Anti-sinking mechanism and plasma enhanced chemical vapor deposition equipment

Abstract

The utility model relates to an anti-sinking mechanism and plasma enhanced chemical vapor deposition equipment, the anti-sinking mechanism comprises a fixed flange, the fixed flange sleeves the end part of a quartz tube, and the fixed flange is used for supporting the quartz tube; the fixing flange is provided with at least one group of supporting components, the supporting components are circumferentially distributed on the outer edge of the quartz tube, and the supporting components are used for radially supporting the quartz tube. According to the mechanism, the fixing flange and the outer wall of the quartz tube are fixed through a plurality of supporting assemblies circumferentially distributed on the outer edge of the quartz tube, so that the quartz tube is supported; meanwhile, by adjusting the distance between the movable supporting body and the fixed supporting body, the supporting assembly can apply supporting force of different strengths to the surface of the quartz tube, the gap between the quartz tube and the fixed flange is adjusted, the quartz tube is evenly stressed in the circumferential direction, it is guaranteed that the circumferential side of the quartz tube is well sealed, and meanwhile the cracking risk of the quartz tube is reduced.

Description

Technical Field

[0001] The present application relates to the technical field of photovoltaic cell manufacturing equipment, and in particular to an anti-sinking mechanism and plasma enhanced chemical vapor deposition. Background Art

[0002] Currently, TOPcon (tunneling oxide passivated contact solar cell) technology is developing rapidly and has entered the mass production stage. Tubular PECVD (plasma enhanced chemical vapor deposition) equipment is an important part of TOPcon manufacturing equipment. In order to improve battery production efficiency and output, many equipment manufacturers have made the quartz tube of tubular PECVD equipment larger and larger, thereby increasing the internal capacity of the quartz tube. Although this method has improved battery production output and efficiency, it also has some defects.

[0003] At present, when the tubular PECVD equipment is used in a long-term high-temperature environment, it is found that the fixed flanges at both ends of the quartz tube will sink; or the middle of the quartz tube will deform in a long-term high-temperature environment, causing the two ends of the quartz tube to rise and the quartz tube and the fixed flange to be eccentric. Since there is a sealing ring between the quartz tube and the fixed flange, once the quartz tube and the fixed flange are eccentric, the sealing performance of the sealing ring will fail. In severe cases, even combustion will occur inside the quartz tube, posing a huge safety hazard. In addition, when the quartz tube and the fixed flange are eccentric, the quartz tube is very easy to break under high temperature and high vacuum conditions, causing equipment damage. Utility Model Content

[0004] In order to overcome the above-mentioned deficiencies of the prior art, the present application provides an anti-sinking mechanism and a plasma enhanced chemical vapor deposition device, which specifically adopts the following technical solutions:

[0005] An anti-sinking mechanism is used to support a quartz tube of a plasma enhanced chemical vapor deposition device, the anti-sinking mechanism comprises a fixing flange, the fixing flange is sleeved on the end of the quartz tube, and the fixing flange is used to support the quartz tube;

[0006] At least one group of supporting components is arranged on the fixed flange. The supporting components are circumferentially distributed on the outer edge of the quartz tube and are used to radially support the quartz tube.

[0007] The gap between the flange hole of the fixed flange and the quartz tube can be adjusted by the support components distributed circumferentially on the outer edge of the quartz tube, so that the quartz tube and the fixed flange are evenly stressed, reducing the risk of breakage.

[0008] Optionally, the support assembly includes a fixed support body, a movable support body and an adjustment assembly, wherein the fixed support body is connected to the fixed flange, the movable support body is movably connected to the fixed support body, the movable support body is used to abut the circumferential surface of the quartz tube, and the adjustment assembly is located between the movable support body and the fixed support body, and the distance between the movable support body and the fixed support body is adjusted by the adjustment assembly. The distance between the movable support body and the fixed support body can be changed by the adjustment assembly, so that the support assembly can fix the fixed flange and the end of the quartz tube.

[0009] Optionally, the adjustment assembly includes a first bolt, one end of which is connected to the movable support body, and the other end of which extends into the through hole of the fixed support body, and an adjustment nut is provided on the first bolt between the fixed support body and the movable support body, and the adjustment nut abuts against the fixed support body. When the distance between the fixed support body and the movable support body in the support assembly needs to be changed, the distance between the fixed support body and the movable support body can be changed by screwing the adjustment nut to adjust the length of the first bolt extending into the through hole.

[0010] Optionally, the adjustment assembly includes a second bolt, the second bolt is connected to the threaded hole of the fixed support body, and one end of the second bolt abuts against the movable support body. When the distance between the fixed support body and the movable support body in the support assembly needs to be changed, the distance between the fixed support body and the movable support body can be changed by screwing the second bolt to change the relative position between the second bolt and the threaded hole.

[0011] Optionally, a mounting groove is provided on the surface of the movable support body that abuts against the quartz tube, and a support pad is provided in the mounting groove, and the support pad is used to flexibly contact the outer surface of the quartz tube. The support pad can avoid rigid contact between the quartz tube and the movable support body, reducing the risk of the quartz tube breaking.

[0012] Optionally, the support assembly is provided with three groups, one of which is distributed directly below the quartz tube, with the normal line of the support assembly directly below the quartz tube as the symmetry axis, and the remaining two groups of support assemblies are symmetrically distributed on both sides of the quartz tube relative to the normal line of the support assembly directly below the quartz tube. The three groups of support assemblies can realize the longitudinal and transverse movement of the quartz tube and the fixed flange, thereby realizing the adjustment of the gap between the quartz tube and the fixed flange.

[0013] Optionally, the angle between the two groups of support components distributed on both sides of the quartz tube is set to 100-150 degrees. By properly adjusting the distribution angle of the support components on both sides of the quartz tube, the extrusion force on both sides of the quartz tube is reduced, while taking into account the adjustment of the gap between the quartz tube periphery and the fixed flange.

[0014] Optionally, at least two groups of the first bolts are provided, the first bolts are located near the end of the fixed support body, and the first bolts are axially symmetrically distributed relative to the middle of the fixed support body; at least one group of the second bolts is provided, and the second bolts are located in the middle of the fixed support body. The first bolts distributed at both ends of the fixed support body and the second bolts located in the middle can ensure that the fixed support body and the movable support body are firmly connected, thereby improving the support strength of the support assembly.

[0015] Optionally, the support pad is made of polytetrafluoroethylene. The support pad made of polytetrafluoroethylene has the characteristics of high temperature resistance and soft surface, and is more suitable for supporting the surface of the quartz tube.

[0016] In addition, the present application also discloses a plasma enhanced chemical vapor deposition device, in which the anti-sinking mechanism as described above is provided.

[0017] Beneficial Effects

[0018] The technical solution of this application has the following beneficial effects:

[0019] (1) The anti-sinking mechanism of the present application realizes the fixation of the fixed flange and the outer wall of the quartz tube by multiple groups of support components distributed circumferentially on the outer edge of the quartz tube, so as to realize the support of the quartz tube; at the same time, by adjusting the distance between the movable support body and the fixed support body in the support component, the support component can apply support forces of different strengths to the surface of the quartz tube, and by adjusting the support components distributed circumferentially on the quartz tube respectively, the gap between the quartz tube and the fixed flange can be adjusted to adjust the coaxiality of the quartz tube and the fixed flange, so that the quartz tube is evenly stressed in the circumferential direction, which not only ensures good sealing of the quartz tube side, but also reduces the risk of quartz tube breakage.

[0020] (2) When the quartz tube is disassembled, the anti-sinking mechanism of the present application can also lift the quartz tube through the above-mentioned support assembly and insert the sliding paper into the gap between the quartz tube and the fixed flange to facilitate the disassembly of the quartz tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the overall structure of the anti-sinking mechanism of this application.

[0022] Figure 2 This is a schematic diagram of the distribution of support components in the anti-sinking mechanism of this application.

[0023] Figure 3 This is a schematic diagram of the structure of the support component of this application.

[0024] The specific meanings of the reference numerals in the accompanying drawings:

[0025] 1-fixed flange; 2-quartz tube; 3-support assembly; 301-fixed support body; 302-movable support body; 303-support pad; 304-adjusting nut; 305-first screw; 306-second screw. DETAILED DESCRIPTION

[0026] The present application is further described below in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present application, and cannot be used to limit the scope of protection of the present application. It should be noted that the following detailed descriptions are all exemplary and are intended to provide further explanation of the present application.

[0027] Unless otherwise specified, all technical and scientific terms used herein have the same meanings as those generally understood by those of ordinary skill in the art to which this application belongs. It should be noted that the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprising" and / or "including" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0028] At present, the quartz tube of PECVD (plasma enhanced chemical vapor deposition) equipment is relatively large. After being used in a long-term high-temperature environment, the fixed flanges at both ends of the quartz tube will sink or the middle of the quartz tube will deform, and the two ends of the quartz tube will tilt. When the above phenomenon occurs, the quartz tube and the fixed flange will have a certain eccentricity. At this time, the sealing ring between the quartz tube and the fixed flange will fail to seal due to uneven force, and the outside air will enter the quartz tube, causing the process gas, such as silane, to burn and catch fire. And after the quartz tube and the fixed flange are eccentric, the quartz tube is unevenly stressed in the circumferential direction, which will generate stress in a local position. In a high-temperature and high-vacuum environment, the risk of quartz tube fragmentation is high. Therefore, in this embodiment, a support assembly 3 is added to the fixed flange 1, and the gap between the fixed flange 1 and the quartz tube 2 is adjusted by the support assembly 3, which can avoid the sinking of the end of the quartz tube 2 and the uneven force on the quartz tube.

[0029] Combined with Figure 1-3 As shown, in this embodiment, an anti-sinking mechanism is specifically disclosed, which is used to support the quartz tube 2 of the plasma enhanced chemical vapor deposition equipment to achieve support and protection for the end of the quartz tube 2. Specifically, the anti-sinking mechanism includes two groups of fixed flanges 1, and the fixed flanges 1 are sleeved on the ends of the quartz tube 2. A flange hole is respectively provided in the middle of each group of fixed flanges 1, and the flange holes are connected to the ends of the quartz tube 2. The quartz tube 2 is supported by the two groups of fixed flanges 1.

[0030] Combined with Figure 2As shown, in this embodiment, at least one set of support components 3 is provided on the fixed flange 1, and the support components 3 are used to radially support the quartz tube 2. The support components 3 are circumferentially distributed on the outer edge of the quartz tube 2.

[0031] The gap between the flange hole of the fixed flange 1 and the quartz tube 2 can be adjusted by the support assembly 3 distributed circumferentially on the outer edge of the quartz tube 2, so that the quartz tube 2 and the fixed flange 1 are evenly stressed, avoiding uneven stress on the sealing ring and reducing the risk of breakage.

[0032] More detailed, combined Figure 3 As shown, the support assembly 3 in this embodiment includes a fixed support body 301, a movable support body 302 and an adjustment assembly, the fixed support body 301 is connected to the fixed flange 1, the movable support body 302 is movably connected to the fixed support body 301, the movable support body 302 is used to abut the circumferential surface of the quartz tube 2, and the adjustment assembly is located between the movable support body 302 and the fixed support body 301, and the distance between the movable support body 302 and the fixed support body 301 is adjusted by the adjustment assembly.

[0033] Furthermore, the adjustment assembly in this embodiment includes a first bolt 305, wherein one end of the first bolt 305 is connected to the movable support body 302, and the other end of the first bolt 305 extends into the through hole of the fixed support body 301, and an adjustment nut 304 is provided on the first bolt 305 between the fixed support body 301 and the movable support body 302, and the adjustment nut 304 abuts against the fixed support body 301. When the distance between the fixed support body 301 and the movable support body 302 in the support assembly needs to be changed, the distance between the fixed support body 301 and the movable support body 302 can be changed by screwing the adjustment nut 304 to adjust the length of the first bolt 305 extending into the through hole.

[0034] Furthermore, the adjustment assembly includes a second bolt 306, the second bolt 306 is connected to the threaded hole of the fixed support body 301, and one end of the second bolt 306 abuts against the movable support body 302. When the distance between the fixed support body 301 and the movable support body 302 in the support assembly needs to be changed, the distance between the fixed support body 301 and the movable support body 302 can be changed by screwing the second bolt 306 to change the relative position of the second bolt 306 and the threaded hole.

[0035] It should be noted that in this embodiment, the above-mentioned first bolt 305 and the second bolt 306 can be used separately, or the above-mentioned first bolt 305 and the second bolt 306 can be used in combination. For example, when the distance between the fixed support body 301 and the movable support body 302 is adjusted to be larger, the adjusting bolt 304 on the first bolt 305 can be adjusted first to reduce the length of the first bolt 305 extending into the through hole, and the distance between the fixed support body 301 and the movable support body 302 is increased, and then the second bolt 306 is screwed to make the second bolt 306 abut against the movable support body 302; or when the distance between the fixed support body 301 and the movable support body 302 is adjusted to be smaller, the end of the second bolt 306 can be adjusted first to separate from the movable support body 302, and then the adjusting bolt 304 on the first bolt 305 can be adjusted to increase the length of the first bolt 305 extending into the through hole, and the distance between the fixed support body 301 and the movable support body 302 is reduced. In this embodiment, the stable adjustment of the distance between the fixed support body 301 and the movable support body 302 can be achieved through the cooperation of the first screw 305 and the second screw 306.

[0036] In addition, in this embodiment, a mounting groove is provided on one side of the movable support body 302 abutting against the quartz tube 2, and a support pad 303 is provided in the mounting groove, and the support pad 303 is used to flexibly contact the outer surface of the quartz tube 2. It should be noted that the support pad 303 in this embodiment is made of polytetrafluoroethylene. The support pad 303 made of polytetrafluoroethylene has the characteristics of high temperature resistance and soft surface, and it will not be in hard contact with the quartz tube 2, which can avoid causing the quartz tube 2 to break, thereby ensuring the service life of the quartz tube 2.

[0037] Preferably, the support assembly described in this embodiment is provided with three groups, one of which is located directly below the end of the quartz tube 2, with the straight line where the normal of the support assembly directly below the quartz tube is located as the axis of symmetry, and the remaining two groups of support assemblies 3 are respectively located at the two sides of the end of the quartz tube 2. It should be noted that in this embodiment, directly below refers to the direction indicated by the gravity of the quartz tube 2. The support assembly 3 located directly below the quartz tube 2 is mainly used to support and adjust the longitudinal height of the quartz tube 2, and the support assemblies 3 located on both sides are used to support and adjust the lateral position of the quartz tube 2. Through the cooperation of the above three groups of support assemblies 3, the axial position adjustment between the quartz tube 2 and the fixed flange 1 can be realized, thereby ensuring that the flange holes of the quartz tube 2 and the fixed flange 1 are concentric, so that the sealing ring is evenly stressed to ensure good sealing performance. At the same time, through the above support assemblies 3, the gap between the quartz tube 2 and the flange hole can be adjusted during the maintenance of the quartz tube 2, so as to facilitate the sliding of paper into the gap between the quartz tube 2 and the flange hole, so as to reduce the difficulty of disassembling the quartz tube 2.

[0038] It is further explained that the number of support assemblies 3 described in this embodiment can be increased or decreased according to the diameter of the quartz tube. For example, when the diameter of the quartz tube is small, one group of support assemblies 3 can be set directly below the quartz tube 2, and the height of the quartz tube can be adjusted by using the support assemblies. Alternatively, two groups of support assemblies 3 can be set at the outer edge of the quartz tube 2. At this time, a certain angle must be formed between the two groups of support assemblies 3, which refers to the angle between the two groups of support assemblies 2 and the center of the flange hole. Preferably, the support assemblies 3 are installed at the lower part of the quartz tube 2, and the position of the quartz tube 2 can be adjusted longitudinally and transversely by using the two groups of support assemblies 3. When the diameter of the quartz tube is large, it is not convenient to adjust only two groups of support assemblies 3. Preferably, three groups of support assemblies 3 are used. The support assemblies 3 located directly below the quartz tube 2 are mainly used to support and adjust the longitudinal height of the quartz tube 2, and the support assemblies 3 located on both sides are used to support and adjust the transverse position of the quartz tube 2.

[0039] Preferably, in this embodiment, the angle between the two groups of support components 3 located on both sides of the quartz tube 2 is set to 100-150 degrees. Generally, if the angle is too large, when adjusting the height of the quartz tube 2, the extrusion force on both sides of the quartz tube 2 is greater, and the upward adjustment force is smaller, which is inconvenient to adjust and easy to squeeze and crack the quartz tube 2. However, if the angle is too small, it is not easy to adjust the gap of the quartz tube 2 in the lateral direction. Therefore, the angle between the two groups of support components 3 needs to be selected according to the actual diameter of the quartz tube 2 to meet the height adjustment requirements. At the same time, it is better that the force on both sides does not exceed the strength of the quartz tube 2 itself.

[0040] Furthermore, in this embodiment, at least two groups of the first bolts 305 are provided, and the first bolts 305 are located near the end of the fixed support body 301, and the first bolts 305 are axially symmetrically distributed relative to the middle of the fixed support body 301; at least one group of the second bolts 306 is provided, and the second bolts 306 are located in the middle of the fixed support body 301. Through the cooperation of the first bolts 305 distributed at both ends of the fixed support body 301 and the second bolts 306 located in the middle, the fixed support body 301 and the movable support body 302 can be firmly connected, thereby improving the support strength of the support assembly 3. .

[0041] In addition, it should be noted that the support assembly 3 in this embodiment can not only prevent the quartz tube 2 from sinking, but also assist in the disassembly of the quartz tube 2. When the quartz tube 2 is disassembled, a slide paper needs to be placed in the gap between the quartz tube 2 and the fixed flange 1. By adjusting the support assembly 3, the width of the gap between the quartz tube 2 and the fixed flange 1 can be adjusted so that the slide paper can be smoothly inserted, which facilitates the disassembly of the quartz tube 2.

[0042] The above is only a preferred implementation of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present application. These improvements and modifications should also be regarded as the scope of protection of the present application.

Claims

1. An anti-sinking mechanism for supporting a quartz tube (2) of a plasma enhanced chemical vapor deposition device, characterized in that: It comprises a fixing flange (1), wherein the fixing flange (1) is sleeved on the end of the quartz tube (2), and the fixing flange (1) is used to support the quartz tube (2); At least one group of support components (3) is provided on the fixed flange (1), and the support components (3) are circumferentially distributed on the outer edge of the quartz tube (2), and the support components (3) are used to radially support the quartz tube (2).

2. The anti-sinking mechanism according to claim 1, characterized in that: The support assembly (3) comprises a fixed support body (301), a movable support body (302) and an adjustment assembly, wherein the fixed support body (301) is connected to the fixed flange (1), the movable support body (302) is movably connected to the fixed support body (301), and the adjustment assembly is located between the movable support body (302) and the fixed support body (301), and the distance between the movable support body (302) and the fixed support body (301) is adjusted by the adjustment assembly.

3. The anti-sinking mechanism according to claim 2, characterized in that: The adjustment assembly comprises a first bolt (305), one end of which is connected to the movable support body (302), and the other end of which extends into a through hole of the fixed support body (301), and a portion of the first bolt (305) located between the fixed support body (301) and the movable support body (302) is provided with an adjustment nut (304), and the adjustment nut (304) abuts against the fixed support body (301).

4. The anti-sinking mechanism according to claim 3, characterized in that: The adjustment assembly comprises a second bolt (306), the second bolt (306) is connected to the threaded hole of the fixed support body (301), and one end of the second bolt (306) abuts against the movable support body (302).

5. The anti-sinking mechanism according to claim 2, characterized in that: A mounting groove is provided on one side of the movable support body (302) that abuts against the quartz tube (2), and a supporting pad (303) is provided in the mounting groove. The supporting pad (303) is used to flexibly contact the outer surface of the quartz tube (2).

6. The anti-sinking mechanism according to claim 1, characterized in that: The support components (3) are provided in three groups, one group of the support components (3) is distributed directly below the quartz tube (2), the straight line where the normal of the support components (3) directly below the quartz tube (2) is located is taken as the axis of symmetry, and the remaining two groups of the support components (3) are distributed on both sides of the quartz tube (2).

7. The anti-sinking mechanism according to claim 6, characterized in that: The angle between the two groups of support components (3) located on both sides of the quartz tube (2) is in the range of 100-150 degrees.

8. The anti-sinking mechanism according to claim 4, characterized in that: The first bolts (305) are provided with at least two groups, the first bolts (305) are located near the end of the fixed support body (301), and the first bolts (305) are axially symmetrically distributed relative to the middle of the fixed support body (301); the second bolts (306) are provided with at least one group, and the second bolts (306) are located in the middle of the fixed support body (301).

9. The anti-sinking mechanism according to claim 5, characterized in that: The supporting pad (303) is made of polytetrafluoroethylene.

10. A plasma enhanced chemical vapor deposition device, characterized in that: The device is provided with an anti-sinking mechanism as described in any one of claims 1-9.

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