Single crystal furnace heater and single crystal furnace

Abstract

The utility model provides a single crystal furnace heater and a single crystal furnace. The single crystal furnace heater comprises a plurality of lower heaters, a plurality of upper heaters and a plurality of lower heaters, the upper heaters are of inverted U-shaped structures and are located above the lower heaters, and the upper heaters and the lower heaters are arranged in a staggered mode to form a snake-shaped heater; wherein the length of the upper heater in the vertical direction is greater than the length of the lower heater in the vertical direction. According to the scheme, the single crystal furnace heater is composed of the lower heater and the upper heater, the length of the upper heater in the vertical direction is larger than that of the lower heater in the vertical direction, and the heating center of the single crystal furnace heater is located in the upper heater, so that when the thickness of the heating center of the single crystal furnace heater becomes thin due to aging, the heating center can be heated; and only the heater needs to be replaced without replacing a complete single crystal furnace heater, so that the cost can be reduced and materials can be saved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a single crystal furnace heater and a single crystal furnace. Background Art

[0002] Single crystal silicon is an important component of semiconductor materials. However, the amount of natural single crystal silicon in nature is extremely small, and the quality is difficult to meet actual requirements. Therefore, artificial preparation methods are usually used to obtain high-quality single crystal silicon. Among them, the Czochralski method is widely used in the process of preparing single crystal silicon due to its advantages such as low cost and mature preparation process. The use of the Czochralski method to prepare single crystal silicon often needs to be carried out in a single crystal furnace, in which the heater is an important component of the thermal field of the single crystal furnace. The thermal field refers to the entire system for melting silicon materials and maintaining the temperature during the growth of single crystal silicon. The thermal field will directly affect the temperature of the growing single crystal silicon. The heater is mainly used to provide heat during the preparation of single crystal silicon.

[0003] The heater in the related art is usually an integral component, which is composed of a serpentine graphite connected to each other and arranged on a graphite electrode. As the use time increases, the resistance value of the heater gradually increases, the heater will age, and the thickness of the heating center of the heater will decrease, resulting in the shrinkage and reduction of the heating center. At this time, the heater needs to be replaced. However, since the heater is an integral component, it can only be replaced as a whole, but in fact, only the thinned heating center part needs to be replaced. The overall replacement will lead to increased costs and waste of materials. Utility Model Content

[0004] A series of simplified concepts are introduced in the utility model content section, which will be further described in detail in the detailed implementation section. The utility model content section of the utility model does not mean to attempt to define the key features and essential technical features of the technical solution claimed for protection, nor does it mean to attempt to determine the scope of protection of the technical solution claimed for protection.

[0005] In order to at least partially solve the above technical problems, the utility model provides a single crystal furnace heater, comprising:

[0006] A plurality of lower heaters in a U-shaped structure;

[0007] A plurality of upper heaters in an inverted U-shaped structure, wherein the upper heaters are located above the lower heaters, and the upper heaters are staggered with each other to form a serpentine heater;

[0008] Wherein, the length of the upper heater along the vertical direction is greater than the length of the lower heater along the vertical direction.

[0009] Exemplarily, the two end faces of each lower heater with a U-shaped structure are respectively connected to one end face of a different upper heater with an inverted U-shaped structure, and the two end faces of each upper heater with an inverted U-shaped structure are respectively connected to one end face of a different lower heater with a U-shaped structure. Multiple lower heaters and multiple upper heaters are staggered to form a ring-shaped single crystal furnace heater.

[0010] Exemplarily, a fastener is also included, a first fastening hole is formed in the upper heater and passes through the upper heater along the vertical direction, a second fastening hole is formed in the lower heater and corresponds to the first fastening hole and passes through the first fastening hole to fasten the lower heater and the upper heater.

[0011] Exemplarily, the fastener comprises a graphite bolt or a graphite column.

[0012] Exemplarily, the cross-sections of the first fastening hole and the second fastening hole are hexagonal or cylindrical.

[0013] Exemplarily, an angle between a lower surface of the lower heater and an upper surface of the upper heater is less than or equal to 5 degrees.

[0014] Exemplarily, graphite paper is placed between the upper surface of the lower heater and the lower surface of the upper heater as contact surfaces, and the shape of the graphite paper is the same as that of the contact surface.

[0015] Exemplarily, the upper surface of the lower heater and the lower surface of the upper heater used as contact surfaces are planes, stepped surfaces or wavy surfaces corresponding to each other.

[0016] Another aspect of the utility model provides a single crystal furnace, wherein the single crystal furnace comprises the above-mentioned single crystal furnace heater.

[0017] Exemplarily, an electrode is also included, and the lower heater in the single crystal furnace heater is located above the electrode, and the electrode is used to energize the single crystal furnace heater.

[0018] The single crystal furnace heater and single crystal furnace of the utility model, the single crystal furnace heater consists of a lower heater and an upper heater, the length of the upper heater in the vertical direction is greater than the length of the lower heater in the vertical direction, so that the heating center of the single crystal furnace heater is located in the upper heater, so when the thickness of the heating center of the single crystal furnace heater becomes thinner due to aging, it is only necessary to replace the upper heater, without replacing the complete single crystal furnace heater, which can reduce costs and save materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The following drawings of the present invention are used as a part of the present invention for understanding the present invention. The drawings show the embodiments of the present invention and their descriptions, and are used to explain the principle of the present invention.

[0020] In the attached figure:

[0021] Figure 1 A schematic structural diagram of a single crystal furnace heater according to a specific embodiment of the present invention is shown;

[0022] Figure 2 A schematic diagram showing the shape of the contact surface between the lower heater and the upper heater of a single crystal furnace heater according to a specific embodiment of the utility model is shown. DETAILED DESCRIPTION

[0023] Next, the utility model will be described more completely in conjunction with the accompanying drawings, in which embodiments of the utility model are shown. However, the utility model can be implemented in different forms and should not be construed as being limited to the embodiments presented herein. On the contrary, providing these embodiments will make the disclosure thorough and complete, and fully convey the scope of the utility model to those skilled in the art. In the accompanying drawings, the sizes and relative sizes of layers and regions may be exaggerated for clarity. The same reference numerals throughout represent the same elements.

[0024] It should be understood that when an element or layer is referred to as "on ...", "adjacent to ...", "connected to" or "coupled to" other elements or layers, it may be directly on, adjacent to, connected to or coupled to other elements or layers, or there may be intervening elements or layers. On the contrary, when an element is referred to as "directly on ...", "directly adjacent to ...", "directly connected to" or "directly coupled to" other elements or layers, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc. can be used to describe various elements, components, regions, layers and / or parts, these elements, components, regions, layers and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or part from another element, component, region, layer or part. Therefore, without departing from the teachings of the present invention, the first element, component, region, layer or part discussed below may be represented as a second element, component, region, layer or part.

[0025] Spatially relative terms such as "under," "below," "below," "under," "above," "above," etc., may be used herein for ease of description to describe the relationship of an element or feature shown in the figures to other elements or features. It should be understood that in addition to the orientations shown in the figures, the spatially relative terms are intended to include different orientations of the device in use and operation. For example, if the device in the accompanying drawings is flipped, then the elements or features described as "under other elements" or "under" or "under" will be oriented as "on" the other elements or features. Therefore, the exemplary terms "under" and "under" may include both upper and lower orientations. The device may be oriented otherwise (rotated 90 degrees or other orientations) and the spatial descriptors used herein are interpreted accordingly.

[0026] Embodiments of the utility model are described herein with reference to cross-sectional views that are schematic diagrams of ideal embodiments (and intermediate structures) of the utility model. In this way, variations from the shapes shown due to, for example, manufacturing techniques and / or tolerances can be expected. Therefore, embodiments of the utility model should not be limited to the specific shapes of the zones shown herein, but include shape deviations due to, for example, manufacturing. For example, an implanted region shown as a rectangle typically has rounded or curved features and / or an implant concentration gradient at its edges, rather than a binary change from an implanted region to a non-implanted region. Similarly, a buried region formed by implantation may result in some implantation in the region between the buried region and the surface through which the implantation is performed. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to show the actual shape of the region of the device and are not intended to limit the scope of the utility model.

[0027] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by ordinary technicians in the field of the utility model. It will also be understood that terms such as those defined in commonly used dictionaries should be understood to have the same meaning as they have in the context of the relevant field and / or this specification, and should not be interpreted in an ideal or overly formal sense unless expressly defined herein.

[0028] Therefore, in view of the existence of the above-mentioned technical problems, the utility model proposes a single crystal furnace heater, comprising:

[0029] A plurality of lower heaters in a U-shaped structure;

[0030] A plurality of upper heaters in an inverted U-shaped structure, wherein the upper heaters are located above the lower heaters, and the upper heaters are staggered with each other to form a serpentine heater;

[0031] The length of the upper heater along the vertical direction is greater than the length of the lower heater along the vertical direction.

[0032] The single crystal furnace heater of the utility model is composed of a lower heater and an upper heater. The length of the upper heater in the vertical direction is greater than that of the lower heater in the vertical direction, so that the heating center of the single crystal furnace heater is located in the upper heater. In this way, when the thickness of the heating center of the single crystal furnace heater becomes thinner due to aging, it is only necessary to replace the upper heater without replacing the entire single crystal furnace heater, which can reduce costs and save materials.

[0033] Below, reference Figure 1 and Figure 2 The single crystal furnace heater in the embodiment of the present application is described, wherein: Figure 1 The structure diagram of a single crystal furnace heater according to a specific embodiment of the utility model is shown. Figure 2 A schematic diagram showing the contact surface between the lower heater and the upper heater of a single crystal furnace heater according to a specific embodiment of the utility model is shown.

[0034] like Figure 1 As shown, the single crystal furnace heater 100 of the present application includes a plurality of lower heaters 110 in a U-shaped structure and a plurality of upper heaters 120 in an inverted U-shaped structure, the upper heaters 120 are located above the lower heaters 110, and the two are staggered to form a serpentine heater, wherein the length of the upper heater 120 along the vertical direction is greater than the length of the lower heater 110 along the vertical direction. Exemplarily, the material of the lower heater 110 and the upper heater 120 can be graphite or any other suitable material. Exemplarily, Figure 1 The lower heaters 110 located on both sides in the figure only show a partial structure, and the overall structure of the lower heater 110 should be a U-shaped structure.

[0035] In one example, if Figure 1 As shown, the lower heater 110 and the upper heater 120 are arranged in the vertical direction, and the heating center of the single crystal furnace heater 100 is located near the midpoint position in the vertical direction. Since the length of the upper heater 120 in the vertical direction is greater than the length of the lower heater 110 in the vertical direction, the heating center of the single crystal furnace heater 100 is located in the upper heater 120 part. When the single crystal furnace heater 100 ages with the increase of the use time, the thickness of the heating center will become thinner and need to be replaced, but other parts will not affect the use. The single crystal furnace heater 100 of the present application can achieve the purpose of replacing the heating center by replacing the upper heater 120, without the need to replace the entire unit, which can reduce costs and avoid waste of materials. In addition, there are generally no other components arranged above the upper heater 120, and when replacing the upper heater 120, there is no need to adjust the position of other components, and the replacement process is simpler and more convenient.

[0036] In one example, if Figure 1 As shown, the single crystal furnace heater 100 of the present application is composed of a lower heater 110 and an upper heater 120. Compared with an integrally formed single crystal furnace heater, the resistance at the contact surface between the lower heater 110 and the upper heater 120 is larger. When the heating power remains unchanged, the single crystal furnace heater 100 of the present application can generate more heat and has a better heating effect than the integrally formed single crystal furnace heater.

[0037] In one example, if Figure 1 As shown, the upper surface of the lower heater 110 and the lower surface of the upper heater 120 are the contact surfaces therebetween. At the same time, the upper surface of the lower heater 110 is also the two end surfaces of the lower heater 110 in a U-shaped structure, and the lower surface of the upper heater 120 is also the two end surfaces of the upper heater 120 in a U-shaped structure. Figure 1 As shown, the lower heater 110 and the upper heater 120 are staggered, and the two end faces of each lower heater 110 in a U-shaped structure are respectively connected to one end face of a different upper heater 120 in an inverted U-shaped structure, and the two end faces of each upper heater 120 in an inverted U-shaped structure are respectively connected to one end face of a different lower heater 110 in a U-shaped structure, and multiple lower heaters 110 and multiple upper heaters 120 are staggered to form an annular single crystal furnace heater 100. Exemplarily, the annular single crystal furnace heater 100 can be arranged around the quartz crucible and the graphite crucible in the single crystal furnace.

[0038] In one example, if Figure 1 and Figure 2 As shown, the upper surface of the lower heater 110 and the lower surface of the upper heater 120 used as the contact surface are planes, stepped surfaces or wavy lines that match each other. In other embodiments, the upper surface of the lower heater 110 and the lower surface of the upper heater 120 used as the contact surface can also be surfaces of other shapes that match each other, and the present application is not limited to this.

[0039] In one example, graphite paper is also provided between the upper surface of the lower heater 110 and the lower surface of the upper heater 120 used as the contact surface, and the shape of the graphite paper is the same as the shape of the contact surface. The graphite paper can increase the contact area between the lower heater 110 and the upper heater 120 to ensure good contact between the lower heater 110 and the upper heater 120, thereby enhancing the stability of the single crystal furnace heater 100 during operation, and preventing accidents such as ignition caused by poor contact between the lower heater 110 and the upper heater 120. Exemplarily, any other suitable material can also be provided on the upper surface of the lower heater 110 and the lower surface of the upper heater 120 used as the contact surface, and this application does not limit this.

[0040] In one example, if Figure 1As shown, the single crystal furnace heater 100 of the present application further includes a fastener 130. A first fastening hole is formed in the upper heater 120 and passes through the upper heater 120 in a vertical direction. A second fastening hole corresponding to the first fastening hole is formed in the lower heater 110 in a vertical direction. The fastener 130 passes through the first fastening hole and the second fastening hole to fasten the lower heater 110 and the upper heater 120. Exemplarily, the fastener 130 includes a graphite bolt or a graphite column; in other embodiments, the fastener 130 may also be any other suitable graphite part or fastener of other materials, which is not limited in the present application. Exemplarily, as Figure 1 As shown, two fasteners 130 are provided on both sides of the middle hollow groove of each lower heater 110 in a U-shaped structure, and two fasteners are also provided on both sides of the middle hollow groove of each upper heater 120 in an inverted U-shaped structure, which is equivalent to forming four second fastening holes in each lower heater 110, forming four first fastening holes in each upper heater 120, and four fasteners 130 are penetrated in each lower heater 110 and each upper heater 120; in other embodiments, the number and position of the fasteners 130 can be reasonably set according to actual needs, and this application does not limit this. Exemplarily, the lower heater 110 and the upper heater 120 are fastened by the fasteners 130. When the upper heater 120 needs to be replaced, the upper heater 120 can be easily replaced by simply removing the fasteners 130. After replacing the new upper heater 120, the upper heater 120 can be fastened to the lower heater 110 by simply installing the fasteners 130. The replacement process is simple and convenient.

[0041] In one example, the first fastening hole and the second fastening hole are correspondingly arranged and have a cross section of the same size and shape, where the cross section refers to the cross section in a direction perpendicular to the vertical direction. In an embodiment of the present application, the cross section of the first fastening hole and the second fastening hole is a hexagonal prism or a cylindrical shape; in other implementations, the cross section of the first fastening hole and the second fastening hole can also be any other suitable shape, which is not limited by the present application. Exemplarily, the second fastening hole extends from the upper surface of the lower heater 110 in the vertical direction to a preset depth in the lower heater, or the second fastening hole can also pass through the lower heater 110 in the vertical direction, which is not limited by the present application.

[0042] In one example, the angle between the lower surface of the lower heater 110 and the upper surface of the upper heater 120 is less than or equal to 5 degrees, that is, the lower surface of the lower heater 110 and the upper surface of the upper heater 120 are parallel or nearly parallel.

[0043] The introduction of the single crystal furnace heater of the present invention has been completed so far. A complete single crystal furnace heater may also include other components and structures, which will not be described one by one here.

[0044] In summary, the single crystal furnace heater of the utility model is composed of a lower heater and an upper heater, and the length of the upper heater in the vertical direction is greater than the length of the lower heater in the vertical direction, so that the heating center of the single crystal furnace heater is located in the upper heater, so that when the thickness of the heating center of the single crystal furnace heater becomes thinner due to aging, only the upper heater needs to be replaced, and there is no need to replace the complete single crystal furnace heater, which can reduce costs and save materials. For example, graphite paper is also provided between the contact surfaces of the lower heater and the upper heater, which can increase the contact area between the lower heater and the upper heater, thereby enhancing the stability of the single crystal furnace heater during operation and preventing accidents such as ignition caused by poor contact between the lower heater and the upper heater.

[0045] Another embodiment of the utility model provides a single crystal furnace, comprising the above-mentioned single crystal furnace heater.

[0046] In one example, the single crystal furnace of the present application further includes an electrode, and the lower heater in the single crystal furnace heater is located above the electrode, and the electrode is used to energize the single crystal furnace heater. Exemplarily, the electrode can also be used to stably fix the single crystal furnace heater; the contact surface between the electrode and the lower surface of the lower heater in the single crystal furnace heater is smooth and flat to ensure good contact between the electrode and the lower surface of the lower heater. Exemplarily, the material of the electrode includes graphite.

[0047] In one example, the single crystal furnace heater is used to provide heat during the single crystal silicon preparation process. For example, in the melting stage, the single crystal furnace heater generates heat to radiate heat to the graphite crucible, and the graphite crucible transfers heat to the quartz crucible to melt the solid polycrystalline silicon in the quartz crucible.

[0048] Exemplarily, the single crystal furnace also includes other components, such as a pulling mechanism for the seed crystal and a controller for controlling the pulling speed, etc., which is not limited in the embodiments of the present application.

[0049] Although multiple embodiments are described herein, it should be understood that a variety of other modifications and embodiments may be conceived by those skilled in the art, all of which will fall within the spirit and scope of the concepts disclosed in the present utility model. More particularly, within the scope of the present utility model disclosure, the accompanying drawings, and the appended claims, various modifications and changes may be made in the arrangement and / or components of the combined arrangement of the subject matter. In addition to modifications and changes to the components and / or arrangements, the use of alternatives is also an obvious choice for those skilled in the art.

Claims

1. A single crystal furnace heater, characterized in that: include: A plurality of lower heaters in a U-shaped structure; A plurality of upper heaters in an inverted U-shaped structure, wherein the upper heaters are located above the lower heaters, and the upper heaters are staggered with each other to form a serpentine heater; Wherein, the length of the upper heater along the vertical direction is greater than the length of the lower heater along the vertical direction.

2. The single crystal furnace heater according to claim 1, characterized in that: The two end faces of each lower heater with a U-shaped structure are respectively connected to one end face of a different upper heater with an inverted U-shaped structure, and the two end faces of each upper heater with an inverted U-shaped structure are respectively connected to one end face of a different lower heater with a U-shaped structure. Multiple lower heaters and multiple upper heaters are staggered to form a ring-shaped single crystal furnace heater.

3. The single crystal furnace heater according to claim 1, characterized in that: It also includes a fastener, wherein a first fastening hole is formed in the upper heater and passes through the upper heater along the vertical direction, and a second fastening hole is formed in the lower heater and corresponds to the first fastening hole and passes through the first fastening hole to fasten the lower heater and the upper heater.

4. The single crystal furnace heater according to claim 3, characterized in that: The fasteners include graphite bolts or graphite columns.

5. The single crystal furnace heater according to claim 3, characterized in that: The cross-sections of the first fastening hole and the second fastening hole are hexagonal or cylindrical.

6. The single crystal furnace heater according to claim 1, characterized in that: An angle between a lower surface of the lower heater and an upper surface of the upper heater is less than or equal to 5 degrees.

7. The single crystal furnace heater according to claim 1, characterized in that: Graphite paper is also arranged between the upper surface of the lower heater and the lower surface of the upper heater as the contact surface, and the shape of the graphite paper is the same as that of the contact surface.

8. The single crystal furnace heater according to claim 1, characterized in that: The upper surface of the lower heater and the lower surface of the upper heater used as contact surfaces are flat surfaces, stepped surfaces or wavy surfaces corresponding to each other.

9. A single crystal furnace, characterized in that: The single crystal furnace comprises the single crystal furnace heater according to any one of claims 1-8.

10. The single crystal furnace according to claim 9, characterized in that: It also includes an electrode, the lower heater in the single crystal furnace heater is located above the electrode, and the electrode is used to energize the single crystal furnace heater.

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