Jig for physical vapor deposition equipment

Abstract

The utility model discloses a jig for physical vapor deposition equipment, which comprises a jig body, the jig body is provided with a first opening, a first bearing surface and a second bearing surface, or the jig body is provided with a first opening, a bearing plate and a second bearing surface, the first bearing surface or the bearing plate is provided with a lifting part used for abutting against a cavity body of the reaction cavity. When the motor of the physical vapor deposition equipment needs to be replaced, a heater of the physical vapor deposition equipment is moved to a proper position, then the first opening is aligned with the bearing base located at the bottom of the cavity, and then the jig is transversely inserted to enable the surrounding wall of the jig body to be on the outer wall of the bearing base; when the motor is replaced, the second bearing face abuts against a holding block on a bearing base of the physical vapor deposition equipment, the first bearing face or the bearing plate is located below the cavity, then the lifting component acts to abut against the bottom of the cavity, at the moment, the motor of the physical vapor deposition equipment can be replaced, and replacement of the motor is convenient, rapid and safe.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a fixture used for physical vapor deposition equipment. Background Art

[0002] Semiconductor manufacturing processes mainly include photolithography, etching and film-forming processes, among which the film-forming process is mainly used to form ultra-thin metal and transition metal nitride films on the surface of the wafer. Currently, the film-forming process commonly used in semiconductor manufacturing is mainly the PVD deposition process (physical vapor deposition process). In semiconductor manufacturing, the PVD deposition process usually needs to be completed in a high vacuum platform. The existing popular and mature high vacuum platforms are mainly the Endura platform of Applied Materials, such as the Endura IIPVD deposition equipment, which achieves thin film deposition on the wafer placed in the reaction chamber by constructing a reaction chamber with a vacuum environment in the deposition equipment and performing a sputtering process in the reaction chamber.

[0003] During the sputtering process, the wafer to be deposited needs to be placed on the wafer supporting base of the reaction chamber. In order to ensure the uniformity of the deposition process, the wafer supporting base used in the currently popular PVD deposition equipment is usually equipped with a heater. During the process, the wafer will be transferred to the heater and moved to a suitable height, thereby producing qualified products. In these popular PVD deposition equipment, the entire heater assembly usually includes a supporting base and a heater, wherein the heater is mounted on the top of the supporting base, the supporting base is fixed on the slider by at least one holding block, and the slider is mounted on the screw rod. At the same time, a seal (such as a bellows) is installed between the bottom of the part of the supporting base where the heater is installed and the opening of the cavity of the reaction chamber that intersects the supporting base. Among them, when the motor is in working state, the slider moves up and down by relying on the motor and the screw rod, and thereby drives the supporting base and the heater on its top to move up and down through the holding block, thereby moving the wafer placed on the heater to a suitable height for deposition process processing. The motor can lock the up and down movement of the supporting base when it is not working. When the cavity of the reaction chamber is in a vacuum environment, the supporting base and the heater on the top of it will not move up and down due to the locking effect of the non-working motor.

[0004] During the use of PVD deposition equipment, it is common that the motor needs to be replaced due to life span or failure. When the motor needs to be replaced, it is easy to replace when the cavity of the reaction chamber of the physical vapor deposition equipment is in the atmospheric environment. Because when the cavity of the reaction chamber is in the atmospheric environment, after the motor is removed, the bearing base and the heater on its top will not be sucked to the upper part of the cavity due to the pressure difference between the inside and outside of the cavity. However, after the cavity of the reaction chamber of the physical vapor deposition equipment is in the atmospheric environment, PM (preventive maintenance) operation must be performed, and it takes dozens of hours to restore the machine, wasting manpower, material resources, and financial resources. Therefore, the preferred solution at present is to directly replace the motor when the cavity of the reaction chamber is in a vacuum environment. However, when the motor is removed in a vacuum environment, if there are no protective measures, after the motor is removed, the locking effect of the motor on the up and down movement of the bearing base disappears. Therefore, due to the strong suction caused by the pressure difference between the inside and outside of the cavity, the bearing base and the heater on its top will be sucked to the upper part of the cavity, which is very likely to cause personnel pinching, hardware impact damage, etc. In order to solve this problem, the general method of replacing the motor is to use a pad to clamp between the cavity and the heater block of the reaction chamber of the physical vapor deposition equipment, and then remove the motor. This method has at least two problems. First, it is difficult to find a suitable pad thickness, and it often takes a long time to find a suitable pad. Second, after replacing the motor, the pressure difference between the inside and outside of the cavity will exert an attraction on the support base and the heater on top of the cavity toward the upper part of the cavity, which will cause the support base to have a tendency to drive the heater block on it to move upward synchronously. Therefore, the heater block on the support base will clamp the pad, making it difficult to remove the pad, which is time-consuming and laborious. Utility Model Content

[0005] The purpose of the utility model is to provide a jig for physical vapor deposition equipment, so as to at least solve the technical problems in the prior art that when disassembling the motor of the heater under a vacuum environment, it is difficult to find the required pads of suitable thickness and it is difficult to disassemble the pads.

[0006] According to one aspect of the utility model, a fixture for a physical vapor deposition device is provided, comprising a fixture body, on which is provided:

[0007] a first opening extending therethrough;

[0008] A first carrying surface, on which a lifting component for abutting against a cavity of a reaction chamber of a physical vapor deposition device is disposed; and

[0009] A second bearing surface for abutting against a block on a bearing base of a physical vapor deposition apparatus.

[0010] Therefore, when the motor of the physical vapor deposition equipment needs to be replaced, the heater of the physical vapor deposition equipment is first moved to a suitable position, and then the first opening on the jig body is aligned with the supporting base located at the bottom of the cavity of the reaction chamber of the physical vapor deposition equipment, and then the jig is laterally inserted so that the surrounding wall of the jig body is on the outer wall of the supporting base, and the second supporting surface of the jig body is abutted against the holding block on the supporting base of the physical vapor deposition equipment, so that the first supporting surface of the jig body is located below the cavity of the physical vapor deposition equipment, and then, the lifting component on the first supporting surface is actuated to make the lifting component abut against the bottom of the cavity of the physical vapor deposition equipment to prevent the supporting base and the heater on the top of it from being sucked toward the cavity. At this time, the motor of the physical vapor deposition equipment can be replaced when the reaction chamber is in a vacuum environment. The replacement of the motor is convenient, fast and safe. After the replacement is completed, the lifting component is actuated to separate the lifting component from the bottom of the cavity of the physical vapor deposition equipment, and the jig can be easily taken away, which is very labor-saving and convenient.

[0011] In some embodiments, the fixture body may include a first straight wall, a semicircular arc wall, and a second straight wall connected in sequence, and the first opening is defined by the first straight wall, the semicircular arc wall, and the second straight wall connected in sequence, wherein the first straight wall and the second straight wall are arranged in parallel. Thus, the first straight wall and the second straight wall arranged in parallel ensure that the fixture can be smoothly surrounded by the periphery of the bearing base at the bottom of the cavity, and the semicircular arc wall ensures that the fixture body can be attached to the bearing base at the bottom of the cavity as close as possible, ensuring that the fixture can be stably installed between the bottom of the cavity of the physical vapor deposition device and the holding block on the bearing base.

[0012] In some embodiments, the cross section of the jig body may be U-shaped, and the jig body further includes a first side wall, a connecting wall, and a second side wall connected in sequence, and the first side wall and the second side wall are arranged in parallel. Thus, the U-shaped jig body is convenient for operators to take the jig, and the operators can easily take the jig by holding the first side wall and the second side wall arranged in parallel, which is convenient for installation and removal of the jig.

[0013] According to another aspect of the utility model, there is also provided a jig for a physical vapor deposition device, comprising a jig body and a carrier plate;

[0014] The fixture body is equipped with:

[0015] a first opening therethrough; and

[0016] A second bearing surface for abutting against a block on a bearing base of a physical vapor deposition apparatus;

[0017] The carrying plate is arranged on the fixture body, the first opening passes through the carrying plate, and a lifting component for abutting against a cavity of a reaction chamber of a physical vapor deposition device is arranged on the carrying plate.

[0018] Therefore, when the motor of the physical vapor deposition equipment needs to be replaced, the heater of the physical vapor deposition equipment is first moved to a suitable position, and then the first opening on the jig body is aligned with the supporting base located at the bottom of the cavity, and then the jig is laterally inserted so that the surrounding wall of the jig body is on the outer wall of the supporting base, and the second supporting surface of the jig body is against the holding block on the supporting base of the physical vapor deposition equipment, and the supporting plate is located below the cavity of the physical vapor deposition equipment, and then, the lifting component on the supporting plate is actuated so that the lifting component is against the bottom of the cavity of the physical vapor deposition equipment to prevent the supporting base and the heater on the top of the base from being sucked toward the cavity, at this time, the motor of the physical vapor deposition equipment can be replaced when the reaction chamber is in a vacuum environment, and the replacement of the motor is convenient, fast and safe. After the replacement is completed, the lifting component is actuated to separate the lifting component from the bottom of the cavity of the physical vapor deposition equipment, and the jig can be easily taken away, which is very labor-saving and convenient.

[0019] In some embodiments, the lifting component may include at least one threaded hole provided on the supporting plate and a screw that can be screwed into the threaded hole, and the threaded hole is arranged so that when the fixture wall is placed on the outer wall of the supporting base at the bottom of the cavity of the reaction chamber of the physical vapor deposition equipment and the second supporting surface is against the holding block on the supporting base of the physical vapor deposition equipment, the threaded hole is located below the cavity of the reaction chamber of the physical vapor deposition equipment.

[0020] Therefore, when it is necessary to replace the motor of the physical vapor deposition equipment, first move the heater of the physical vapor deposition equipment to a suitable position, then align the first opening on the jig body with the supporting base located at the bottom of the cavity, and then laterally insert the jig so that the surrounding wall of the jig body is on the outer wall of the supporting base, and the second supporting surface of the jig body is against the block on the supporting base of the physical vapor deposition equipment, and the supporting plate is located below the cavity of the physical vapor deposition equipment. At this time, screw the screw in the threaded hole on the supporting plate. As the screw is screwed, the top of the screw extends from the surface of the supporting plate, and the screw continues to be screwed until the ends of all the screws touch the bottom of the cavity of the physical vapor deposition equipment. Then the motor of the physical vapor deposition equipment can be replaced. After the replacement is completed, loosen all the screws and take away the jig. The replacement of the motor is convenient, fast and safe.

[0021] In some embodiments, the carrier plate includes an edge portion extending from the outer side wall of the fixture body, and the threaded hole is provided on the edge portion. Thus, when replacing the motor of the physical vapor deposition device, the end of the screw can be pushed to the bottom of the cavity of the physical vapor deposition device or separated from the bottom of the cavity of the physical vapor deposition device by screwing the screw from the bottom of the edge portion of the carrier plate, and the screwing operation of the screw is very convenient.

[0022] In some embodiments, the length of the screw can be longer than the thickness of the edge portion, thereby ensuring that when the screw is rotated, the end of the screw can easily reach the bottom of the chamber of the physical vapor deposition device.

[0023] In some embodiments, the number of the screw rods and the threaded holes can be six. Thus, the six screw rods are screwed in sequence so that the ends of the six screw rods are all pushed against the bottom of the cavity of the physical vapor deposition device. The cavity of the physical vapor deposition device is supported by the six screw rods, which can ensure that the cavity of the physical vapor deposition device is evenly stressed and stably supported by the fixture.

[0024] In some embodiments, the diameter of the carrier plate is not less than the diameter of the cavity of the reaction chamber of the physical vapor deposition device, and the second carrier surface is configured to fit with the end surface of the holding block on the bearing base of the physical vapor deposition device. Thus, it can be ensured that the screw on the carrier plate and the second carrier surface can be stably stuck between the bottom of the cavity of the physical vapor deposition device and the holding block on the bearing base.

[0025] In some embodiments, the cross-section of the carrier plate is a circle with an unclosed outer periphery, and a second opening connected to the first opening is defined between the first end and the second end of the unclosed outer periphery of the carrier plate, and the width of the second opening is greater than the width of the first opening. Therefore, when it is necessary to replace the motor of the physical vapor deposition device, the heater of the physical vapor deposition device is first moved to a suitable position, and then the second opening on the carrier plate and the first opening on the jig body are aligned with the bearing base at the bottom of the cavity, and then the jig is laterally inserted so that the surrounding wall of the jig body is on the outer wall of the bearing base, and the width of the second opening is greater than the width of the first opening, so that the second opening will form an escape position, and when the surrounding wall of the jig body is on the outer wall of the bearing base, the escape position formed by the second opening can provide a space for accommodating the screw rod components on the physical vapor deposition device, thereby preventing the jig from interfering with the screw rod components on the physical vapor deposition device and affecting the installation and use of the jig.

[0026] In some embodiments, the corner between two adjacent planar walls in the second opening may be L-shaped. Thus, when the fixture body wall is on the outer wall of the supporting base, the clearance formed by the second opening can provide maximum accommodation space for the screw rod component on the physical vapor deposition device.

[0027] In some embodiments, the fixture body may include a first straight wall, a semicircular arc wall, and a second straight wall connected in sequence, and the first opening is defined by the first straight wall, the semicircular arc wall, and the second straight wall connected in sequence, wherein the first straight wall and the second straight wall are arranged in parallel. Thus, the parallel arrangement of the first straight wall and the second straight wall ensures that the fixture can smoothly surround the periphery of the bearing base at the bottom of the cavity, and the semicircular arc wall ensures that the fixture body can be attached to the bearing base as close as possible, ensuring that the fixture can be stably installed between the bottom of the cavity of the physical vapor deposition device and the holding block on the bearing base.

[0028] In some embodiments, the cross section of the jig body may be U-shaped, and the jig body includes a first side wall, a connecting wall, and a second side wall connected in sequence, and the first side wall and the second side wall are arranged in parallel. Thus, the U-shaped jig body is convenient for operators to take the jig, and the operators can easily take the jig by holding the first side wall and the second side wall arranged in parallel, which is convenient for installation and removal of the jig. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 This is a schematic structural diagram of a fixture for physical vapor deposition equipment according to one embodiment of the utility model;

[0030] Figure 2 for Figure 1 The schematic diagram of the structure of the fixture after the screw is hidden;

[0031] Figure 3 for Figure 2 a side view of the jig shown;

[0032] Figure 4 for Figure 2 The schematic diagram of the structure of the fixture along direction A is shown. DETAILED DESCRIPTION

[0033] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0034] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or any actual relationship or order.

[0035] Embodiment 1:

[0036] Figures 1 to 4 The structure of a fixture for physical vapor deposition equipment according to one embodiment of the utility model is schematically shown.

[0037] refer to Figures 1 to 4 A fixture for physical vapor deposition equipment includes a fixture body 1, a carrying plate 2 and a lifting component.

[0038] refer to Figure 1 and Figure 2 A first opening 11 is formed on the side of the fixture body 1, and the first opening 11 passes through from the bottom to the top of the fixture body 1. The first opening 11 is used to accommodate a supporting base at the bottom of the cavity of the reaction chamber of the physical vapor deposition equipment.

[0039] refer to Figure 1 and Figure 2 , the bearing plate 2 is arranged on the top of the jig body 1. Specifically, in the present embodiment, the bearing plate 2 is integrally formed with the jig body 1, and the top of the jig body 1 extends outward by a certain thickness to form the bearing plate 2, that is, the edge of the bearing plate 2 has a certain thickness, so that the overall bearing strength of the bearing plate 2 can be improved, and the first opening 11 also passes through the bearing plate 2 from top to bottom. In other embodiments, the bearing plate 2 can also be welded to the top of the jig body 1, or the bearing plate 2 can also be installed and fixed to the bottom of the jig body 1 by a snap-fit ​​structure, as long as the structure can ensure that the bearing plate 2 and the jig body 1 are firmly installed.

[0040] refer to Figure 1 and Figure 2 The bottom of the fixture body 1 is a second bearing surface 12, and the second bearing surface 12 is used to abut against a heater block on a bearing base of a physical vapor deposition device.

[0041] refer to Figure 2The jig body 1 includes a first straight wall 111, a semicircular arc wall 112 and a second straight wall 113 connected in sequence. The first opening 11 is defined by the first straight wall 111, the semicircular arc wall 112 and the second straight wall 113 connected in sequence. There is a smooth transition between the first straight wall 111 and the semicircular arc wall 112, and there is a smooth transition between the semicircular arc wall 112 and the second straight wall 113. The spacing between the first straight wall 111 and the second straight wall 113 is greater than the outer diameter of the supporting base at the bottom of the cavity of the physical vapor deposition device. Preferably, the first straight wall 111 and the second straight wall 113 are arranged in parallel. The first straight wall 111 and the second straight wall 113 ensure that the jig body 1 can be smoothly surrounded by the periphery of the supporting base. The semicircular arc wall 112 ensures that the jig body 1 can be attached to the supporting base as close as possible, thereby ensuring that the jig can be firmly installed between the bottom of the cavity of the physical vapor deposition device and the block on the supporting base.

[0042] refer to Figure 3 , the cross section of the fixture body 1 along the plane where the carrier plate 2 is located (i.e. Figure 4 The longitudinal section of the jig body 1 is U-shaped, and the jig body 1 includes a first side wall 101, a connecting wall 102, and a second side wall 103 connected in sequence. Preferably, the first side wall 101 and the second side wall 102 are arranged in parallel, and the inner wall of the first side wall 101, the inner wall of the connecting wall 102, and the inner wall of the second side wall 103 are the first straight wall 111, the semicircular arc wall 112, and the second straight wall 113 connected in sequence; the U-shaped jig body 1 is convenient for the operator to take the jig, and the operator can easily take the jig by holding the first side wall 101 and the second side wall 102 with his hand, which is convenient for the installation and disassembly of the jig.

[0043] refer to Figures 1 to 3 The carrying plate 2 includes an edge portion 23 extending from the outer side wall of the fixture body 1, that is, Figure 3 In the embodiment, the edge portion 23 protrudes from the outer wall of the first side wall 101 , the outer wall of the connecting wall 102 , and the outer wall of the second side wall 103 .

[0044] refer to Figure 1 and Figure 2 In this embodiment, the lifting component includes at least one threaded hole 21 on the bearing plate 2 and a screw 3 that can be screwed into the threaded hole 21. Specifically, refer to Figures 1 to 3A threaded hole 21 is formed on the carrier plate 2, and the threaded hole 21 is arranged on the edge portion 23 of the carrier plate 2. The screw 3 is screwed into the threaded hole 21. The threaded hole 21 is arranged so that when the fixture wall is placed on the outer wall of the supporting base at the bottom of the cavity of the reaction chamber of the physical vapor deposition equipment and the second supporting surface 12 is against the block on the supporting base of the physical vapor deposition equipment, the threaded hole 21 is located below the cavity of the reaction chamber of the physical vapor deposition equipment. This ensures that when the screw 3 in the threaded hole 21 is screwed, the end of the screw 3 can reach the bottom of the cavity of the physical vapor deposition equipment; align the first opening 11 on the fixture body 1 with the outer wall of the supporting base at the bottom of the cavity of the physical vapor deposition equipment The supporting base at the bottom of the cavity of the reaction chamber of the physical vapor deposition equipment is then inserted into the fixture horizontally so that the surrounding wall of the fixture body 1 is on the outer wall of the supporting base, and the second supporting surface 12 of the fixture body 1 is against the holding block on the supporting base of the physical vapor deposition equipment. The supporting plate 2 of the fixture body is located below the cavity of the physical vapor deposition equipment. At this time, screw the screw 3, and the top of the screw 3 extends from the upper surface of the supporting plate 2, that is, the first end face. Continue to screw the screw 3 until the end of the screw 3 hits the bottom of the cavity of the physical vapor deposition equipment, and then replace the motor of the physical vapor deposition equipment. After the replacement is completed, loosen the screw 3 and you can easily take away the fixture.

[0045] refer to Figures 1 to 3 In this embodiment, the number of the screw rods 3 and the number of the threaded holes 21 are both six, and the six threaded holes 21 are distributed on the edge portion 23 of the bearing plate 2 at approximately equal intervals along the outer periphery of the bearing plate 2; Figure 1 , six screws 3 are respectively screwed into the six threaded holes 21 on the carrier plate 2 from bottom to top, and the six screws 3 are screwed in sequence so that the ends of the six screws 3 are all against the bottom of the cavity of the physical vapor deposition device. The cavity of the physical vapor deposition device is supported by the six screws 3, which can ensure that the cavity of the physical vapor deposition device is evenly stressed and stably supported by the fixture. In other embodiments, the number of screws 3 and threaded holes 21 can also be set to other numbers as needed, such as three, four, five, etc., as long as it can ensure that the cavity of the physical vapor deposition device can be stably supported.

[0046] refer to Figure 1Preferably, the length of the screw 3 is longer than the thickness of the edge portion 23 of the carrier plate 2 and the top of the screw 3 can extend from the upper surface of the carrier plate 2, so that it can be ensured that when the screw 3 is screwed, the top of the screw 3 can easily reach the bottom of the cavity of the physical vapor deposition device. The screw 3 of a suitable length can be selected according to the needs and goals, as long as it can be ensured that when the screw 3 is screwed, the top of the screw 3 can reach the bottom of the cavity of the physical vapor deposition device. In addition, since the edge portion 23 of the carrier plate 2 protrudes from the outer wall of the fixture body 1, when replacing the motor of the physical vapor deposition device, the screw 3 can be screwed from the bottom of the edge portion 23 of the carrier plate 2 to make the end of the screw 3 reach the bottom of the cavity of the physical vapor deposition device or be separated from the bottom of the cavity of the physical vapor deposition device, and the screwing operation of the screw 3 is very convenient.

[0047] In other embodiments, the lifting component may also be a small cylinder, such as a needle-type cylinder, and the position where the needle-type cylinder is installed on the supporting plate 2 is located at the bottom of the edge portion 23 of the supporting plate 2, and the push rod of the needle-type cylinder can pass through the edge portion 23 of the supporting plate 2 and extend from the upper surface of the supporting plate 2, so that it can be used to abut against the cavity of the physical vapor deposition equipment. The lifting component may also be a small linear motor, such as a micro electric push rod, and the position where the micro electric push rod is installed on the supporting plate 2 is located at the bottom of the edge portion 23 of the supporting plate 2, and the push rod component of the micro electric push rod can pass through the edge portion 23 of the supporting plate 2 and extend from the upper surface of the supporting plate 2, so that it can be used to abut against the cavity of the physical vapor deposition equipment.

[0048] In order to adapt to the bottom shape of the cavity of the physical vapor deposition device and to adapt to the block on the supporting base of the physical vapor deposition device, the diameter of the supporting plate 2 is not less than the diameter of the cavity of the reaction chamber of the physical vapor deposition device, and the second supporting surface 12 is configured to be able to fit with the end face of the block on the supporting base of the physical vapor deposition device; preferably, the diameter of the supporting plate 2 is equivalent to the diameter of the bottom of the cavity of the reaction chamber of the physical vapor deposition device, so that it can be ensured that when the screw 3 in the threaded hole 21 on the supporting plate 2 is screwed, the end of the screw 3 can reach the bottom of the cavity of the physical vapor deposition device. Specifically: The second opening 22 on the carrier plate 2 and the first opening 11 on the fixture body 1 are aligned with the carrier base located at the bottom of the cavity of the reaction chamber of the physical vapor deposition equipment, and then the fixture is horizontally inserted so that the fixture wall is on the outer wall of the carrier base and the semicircular arc wall 112 of the first opening 11 is attached to the carrier base, the carrier plate 2 is aligned with the bottom of the cavity of the reaction chamber of the physical vapor deposition equipment in the up and down direction. At this time, the edge 23 of the carrier plate 2 is located below the bottom of the cavity, and when the screw 3 in the threaded hole 21 on the carrier plate 2 is screwed, the end of the screw 3 can be pushed to the bottom of the cavity of the physical vapor deposition equipment.

[0049] In this embodiment, reference Figures 1 to 4, the cross section of the load-bearing plate 2 (i.e. Figure 4 The longitudinal section of the middle carrier plate 2 is a circle with a non-closed outer periphery, and the edge of the outer periphery of the carrier plate 2 is a circle with a section broken in the middle, so that it can be adapted to the bottom shape of the cavity of the physical vapor deposition equipment, refer to Figure 4 A second opening 22 is defined between the first end 201 and the second end 202 of the non-closed outer periphery of the carrier plate 2, the second opening 22 is connected to the first opening 11, the width of the second opening 22 is greater than the width of the first opening 11, the first end 201 of the carrier plate 2 protrudes from the free end of the first side wall 101, the second end 202 of the carrier plate 2 protrudes from the free end of the second side wall 103, the first end 201 of the carrier plate 2, the free end of the first side wall 101 of the fixture body 1, the opening portion of the first opening 11, the second end 202 of the carrier plate 2, and the free end of the second side wall 103 of the fixture body 1 together form an avoidance position, when the surrounding wall of the fixture body 1 is on the bearing base, the avoidance position can provide an accommodating space for the screw rod component on the physical vapor deposition device, to prevent the fixture from interfering with the screw rod component on the physical vapor deposition device, thereby affecting the installation and use of the fixture.

[0050] refer to Figure 4 The corner between two adjacent plane walls in the second opening 22 is L-shaped. In this way, when the surrounding wall of the fixture body 1 is on the outer wall of the supporting base, the avoidance position formed by the second opening 22 can provide accommodating space for the screw components on the physical vapor deposition equipment to the maximum extent.

[0051] When the motor of the physical vapor deposition equipment needs to be replaced, first move the heater of the physical vapor deposition equipment to a suitable position, then align the second opening 22 on the supporting plate 2 and the first opening 11 on the fixture body 1 with the supporting base at the bottom of the cavity of the reaction chamber of the physical vapor deposition equipment, and then insert the fixture horizontally so that the fixture wall is on the outer wall of the supporting base, and the second supporting surface 12 of the fixture body 1 is against the block on the supporting base of the physical vapor deposition equipment, and the threaded hole 21 on the edge 23 of the supporting plate 2 is located below the cavity of the physical vapor deposition equipment. At this time, screw the screw 3 on the supporting plate 2. As the screw 3 is screwed, the top of the screw 3 extends from the upper surface of the supporting plate 2. The six screws 3 are screwed in sequence so that the ends of the six screws 3 are all against the bottom of the cavity of the physical vapor deposition equipment. At this time, the motor of the physical vapor deposition equipment can be replaced. The replacement of the motor is convenient, fast and safe. After the replacement is completed, the six screws 3 can be loosened and the fixture can be easily taken away, which is very labor-saving and convenient.

[0052] Embodiment 2:

[0053] The fixture for physical vapor deposition equipment includes a fixture body 1 and a lifting component. In this embodiment, the structure of the fixture body 1 can be the same as that of the first embodiment, so it will not be repeated here.

[0054] The difference from the first embodiment is that, in this embodiment, the fixture does not include the bearing plate 2, a first bearing surface is provided on the fixture body 1, and the lifting component is directly provided on the first bearing surface of the fixture body 1. When the surrounding wall of the fixture body 1 is on the bearing base at the bottom of the cavity, the first bearing surface is located below the cavity of the physical vapor deposition device. Exemplarily, when the structure of the fixture body 1 is the same as that of the first embodiment, the surface of the fixture body 1 on which the bearing plate 2 is provided can be used as the first bearing surface of the fixture body 1. Among them, as a possible implementation, the lifting component can be composed of at least one threaded hole 21 arranged on the first bearing surface of the jig body 1 and a screw 3 that can be screwed into the threaded hole 21. The threaded hole 21 can be a blind hole or a through hole. The threaded hole 21 is directly arranged on the first bearing surface of the jig body 1, and the screw 3 is screwed into the threaded hole 21. In order to facilitate the screwing of the screw 3, a nut can be installed on the screw 3. The nut rotates synchronously with the screw 3. The screw 3 can be raised or lowered in the threaded hole 21 by screwing the nut, so that the end of the screw 3 can be pushed against the bottom of the cavity of the physical vapor deposition device or separated from the bottom of the cavity of the physical vapor deposition device; when the threaded hole 21 is a through hole, it is sufficient to ensure that the screw 3 does not extend from the second bearing surface 12 on the jig body 1 during use.

[0055] Embodiment three:

[0056] The fixture for physical vapor deposition equipment includes a fixture body 1 and a lifting component. In this embodiment, the structure of the fixture body 1 can be the same as that of the first embodiment, so it will not be repeated here.

[0057] The difference from the first embodiment is that, in the present embodiment, the jig does not include the supporting plate 2, and a first supporting surface is arranged on the jig body 1. By way of example, when the structure of the jig body 1 is the same as that of the first embodiment, the surface of the jig body 1 on which the supporting plate 2 is arranged can serve as the first supporting surface of the jig body 1. In the present embodiment, a plurality of lugs extend outward from the first supporting surface, and each lug is formed with an internal thread. When the surrounding wall of the jig body 1 is on the supporting base at the bottom of the cavity, the first supporting surface and the lugs on its periphery are located below the cavity of the physical vapor deposition device. The lifting component can be a screw 3 that can be screwed into the internal thread on the lug, and the screw 3 is screwed into the internal thread on the lug on the periphery of the first supporting surface. Similarly, the end of the screw 3 can be pushed to the bottom of the cavity of the physical vapor deposition device or separated from the bottom of the cavity of the physical vapor deposition device by screwing the screw 3.

[0058] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A fixture for a physical vapor deposition device, characterized in that: It includes a jig body, and the jig body is provided with: a first opening extending therethrough; A first bearing surface, on which a lifting component for abutting against a cavity of a reaction chamber of a physical vapor deposition device is disposed; and A second bearing surface for abutting against a block on a bearing base of a physical vapor deposition apparatus.

2. The fixture according to claim 1, characterized in that: The fixture body includes a first straight wall, a semicircular arc wall, and a second straight wall connected in sequence, and the first opening is defined by the first straight wall, the semicircular arc wall, and the second straight wall connected in sequence, wherein the first straight wall and the second straight wall are arranged in parallel.

3. The fixture according to claim 1, characterized in that: The cross section of the fixture body is U-shaped, and the fixture body further comprises a first side wall, a connecting wall and a second side wall which are connected in sequence, and the first side wall and the second side wall are arranged in parallel.

4. A fixture for a physical vapor deposition device, characterized in that: It includes a jig body and a carrying plate; The fixture body is provided with: a first opening therethrough; and A second bearing surface for abutting against a block on a bearing base of a physical vapor deposition apparatus; The carrying plate is arranged on the fixture body, the first opening passes through the carrying plate, and a lifting component for abutting against a cavity of a reaction chamber of a physical vapor deposition device is arranged on the carrying plate.

5. The fixture according to claim 4, characterized in that: The lifting component includes at least one threaded hole provided on the supporting plate and a screw that can be screwed into the threaded hole. The threaded hole is arranged so that when the fixture wall is placed on the outer wall of the supporting base at the bottom of the cavity of the reaction chamber of the physical vapor deposition equipment and the second supporting surface is against the block on the supporting base of the physical vapor deposition equipment, the threaded hole is located below the cavity of the reaction chamber of the physical vapor deposition equipment.

6. The fixture according to claim 5, characterized in that: The carrying plate comprises an edge portion extending from an outer side wall of the fixture body, and the threaded hole is arranged on the edge portion.

7. The fixture according to claim 4, characterized in that: The diameter of the supporting plate is not less than the diameter of the cavity of the reaction chamber of the physical vapor deposition equipment, and the second supporting surface is configured to fit with the end surface of the holding block on the supporting base of the physical vapor deposition equipment.

8. The jig according to any one of claims 4 to 7, characterized in that: The cross section of the carrier plate is a circle with an open outer periphery, and a second opening connected to the first opening is defined between the first end and the second end of the open outer periphery of the carrier plate, and the width of the second opening is greater than that of the first opening.

9. The fixture according to claim 8, characterized in that: The corner between two adjacent plane walls in the second opening is in an L shape.

10. The jig according to any one of claims 4 to 7, characterized in that: The fixture body includes a first straight wall, a semicircular arc wall, and a second straight wall connected in sequence, and the first opening is defined by the first straight wall, the semicircular arc wall, and the second straight wall connected in sequence, wherein the first straight wall and the second straight wall are arranged in parallel.

11. The jig according to any one of claims 4 to 7, characterized in that: The cross section of the fixture body is U-shaped, and the fixture body further comprises a first side wall, a connecting wall and a second side wall which are connected in sequence, and the first side wall and the second side wall are arranged in parallel.

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