Integrated lifting device and wafer probe test bench

Abstract

The utility model discloses an integrated lifting device and a wafer probe test bench, and relates to the technical field of semiconductor test equipment. The integrated lifting device comprises a base, a lifting platform movably arranged on the base and a transmission mechanism in transmission connection with the lifting platform, the transmission mechanism comprises a power input assembly, a middle transmission assembly and a power output assembly, the power input assembly comprises a first rotating shaft and a second rotating shaft which are coaxially arranged, the first rotating shaft is driven to rotate, and the second rotating shaft is driven to rotate. The middle transmission assembly and the power output assembly drive the lifting platform to ascend and descend at a first speed, the second rotating shaft is driven to rotate so as to drive the lifting platform to ascend and descend at a second speed through the middle transmission assembly and the power output assembly, and the first speed is smaller than the second speed. The integrated lifting device and the wafer probe testboard can solve the problems that in the prior art, due to the fact that a manual probe testboard adopts two sets of relatively independent mechanical structures to ascend and descend at high speed and low speed, the occupied space of a lifting structure is large, and operation is inconvenient.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor testing equipment, in particular to an integrated lifting device and a wafer probe testing platform. Background Art

[0002] The wafer probe test bench is an intermediate test equipment on the semiconductor process line. After being connected to the tester, it can automatically complete the test of the electrical parameters and functions of integrated circuits and various transistor cores. In the prior art, the lifting method of the manual probe test bench is generally a slow lifting method driven by a screw nut with a large stroke, combined with a fast lifting method driven by a disc cam with a small stroke.

[0003] At present, the fast lifting and slow lifting of the manual probe test bench on the market use two relatively independent mechanical structures respectively: a rotary handwheel is set on the top, which completes the slow lifting through the screw and nut transmission system; a lifting handle is set on the side, which completes the fast lifting through the disc cam transmission system. There are problems that the lifting structure occupies a large space and is inconvenient to operate. Utility Model Content

[0004] The purpose of the utility model is to provide an integrated lifting device and a wafer probe test bench, which can solve the problem that the lifting structure of the manual probe test bench in the prior art occupies a large space and is inconvenient to operate because the fast and slow lifting adopts two relatively independent mechanical structures.

[0005] The embodiment of the utility model is achieved as follows:

[0006] The first aspect of the embodiment of the utility model provides an integrated lifting device, including a base, a lifting platform movably arranged on the base, and a transmission mechanism connected to the lifting platform, the transmission mechanism includes a power input assembly, an intermediate transmission assembly and a power output assembly connected in sequence, the power input assembly includes a first rotating shaft and a second rotating shaft arranged coaxially, the first rotating shaft is driven to rotate to drive the lifting platform to lift at a first speed through the intermediate transmission assembly and the power output assembly, the second rotating shaft is driven to rotate to drive the lifting platform to lift at a second speed through the intermediate transmission assembly and the power output assembly, and the first speed is less than the second speed. The integrated lifting device can solve the problem that the lifting structure of the manual probe test bench in the prior art occupies a large space and is inconvenient to operate because two sets of relatively independent mechanical structures are used for fast and slow lifting.

[0007] Optionally, along the axial direction of the first rotating shaft, the opposite ends of the first rotating shaft respectively protrude from the opposite ends of the second rotating shaft, and along the radial direction of the first rotating shaft, the second rotating shaft is sleeved outside the first rotating shaft; the power input assembly also includes a first handle and a second handle, the center line of the first handle and the center line of the second handle are perpendicular to each other, the first handle is fixedly connected to one end of the first rotating shaft protruding from the second rotating shaft, and the second handle is fixedly connected to the side wall of the second rotating shaft.

[0008] Optionally, the intermediate transmission assembly includes a first driving wheel, a first driven wheel and a first synchronous belt, the first driving wheel is fixedly connected to the other end of the first rotating shaft protruding from the second rotating shaft, the first driven wheel is connected to the power output assembly, the first synchronous belt is sleeved on the first driving wheel and the first driven wheel, the first rotating shaft drives the first driving wheel to rotate, and drives the first driven wheel to rotate through the first synchronous belt, so as to drive the power output assembly to rise and fall at the first speed.

[0009] Optionally, the intermediate transmission assembly also includes a second driving wheel, a second driven wheel and a second synchronous belt, the second driving wheel is fixedly connected to the end of the second rotating shaft away from the second handle, the second driven wheel is connected to the power output assembly, the second synchronous belt is sleeved on the second driving wheel and the second driven wheel, the second rotating shaft drives the second driving wheel to rotate, and drives the second driven wheel to rotate through the second synchronous belt, so as to drive the power output assembly to rise and fall at the second speed.

[0010] Optionally, the power output assembly includes a lifting seat, a lifting rod, a mounting plate and an elastic member, the lifting seat is fixedly connected to the lifting platform, one end of the lifting rod is rotatably connected to the lifting seat, the mounting plate is fixedly mounted on the other end of the lifting rod, the first driven wheel is sleeved outside the lifting rod and is spaced above the mounting plate, the opposite ends of the elastic member are respectively fixedly connected to the first driven wheel and the mounting plate, the first driven wheel rotates to drive the mounting plate to rotate through the elastic member, so as to synchronously drive the lifting rod to rotate at the first speed relative to the lifting seat.

[0011] Optionally, the power output assembly also includes a fixed column, a fixed shaft, a cylindrical cam and a lifting member, the fixed column and the fixed shaft are respectively fixedly installed on opposite sides of the base, the lifting seat and the lifting rod are slidably installed in the fixed column, the second driven wheel and the cylindrical cam are coaxially sleeved outside the fixed shaft, the cylindrical cam is stacked and fixedly arranged above the second driven wheel, one end of the lifting member is fixedly installed on the other end of the lifting rod, and the other end of the lifting member is abutted against the end surface of the cylindrical cam away from the second driven wheel, and the rotation of the second driven wheel drives the cylindrical cam to rotate synchronously, so as to drive the lifting rod and the lifting seat to rise and fall at the second speed relative to the fixed column through the lifting member.

[0012] Optionally, the intermediate transmission assembly also includes a first transition assembly, the first transition assembly includes a first transition wheel and a second transition wheel that are coaxial and layered, the diameter of the first transition wheel is larger than the diameter of the second transition wheel, the number of the first synchronous belts is two, one of the first synchronous belts is sleeved on the first driving wheel and the first transition wheel, and the other of the first synchronous belt is sleeved on the second transition wheel and the first driven wheel; the intermediate transmission assembly also includes a second transition assembly, the second transition assembly includes a third transition wheel and a fourth transition wheel that are coaxial and layered, the diameter of the third transition wheel is larger than the diameter of the fourth transition wheel, the number of the second synchronous belts is two, one of the second synchronous belts is sleeved on the second driving wheel and the third transition wheel, and the other of the second synchronous belt is sleeved on the fourth transition wheel and the second driven wheel.

[0013] Optionally, the power input assembly also includes a fixed seat sleeve, a rotating handwheel and a limit locking pin, the fixed seat sleeve is fixedly installed on the base, the first rotating shaft and the second rotating shaft are rotatably arranged in the fixed seat sleeve, the rotating handwheel is fixedly installed on one end of the first rotating shaft protruding from the second rotating shaft, the first handle is fixedly installed on the rotating handwheel, the second handle is passed through the side wall of the fixed seat sleeve to be fixedly connected to the side wall of the second rotating shaft, the limit locking pin is passed through the rotating handwheel and the fixed seat sleeve in sequence, and the limit locking pin is screwed to make the rotating handwheel and the fixed seat sleeve abut against each other.

[0014] Optionally, the power input assembly also includes a fixed seat sleeve and a limit locking sleeve, the fixed seat sleeve is fixedly installed on the base, the first rotating shaft and the second rotating shaft are rotatably arranged in the fixed seat sleeve, the limit locking sleeve is coaxially sleeved outside the fixed seat sleeve, and a plurality of positioning holes are arranged along the circumferential outer edge of the fixed seat sleeve, the limit locking sleeve is provided with a locking piece, and the locking piece can be selectively limited and accommodated in any one of the positioning holes.

[0015] The second aspect of the embodiment of the utility model provides a wafer probe test station, comprising the above-mentioned integrated lifting device. The integrated lifting device can solve the problem that the manual probe test station in the prior art uses two relatively independent mechanical structures for fast and slow lifting, resulting in a large lifting structure occupying a large space and being inconvenient to operate.

[0016] The beneficial effects of the embodiments of the utility model include:

[0017] The integrated lifting device includes a base, a lifting platform movably arranged on the base, and a transmission mechanism connected to the lifting platform, so as to provide an installation and support foundation for the lifting platform and the transmission mechanism through the base, and the transmission mechanism includes a power input component, an intermediate transmission component and a power output component connected in sequence, so as to drive the lifting platform to move relative to the base through the transmission mechanism, so that the lifting platform can achieve lifting action relative to the base, and further enable the wafer probe test bench provided with the above-mentioned integrated lifting device to achieve the purpose of testing the wafer. Among them, the power input component includes a first rotating shaft and a second rotating shaft arranged coaxially, the first rotating shaft is driven to rotate, so as to drive the lifting platform to lift and lower at a first speed through the intermediate transmission component and the power output component, and the second rotating shaft is driven to rotate, so as to drive the lifting platform to lift and lower at a second speed through the intermediate transmission component and the power output component, and the first speed is less than the second speed, so that the lifting platform can achieve different speeds of lifting and lowering relative to the base. Compared with the manual probe test bench in the prior art, most of them adopt two relatively independent mechanical structures to realize slow lifting and fast lifting of the test bench respectively. The integrated lifting device provided in the present application can make the structure of the power input component more compact by integrating the first rotating shaft and the second rotating shaft coaxially, thereby reducing the occupied space of the integrated lifting device. When in use, the user only needs to selectively drive the first rotating shaft or the second rotating shaft to enable the lifting platform to be lifted and lowered at different speeds relative to the base, which has the advantage of simple and convenient operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 A schematic diagram of the structure of an integrated lifting device provided in an embodiment of the utility model;

[0020] Figure 2 A schematic diagram of the structure of a power input assembly provided by an embodiment of the utility model;

[0021] Figure 3 One of the structural schematic diagrams of the intermediate transmission assembly provided in the embodiment of the utility model;

[0022] Figure 4 The second structural diagram of the intermediate transmission assembly provided by the embodiment of the utility model;

[0023] Figure 5 A schematic diagram of the structure of a power output assembly provided in an embodiment of the utility model;

[0024] Figure 6 A schematic structural diagram of a fixed seat cover and a limit lock cover provided in an embodiment of the utility model.

[0025] Icons: 100-integrated lifting device; 10-base; 20-lifting platform; 31-power input assembly; 311-first rotating shaft; 312-second rotating shaft; 313-first handle; 314-second handle; 315-fixed seat cover; 316-rotating hand wheel; 317-limiting locking pin; 318-limiting locking sleeve; 319-locking member; 32-intermediate transmission assembly; 321-first driving wheel; 322-first driven wheel; 323-first synchronous belt; 324-second driving wheel; 325-second driven wheel; 326-second synchronous belt; 327-first transition assembly; 3271-first transition wheel; 3272-second transition wheel; 328-second transition assembly; 3281-third transition wheel; 3282-fourth transition wheel; 33-power output assembly; 331-lifting seat; 332-lifting rod; 334-mounting plate; 335-elastic member; 336-fixed column; 337-fixed shaft; 3371-fixed frame; 338-cylindrical cam; 339-lifting member. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0027] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0029] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0030] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0031] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be a connection between two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0032] Please refer to Figures 1 to 6The embodiment of the present application provides an integrated lifting device 100, including a base 10, a lifting platform 20 movably arranged on the base 10, and a transmission mechanism connected to the lifting platform 20, the transmission mechanism includes a power input assembly 31, an intermediate transmission assembly 32 and a power output assembly 33 connected in sequence, the power input assembly 31 includes a first rotating shaft 311 and a second rotating shaft 312 arranged coaxially, the first rotating shaft 311 is driven to rotate, so as to drive the lifting platform 20 to rise and fall at a first speed through the intermediate transmission assembly 32 and the power output assembly 33, the second rotating shaft 312 is driven to rotate, so as to drive the lifting platform 20 to rise and fall at a second speed through the intermediate transmission assembly 32 and the power output assembly 33, and the first speed is less than the second speed. The integrated lifting device 100 can solve the problem that the lifting structure of the manual probe test bench in the prior art occupies a large space and is inconvenient to operate because two sets of relatively independent mechanical structures are used for fast and slow lifting.

[0033] It should be noted that Figure 1 A schematic diagram of the structure of an integrated lifting device provided in an embodiment of the utility model is shown in FIG. Figure 1 As shown, in this embodiment, the integrated lifting device 100 includes a base 10, a lifting platform 20 and a transmission mechanism, so that the base 10 provides an installation and support basis for the lifting platform 20 and the transmission mechanism, wherein the lifting platform 20 is movably arranged on the base 10, and the transmission mechanism is connected to the lifting platform 20 through transmission, so that the lifting platform 20 is driven to move relative to the base 10 through the transmission mechanism, so that the lifting platform 20 can realize a lifting action relative to the base 10, and further, the wafer probe test bench equipped with the above-mentioned integrated lifting device 100 can achieve the purpose of testing the wafer.

[0034] On this basis, the transmission mechanism includes a power input assembly 31, an intermediate transmission assembly 32 and a power output assembly 33 which are sequentially connected in transmission. Figure 2 As shown, the power input assembly 31 includes a first rotating shaft 311 and a second rotating shaft 312 which are coaxially arranged. The first rotating shaft 311 is driven to rotate so as to drive the lifting platform 20 to be lifted and lowered at a first speed through the intermediate transmission assembly 32 and the power output assembly 33. The second rotating shaft 312 is driven to rotate so as to drive the lifting platform 20 to be lifted and lowered at a second speed through the intermediate transmission assembly 32 and the power output assembly 33. The first speed is less than the second speed, so that the lifting platform 20 can be lifted and lowered at different speeds relative to the base 10.

[0035] Compared with the manual probe test bench in the prior art, most of them adopt two relatively independent mechanical structures to realize the slow lifting and fast lifting of the test bench respectively. The integrated lifting device 100 provided in the present application can make the structure of the power input component 31 more compact by integrating the first rotating shaft 311 and the second rotating shaft 312 coaxially, thereby reducing the occupied space of the integrated lifting device 100. When in use, the user only needs to selectively drive the first rotating shaft 311 or the second rotating shaft 312 to enable the lifting platform 20 to achieve different speeds relative to the base 10, which has the advantage of simple and convenient operation.

[0036] Specifically, Figure 2 A schematic diagram of the structure of the power input assembly provided by the embodiment of the utility model is shown as follows: Figure 2 As shown, in this embodiment, along the axial direction of the first rotating shaft 311, the opposite ends of the first rotating shaft 311 protrude from the opposite ends of the second rotating shaft 312 respectively, and along the radial direction of the first rotating shaft 311, the second rotating shaft 312 is sleeved outside the first rotating shaft 311 to expose the opposite ends of the first rotating shaft 311 from the second rotating shaft 312, so that it is convenient for the user to drive the first rotating shaft 311 or the second rotating shaft 312 to rotate respectively. For example, the user can drive the first rotating shaft 311 by driving any end of the first rotating shaft 311 protruding from the second rotating shaft 312, or the user can drive the second rotating shaft 312 by driving the second rotating shaft 312 to cover the side wall of the first rotating shaft 311.

[0037] On this basis, in order to facilitate users to perform driving operations separately, such as Figure 2 As shown, in this embodiment, the power input assembly 31 also includes a first handle 313 and a second handle 314, and the center line of the first handle 313 and the center line of the second handle 314 are perpendicular to each other, so that the user can distinguish the first handle 313 and the second handle 314 easily, and at the same time, it can avoid interference between the first handle 313 and the second handle 314. The first handle 313 is fixedly connected to one end of the first rotating shaft 311 protruding from the second rotating shaft 312, and the second handle 314 is fixedly connected to the side wall of the second rotating shaft 312.

[0038] Regarding the transmission form of the intermediate transmission assembly 32, Figure 3 This is one of the structural schematic diagrams of the intermediate transmission assembly provided in the embodiment of the utility model. Figure 4 The second structural diagram of the intermediate transmission assembly provided by the embodiment of the utility model is as follows: Figure 3 and Figure 4As shown, in this embodiment, the present application uses a synchronous belt transmission to meet the transmission requirements of a longer distance, while also ensuring a relatively accurate transmission ratio. Of course, in other embodiments, a gear set transmission may also be used, and those skilled in the art should be able to make reasonable selections and designs based on actual conditions, and no specific restrictions are made here. Relatively speaking, if a gear set transmission is used to achieve a longer distance transmission requirement, a larger number of gears are required, and therefore, the present application uses a synchronous belt transmission.

[0039] Specifically, Figure 3 and Figure 4 As shown, in this embodiment, the intermediate transmission assembly 32 includes a first driving wheel 321, a first driven wheel 322 and a first synchronous belt 323. The first driving wheel 321 is fixedly connected to the other end of the first rotating shaft 311 protruding from the second rotating shaft 312, the first driven wheel 322 is connected to the power output assembly 33, and the first synchronous belt 323 is sleeved on the first driving wheel 321 and the first driven wheel 322. The first rotating shaft 311 drives the first driving wheel 321 to rotate, and drives the first driven wheel 322 to rotate through the first synchronous belt 323, so as to drive the power output assembly 33 to rise and fall at a first speed.

[0040] In this way, when the power input component 31 also includes a first handle 313, the user can drive the first handle 313 to drive the first rotating shaft 311 to rotate relative to the base 10, and then drive the first driving wheel 321 to rotate synchronously through the first rotating shaft 311, and then drive the first driven wheel 322 to rotate synchronously through the first synchronous belt 323, and finally drive the lifting platform 20 to rise and fall relative to the base 10 at a first speed through the power output component 33.

[0041] Similarly, if Figure 3 and Figure 4 As shown, in this embodiment, the intermediate transmission assembly 32 also includes a second driving wheel 324, a second driven wheel 325 and a second synchronous belt 326. The second driving wheel 324 is fixedly connected to the end of the second rotating shaft 312 away from the second handle 314, the second driven wheel 325 is connected to the power output assembly 33, and the second synchronous belt 326 is sleeved on the second driving wheel 324 and the second driven wheel 325. The second rotating shaft 312 drives the second driving wheel 324 to rotate, and drives the second driven wheel 325 to rotate through the second synchronous belt 326, so as to drive the power output assembly 33 to rise and fall at the second speed.

[0042] In this way, when the power input component 31 also includes a second handle 314, the user can drive the second handle 314 to drive the second rotating shaft 312 to rotate relative to the base 10, and then drive the second driving wheel 324 to rotate synchronously through the second rotating shaft 312, and then drive the second driven wheel 325 to rotate synchronously through the second synchronous belt 326, and finally drive the lifting platform 20 to rise and fall relative to the base 10 at the second speed through the power output component 33.

[0043] It should be noted that if Figure 4 As shown, in this embodiment, in order to avoid interference between the first driving wheel 321, the first driven wheel 322, the first synchronous belt 323, the second driving wheel 324, the second driven wheel 325 and the second synchronous belt 326, along the axial direction of the first rotating shaft 311, the first driving wheel 321, the first driven wheel 322 and the first synchronous belt 323 can be set at one vertical height, and the second driving wheel 324, the second driven wheel 325 and the second synchronous belt 326 can be set at another vertical height. It is also for this reason that the opposite ends of the first rotating shaft 311 are deliberately protruded from the opposite ends of the second rotating shaft 312, so that the first driving wheel 321 and the second driving wheel 324 are at different vertical heights, so that the first driven wheel 322 and the first synchronous belt 323 connected to the first driving wheel 321 and the second driven wheel 325 and the second synchronous belt 326 connected to the second driving wheel 324 are at different vertical heights.

[0044] Figure 5 A schematic diagram of the structure of the power output assembly provided by the embodiment of the utility model, such as Figure 5 As shown, in this embodiment, the power output assembly 33 includes a lifting seat 331, a lifting rod 332, a mounting plate 334 and an elastic member 335. The lifting seat 331 is fixedly connected to the lifting platform 20, one end of the lifting rod 332 is rotatably connected to the lifting seat 331, and the mounting plate 334 is fixedly installed on the other end of the lifting rod 332. The first driven wheel 322 is sleeved outside the lifting rod 332 and is spaced above the mounting plate 334. The opposite ends of the elastic member 335 are respectively fixedly connected to the first driven wheel 322 and the mounting plate 334. The first driven wheel 322 rotates to drive the mounting plate 334 to rotate through the elastic member 335, so as to synchronously drive the lifting rod 332 to rotate at a first speed relative to the lifting seat 331.

[0045] It should be noted that, since the mounting plate 334 is fixedly mounted on one end of the lifting rod 332, there is no relative movement between the mounting plate 334 and the lifting rod 332, and the first driven wheel 322 is sleeved outside the lifting rod 332. Therefore, the first driven wheel 322 and the lifting rod 332 have a tendency of relative sliding movement. In order to avoid the vertical height of the first driven wheel 322 along the axial direction of the first rotating shaft 311 from changing, the power output assembly 33 also includes an elastic member 335, and the opposite ends of the elastic member 335 are fixedly connected to the first driven wheel 322 and the mounting plate 334, respectively. In this way, through the elastic potential energy of the elastic member 335, it can be ensured that the vertical height of the first driven wheel 322 will not be reduced.

[0046] Moreover, by adding an elastic member 335 between the first driven wheel 322 and the mounting plate 334, when the first driven wheel 322 is driven to rotate, the elastic member 335 can be driven to rotate, so that the elastic member 335 is subjected to a stretching force and has a tendency to restore its natural shape. In this way, the mounting plate 334 fixedly connected to the other end of the elastic member 335 can be rotated, and then the lifting rod 332 can be driven to rotate relative to the lifting seat 331 through the mounting plate 334, thereby realizing a slow lifting and lowering of a smaller stroke of the lifting platform 20.

[0047] like Figure 5 As shown, in the present embodiment, the power output assembly 33 further includes a fixed column 336, a fixed shaft 337, a cylindrical cam 338 and a lifting member 339. The fixed column 336 and the fixed shaft 337 are fixedly mounted on opposite sides of the base 10 respectively. The lifting seat 331 and the lifting rod 332 are slidably mounted in the fixed column 336. The second driven wheel 325 and the cylindrical cam 338 are coaxially sleeved outside the fixed shaft 337. The cylindrical cam 338 is stacked and fixedly arranged above the second driven wheel 325. One end of the lifting member 339 is fixedly mounted on the other end of the lifting rod 332. The other end of the lifting member 339 abuts against the end surface of the cylindrical cam 338 away from the second driven wheel 325. The rotation of the second driven wheel 325 drives the cylindrical cam 338 to rotate synchronously, so as to drive the lifting rod 332 and the lifting seat 331 to rise and fall at the second speed relative to the fixed column 336 through the lifting member 339. For example, in this embodiment, an L-shaped fixing frame 3371 is disposed on the bottom surface of the base 10 to fix the fixing shaft 337 through the fixing frame 3371 .

[0048] It should be noted that, since the second driven wheel 325 and the cylindrical cam 338 are coaxially sleeved outside the fixed shaft 337, and the cylindrical cam 338 is stacked and fixedly arranged above the second driven wheel 325, when the second driven wheel 325 is driven to rotate, the cylindrical cam 338 can be driven to rotate synchronously relative to the fixed shaft 337; and since the opposite ends of the lifting member 339 are respectively abutted against the end surface of the lifting rod 332 and the end surface of the cylindrical cam 338 away from the second driven wheel 325, as the cylindrical cam 338 rotates relative to the fixed shaft 337, the lifting member 339 will rise and fall to different degrees under the action of the end surface of the cylindrical cam 338 away from the second driven wheel 325; and because the lifting member 339 is fixedly connected to the lifting rod 332, it can synchronously drive the lifting rod 332 to rise and fall at the second speed relative to the fixed column 336. During this process, since the lifting rod 332 only slides relative to the fixed column 336 but does not rotate relative to the lifting seat 331, the lifting seat 331 will also slide with the lifting rod 332 relative to the fixed column 336, thereby realizing the rapid lifting and lowering of the lifting platform 20 with a larger stroke.

[0049] The advantage of using the cylindrical cam 338 is that the lifting and lowering of different heights can be achieved through the step structure on the end face of the cylindrical cam 338 away from the second driven wheel 325, and the stability of the lifting platform 20 relative to the base 10 at each height can also be improved. Regarding the number of step structures on the end face of the cylindrical cam 338 away from the second driven wheel 325, those skilled in the art should be able to make reasonable selections and designs according to actual conditions, and no specific restrictions are made here. For example, in this embodiment, the number of step structures on the end face of the cylindrical cam 338 away from the second driven wheel 325 is three, so that the lifting platform 20 can achieve three different levels of rapid lifting and lowering, such as 0mm, 0.3mm and 3mm. In addition, in order to improve the smoothness of the relative movement between the lifting member 339 and the cylindrical cam 338, the end face of the other end of the lifting member 339 and the end face of the cylindrical cam 338 away from the second driven wheel 325 can be spherical. In the actual assembly process, the lifting member 339 can be assembled in the lifting rod 332 through a bearing to ensure that the ejection action of the lifting member 339 will not be affected by the rotation of the lifting rod 332.

[0050] like Figure 3 and Figure 4As shown, in this embodiment, the intermediate transmission assembly 32 further includes a first transition assembly 327, the first transition assembly 327 includes a first transition wheel 3271 and a second transition wheel 3272 that are coaxial and layered, the diameter of the first transition wheel 3271 is larger than the diameter of the second transition wheel 3272, the number of the first synchronous belts 323 is two, one of which is sleeved on the first driving wheel 321 and the first transition wheel 3271, and the other is sleeved on the second transition wheel 3272 and the first driven wheel 32 2; similarly, the intermediate transmission assembly 32 also includes a second transition assembly 328, the second transition assembly 328 includes a third transition wheel 3281 and a fourth transition wheel 3282 that are coaxial and layered, the diameter of the third transition wheel 3281 is larger than the diameter of the fourth transition wheel 3282, and the number of the second synchronous belts 326 is two, one of which is sleeved on the second driving wheel 324 and the third transition wheel 3281, and the other is sleeved on the fourth transition wheel 3282 and the second driven wheel 325.

[0051] It should be noted that by providing the first transition assembly 327 and the second transition assembly 328, the variable speed transmission of the intermediate transmission assembly 32 can be realized, and by the diameter of the first transition wheel 3271 being larger than the diameter of the second transition wheel 3272, and the diameter of the third transition wheel 3281 being larger than the diameter of the fourth transition wheel 3282, two-stage multiple speed reduction transmission is realized respectively, and finally the effect of speed reduction and torque increase is achieved, so as to achieve the purpose of easy and labor-saving operation. In addition, the first transition wheel 3271, the second transition wheel 3272, the third transition wheel 3281 and the fourth transition wheel 3282 mentioned above also have the function of tension wheels, so as to ensure the relative accuracy of transmission, thereby improving the accuracy of transmission of the intermediate transmission assembly 32.

[0052] like Figure 2As shown, in this embodiment, the power input assembly 31 also includes a fixed seat cover 315, a rotating hand wheel 316 and a limit lock nail 317. The fixed seat cover 315 is fixedly installed on the base 10. The first rotating shaft 311 and the second rotating shaft 312 are rotatably arranged in the fixed seat cover 315. The rotating hand wheel 316 is fixedly installed on one end of the first rotating shaft 311 protruding from the second rotating shaft 312. The first handle 313 is fixedly installed on the rotating hand wheel 316, so that the rotating hand wheel 316 is driven to rotate synchronously by driving the first handle 313, thereby driving the first rotating shaft 311 to rotate synchronously. The second handle 314 is inserted into the fixed seat cover 31 5 is fixedly connected to the side wall of the second rotating shaft 312 to prevent the fixed seat cover 315 from affecting the connection between the second handle 314 and the second rotating shaft 312. The limiting locking pin 317 is sequentially penetrated through the rotating hand wheel 316 and the fixing seat cover 315. When the lifting platform 20 is slowly lifted to the required vertical height by the first handle 313, the limiting locking pin 317 can be screwed to make the rotating hand wheel 316 and the fixing seat cover 315 abut against each other, so that the rotating hand wheel 316 and the fixing seat cover 315 will no longer have relative movement, thereby ensuring that the lifting platform 20 is maintained at the current vertical height.

[0053] Figure 6 The structural diagram of the fixed seat cover and the limit lock sleeve provided by the embodiment of the utility model is as follows: Figure 6 As shown, in this embodiment, the power input assembly 31 also includes a fixed seat sleeve 315 and a limit lock sleeve 318, the fixed seat sleeve 315 is fixedly installed on the base 10, the first rotating shaft 311 and the second rotating shaft 312 are rotatably arranged in the fixed seat sleeve 315, and the first handle 313 and the second handle 314 are respectively connected to the first rotating shaft 311 and the second rotating shaft 312 in the same manner as the connection described in the previous paragraph, so it is not repeated. Different from this, the limit lock sleeve 318 is coaxially sleeved outside the fixed seat sleeve 315, and a plurality of positioning holes are arranged along the circumferential outer edge of the fixed seat sleeve 315. The limit lock sleeve 318 is provided with a locking member 319, and the locking member 319 can be selectively limited and accommodated in any one of the positioning holes.

[0054] The multiple positioning holes here are equal to the number of the step structures on the end surface of the cylindrical cam 338 away from the second driven wheel 325, and correspond one-to-one to the step structures on the end surface of the cylindrical cam 338 away from the second driven wheel 325, that is, when the locking member 319 is limitedly accommodated in a certain positioning hole, the other end of the lifting member 339 is abutted against the step structure on the end surface of the corresponding cylindrical cam 338 away from the second driven wheel 325, so that the lifting platform 20 can be quickly lifted to the corresponding vertical height. On this basis, in order to ensure that the vertical height of the lifting platform 20 no longer changes, the second handle 314 can be screwed at this time to make the second handle 314 and the fixed seat cover 315 abut against each other, so that the limit lock sleeve 318 and the fixed seat cover 315 will no longer have relative movement, thereby ensuring the stability of the lifting platform 20 relative to the base.

[0055] The embodiment of the present application also provides a wafer probe test station, including the above-mentioned integrated lifting device 100 and a probe test device, so that the lifting platform 20 can be controlled by the integrated lifting device 100 to achieve lifting and lowering at different speeds, and the wafer is tested by the probe test device. Since the structure and beneficial effects of the integrated lifting device 100 have been described in detail in the aforementioned embodiments, they will not be repeated here. As for the specific structure of the probe test device, those skilled in the art should be able to make reasonable selections and designs with reference to the specific structure of the probe test device in the manual probe test station in the prior art, and no specific restrictions are made here.

[0056] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

[0057] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present utility model will not further describe various possible combinations.

Claims

1. An integrated lifting device, characterized in that: It includes a base, a lifting platform movably arranged on the base, and a transmission mechanism connected to the lifting platform, the transmission mechanism includes a power input component, an intermediate transmission component and a power output component connected in sequence, the power input component includes a first rotating shaft and a second rotating shaft arranged coaxially, the first rotating shaft is driven to rotate to drive the lifting platform to rise and fall at a first speed through the intermediate transmission component and the power output component, the second rotating shaft is driven to rotate to drive the lifting platform to rise and fall at a second speed through the intermediate transmission component and the power output component, and the first speed is less than the second speed.

2. The integrated lifting device according to claim 1, characterized in that: Along the axial direction of the first rotating shaft, the opposite ends of the first rotating shaft respectively protrude from the opposite ends of the second rotating shaft, and along the radial direction of the first rotating shaft, the second rotating shaft is sleeved outside the first rotating shaft; the power input assembly also includes a first handle and a second handle, the center line of the first handle and the center line of the second handle are perpendicular to each other, the first handle is fixedly connected to one end of the first rotating shaft protruding from the second rotating shaft, and the second handle is fixedly connected to the side wall of the second rotating shaft.

3. The integrated lifting device according to claim 2, characterized in that: The intermediate transmission assembly includes a first driving wheel, a first driven wheel and a first synchronous belt. The first driving wheel is fixedly connected to the other end of the first rotating shaft protruding from the second rotating shaft. The first driven wheel is connected to the power output assembly. The first synchronous belt is sleeved on the first driving wheel and the first driven wheel. The first rotating shaft drives the first driving wheel to rotate, and drives the first driven wheel to rotate through the first synchronous belt, so as to drive the power output assembly to rise and fall at the first speed.

4. The integrated lifting device according to claim 3, characterized in that: The intermediate transmission assembly also includes a second driving wheel, a second driven wheel and a second synchronous belt. The second driving wheel is fixedly connected to the end of the second rotating shaft away from the second handle. The second driven wheel is connected to the power output assembly. The second synchronous belt is sleeved on the second driving wheel and the second driven wheel. The second rotating shaft drives the second driving wheel to rotate, and drives the second driven wheel to rotate through the second synchronous belt, so as to drive the power output assembly to rise and fall at the second speed.

5. The integrated lifting device according to claim 4, characterized in that: The power output assembly includes a lifting seat, a lifting rod, a mounting plate and an elastic member. The lifting seat is fixedly connected to the lifting platform, one end of the lifting rod is rotatably connected to the lifting seat, and the mounting plate is fixedly mounted on the other end of the lifting rod. The first driven wheel is sleeved outside the lifting rod and is spaced above the mounting plate. The opposite ends of the elastic member are respectively fixedly connected to the first driven wheel and the mounting plate. The first driven wheel rotates to drive the mounting plate to rotate through the elastic member, so as to synchronously drive the lifting rod to rotate at the first speed relative to the lifting seat.

6. The integrated lifting device according to claim 5, characterized in that: The power output assembly also includes a fixed column, a fixed shaft, a cylindrical cam and a lifting member. The fixed column and the fixed shaft are respectively fixedly installed on opposite sides of the base, the lifting seat and the lifting rod are slidably installed in the fixed column, the second driven wheel and the cylindrical cam are coaxially sleeved outside the fixed shaft, the cylindrical cam is stacked and fixedly arranged above the second driven wheel, one end of the lifting member is fixedly installed on the other end of the lifting rod, and the other end of the lifting member is abutted against the end surface of the cylindrical cam away from the second driven wheel, and the rotation of the second driven wheel drives the cylindrical cam to rotate synchronously, so as to drive the lifting rod and the lifting seat to rise and fall at the second speed relative to the fixed column through the lifting member.

7. The integrated lifting device according to claim 4, characterized in that: The intermediate transmission assembly further includes a first transition assembly, the first transition assembly includes a first transition wheel and a second transition wheel that are coaxial and layered, the diameter of the first transition wheel is larger than the diameter of the second transition wheel, the number of the first synchronous belts is two, one of the first synchronous belts is sleeved on the first driving wheel and the first transition wheel, and the other first synchronous belt is sleeved on the second transition wheel and the first driven wheel; The intermediate transmission assembly also includes a second transition assembly, which includes a third transition wheel and a fourth transition wheel that are coaxial and layered, the diameter of the third transition wheel is larger than the diameter of the fourth transition wheel, and the number of the second synchronous belts is two, one of which is sleeved on the second driving wheel and the third transition wheel, and the other is sleeved on the fourth transition wheel and the second driven wheel.

8. The integrated lifting device according to claim 2, characterized in that: The power input assembly also includes a fixed seat sleeve, a rotating handwheel and a limit locking pin. The fixed seat sleeve is fixedly installed on the base, the first rotating shaft and the second rotating shaft are rotatably arranged in the fixed seat sleeve, the rotating handwheel is fixedly installed on one end of the first rotating shaft protruding from the second rotating shaft, the first handle is fixedly installed on the rotating handwheel, the second handle is passed through the side wall of the fixed seat sleeve to be fixedly connected to the side wall of the second rotating shaft, the limit locking pin is passed through the rotating handwheel and the fixed seat sleeve in turn, and the limit locking pin is screwed to make the rotating handwheel and the fixed seat sleeve abut against each other.

9. The integrated lifting device according to claim 1, characterized in that: The power input assembly also includes a fixed seat sleeve and a limit lock sleeve, the fixed seat sleeve is fixedly installed on the base, the first rotating shaft and the second rotating shaft are rotatably arranged in the fixed seat sleeve, the limit lock sleeve is coaxially sleeved outside the fixed seat sleeve, and a plurality of positioning holes are arranged along the circumferential outer edge of the fixed seat sleeve, the limit lock sleeve is provided with a locking piece, and the locking piece can be selectively limited and accommodated in any one of the positioning holes.

10. A wafer probe test station, characterized in that: It comprises the integrated lifting device as described in any one of claims 1 to 9.

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