Reaction sintering silicon carbide ceramic cantilever paddle

Abstract

The utility model relates to the technical field of silicon carbide ceramic cantilever paddles, in particular to a reaction sintering silicon carbide ceramic cantilever paddle which comprises a cantilever paddle rod and a vent hole, and one end of the cantilever paddle rod is fixedly connected with a bearing rod; the device has the beneficial effects that the cantilever paddle rod can be pulled towards one side, one end of the cantilever paddle rod slides towards one side on the inner side of the extension paddle rod, meanwhile, the first sliding block and the second sliding block are driven to slide towards one side in the first sliding groove and the second sliding groove respectively, and after the cantilever paddle rod slides to the proper length, the positioning rod is inserted into the limiting hole, so that the cantilever paddle rod is fixed; then a positioning rod is rotated clockwise, the positioning rod drives a connecting block to slide into an arc-shaped groove, the positioning rod limits sliding of a cantilever paddle rod, the length of the reaction sintering silicon carbide ceramic cantilever paddle can be rapidly extended, and then the bottom area of a bearing rod can be adjusted through a supporting plate; and the extension mechanism and the limiting mechanism are beneficial to improving the practicability and the placement stability of the reaction sintering silicon carbide ceramic cantilever paddle.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon carbide ceramic cantilever paddles, in particular to a reaction-sintered silicon carbide ceramic cantilever paddle. Background Art

[0002] In the diffusion furnace, a PN junction diffusion doping equipment for solar photovoltaic cells, and the high-temperature oxidation diffusion furnace for thermal growth oxidation of silicon wafers in the semiconductor manufacturing industry, the reaction-sintered silicon carbide cantilever paddle is a key component of the wafer loading system in the equipment, which can ensure the concentricity of the wafer and the furnace tube, thereby making the diffusion and oxidation more uniform. In particular, the reaction-sintered silicon carbide cantilever paddle has the characteristics of high strength, high purity, high thermal conductivity, no pores, acid and alkali corrosion resistance, no pollution at high temperature, no deformation, good thermal shock resistance stability, and large load capacity.

[0003] However, when using the existing reaction-sintered silicon carbide ceramic cantilever paddle, since most of the reaction-sintered silicon carbide ceramic cantilever paddles have a fixed length, it is not convenient to adjust the length of the reaction-sintered silicon carbide ceramic cantilever paddle according to the position requirements of the silicon wafer in the diffusion furnace. When a longer reaction-sintered silicon carbide ceramic cantilever paddle is needed, it is necessary to replace other silicon carbide ceramic cantilever paddles, which reduces the practicality of the reaction-sintered silicon carbide ceramic cantilever paddle. Therefore, we propose a reaction-sintered silicon carbide ceramic cantilever paddle. Utility Model Content

[0004] The utility model aims to provide a reaction-sintered silicon carbide ceramic cantilever paddle to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solution: a reaction-sintered silicon carbide ceramic cantilever paddle, comprising a cantilever paddle rod and vents, one end of the cantilever paddle rod is fixedly connected to a load-bearing rod, and the vents are spaced apart on the inner walls on both sides of the load-bearing rod.

[0006] Preferably, an extended paddle rod is sleeved on one end of the cantilever paddle rod away from the load-bearing rod, a No. 1 slide groove is provided on the inner walls on both sides of the extended paddle rod, and a No. 1 slider is fixed on both sides of the extended paddle rod close to the No. 1 slide groove.

[0007] Preferably, a second slider is fixed to the side of the cantilever paddle rod away from the first slider, a second slide groove is provided on the side of the extended paddle rod close to the second slider, and an extension mechanism is provided on the side of the cantilever paddle rod away from the first slider and the second slider.

[0008] Preferably, rotating shafts are installed on both sides of the bearing rod, one side of the rotating shaft is connected to a limiting mechanism, and the limiting mechanism is connected to the bearing rod, and an insert rod is provided on the inner side of the limiting mechanism.

[0009] Preferably, the extension mechanism comprises a limiting hole, a positioning rod, an arc groove and a connecting block, and a side of the cantilever paddle rod away from the first slider and the second slider is provided with limiting holes distributed at intervals.

[0010] Preferably, a positioning rod is inserted into the limiting hole, both ends of the positioning rod are connected to connecting blocks, an arc groove is provided on the inner wall of the limiting hole close to the connecting block, and the positioning rod passes through one side of the extended paddle rod.

[0011] Preferably, the limiting mechanism comprises a limiting rod, a support plate, a limiting pin and a support block, and support blocks are fixed on both sides of the bearing rod.

[0012] Preferably, one side of the support block is movably sleeved with a support plate via a movable shaft, one side of the rotating shaft is movably connected to a limit pin, and limit rods are fixed to both ends of the support plate near the limit pin.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] The utility model provides a reaction-sintered silicon carbide ceramic cantilever paddle, which can pull the cantilever paddle rod to one side so that one end of the cantilever paddle rod slides to one side on the inner side of the extended paddle rod, and at the same time drives the No. 1 slider and the No. 2 slider to slide to one side in the No. 1 slide groove and the No. 2 slide groove respectively. After the cantilever paddle rod is slid to a suitable length, the positioning rod is inserted into the limiting hole, and then the positioning rod is rotated clockwise so that the positioning rod drives the connecting block to slide into the arc groove. The positioning rod limits the sliding of the cantilever paddle rod, and the length of the reaction-sintered silicon carbide ceramic cantilever paddle can be quickly extended. Then, the bottom area of ​​the load-bearing rod can be adjusted through the support plate. The extension mechanism and the limiting mechanism are conducive to improving the practicality and placement stability of the reaction-sintered silicon carbide ceramic cantilever paddle. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the main structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the main cross-sectional structure of the utility model;

[0017] Figure 3 This is a schematic diagram of the cross-sectional structure of the utility model from top view;

[0018] Figure 4 This is an enlarged structural diagram of the utility model at A;

[0019] Figure 5 This is a schematic diagram of the main cross-sectional structure of the arc-shaped groove of the utility model;

[0020] Figure 6 This is a schematic diagram of the side cross-sectional structure of the connection block of the utility model;

[0021] Figure 7 It is a schematic diagram of the three-dimensional structure of the positioning rod of the utility model.

[0022] In the figure: 1. cantilever paddle rod; 2. load-bearing rod; 3. vent; 4. extended paddle rod; 5. slider No. 1; 6. slide slot No. 1; 7. slider No. 2; 8. slide slot No. 2; 9. extension mechanism; 901. limit hole; 902. positioning rod; 903. arc groove; 904. connecting block; 10. limit mechanism; 101. limit rod; 102. support plate; 103. limit pin; 104. support block; 11. rotating shaft; 12. insertion rod. DETAILED DESCRIPTION

[0023] In order to make the purpose and technical solution of the utility model clearly and completely described, and the advantages more clearly understood, the embodiments of the utility model are further described in detail in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are part of the embodiments of the utility model, not all of the embodiments, and are only used to explain the embodiments of the utility model, and are not used to limit the embodiments of the utility model. All other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model. Embodiment 1

[0024] See also Figures 1 to 6 The utility model provides a technical solution: a reaction-sintered silicon carbide ceramic cantilever paddle, comprising a cantilever paddle rod 1 and a vent 3, one end of the cantilever paddle rod 1 is fixedly connected to a load-bearing rod 2, and the vents 3 are distributed on the inner walls of both sides of the load-bearing rod 2 at intervals.

[0025] In specific implementation, when the silicon wafer needs to be sent to a diffusion furnace for high-temperature treatment, the silicon wafer needs to be placed on the supporting rod 2 at one end of the cantilever paddle rod 1, and then the supporting rod 2 is transported into the diffusion furnace through the cantilever paddle rod 1. During the high-temperature treatment of the silicon wafer, the vent 3 can allow heat to flow on both sides of the supporting rod 2, thereby assisting in completing the high-temperature treatment of the silicon wafer. Embodiment 2

[0026] See also Figures 1 to 3 and Figure 5-Figure 7On the basis of the first embodiment, the end of the cantilever paddle rod 1 away from the load-bearing rod 2 is sleeved with an extended paddle rod 4, and a No. 1 slide groove 6 is provided on the inner walls of both sides of the extended paddle rod 4, and a No. 1 slider 5 is fixed on both sides of the extended paddle rod 4 close to the No. 1 slide groove 6, and a No. 2 slider 7 is fixed on the side of the cantilever paddle rod 1 away from the No. 1 slider 5, and a No. 2 slide groove 8 is provided on the side of the extended paddle rod 4 close to the No. 2 slider 7, and an extension mechanism 9 is provided on the side of the cantilever paddle rod 1 away from the No. 1 slider 5 and the No. 2 slider 7, and the extension mechanism 9 includes a limiting hole 901, a positioning rod 902, an arc groove 903 and a connecting block 9 04, the cantilever paddle rod 1 is provided with spaced limiting holes 901 on one side away from the No. 1 slider 5 and the No. 2 slider 7, a positioning rod 902 is inserted into the limiting hole 901, and the two ends of the positioning rod 902 are connected to connecting blocks 904, and an arc groove 903 is provided on the inner wall of the limiting hole 901 close to the connecting block 904, and the positioning rod 902 passes through one side of the extended paddle rod 4, the No. 1 slider 5 and the No. 1 slide groove 6 are slidably connected, and the No. 2 slider 7 and the No. 2 slide groove 8 are slidably connected, and the cross-sectional shape of the arc groove 903 and the connecting block 904 are both "T"-shaped.

[0027] In specific implementation, the length of most reaction-sintered silicon carbide ceramic cantilever paddles is usually fixed, which is not convenient for adjusting the length according to actual needs. When the length of the reaction-sintered silicon carbide ceramic cantilever paddle needs to be adjusted, the cantilever paddle rod 1 can be pulled to one side, so that one end of the cantilever paddle rod 1 slides to one side on the inner side of the extended paddle rod 4, and at the same time, the first slider 5 and the second slider 7 are driven to slide to one side in the first slide groove 6 and the second slide groove 8 respectively. After the cantilever paddle rod 1 is slid to a suitable length, the fixed length can be adjusted. The positioning rod 902 is inserted into the limiting hole 901, and then the positioning rod 902 is rotated clockwise so that the positioning rod 902 drives the connecting block 904 to slide into the arc groove 903, and the cross-sectional shape of the arc groove 903 and the cross-sectional shape of the connecting block 904 are both "T"-shaped, which can improve the stability of the connecting block 904. The positioning rod 902 limits the sliding of the cantilever paddle rod 1, and can quickly extend the length of the reaction-sintered silicon carbide ceramic cantilever paddle, thereby improving the practicality of the reaction-sintered silicon carbide ceramic cantilever paddle. Embodiment 3

[0028] See also Figure 1 and Figure 3-Figure 4On the basis of the second embodiment, rotating shafts 11 are installed on both sides of the load-bearing rod 2, one side of the rotating shaft 11 is connected to a limiting mechanism 10, and the limiting mechanism 10 is connected to the load-bearing rod 2, an insert rod 12 is provided on the inner side of the limiting mechanism 10, the limiting mechanism 10 includes a limiting rod 101, a support plate 102, a limiting pin 103 and a support block 104, support blocks 104 are fixed on both sides of the load-bearing rod 2, one side of the support block 104 is movably connected with the support plate 102 through a movable shaft, one side of the rotating shaft 11 is movably connected to the limiting pin 103, and the limiting rod 101 is fixed at both ends of the support plate 102 near the limiting pin 103, and jacks are provided on both sides of the support plate 102, and a bayonet is provided on one side of the limiting pin 103 near the limiting rod 101.

[0029] In specific implementation, since the bottom width of the reaction-sintered silicon carbide ceramic cantilever paddle is relatively narrow and the contact surface with the support assembly in the diffusion furnace is small, the placement stability of the reaction-sintered silicon carbide ceramic cantilever paddle is insufficient. The limit pin 103 can be rotated by rotating the rotating shaft 11 to disengage the stopper of the limit pin 103 from the limit rod 101, and then the support plate 102 is rotated to make the bottom surface of the support plate 102 flush with the bottom surface of the load-bearing rod 2, and then the insertion rod 12 is inserted from the support block 104 into the sockets at both ends of the support plate 102 to limit the position of the support plate 102. The support plate 102 increases the bottom area of ​​the reaction-sintered silicon carbide ceramic cantilever paddle, which is beneficial to improving the placement stability of the reaction-sintered silicon carbide ceramic cantilever paddle.

[0030] In actual use, the length of the reaction-sintered silicon carbide ceramic cantilever paddle can be adjusted as needed. First, the length of the cantilever paddle rod 1 is extended by extending the paddle rod 4, and then the position of the cantilever paddle rod 1 is restricted by the extending mechanism 9, and then the bottom area of ​​the supporting rod 2 is adjusted by the limiting mechanism 10. Subsequently, the silicon wafer is placed in the placement area of ​​the supporting rod 2, and then the supporting rod 2 is sent into the interior of the diffusion furnace, and the silicon wafer is subjected to high-temperature treatment. The vent hole 3 is used for heat circulation. The extending mechanism 9 and the limiting mechanism 10 improve the practicality and stability of the reaction-sintered silicon carbide ceramic cantilever paddle.

[0031] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A reaction-sintered silicon carbide ceramic cantilever propeller, comprising a cantilever propeller shaft (1) and a vent hole (3), characterized in that: One end of the cantilever paddle rod (1) is fixedly connected to the bearing rod (2), the vent holes (3) are spaced apart on the inner walls of both sides of the bearing rod (2), the end of the cantilever paddle rod (1) away from the bearing rod (2) is sleeved with an extended paddle rod (4), a first slide groove (6) is provided on the inner walls of both sides of the extended paddle rod (4), a first slider (5) is fixed on both sides of the extended paddle rod (4) close to the first slide groove (6), and a second slider is fixed on the side of the cantilever paddle rod (1) away from the first slider (5) (7), a second slide groove (8) is provided on a side of the extended paddle rod (4) close to the second slider (7), an extension mechanism (9) is provided on a side of the cantilever paddle rod (1) away from the first slider (5) and the second slider (7), the extension mechanism (9) comprises a limiting hole (901), a positioning rod (902), an arc groove (903) and a connecting block (904), and limiting holes (901) are provided at intervals on a side of the cantilever paddle rod (1) away from the first slider (5) and the second slider (7).

2. A reaction-sintered silicon carbide ceramic cantilever paddle according to claim 1, characterized in that: Rotating shafts (11) are installed on both sides of the bearing rod (2), one side of the rotating shaft (11) is connected to a limiting mechanism (10), and the limiting mechanism (10) is connected to the bearing rod (2), and an inserting rod (12) is provided on the inner side of the limiting mechanism (10).

3. The reaction-sintered silicon carbide ceramic cantilever paddle according to claim 1, characterized in that: A positioning rod (902) is inserted into the limiting hole (901), and connecting blocks (904) are connected to both ends of the positioning rod (902). An arc groove (903) is provided on the inner wall of the limiting hole (901) close to the connecting block (904), and the positioning rod (902) passes through one side of the extended paddle rod (4).

4. A reaction-sintered silicon carbide ceramic cantilever paddle according to claim 2, characterized in that: The limiting mechanism (10) comprises a limiting rod (101), a support plate (102), a limiting pin (103) and a support block (104), and support blocks (104) are fixed on both sides of the bearing rod (2).

5. A reaction-sintered silicon carbide ceramic cantilever paddle according to claim 4, characterized in that: One side of the support block (104) is movably sleeved with a support plate (102) via a movable shaft, one side of the rotating shaft (11) is movably connected to a limit pin (103), and both ends of the support plate (102) close to the limit pin (103) are fixed with limit rods (101).

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