Ion beam current measuring device and vacuum equipment

Abstract

The utility model relates to an ion beam current measuring device and vacuum equipment, and the measuring device is used for measuring an ion beam current of an ion source. Comprising a supporting structure, a guide rail and a moving module. The supporting structure is installed on the vacuum cavity, the guide rail is fixed in the vacuum cavity through the supporting structure, and the moving module is arranged on the guide rail and moves along the guide rail; a detection device is mounted on the mobile module and is used for measuring beam parameters of the ion beam; the moving module is used for moving the detection device in a spatial range; the detection device dynamically detects beam parameters of the ion beam in a moving range and outputs the beam parameters; according to the technical scheme provided by the invention, one detection device can be adopted to detect a plurality of position points, dynamically collect the beam parameters of the ion beam and ensure the consistency of measurement data, so that the accuracy of the measured beam parameters of the ion beam and the analysis result of the ion beam can be improved.

Description

Technical Field

[0001] The present application relates to the field of vacuum detection technology, and in particular to an ion beam current measurement device and a vacuum device. Background Art

[0002] In vacuum equipment, the ion source is an important device that needs to be used. The ion source can output ion beam current. The size and energy distribution of the ion beam current are important parameters of the ion source. Therefore, it is necessary to detect the ion beam current output by the ion source.

[0003] Conventional ion beam current measurement solutions usually place multiple detection devices in the vacuum chamber of the vacuum equipment and use spatial measurement above the ion source for detection. Due to the differences between different detection devices themselves and the difficulty in achieving consistent height and direction of the detection device distribution, the consistency of the measurement data is poor. Utility Model Content

[0004] The purpose of this application is to solve one of the above-mentioned technical defects and provide an ion beam current measurement device and a vacuum equipment to improve the consistency of the measurement data.

[0005] An ion beam current measuring device is used to measure the ion beam current of an ion source; it comprises: a support structure, a guide rail and a moving module; the support structure is installed on a vacuum chamber, the guide rail is fixed in the vacuum chamber through the support structure, and the moving module is arranged on the guide rail and moves along the guide rail;

[0006] The mobile module is provided with a detection device for measuring the beam current parameters of the ion beam;

[0007] The mobile module moves the detection device within a spatial range;

[0008] The detection device dynamically detects the ion beam current parameters within the moving range and outputs them.

[0009] In one embodiment, the support structure includes: a mounting seat and a telescopic adjustment rod;

[0010] The mounting seat is fixedly mounted on the outer shell of the vacuum chamber, and the guide rail is connected to the mounting seat via a telescopic adjustment rod; the telescopic adjustment rod adjusts the distance of the detection device relative to the ion source through telescopic control.

[0011] In one embodiment, a rotating seat is further connected between the telescopic adjustment rod and the mounting seat, which is used to rotate the telescopic adjustment rod to select the guide rail and rotate the detection device to different angular positions on the plane.

[0012] In one embodiment, an angle adjuster is further provided between the detection device and the moving module for adjusting the detection angle of the detection device.

[0013] In one embodiment, the detection device is provided with an anti-pollution cover, which is opened in a measuring state and closed in a non-measuring state to protect the detection device.

[0014] In one embodiment, the detection device is connected to the control device via a transmission line;

[0015] The active part of the transmission line is wrapped with tin foil and protected by a tank chain.

[0016] In one embodiment, the detection device comprises: a Faraday cage, an operational amplifier circuit, an ADC, a digital isolation chip and an MCU connected in sequence; wherein,

[0017] The Faraday cage is used to detect the ion beam current and output an analog electrical signal;

[0018] The operational amplifier circuit amplifies the analog electrical signal;

[0019] The ADC converts the analog electrical signal into a digital signal;

[0020] The digital isolation chip is used to isolate digital signals;

[0021] The MCU is used to send the collected digital signal to the control device.

[0022] In one embodiment, the Faraday cage is of flat design, and its structure includes: an ion beam collecting front end, an ion suppression component, an isolation component, an ion collecting component and a protective shell stacked in sequence; wherein the ion collecting component is connected to the operational amplifier circuit;

[0023] The ion collecting component is used to collect ion beam current and output analog electrical signals.

[0024] In one embodiment, the mobile module is driven by a first motor; the telescopic adjustment rod is driven by a second motor; and the rotating seat is driven by a third motor;

[0025] The MCU is respectively connected to the first motor, the second motor, the third motor and the angle adjuster;

[0026] Limit sensors are respectively provided at both ends of the guide rail for triggering the limit when the mobile module moves.

[0027] A vacuum device comprises: a vacuum chamber, an ion source and the ion beam current measuring device.

[0028] This application has the following beneficial effects:

[0029] The detection device is moved by the guide rail and the moving module to perform mobile measurement of the ion beam current. The same detection device is used to detect multiple positions, and the ion beam current parameters output by the ion source can be dynamically collected to ensure the consistency of the measurement data, thereby improving the accuracy of the measured ion beam current parameters and their analysis results.

[0030] Furthermore, through the design of the telescopic rod and the rotating seat, it is possible to detect multiple position points in the three-dimensional space, so that the ion beam current parameters can be measured more comprehensively, thereby enabling a more comprehensive evaluation of the ion source.

[0031] Furthermore, the detection angle of the detection device can be adjusted to align with the ion source through the angle regulator, thereby improving the accuracy of measuring the ion beam current parameters.

[0032] Furthermore, the active part of the transmission line is wrapped with tin foil and protected by a tank chain, which can improve the ability to resist high temperature and interference.

[0033] Furthermore, an anti-pollution cover is designed to protect the detection device to prevent the device from being damaged by long-term ion beam exposure when not in use.

[0034] Furthermore, the Faraday cage is of flat design, which simplifies the device structure and facilitates movement in space, thereby improving the measurement effect of the ion beam current.

[0035] Additional aspects and advantages of the present application will be partially given in the following description, which will become apparent from the following description, or will be understood through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the following description of the embodiments in conjunction with the accompanying drawings, in which:

[0037] Figure 1 is a schematic structural diagram of an ion beam current measuring device according to an embodiment;

[0038] Figure 2 is a schematic structural diagram of an ion beam current measuring device according to another embodiment;

[0039] Figure 3 is a circuit diagram of a detection device of an embodiment;

[0040] Figure 4 is an exploded view of a Faraday cage according to an embodiment;

[0041] Figure 5 is a transmission line protection schematic diagram of an embodiment;

[0042] Figure 6The electrical structure diagram of an ion beam current measuring device according to an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0043] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be interpreted as limiting the present application.

[0044] Those skilled in the art will appreciate that, unless otherwise stated, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. It should be further understood that the term "comprising" used in the specification of the present application refers to the presence of the features, integers, steps, operations, but does not exclude the presence or addition of one or more other features, integers, steps, operations.

[0045] The ion beam current measuring device 01 provided in the present application is mainly used to measure the ion beam current of the ion source 02 in the vacuum equipment 100; Figure 1 , Figure 1 It is a schematic structural diagram of an ion beam current measuring device according to an embodiment, comprising: a support structure 11, a guide rail 12 and at least one movable module 13; the support structure 11 is mounted on a vacuum chamber 03, the guide rail 12 is fixed in the vacuum chamber 03 through the support structure 11, and the movable module 13 is disposed on the guide rail 12 and moves along the guide rail 12.

[0046] A detection device 14 is installed on the mobile module 13 for measuring the ion beam current parameters; the mobile module 13 moves the detection device 14 within a spatial range; the mobile module 13 can move in a straight line along the guide rail 12 under control, and the detection device 14 follows the mobile module 13 to dynamically detect the ion beam current parameters within the moving range, and can output the ion beam current parameters at multiple positions as required, and measure the ion beam current parameters output by the ion source 02 as a whole, so as to better consistently detect the ion beam current size and energy distribution.

[0047] In this embodiment, the support structure 11 can be installed on the top of the vacuum chamber 03, and the guide rail 12 can be installed in the horizontal direction by hanging. When it is necessary to measure the ion beam current output by the ion source 02, the ion source 02 is installed in the vacuum chamber 03, and then under the set vacuum conditions, the moving module 13 is started to move in a straight line along the guide rail 12, and the ion beam current parameters generated by the detection device 14 are collected at the same time. Through the measurement points on the guide rail 12 when the moving module 13 moves, the beam current size and energy distribution of each measurement point can be drawn on the plane.

[0048] As in the scheme of the above-mentioned embodiment, the detection device 14 is moved for measurement through the guide rail 12 and the movable module 13, so that one detection device 14 can be used to detect multiple measurement points, dynamically collect ion beam current parameters, and ensure the consistency of measurement data, thereby improving the accuracy of the measured ion beam current parameters and their analysis results.

[0049] It should be noted that, in the embodiment of the present application, at least one detection device 14 may be provided. In the relevant embodiment, one detection device 14 is used as an example for description. In some embodiments, multiple detection devices 14 may also be included. For example, two mobile modules 13 may be provided on the guide rail 12 as shown in the figure, and a detection device 14 is installed on each mobile module 13, so that measurements can be performed on both sides of the guide rail respectively, thereby improving the test efficiency. Based on this, the scheme of the present embodiment can ensure the measurement efficiency by providing multiple detection devices 14 when the number of detection devices 14 used is reduced in dynamic mobile measurement. In a specific embodiment, the number of detection devices 14 used can be set according to the actual measurement accuracy and measurement efficiency, so as to better balance the relationship between data consistency and measurement efficiency.

[0050] In order to make the effect of the technical solution of this application clearer, refer to Figures 2 to 6 As shown below, combined with the attached Figure 2 Further embodiments are described.

[0051] In one embodiment, Figure 2 As shown, Figure 2 It is a structural schematic diagram of an ion beam current measuring device of another embodiment. In order to achieve better balance, the support structure 11 is connected to the middle position of the guide rail 12; the movable module 13 can be driven by a first motor 13a, and the first motor 13a can move the detection device 14 to a specified position according to control. Furthermore, limit sensors 121 can be respectively provided at both ends of the guide rail 12 to perform limit triggering when the movable module 13 is moved. When the movable module 13 moves to the two end positions, a trigger signal is output to control the movable module 13 to stop moving. The ion beam current parameters detected by the detection device 14 can be transmitted to an external control device 04 for analysis and processing through wired or wireless communication methods. The control device 04 can usually be a computer PC.

[0052] In one embodiment, Figure 2As shown, the support structure 11 may include: a mounting seat 111 and a telescopic adjustment rod 112; wherein the mounting seat 111 is fixedly mounted on the top of the vacuum chamber 03, and the guide rail 12 is connected to the mounting seat 111 through the telescopic adjustment rod 112; the telescopic adjustment rod 112 adjusts the distance of the detection device 14 relative to the ion source 02 through telescopic control; specifically, the mounting seat 111 may adopt a flange plate, fixed above the vacuum chamber 03, and the telescopic adjustment rod 112 may be electrically driven, and it may be driven by a built-in second motor 11a.

[0053] As in the scheme of the above-mentioned embodiment, in the ion beam current measurement, the distance of the detection device 14 relative to the ion source 02 can be adjusted by the telescopic adjustment rod 112, so that measurements can be performed on planes at different heights, thereby the ion beam current parameter size and beam energy distribution state of the ion beam at different height positions can be plotted based on the measured beam current parameters.

[0054] In one embodiment, Figure 2 As shown, in order to more accurately detect the ion beam current parameters on the plane, a rotating seat 15 is further connected between the telescopic adjustment rod 112 and the mounting seat 111 for rotating the telescopic adjustment rod 112 to rotate the detection device 14 to different positions on the plane.

[0055] Specifically, the upper end of the telescopic adjustment rod 112 is connected to the mounting base 111 through the rotating base 15, and the rotating base 15 can rotate the guide rail 12 as a whole, so that the detection device 14 can be rotated to any position on the plane. When in use, the rotation angle of the rotating base 15 can be controlled by the control device 04. For example, within the range of 360°, the control device 04 can rotate the guide rail 12 to any angle as required, and then cooperate with the moving module 13 to adjust the position of the detection device 14, so that any position on the entire plane can be scanned and detected, thereby the overall spatial beam size and energy distribution state of the ion beam output by the ion source 02 can be measured.

[0056] As in the above-mentioned embodiment, through the design of the telescopic rod and the rotating seat 15, it is possible to detect multiple position points in the three-dimensional space, so that the ion beam current parameters can be measured more comprehensively, and the ion beam current of the ion source 02 can be measured more comprehensively.

[0057] In one embodiment, Figure 2As shown, an angle adjuster 16 is further provided between the detection device 14 and the movable module 13 for adjusting the detection angle of the detection device 14; since the detection device 14 is usually most accurate when measuring perpendicular to the direction of the ion beam, during the movement, the position change causes changes in the measurement direction. Therefore, the detection angle of the detection device 14 is adjusted in real time by the angle adjuster 16, so that during the position change, the detection device 14 can always point to the direction of the ion beam. The detection angle can be calculated based on the triangle formed by the distance from the guide rail 12 to the center of the ion source and the distance from the detection device 14 to the rotation center line of the telescopic adjustment rod 112.

[0058] As in the solution of the above embodiment, when the moving module 13 moves the detection device 14, the detection angle can be controlled to change with the position change by controlling the angle adjuster 16, thereby improving the accuracy of measuring the ion beam current parameters.

[0059] In one embodiment, for the circuit design of the detection device 14, as shown in FIG. Figure 3 As shown, Figure 3 It is a circuit structure diagram of a detection device of an embodiment. In order to achieve better measurement of ion beam current, the detection device 14 of this embodiment may include: a Faraday cup 141, an operational amplifier circuit 142, an ADC 143, a digital isolation chip 144 and an MCU (Microcontroller Unit) 145; wherein the Faraday cup 141 is used to detect the ion beam current and output an analog electrical signal, the operational amplifier circuit 142 amplifies the analog electrical signal, the ADC 143 converts the analog electrical signal into a digital signal, the digital isolation chip 144 is used to isolate the digital signal, and the MCU 145 is used to send the collected digital signal to the control device 04 through a set protocol communication line, such as transmission through an RS232 communication line.

[0060] As in the scheme of the above-mentioned embodiment, the Faraday cage 141 can detect the ion beam current and convert it into an analog electrical signal for output, the operational amplifier circuit 142 amplifies the analog electrical signal, and the amplified analog electrical signal can be converted into a digital signal through ADC143. The digital signal is effectively isolated by the digital isolation chip 144 and then sent to MCU145. MCU145 can send the digital signal to the control device 04 for processing through the corresponding communication module; in the detection device 14, MCU145 controls the movement of the mobile module 13 on the guide rail 12, so as to achieve the ion beam energy distribution on the measurement plane. After the digital isolation chip 144 performs isolation, the circuit's anti-interference ability is guaranteed.

[0061] In one embodiment, Figure 4 As shown, Figure 4It is an exploded view of a Faraday cage of an embodiment, and its structure adopts a flat design, including: an ion beam collecting front end 401, an ion suppression component 402, an isolation component 403, an ion collecting component 404 and a protective shell 405 stacked in sequence; wherein the ion collecting component 404 is connected to the operational amplifier circuit 142 for outputting analog electrical signals.

[0062] As in the above-mentioned embodiment, the Faraday cage 141 can realize a flat structure design, which reduces the occupied space and is more conducive to control during the movement process of the mobile module 13 and the adjustment process of the detection angle, thereby improving the use effect.

[0063] In one embodiment, Figure 5 As shown, Figure 5 It is a schematic diagram of transmission line protection of an embodiment, wherein the detection device 14 is connected to the control device 04 outside the vacuum chamber 03 via a transmission line; wherein the active part of the transmission line is wrapped with tin foil and protected by a tank chain 18; specifically, the transmission line used in the detection device 14, such as a signal line, a power line, etc., can be first wrapped with tin foil for the active part, and then protected by a tank chain 18.

[0064] As in the solution of the above embodiment, it can be ensured that the wiring is not burned by the high temperature generated by the ion source 02, and the high temperature resistance and anti-interference capabilities can also be improved.

[0065] In one embodiment, Figure 5 As shown, the detection device 14 is provided with an anti-pollution cover 17 for protecting the detection device 14 in a non-measuring state; wherein the anti-pollution cover 17 is opened in a measuring state and closed in a non-measuring state.

[0066] Since the inside of the vacuum chamber 03 is a high temperature environment, the equipment is prone to aging and pollution interference in this environment. In order to effectively protect the detection device 14, an anti-pollution cover 17 is designed. During daily use, the detection device 14 can be completely closed to protect it, and the anti-pollution cover 17 can be opened when in use.

[0067] As in the above-mentioned embodiment, an anti-pollution cover 17 is designed to protect the detection device 14 to prevent the device from being damaged by ion beam exposure for a long time when not in use.

[0068] In one embodiment, Figure 6 As shown, Figure 6It is an electrical structure diagram of an ion beam current measuring device of an embodiment. As described in the aforementioned embodiment, the moving module 13 can be driven by the first motor 13a, the telescopic adjustment rod 112 can be driven by the second motor 11a, and the rotating seat 15 can be driven by the third motor 15a; wherein, an embedded control system is designed, and the MCU145 is also connected to the first motor 13a, the second motor 11a, the third motor 15a and the angle adjuster 16; preferably, a digital isolation module can also be connected between the MCU145 and each motor for isolation, so that the MCU145 can output a stable motor control signal to control the motor operation.

[0069] As shown in the circuit structure of the above embodiment, MCU145 can control the first motor 13a to drive the mobile module 13 to reach the specified measuring point position through an embedded control system, and can also control the second motor 11a to rotate the guide rail 12 to a specified angle, and can also control the angle adjuster 16 to adjust the detection angle of the Faraday cage 141; when in use, the user can send relevant instruction requirements to MCU145 through the control device 04 to control each motor and the angle adjuster 16.

[0070] An embodiment of the vacuum device 100 is described below.

[0071] The vacuum device 100 provided in this application, refer to Figures 1 to 6 As shown, it includes: a vacuum chamber 03, an ion source 02 and an ion beam current measuring device 01; wherein, the ion beam current measuring device 01 can be installed on the top of the vacuum chamber 03, and the ion source 02 is installed at the bottom of the vacuum chamber 03. When the ion beam current output by the ion source 02 is tested, the moving module 13 is controlled to move along the guide rail 12, so that each position point can be measured; further, when it is necessary to measure the beam current parameters of each preset measurement point on the entire plane, the rotating seat 15 can be rotated at any angle, and then any measurement point on the plane can be detected. When it is necessary to detect planes at different heights, the height can be adjusted by the telescopic adjustment rod 112, so that the size and energy distribution of the ion beam current in space can be measured in an all-round and three-dimensional manner, so that a distribution model of the ion beam current in three-dimensional space can be drawn, providing accurate and scientific data for the measurement of the ion source 02.

[0072] It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as those generally understood by those skilled in the art to which this application belongs. It should also be understood that terms such as those defined in general dictionaries should be understood to have meanings consistent with those in the context of the prior art, and will not be interpreted with idealized or overly formal meanings unless specifically defined as here.

[0073] The above description is only a partial implementation method of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present application. These improvements and modifications should also be regarded as the scope of protection of the present application.

Claims

1. An ion beam current measuring device (01), used for measuring the ion beam current of an ion source (02); characterized in that: include: A support structure (11), a guide rail (12) and a movable module (13); the support structure (11) is installed on the vacuum chamber (03), the guide rail (12) is fixed in the vacuum chamber (03) through the support structure (11), and the movable module (13) is arranged on the guide rail (12) and moves along the guide rail (12); The moving module (13) is provided with a detection device (14) for measuring the beam current parameters of the ion beam; The mobile module (13) moves the detection device (14) within a spatial range; The detection device (14) dynamically detects the ion beam current parameters within the moving range and outputs them.

2. The ion beam current measuring device (01) according to claim 1, characterized in that: The support structure (11) comprises: a mounting seat (111) and a telescopic adjustment rod (112); The mounting seat (111) is fixedly mounted on the outer shell of the vacuum chamber (03), and the guide rail (12) is connected to the mounting seat (111) via a telescopic adjustment rod (112); the telescopic adjustment rod (112) adjusts the distance of the detection device (14) relative to the ion source (02) by telescopic control.

3. The ion beam current measuring device (01) according to claim 2, characterized in that: A rotating seat (15) is also connected between the telescopic adjustment rod (112) and the mounting seat (111) and is used to rotate the telescopic adjustment rod (112) to select the guide rail (12) and rotate the detection device (14) to different angular positions on the plane.

4. The ion beam current measuring device (01) according to claim 3, characterized in that: An angle adjuster (16) is also provided between the detection device (14) and the movable module (13) for adjusting the detection angle of the detection device (14).

5. The ion beam current measuring device (01) according to claim 4, characterized in that: The detection device (14) is provided with an anti-fouling cover (17) outside, which is used to be opened in a measuring state and closed in a non-measuring state to protect the detection device (14).

6. The ion beam current measuring device (01) according to claim 4, characterized in that: The detection device (14) is connected to the control device (04) via a transmission line; The active part of the transmission line is wrapped with tin foil and protected by a tank chain (18).

7. The ion beam current measuring device (01) according to claim 6, characterized in that: The detection device (14) comprises: a Faraday cup (141), an operational amplifier circuit (142), an ADC (143), a digital isolation chip (144) and an MCU (145) connected in sequence; wherein: The Faraday cage (141) is used to detect the ion beam current and output an analog electrical signal; The operational amplifier circuit (142) amplifies the analog electrical signal; The ADC (143) converts the analog electrical signal into a digital signal; The digital isolation chip (144) is used to isolate digital signals; The MCU (145) is used to send the collected digital signal to the control device (04).

8. The ion beam current measuring device (01) according to claim 7, characterized in that: The Faraday cage (141) is of flat design, and its structure comprises: an ion beam collecting front end (401), an ion suppression component (402), an isolation component (403), an ion collecting component (404) and a protective shell (405) stacked in sequence; wherein the ion collecting component (404) is connected to the operational amplifier circuit (142); The ion collecting component (404) is used to collect the ion beam current and output an analog electrical signal.

9. The ion beam current measuring device (01) according to claim 7, characterized in that: The movable module (13) is driven by a first motor (13a); the telescopic adjustment rod (112) is driven by a second motor (11a); and the rotating seat (15) is driven by a third motor (15a); The MCU (145) is respectively connected to the first motor (13a), the second motor (11a), the third motor (15a) and the angle adjuster (16); Limit sensors (121) are respectively provided at both ends of the guide rail (12) for triggering the limit when the moving module (13) moves.

10. A vacuum device (100), characterized in that: include: A vacuum chamber (03), an ion source (02), and an ion beam current measuring device (01) as claimed in any one of claims 1 to 9.

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