Single crystal rotary heating mechanism

Abstract

The utility model relates to the technical field of semiconductor substrate material manufacturing, and particularly discloses a single crystal rotary heating mechanism which comprises a supporting frame, a material pipe rotary driving assembly, a lifting unit and a heating furnace rotary driving assembly, the material pipe rotary driving assembly is installed on the supporting frame and comprises a material pipe installation seat and a first driving unit, and the first driving unit is installed on the material pipe installation seat. The material pipe mounting seat is rotationally mounted on the supporting frame, and the first driving unit is used for driving the material pipe mounting seat to positively rotate around a second direction; the lifting unit is arranged on the supporting frame in the second direction. The heating furnace rotation driving assembly comprises a supporting unit, a heating furnace body and a second driving unit, the supporting unit is connected to the lifting unit, the heating furnace body and the second driving unit are arranged on the supporting unit, and the second driving unit is used for driving the heating furnace body to reversely rotate around a second direction; the lifting unit is used for driving the heating furnace body to move in the second direction. According to the utility model, the uniformity of the heating temperature of the single crystal can be improved on the premise of ensuring the growth of the single crystal.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor substrate material manufacturing, in particular to a single crystal rotating heating mechanism. Background Art

[0002] Indium phosphide substrates have an application market in the fields of manufacturing high-frequency and high-power devices, optical fiber communications, wireless transmission, radio astronomy and other RF devices. RF devices made using indium phosphide substrates have shown excellent performance in application scenarios such as satellites and radars. They are highly competitive in the RF front-end of radar and communication systems, analog / mixed signal wide-bandwidth circuits, and are suitable for applications such as high-speed data processing and high-precision wide-bandwidth A / D conversion. In addition, indium phosphide-based RF device-related devices such as low-noise amplifiers, modules and receivers are also widely used in satellite communications, millimeter-wave radars, active and passive millimeter-wave imaging and other equipment. At bandwidth levels above 100GHz, the use of indium phosphide-based RF devices has obvious advantages in wireless transmission in backhaul networks and point-to-point communication networks. In the future, in 6G communication and even 7G communication wireless transmission networks, indium phosphide substrates are expected to become the mainstream substrate material for RF devices.

[0003] In the prior art, the growth of single crystals on indium phosphide substrates needs to be carried out in a heating furnace. To ensure uniform heating temperature of the single crystal, the single crystal is generally rotated in the heating furnace by a driving device. However, since the heating furnace is relatively fixed, the single crystal needs to be rotated at a faster speed to ensure uniform heating, which is not conducive to single crystal growth. If the single crystal rotates at a lower speed, the uniformity of the heating temperature is reduced. Utility Model Content

[0004] The technical problem to be solved by the utility model is: how to improve the uniformity of the heating temperature of the single crystal under the premise of ensuring the growth of the single crystal.

[0005] In order to solve the above technical problems, the utility model provides a single crystal rotating heating mechanism for heating a single crystal material tube to be heated, comprising:

[0006] A support frame extending along a first direction and a second direction;

[0007] A material pipe rotation driving assembly, the material pipe rotation driving assembly is mounted on the support frame, the material pipe rotation driving assembly comprises a material pipe mounting seat and a first driving unit, the material pipe mounting seat is rotatably mounted on the support frame, and the first driving unit is used to drive the material pipe mounting seat to rotate positively around the second direction;

[0008] at least one set of lifting units, wherein the lifting units are arranged on the support frame along the second direction; and

[0009] A heating furnace rotation drive assembly, the heating furnace rotation drive assembly comprising a support unit, a heating furnace body and a second drive unit, the support unit is connected to the lifting unit, the heating furnace body and the second drive unit are both arranged on the support unit, the second drive unit is used to drive the heating furnace body to rotate in the opposite direction around the second direction, and the lifting unit is used to drive the heating furnace body to move along the second direction;

[0010] Wherein, the orthographic projections of the heating furnace body and the material pipe mounting seat in the second direction overlap.

[0011] Further preferably, the support frame includes a base frame extending along the first direction and a vertical frame extending along the second direction, the material tube rotation drive assembly is arranged on the base frame, and the lifting unit is arranged on the vertical frame.

[0012] Further preferably, the material tube rotation drive assembly also includes a bracket, the bracket is arranged on the base frame, the bracket is installed with a first bearing, the material tube mounting seat is rotationally connected to the bracket through the first bearing, and the first drive unit is connected to the bracket.

[0013] Further preferably, the outer peripheral wall of the material pipe mounting seat is formed with first gear teeth, the first driving unit includes a first rotating motor and a first gear, the first gear is connected to the output end of the first rotating motor, and the first gear is meshedly connected with the first gear teeth on the outer peripheral wall of the material pipe mounting seat.

[0014] Further preferably, a mounting groove for fixing the single crystal material tube to be heated is formed in the middle portion of the material tube mounting seat along the second direction.

[0015] Further preferably, the support unit includes a first support plate and a second support plate parallel to each other in the first direction; a second bearing and a third bearing are respectively provided on the first support plate, the heating furnace body is rotatably connected to the first support plate via the second bearing, and the heating furnace body is rotatably connected to the second support plate via the third bearing.

[0016] Further preferably, the second driving unit is arranged on the first support plate or the second support plate, the second driving unit includes a second rotating motor and a second gear, the second gear is connected to the output end of the second rotating motor, the outer peripheral wall of the heating furnace body is provided with second gear teeth, and the second gear is meshed and connected with the second gear teeth.

[0017] Further preferably, the lifting units are in two groups, and the two groups of lifting units are symmetrically arranged on the stand along the second direction.

[0018] Further preferably, each group of the lifting units includes a shell, a screw rod, a lifting motor and a slider unit. The screw rod is rotatably installed on the inner side of the shell. The lifting motor is arranged at one end of the shell to drive the screw rod to rotate. The slider unit is installed on the screw rod. The lifting motor can drive the slider unit to move along the second direction. The support unit is connected to the slider unit.

[0019] Further preferably, the slider unit includes a first slider and a second slider, the first support plate is connected to the first slider, and the second support plate is connected to the second slider.

[0020] Compared with the prior art, the single crystal rotating heating mechanism provided by the utility model has the following beneficial effects:

[0021] The utility model provides a material tube mounting seat on the support frame for fixing the single crystal material tube to be heated, and then drives the single crystal material tube to be heated to rotate positively around the second direction through the first driving unit. At the same time, the heating furnace body is installed by providing a supporting unit, and the heating furnace body is driven to rotate reversely around the second direction through the second driving unit. That is, the rotation direction of the single crystal material tube to be heated around the second direction is opposite to the rotation direction of the heating furnace body around the second direction, so that the single crystal material tube to be heated can obtain a relatively fast speed relative to the heating furnace body at a relatively small rotation speed, thereby realizing the heating of the single crystal material tube to be heated The uniformity of the heating temperature is improved by increasing the speed, thereby ensuring the growth of the single crystal at a lower rotation speed; in addition, by arranging the lifting unit, the heating furnace rotation drive assembly can be driven to move in the second direction, thereby facilitating the loading and unloading operations of the single crystal material tube to be heated, and the orthographic projections of the heating furnace body and the material tube mounting seat in the second direction overlap, that is, after the single crystal material tube to be heated is fixed on the material tube mounting seat, the heating furnace body moves along the second direction to enable the single crystal material tube to be heated to enter the inner side of the heating furnace body, and there is no need to manually correct the coaxiality of the single crystal material tube to be heated and the heating furnace body, and the operation is simpler. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a structural schematic diagram of a single crystal rotating heating mechanism described in this embodiment.

[0023] Figure 2 It is a front view of a single crystal rotating heating mechanism described in this embodiment.

[0024] Figure 3 It is a partial structural schematic diagram of a single crystal rotating heating mechanism described in this embodiment.

[0025] Figure 4 It is a structural schematic diagram of the heating furnace body described in this embodiment.

[0026] Figure 5It is a schematic diagram of the structure of the first rotation drive assembly in this embodiment.

[0027] Figure 6 Schematic diagram of the structure of the lifting unit described in this embodiment.

[0028] In the figure:

[0029] 10. Support frame; 11. Base frame; 12. Vertical frame;

[0030] 20. material tube rotation drive assembly; 21. bracket; 22. material tube mounting seat; 221. mounting slot; 222. first gear; 23. first rotating motor; 24. first gear;

[0031] 30. Heating furnace rotation drive assembly; 31. First support plate; 311. Second bearing; 32. Second support plate; 321. Third bearing; 33. Second rotating motor; 34. Second gear; 35. Heating furnace body; 36. Second gear teeth;

[0032] 40. lifting unit; 41. housing; 42. screw rod; 43. lifting motor; 44. coupling; 45. first slider; 46. second slider;

[0033] 50. Single crystal tube to be heated. DETAILED DESCRIPTION

[0034] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0035] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like used in the present invention to indicate the orientation or position relationship is based on the orientation or position relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention.

[0036] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0037] In addition, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0038] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0039] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0040] like Figure 1-Figure 6 As shown, this embodiment provides a single crystal rotary heating mechanism for heating a single crystal material tube 50 to be heated, which includes a support frame 10, a material tube rotary drive assembly 20, at least one set of lifting units 40 and a heating furnace rotary drive assembly 30.

[0041] In this embodiment, when in use, the single crystal material tube 50 to be heated is fixed on the material tube rotation drive assembly 20, and the lifting unit 40 drives the heating furnace rotation drive assembly 30 to descend, so that the single crystal material tube 50 to be heated completely enters the heating furnace rotation drive assembly 30 for heating.

[0042] In some embodiments, the support frame 10 has a first direction X and a second direction Y, wherein the first direction X and the second direction Y intersect each other. In a specific embodiment, the first direction X and the second direction Y are perpendicular to each other.

[0043] In the above embodiment, the support frame 10 includes a base frame 11 extending along a first direction X and a vertical frame 12 extending along a second direction Y, the base frame 11 is connected to the vertical frame 12, the material tube rotation drive assembly 20 is arranged on the base frame 11, the lifting unit 40 is arranged on the vertical frame 12 along the second direction Y, and the heating furnace rotation drive assembly 30 is installed on the lifting unit 40, so that the heating furnace rotation drive assembly 30 can be driven to move along the second direction Y through the lifting unit 40, so that the single crystal material tube 50 to be heated can enter or move out of the heating furnace rotation drive assembly 30.

[0044] In some embodiments, the number of lifting units 40 is at least one group. To ensure the support firmness and stability of the single crystal tube 50 to be heated, the present embodiment preferably has two groups of lifting units 40, and the two groups of lifting units 40 are symmetrically arranged on the stand 12 along the second direction Y.

[0045] In some embodiments, the material pipe rotation drive assembly 20 is installed on the support frame 10, and the material pipe rotation drive assembly 20 includes a material pipe mounting seat 22 and a first drive unit. The material pipe mounting seat 22 is rotatably installed on the support frame 10, and the first drive unit is used to drive the material pipe mounting seat 22 to rotate positively around the second direction Y; the heating furnace rotation drive assembly 30 includes a support unit, a heating furnace body 35 and a second drive unit, the support unit is connected to the lifting unit 40, the heating furnace body 35 and the second drive unit are both arranged on the support unit, the second drive unit is used to drive the heating furnace body 35 to rotate in the opposite direction around the second direction Y, and the lifting unit 40 is used to drive the heating furnace body 35 to move along the second direction Y; wherein, the heating furnace body 35 and the material pipe mounting seat 22 have overlapping positive projections in the second direction Y. In this way, the single crystal tube 50 to be heated is driven to rotate in the positive direction around the second direction Y by the first driving unit. At the same time, the heating furnace body 35 is installed by setting a supporting unit, and the heating furnace body 35 is driven to rotate in the reverse direction around the second direction Y by the second driving unit, that is, the rotation direction of the single crystal tube 50 to be heated around the second direction Y is opposite to the rotation direction of the heating furnace body 35 around the second direction Y, so that the single crystal tube 50 to be heated can obtain a speed relatively fast to the heating furnace body 35 at a relatively small rotation speed, thereby achieving an increase in the speed of the single crystal tube 50 to be heated and improving the uniformity of the heating temperature, thereby ensuring the growth of the single crystal at a lower rotation speed.

[0046] In addition, by setting up the lifting unit 40, the heating furnace rotation drive assembly 30 can be driven to move in the second direction Y, thereby facilitating the loading and unloading operations of the single crystal material tube 50 to be heated, and the positive projections of the heating furnace body 35 and the material tube mounting seat 22 in the second direction Y overlap, that is, after the single crystal material tube 50 to be heated is fixed on the material tube mounting seat 22, the heating furnace body 35 moves along the second direction Y to enable the single crystal material tube 50 to be heated to enter the inner side of the heating furnace body 35, and there is no need to manually correct the coaxiality of the single crystal material tube 50 to be heated and the heating furnace body 35, which makes the operation easier.

[0047] In some embodiments, in order to facilitate the installation of the material tube mounting seat 22 and the first drive unit, the material tube rotation drive assembly 20 also includes a bracket 21, which is arranged on the base frame 11, and the bracket 21 is installed with a first bearing. The material tube mounting seat 22 is rotatably connected to the bracket 21 through the first bearing, and the first drive unit is connected to the bracket 21; the material tube mounting seat 22 is lifted to a position at a certain distance from the base frame 11 through the bracket 21 to facilitate the installation and coordination of the material tube mounting seat 22 and the first drive unit.

[0048] In some embodiments, in order to facilitate the placement and fixation of the single crystal tube 50 to be heated, a mounting groove 221 for fixing the single crystal tube 50 to be heated is formed in the middle portion of the tube mounting seat 22 along the second direction Y. When the single crystal tube 50 to be heated is processed, the single crystal tube 50 to be heated is fixed in the mounting groove 221. Since the mounting groove 221 has a certain depth, the radial direction of the single crystal tube 50 to be heated can be limited to ensure that the single crystal tube 50 to be heated does not fall off during the rotation process.

[0049] In some embodiments, a first gear tooth 222 is formed on the outer peripheral wall of the material pipe mounting seat 22, and the first driving unit includes a first rotating motor 23 and a first gear 24. The first gear 24 is connected to the output end of the first rotating motor 23, and the first gear 24 is meshed and connected with the first gear tooth 222 on the outer peripheral wall of the material pipe mounting seat 22; since the material pipe mounting seat 22 is rotatably connected to the bracket 21 through the first bearing, the first rotating motor 23 can drive the material pipe mounting seat 22 to rotate in the second direction Y in the positive direction through the first gear 24 and the first gear tooth 222.

[0050] In some embodiments, in order to ensure the stability of the heating furnace body 35 during rotation, the support unit includes a first support plate 31 and a second support plate 32 parallel to each other in the first direction X; the first support plate 31 and the second support plate 32 are respectively provided with a second bearing 311 and a third bearing 321, and the heating furnace body 35 is rotatably connected to the first support plate 31 through the second bearing 311, and the heating furnace body 35 is rotatably connected to the second support plate 32 through the third bearing 321; thus, by setting the first support plate 31 and the second support plate 32, the radial direction of the heating furnace body 35 can be limited, so that the heating furnace body 35 is more stable during rotation, thereby improving the heating uniformity of the single crystal material tube 50 to be heated.

[0051] In some embodiments, the second drive unit is disposed on the first support plate 31 or the second support plate 32, and the second drive unit includes a second rotating motor 33 and a second gear 34. The second gear 34 is connected to the output end of the second rotating motor 33, and the outer peripheral wall of the heating furnace body 35 is provided with second gear teeth 36, and the second gear 34 is meshed and connected with the second gear teeth 36; the second drive unit is disposed on the first support plate 31 or the second support plate 32, and can follow the heating furnace body 35 to ensure that the heating furnace body 35 can effectively rotate during the processing process.

[0052] In some embodiments, each group of lifting units 40 includes a shell 41, a screw rod 42, a lifting motor 43 and a slider unit. The screw rod 42 is rotatably installed on the inner side of the shell 41. The lifting motor 43 is arranged at one end of the shell 41 and is used to drive the screw rod 42 to rotate. The slider unit is installed on the screw rod 42. The lifting motor 43 can drive the slider unit to move along the second direction Y. The support unit is connected to the slider unit; specifically, the slider unit includes a first slider 45 and a second slider 46, the first support plate 31 is connected to the first slider 45, and the second support plate 32 is connected to the second slider 46; in this way, the lifting motor 43 drives the first slider 45 and the second slider 46 to move downward along the second direction Y through the screw rod 42, thereby driving the heating furnace body 35 to move downward or upward along the second direction Y, thereby realizing the lifting and lowering of the heating furnace body 35.

[0053] In other embodiments, the lifting motor 43 is a servo motor, which can accurately control the lifting height of the heating furnace body 35 to ensure the uniformity of the heating temperature of the single crystal tube 50 to be heated, thereby improving the processing quality of the single crystal tube 50 to be heated.

[0054] In other embodiments, the slider unit may also be a slider, and the first support plate 31 and the second support plate 32 are connected to form an integrated structure and then connected to the slider, which can also achieve smooth lifting of the heating furnace body 35.

[0055] In other embodiments, the lifting motor 43 is connected to the screw rod 42 via a coupling 44 , which facilitates the disassembly and assembly of the lifting motor 43 and is conducive to the maintenance of the lifting motor 43 .

[0056] It should be pointed out that for ordinary technicians in this technical field, several improvements and replacements can be made without departing from the technical principles of the utility model, and these improvements and replacements should also be regarded as the protection scope of the utility model. For example, the bracket 21 together with the material pipe mounting seat 22 can be controlled by the lifting unit 40, and the height of the heating furnace body 35 can be relatively fixed.

[0057] The working process of the utility model is as follows: the indium phosphide substrate sheet single crystal is taken as an example of the single crystal material tube 50 to be heated. When in use, the indium phosphide substrate sheet single crystal is fixed in the mounting slot 221 of the material tube mounting seat 22, and the lifting motor 43 drives the first slider 45 and the second slider 46 to move downward along the second direction Y through the coupling 44 and the screw rod 42, driving the heating furnace body 35 to move downward along the second direction Y until the indium phosphide substrate sheet single crystal completely enters the interior of the heating furnace body 35, and the height of the heating furnace body 35 is maintained; the first rotating motor 23 is started, and the material tube mounting seat 22 is driven to rotate around the second direction Y through the first gear 24 meshing with the first gear tooth 222. The first rotating motor 23 and the second rotating motor 33 are in forward rotation, and the indium phosphide substrate sheet single crystal rotates forward at this time; at the same time, the second rotating motor 33 is started, and the heating furnace body 35 is driven to rotate in the opposite direction around the second direction Y through the engagement of the second gear 34 and the second gear tooth 36; the heating furnace body 35 is started to process the indium phosphide substrate sheet single crystal; after the processing is completed, the first rotating motor 23 and the second rotating motor 33 stop moving, and the lifting motor 43 controls the heating furnace body 35 to move upward along the second direction Y through the screw rod 42, the first slider 45 and the second slider 46 until the indium phosphide substrate sheet single crystal is completely exposed to the outside of the heating furnace body 35, and the processed indium phosphide substrate sheet single crystal can be taken out.

[0058] In summary, the embodiment of the utility model provides a single crystal rotating heating mechanism, which drives the single crystal material tube 50 to be heated to rotate in the positive direction around the second direction Y through the first driving unit, and at the same time, the heating furnace body 35 is installed by setting a supporting unit, and the heating furnace body 35 is driven by the second driving unit to rotate in the reverse direction around the second direction Y, that is, the rotation direction of the single crystal material tube 50 to be heated around the second direction Y is opposite to the rotation direction of the heating furnace body 35 around the second direction Y, so that the single crystal material tube 50 to be heated can obtain a speed relatively fast to the speed of the heating furnace body 35 at a relatively small rotation speed, thereby realizing the speed improvement of the single crystal material tube 50 to be heated when heating. The uniformity of the heating temperature is improved, thereby ensuring the growth of single crystals at a lower rotation speed; in addition, by setting up the lifting unit 40, the heating furnace rotation drive assembly 30 can be driven to move in the second direction Y, thereby facilitating the loading and unloading operations of the single crystal material tube 50 to be heated, and the heating furnace body 35 and the material tube mounting seat 22 have overlapping positive projections in the second direction Y, that is, after the single crystal material tube 50 to be heated is fixed on the material tube mounting seat 22, the heating furnace body 35 moves along the second direction Y to enable the single crystal material tube 50 to be heated to enter the inner side of the heating furnace body 35, and there is no need to manually correct the coaxiality of the single crystal material tube 50 to be heated and the heating furnace body 35, and the operation is easier.

[0059] The above is only a preferred embodiment of the utility model. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the utility model, and these improvements and substitutions should also be regarded as the protection scope of the utility model. The above shows and describes the basic principles, main features and advantages of the utility model. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above preferred embodiments. The embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is defined by the attached claims rather than the above description, so it is intended to include all changes that fall within the meaning and scope of the equivalent elements of the claims in the utility model.

[0060] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in the embodiments may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A single crystal rotating heating mechanism, used to heat a single crystal material tube to be heated, characterized in that: include: A support frame extending along a first direction and a second direction; A material pipe rotation driving assembly, the material pipe rotation driving assembly is mounted on the support frame, the material pipe rotation driving assembly comprises a material pipe mounting seat and a first driving unit, the material pipe mounting seat is rotatably mounted on the support frame, and the first driving unit is used to drive the material pipe mounting seat to rotate positively around the second direction; at least one set of lifting units, wherein the lifting units are arranged on the support frame along the second direction; as well as A heating furnace rotation drive assembly, the heating furnace rotation drive assembly comprising a support unit, a heating furnace body and a second drive unit, the support unit is connected to the lifting unit, the heating furnace body and the second drive unit are both arranged on the support unit, the second drive unit is used to drive the heating furnace body to rotate in the opposite direction around the second direction, and the lifting unit is used to drive the heating furnace body to move along the second direction; Wherein, the orthographic projections of the heating furnace body and the material pipe mounting seat in the second direction overlap.

2. A single crystal rotary heating mechanism according to claim 1, characterized in that: The support frame includes a base frame extending along the first direction and a vertical frame extending along the second direction. The material tube rotation drive assembly is arranged on the base frame, and the lifting unit is arranged on the vertical frame.

3. A single crystal rotating heating mechanism according to claim 2, characterized in that: The material pipe rotation drive assembly also includes a bracket, which is arranged on the base frame, and the bracket is installed with a first bearing. The material pipe mounting seat is rotationally connected to the bracket through the first bearing, and the first driving unit is connected to the bracket.

4. A single crystal rotary heating mechanism according to claim 3, characterized in that: The outer peripheral wall of the material pipe mounting seat is formed with first gear teeth, the first driving unit includes a first rotating motor and a first gear, the first gear is connected to the output end of the first rotating motor, and the first gear is meshedly connected with the first gear teeth on the outer peripheral wall of the material pipe mounting seat.

5. The single crystal rotary heating mechanism according to claim 3, characterized in that: A mounting groove for fixing the single crystal material tube to be heated is formed in the middle of the material tube mounting seat along the second direction.

6. The single crystal rotating heating mechanism according to claim 2, characterized in that: The support unit includes a first support plate and a second support plate parallel to each other in the first direction; a second bearing and a third bearing are respectively provided on the first support plate and the second support plate, the heating furnace body is rotatably connected to the first support plate via the second bearing, and the heating furnace body is rotatably connected to the second support plate via the third bearing.

7. A single crystal rotary heating mechanism according to claim 6, characterized in that: The second driving unit is arranged on the first supporting plate or the second supporting plate, and the second driving unit includes a second rotating motor and a second gear, the second gear is connected to the output end of the second rotating motor, the outer peripheral wall of the heating furnace body is provided with second gear teeth, and the second gear is meshed and connected with the second gear teeth.

8. The single crystal rotary heating mechanism according to claim 7, characterized in that: The lifting units are in two groups, and the two groups of lifting units are symmetrically arranged on the stand along the second direction.

9. The single crystal rotary heating mechanism according to claim 8, characterized in that: Each group of the lifting units includes a shell, a screw rod, a lifting motor and a slider unit. The screw rod is rotatably installed on the inner side of the shell. The lifting motor is arranged at one end of the shell to drive the screw rod to rotate. The slider unit is installed on the screw rod. The lifting motor can drive the slider unit to move along the second direction. The support unit is connected to the slider unit.

10. The single crystal rotary heating mechanism according to claim 9, characterized in that: The slider unit includes a first slider and a second slider, the first support plate is connected to the first slider, and the second support plate is connected to the second slider.

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