1 is adjusted in place, and the cavity 1 can be lifted to install the cavity 1 in the thin film deposition equipment.

[0035] The present embodiment provides an auxiliary fixture 10 for installing a cavity 1 of a thin film deposition device, wherein a first correction ring 11 and a second correction ring 12 are connected via a first connecting member 13 and a second connecting member 14, and the connected first correction ring 11 and the second correction ring 12 are fixed to an existing fixture 2 via a third connecting member 15 and a fourth connecting member 16. In the process of the third connecting member 15 and the fourth connecting member 16 snapping into the existing fixture 2, the first correction ring 11 and the second correction ring 12 of the cavity 1 are moved to the center position of the existing fixture after being connected, so that the axes of the auxiliary fixture 10, the existing fixture 2 and the cavity 1 coincide with each other. At this time, it indicates that the cavity 1 is adjusted into place, and the cavity 1 can be lifted to be installed in the thin film deposition device. The unexpected effect of the auxiliary fixture 10 is that it is no longer necessary to repeatedly adjust the position of the cavity 1 relative to the fixture and measure the gap size multiple times before the cavity 1 can be adjusted in place. The use of the auxiliary fixture 10 can significantly improve the installation efficiency of the cavity 1, save time and manpower, ensure the smooth docking of the air intake pipe and the cavity 1, and improve the equipment maintenance efficiency and the normal operation time of the equipment. It avoids the economic loss caused by the collision between the cavity 1 and the inner wall of the machine due to the displacement of the position of the cavity 1 during the repeated lifting and lowering process.

[0036] Optional, such as Figure 4-Figure 6 As shown, a rotating rod is provided at one end of the third connecting member 15; a notch is provided on the first correction ring 11, and fixing holes are provided at both ends of the notch, and both ends of the rotating rod are rotatably provided in the corresponding fixing holes. The rotating rod can rotate relative to the fixing hole, so that the buckle can be easily inserted into the existing jig 2 or removed from the existing jig 2. In other embodiments, the third connecting member 15 can be made of a material with a certain elasticity, so that the buckle can be inserted into the existing jig 2 or removed from the existing jig 2.

[0037] Optional, such as Figure 6 As shown, the fourth connecting member 16 has the same structure as the third connecting member 15 , and the second correcting ring 12 has the same structure as the first correcting ring 11 , which facilitates the design and manufacture of the auxiliary fixture 10 .

[0038] Optional, such as Figure 4-Figure 6 As shown, one end of the third connecting member 15 is connected to the middle position of the first correcting ring 11, and one end of the fourth connecting member 16 is connected to the middle position of the second correcting ring 12. This can improve the stability of the first correcting ring 11 and the second correcting ring 12 and prevent the first correcting ring 11 and the second correcting ring 12 from tilting relative to the existing fixture 2.

[0039] Optional, such as Figure 4-Figure 6As shown, the diameter of the cylindrical cavity is equal to the outer diameter of the cavity 1 to be installed, so that the inner wall of the fixing structure of the first correction ring 11 and the second correction ring 12 can fit with the outer wall of the cavity 1, so that the cylindrical cavity is coaxial with the cavity 1. In other embodiments, the diameter of the cylindrical cavity can be slightly smaller or slightly larger than the outer diameter of the cavity 1 to be installed.

[0040] Optional, such as Figure 6 As shown, the first connecting member 13 and the second connecting member 14 are both detachable connecting members, and the first connecting member 13 and the second connecting member 14 are both bolts and nuts. The first correction ring 11 and the second correction ring 12 can be easily connected and disassembled by bolts and nuts.

[0041] Optional, reference Figure 6 As shown, the first connecting member 13 and the second connecting member 14 are both detachable connecting members, and the first connecting member 13 and the second connecting member 14 are both spring buckles. The spring buckles can be used to easily connect and disassemble the first correction ring 11 and the second correction ring 12.

[0042] Optional, reference Figure 4-Figure 6 As shown, the first connecting member 13 is a detachable connecting member, the second connecting member 14 is a non-detachable connecting member, the first connecting member 13 is a spring buckle, and the second connecting member 14 is a hinge. The hinge can connect the first correction ring 11 and the second correction ring 12 into a whole, which is convenient for taking the first correction ring 11 and the second correction ring 12. The spring buckle can put the first correction ring 11 and the second correction ring 12 in a locked or open state, so that the first correction ring 11 and the second correction ring 12 can hug the cavity 1 or be removed from the cavity 1.

[0043] Optional, reference Figure 4-Figure 6 As shown, the first correction ring 11 includes an outer layer and an inner layer that are connected to each other, and the hardness of the outer layer is greater than the hardness of the inner layer. The inner layer of the first correction ring 11 can be made of a material with a certain elasticity such as PVC (Polyvinylchloride) or PP (polypropylene), so that the inner layer of the first correction ring 11 and the outer wall of the cavity 1 can be interference fit, and the inner layer of the first correction ring 11 can be prevented from scratching the cavity 1. The outer layer of the first correction ring 11 is made of a harder material, which can prevent the outer layer of the first correction ring 11 from deforming and interfering with the visual inspection of whether the axes of the auxiliary fixture 10, the existing fixture 2 and the cavity 1 coincide.

[0044] Optional, reference Figure 4-Figure 6As shown, the second correction ring 12 includes an outer layer and an inner layer that are connected to each other, and the hardness of the outer layer is greater than the hardness of the inner layer. The inner layer of the second correction ring 12 can be made of a material with a certain elasticity such as PVC (Polyvinylchloride) or PP (polypropylene), so that the inner layer of the second correction ring 12 and the outer wall of the cavity 1 can be interference fit, and the inner layer of the second correction ring 12 can be prevented from scratching the cavity 1. The outer layer of the second correction ring 12 is made of a harder material, which can prevent the outer layer of the second correction ring 12 from deforming and interfering with the visual inspection of whether the axes of the auxiliary fixture 10, the existing fixture 2 and the cavity 1 coincide.

[0045] In summary, the utility model provides an auxiliary fixture 10 for installing a cavity 1 of a thin film deposition device, wherein a first correction ring 11 and a second correction ring 12 are connected by a first connecting member 13 and a second connecting member 14, and the connected first correction ring 11 and the second correction ring 12 are fixed on an existing fixture 2 by a third connecting member 15 and a fourth connecting member 16. In the process of the third connecting member 15 and the fourth connecting member 16 being snapped into the existing fixture 2, the first correction ring 11 and the second correction ring 12 of the cavity 1 are moved to the center position of the existing fixture after being connected, so that the axes of the auxiliary fixture 10, the existing fixture 2 and the cavity 1 coincide with each other. At this time, it indicates that the cavity 1 is adjusted into place, and the cavity 1 can be lifted to install the cavity 1 in the thin film deposition device. The unexpected effect of the auxiliary fixture 10 is that it is no longer necessary to repeatedly adjust the position of the cavity 1 relative to the fixture and measure the gap size multiple times before the cavity 1 can be adjusted in place. The use of the auxiliary fixture 10 can significantly improve the installation efficiency of the cavity 1, save time and manpower, ensure the smooth docking of the air intake pipe and the cavity 1, and improve the equipment maintenance efficiency and the normal operation time of the equipment. It avoids the economic loss caused by the collision between the cavity 1 and the inner wall of the machine due to the displacement of the cavity 1 during the repeated lifting process.

[0046] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation to the scope of the utility model. Any changes and modifications made by ordinary technicians in this field based on the above disclosure are within the protection scope of the utility model.

Claims

1. An auxiliary fixture for installing a cavity of a thin film deposition device, characterized in that: It includes a first correction ring, a second correction ring, a first connecting piece, a second connecting piece, a third connecting piece and a fourth connecting piece; The first correction ring and the second correction ring both include a semicircular fixing structure, and the two fixing structures enclose a cylindrical cavity; One end of the first correcting ring and one end of the second correcting ring are connected via the first connecting member; The other end of the first correction ring and the other end of the second correction ring are connected through the second connecting member; The first connecting member and / or the second connecting member is a detachable connecting member; One end of the third connecting member is connected to the first correcting ring, and the other end is provided with a buckle; One end of the fourth connecting member is connected to the second correcting ring, and the other end is provided with a buckle.

2. The auxiliary fixture for installing a cavity of a thin film deposition device according to claim 1, characterized in that: A rotating rod is arranged at one end of the third connecting member; a notch is arranged on the first correcting ring, and fixing holes are arranged at both ends of the notch, and both ends of the rotating rod are rotatably arranged in the corresponding fixing holes.

3. The auxiliary fixture for installing a cavity of a thin film deposition device according to claim 2, characterized in that: The fourth connecting member has the same structure as the third connecting member, and the second correcting ring has the same structure as the first correcting ring.

4. The auxiliary fixture for installing a cavity of a thin film deposition device according to claim 3, characterized in that: One end of the third connecting member is connected to the middle position of the first correcting ring, and one end of the fourth connecting member is connected to the middle position of the second correcting ring.

5. The auxiliary fixture for installing a cavity of a thin film deposition device according to claim 1, characterized in that: The diameter of the cylindrical cavity is equal to the outer diameter of the cavity to be installed.

6. The auxiliary fixture for installing a cavity of a thin film deposition device according to claim 1, characterized in that: The first connecting member and the second connecting member are both detachable connecting members, and the first connecting member and the second connecting member are both bolts and nuts.

7. The auxiliary fixture for installing a cavity of a thin film deposition device according to claim 1, characterized in that: The first connecting member and the second connecting member are both detachable connecting members, and the first connecting member and the second connecting member are both spring buckles.

8. The auxiliary fixture for installing a cavity of a thin film deposition device according to claim 1, characterized in that: The first connecting member is a detachable connecting member, the second connecting member is a non-detachable connecting member, the first connecting member is a spring buckle, and the second connecting member is a hinge.

9. The auxiliary fixture for installing a cavity of a thin film deposition device according to claim 1, characterized in that: The first correction ring includes an outer layer and an inner layer connected to each other, and the hardness of the outer layer is greater than the hardness of the inner layer.

10. The auxiliary fixture for installing a cavity of a thin film deposition device according to claim 1, characterized in that: The second correction ring includes an outer layer and an inner layer connected to each other, and the hardness of the outer layer is greater than the hardness of the inner layer.

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