Wafer box with multiple vertically placed wafers

Abstract

The utility model provides a wafer box with multiple vertically placed wafers, which relates to the technical field of wafers, and comprises a wafer upper cover, a plurality of plastic elastic sheet groups are fixedly connected in the wafer upper cover, each plastic elastic sheet group comprises two opposite plastic elastic sheets, the bottom of the wafer upper cover is provided with a clamping ring, and the clamping ring is fixedly connected with the plastic elastic sheets. And a clamping table fixedly connected with the wafer box body is clamped in the clamping ring. Compared with the prior art, the wafer placing structure has the advantages that the notch is formed in the wafer placing structure to vertically place the wafer, the upper cover and the wafer placing structure are closed to store the wafer in a closed mode, and the elastic piece structure is arranged in the upper cover to clamp the vertically-placed wafer, so that the wafer can be effectively prevented from rotating, the wafer is prevented from being damaged, and the service life of the wafer is prolonged. Meanwhile, the wafers can be effectively prevented from moving in the transportation process through closed storage, protection is provided for the wafers in the transportation process, the wafer transportation safety is improved, and the wafers can be transported conveniently.

Description

Technical Field

[0001] The utility model relates to the technical field of wafers, in particular to a wafer box for vertically placing multiple wafers. Background Art

[0002] Wafers are the highest-end products and also the most fragile products. The research and development and production of wafers often involve the transportation of wafers. Wafers need to be protected during transportation to avoid damage or contamination.

[0003] However, the existing wafers are easy to rotate during transportation and placement, and are relatively easy to wear, which is not conducive to protecting the wafers, and the transportation safety of the wafers is low. Utility Model Content

[0004] Therefore, the purpose of the present invention is to provide a multi-wafer box placed vertically to solve the problems mentioned in the background technology and overcome the shortcomings of the prior art.

[0005] In order to achieve the above-mentioned purpose, an embodiment of the utility model on one hand provides a multi-piece vertical wafer box, including a wafer box body, a plurality of wafer placement slots are opened inside the wafer box body, vertical wafers are placed inside the wafer placement slots, a wafer cover is arranged above the vertical wafer and is engaged with the wafer box body, a plurality of groups of plastic spring sheets are fixedly connected to the inside of the wafer cover, each group of the plastic spring sheets includes two opposite plastic spring sheets, a clamping ring is arranged at the bottom of the wafer cover, and a clamping table fixedly connected to the wafer box body is engaged inside the clamping ring.

[0006] Preferably, any of the above schemes is provided with a protective frame at the top of the wafer box body, limiting bosses are provided at both ends of the protective frame, and an annular table fixedly connected to the wafer box body is provided on one side of the limiting boss.

[0007] The above technical solution is adopted: the wafer is supported and fixed by a wafer box, a protective frame is set to cover the wafer to facilitate protection of the wafer, and a limiting boss and an annular table are set to facilitate clamping of the wafer cover to achieve closed protection of the wafer.

[0008] Preferably, any of the above schemes is that a plurality of the wafer placement slots are linearly arrayed inside the wafer box, and a placement partition fixedly connected to the wafer box is provided on one side of the wafer placement slots.

[0009] The above technical solution is adopted: a wafer placement groove is provided to facilitate the placement of wafers, and a placement partition can be used to support and fix the placed wafers, thereby improving the stability of wafer placement.

[0010] Preferably, any of the above schemes has a protective cavity adapted to the protective frame formed inside the wafer cover, a limiting groove adapted to the vertical wafer formed inside the protective cavity, and card slots adapted to the limiting boss formed at both ends of the protective cavity.

[0011] The above technical solution is adopted: the protective cavity is used to cover the placed wafer to facilitate the sealing of the wafer, and the limiting groove and the clamping groove are used to facilitate the limiting clamping of the wafer and the fixing of the wafer cover.

[0012] Preferably, in any of the above schemes, an arc-shaped boss is provided at one end of the plastic spring, and the arc-shaped boss is located at one side of the limiting groove.

[0013] By adopting the above technical solution: each set of plastic spring sheets clamps and fixes a wafer, so that the arc-shaped boss squeezes the wafer to a certain extent to prevent the wafer from rotating.

[0014] Preferably, any of the above schemes has a notch adapted to the clamping platform formed inside the clamping ring, and the clamping ring fits the wafer box body.

[0015] The above technical solution is adopted: the wafer cover is fixed by utilizing the engagement between the clamping ring and the clamping platform to ensure the stability of the wafer closure.

[0016] Preferably, any of the above schemes is that the clamping platform and the clamping ring are clamped together, and the clamping platform is located between the annular platform and the limiting boss.

[0017] The above technical solution is adopted: the locking between the limiting boss and the locking groove is utilized to enhance the sealing stability of the wafer cover and improve the safety of transportation.

[0018] Compared with the prior art, the advantages and beneficial effects of the utility model are:

[0019] 1. A notch is set inside the wafer placement structure to place the wafer vertically. The upper cover and the wafer placement structure are closed to store the wafer in a closed manner, and a spring structure is set inside the upper cover to clamp the vertically placed wafer, which can effectively prevent the wafer from rotating, prevent the wafer from being damaged, and reduce the generation of dust. At the same time, closed storage can effectively prevent the wafer from moving during transportation, provide protection for the wafer during transportation, improve the safety of wafer transportation, and facilitate the transportation of wafers.

[0020] Additional aspects and advantages of the present invention will be given in part in the following description and in part will become apparent from the following description or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0022] Figure 1 It is a structural schematic diagram according to an embodiment of the utility model;

[0023] Figure 2 It is a schematic diagram of an explosion structure according to an embodiment of the utility model;

[0024] Figure 3 It is a structural schematic diagram of a wafer cassette according to an embodiment of the utility model;

[0025] Figure 4 It is a schematic diagram of the structure of a wafer cover according to an embodiment of the utility model;

[0026] Among them: 1-wafer box, 2-wafer placement slot, 3-vertical wafer, 4-wafer cover, 5-plastic spring group, 51-plastic spring, 6-clamp ring, 7-clamping platform, 8-protective frame, 9-limiting boss, 10-annular platform, 11-placing partition, 12-protective cavity, 13-limiting slot, 14-clamping slot, 15-arc boss. DETAILED DESCRIPTION

[0027] The present invention is further described below in conjunction with the accompanying drawings, but the protection scope of the present invention is not limited to the following description.

[0028] like Figure 1-4 As shown, a multi-piece vertical wafer box according to an embodiment of the utility model comprises a wafer box body 1, a plurality of wafer placement slots 2 are provided inside the wafer box body 1, vertical wafers 3 are placed inside the wafer placement slots 2, a wafer top cover 4 which is engaged with the wafer box body 1 is provided above the vertical wafer 3, a plurality of plastic spring groups 5 are fixedly connected inside the wafer top cover 4, each plastic spring group 5 includes two opposite plastic springs 51, a clamping ring 6 is provided at the bottom of the wafer top cover 4, a clamping table 7 which is fixedly connected with the wafer box body 1 is engaged inside the clamping ring 6.

[0029] Preferably, any of the above schemes is that a protective frame 8 is provided at the top of the wafer box body 1, limiting bosses 9 are provided at both ends of the protective frame 8, and a ring platform 10 fixedly connected to the wafer box body 1 is provided on one side of the limiting boss 9.

[0030] The above technical solution is adopted: the wafer is supported and fixed by the wafer box 1, a protective frame 8 is set to cover the wafer to facilitate protection of the wafer, and a limiting boss 9 and an annular table 10 are set to facilitate the clamping of the wafer cover 4 to achieve closed protection of the wafer.

[0031] Preferably, any of the above schemes is that a plurality of wafer placement slots 2 are linearly arrayed inside the wafer box 1 , and a placement partition 11 fixedly connected to the wafer box 1 is provided on one side of the wafer placement slots 2 .

[0032] The above technical solution is adopted: a wafer placement groove 2 is provided to facilitate wafer placement, and a placement partition 11 can be used to support and fix the placed wafer, thereby improving the stability of wafer placement.

[0033] Preferably, any of the above schemes has a protective cavity 12 adapted to the protective frame 8 formed inside the wafer cover 4, a limiting groove 13 adapted to the vertical wafer 3 formed inside the protective cavity 12, and card grooves 14 adapted to the limiting boss 9 formed at both ends of the protective cavity 12.

[0034] The above technical solution is adopted: the protective cavity 12 is used to cover the placed wafer to facilitate the sealing of the wafer, and the limiting groove 13 and the clamping groove 14 are used to facilitate the limiting clamping of the wafer and the fixing of the wafer cover 4.

[0035] Preferably, any of the above solutions is that an arc-shaped boss 15 is provided at one end of the plastic spring 51 , and the arc-shaped boss 15 is located at one side of the limiting groove 13 .

[0036] By adopting the above technical solution, each set of plastic spring sheet groups 5 clamps and fixes a wafer, so that the arc-shaped boss 15 squeezes the wafer to a certain extent to prevent the wafer from rotating.

[0037] Preferably, any of the above solutions has a notch adapted to the clamping platform 7 formed inside the clamping ring 6 , so that the clamping ring 6 fits the wafer box 1 .

[0038] The above technical solution is adopted: the wafer cover 4 is fixed by the engagement between the clamping ring 6 and the clamping platform 7 to ensure the stability of the wafer closure.

[0039] Preferably, in any of the above schemes, the clamping platform 7 and the clamping ring 6 are clamped together, and the clamping platform 7 is located between the annular platform 10 and the limiting boss 9 .

[0040] The above technical solution is adopted: the engagement between the limiting boss 9 and the locking groove 14 is utilized to enhance the sealing stability of the wafer cover 4 and improve the safety of transportation.

[0041] The utility model is a multi-piece vertical wafer box, the working principle is as follows:

[0042] Place the vertical wafer 3 inside the wafer placement groove 2, snap the wafer cover 4 onto the top of the wafer box 1, snap the wafer cover 4 and the wafer box 1 together, and use the plastic spring sheet group 5 to clamp and fix the placed vertical wafer 3 to ensure the stability of wafer placement.

[0043] Compared with the prior art, the present invention has the following beneficial effects:

[0044] 1. A notch is set inside the wafer placement structure to place the wafer vertically. The upper cover and the wafer placement structure are closed to store the wafer in a closed manner, and a spring structure is set inside the upper cover to clamp the vertically placed wafer, which can effectively prevent the wafer from rotating, prevent the wafer from being damaged, and reduce the generation of dust. At the same time, closed storage can effectively prevent the wafer from moving during transportation, provide protection for the wafer during transportation, improve the safety of wafer transportation, and facilitate the transportation of wafers.

Claims

1. A multi-wafer box placed vertically, characterized in that: The invention comprises a wafer box body (1), wherein a plurality of wafer placement grooves (2) are provided inside the wafer box body (1), vertical wafers (3) are placed inside the wafer placement grooves (2), a wafer cover (4) which is engaged with the wafer box body (1) is arranged above the vertical wafer (3), a plurality of groups of plastic spring sheet groups (5) are fixedly connected inside the wafer cover (4), each group of the plastic spring sheet groups (5) comprises two opposite plastic spring sheets (51), a clamping ring (6) is arranged at the bottom of the wafer cover (4), and a clamping table (7) which is fixedly connected with the wafer box body (1) is engaged inside the clamping ring (6).

2. A multi-wafer vertically placed cassette as claimed in claim 1, characterized in that: A protective frame (8) is provided at the top of the wafer box body (1), limiting bosses (9) are provided at both ends of the protective frame (8), and a ring-shaped platform (10) fixedly connected to the wafer box body (1) is provided on one side of the limiting bosses (9).

3. A multi-wafer vertically placed cassette as claimed in claim 2, characterized in that: A plurality of wafer placement slots (2) are linearly arrayed inside the wafer box (1), and a placement partition (11) fixedly connected to the wafer box (1) is provided on one side of the wafer placement slot (2).

4. A multi-wafer vertically placed cassette as claimed in claim 3, characterized in that: The wafer upper cover (4) is provided with a protective cavity (12) adapted to the protective frame (8), the protective cavity (12) is provided with a limiting groove (13) adapted to the vertical wafer (3), and both ends of the protective cavity (12) are provided with card slots (14) adapted to the card platform (7).

5. A multi-wafer vertically placed cassette as claimed in claim 4, characterized in that: An arc-shaped boss (15) is provided at one end of the plastic spring (51), and the arc-shaped boss (15) is located on one side of the limiting groove (13).

6. A multi-wafer vertically placed wafer box as claimed in claim 5, characterized in that: The clamping ring (6) is provided with a notch matched with the clamping platform (7) inside, and the clamping ring (6) is fitted with the wafer box body (1).

7. A multi-wafer vertically placed cassette as claimed in claim 6, characterized in that: The clamping platform (7) and the clamping ring (6) are clamped together, and the clamping platform (7) is located between the annular platform (10) and the limiting boss (9).

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