Wafer supply device
By designing a wafer supply device that containing a lifting mechanism and a wafer counter, the problem of being unable to count and accurately pick up the wafer in existing technologies, and realize the effective anti -oxidation and accurate counting and pickup of wafers.
Patent Information
- Application Number
- CN202421164693.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-24
- Publication Date
- 2025-01-28
- Estimated Expiration
- 2034-05-24
AI Technical Summary
The existing wafer supply method cannot count the number of wafers in the wafer box, and it is easy to break or scratch the wafer due to lattice height deviation when taking the wafer. The wafer cannot meet the special requirements and will not be exposed for a long time during the processing process. Demand in the air.
A wafer supply device is designed, including wafer boxes, medicinal liquid grooves, lifting mechanisms and wafer counter. The wafer box and the wafer are reduced and immersed in the medicinal liquid in the phenoto tank through the lift mechanism, and the wafer and air contact areolate the wafers; the wafers in the wafer box are counted by the wafer counter to ensure accurate pickup.
The wafer box and wafers are not soaked in the liquid to avoid oxidation and pollution when the wafer box is not taken out of the wafer, and meets the needs of special machining process; ensure accurate statistics and picking wafers by counter to avoid empty picking and wafer damage.
Smart Images
Figure CN222421929U_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to the semiconductor field, and more particularly to a wafer supply device. Background Art
[0002] Figure 1 The schematic diagram of the existing wafer supply method is as follows. The wafer 200 is placed in the wafer box 1, and then the wafer box 1 is placed on a wafer box fixture 500 exposed to the air. When taking the wafer 200, a picking finger (not shown) is inserted into the wafer box 1 to take the wafer 200.
[0003] The above-mentioned existing wafer supply method cannot count the number of wafers 200 in the wafer box 1. In addition, the wafer picking position when taking the wafer 200 is determined according to the height size of the grid 12 inside the wafer box 1 for placing the wafer 200. There is no external sensor for signal feedback. If the height of the grid 12 inside the wafer box 1 for placing the wafer 200 is deviated, the picking finger is likely to break or scratch the wafer 200.
[0004] For processing techniques with special requirements, the wafer 200 is required to be immersed in a chemical solution to prevent the wafer 200 from being exposed to the air for a long time and being oxidized. For this processing technique, the existing wafer supply method and device cannot meet the requirements of this process. Utility Model Content
[0005] In view of the problems existing in the background technology, an object of the present disclosure is to provide a wafer supply device, which can immerse the wafer box together with the wafers therein into the chemical solution in the chemical solution tank when there is no need to take out the wafers from the wafer box.
[0006] Another object of the present disclosure is to provide a wafer supply device capable of counting wafers in a wafer box.
[0007] Another object of the present disclosure is to provide a wafer supply device, which can accurately pick up the wafers even if the grid height of the wafers in the wafer box deviates.
[0008] Thus, a wafer supply device is provided, which includes a wafer box, a chemical solution tank, a lifting mechanism, and a wafer counter; the wafer box has an open side and grids spaced apart in the up-and-down direction, each grid is used to place the wafer therein; the chemical solution tank is used to hold the chemical solution; the lifting mechanism is connected to the wafer box, and is used to lower the wafer box and the wafers therein and immerse them in the chemical solution in the chemical solution tank when there is no need to take the wafers out of the wafer box, and to raise the wafer box and the wafers therein and make the wafer at the top of the wafer box exposed to the liquid surface of the chemical solution for the picking finger to pick up the wafer from the wafer box when there is a need to take the wafers out of the wafer box. The open side of the round box takes out the wafers exposed to the liquid surface of the chemical solution, and when there is no need to take out the wafers from the wafer box, the wafer box together with the remaining wafers therein are lowered and immersed in the chemical solution in the chemical solution tank; the wafer counter is located on the open side of the wafer box, the wafer box is used to count the wafers in the wafer box, when it is necessary to take out the wafers from the wafer box, the lifting mechanism raises the wafer box together with the wafers therein and makes the uppermost wafer in the wafer box exposed to the liquid surface of the chemical solution, senses the wafer exposed to the liquid surface of the chemical solution and communicates the lifting mechanism to stop rising, and when there is no need to take out the wafers from the wafer box, communicates the lifting mechanism to lower.
[0009] The beneficial effects of the present disclosure are as follows.
[0010] In the wafer supply device according to the present disclosure, through the setting of the lifting mechanism and the chemical solution tank, when there is no need to take out the wafers from the wafer box, the lifting mechanism causes the wafer box together with the wafers therein to descend and immerse them in the chemical solution in the chemical solution tank, isolating the wafers from contact with the air, thereby preventing the wafers from being exposed to the air for a long time and being oxidized and contaminated by dust, thereby meeting special processing requirements and improving processing yield.
[0011] In the wafer supply device according to the present disclosure, by setting a wafer counter, the wafers in the wafer box can be counted, so that the number of wafers in the wafer box can be counted, and then the picking fingers can pick up the wafers based on the wafers counted by the wafer counter to avoid empty picking (that is, all the wafers in the wafer box have been picked out, but the picking operation is still being performed).
[0012] In the wafer supply device according to the present disclosure, even if the grid height of the wafers inside the wafer box deviates, through the cooperation of the wafer counter and the lifting mechanism, after the lifting mechanism stops rising, the position of the top wafer in the wafer box exposed above the liquid surface of the chemical solution is accurately located, so that the picking fingers can pick up the wafer exposed above the liquid surface of the chemical solution according to the located position, thereby avoiding breaking or scratching the wafer.
[0013] In the wafer supply device according to the present invention, the wafer exposed from the liquid surface of the chemical solution (i.e., the wafer at the top in the wafer box) is sensed by the wafer counter and the communication lifting mechanism stops rising, so that there is only one wafer to be picked up and it is at the top in the wafer box. Regardless of whether the wafers are picked up continuously (i.e., after picking up one wafer, the adjacent wafer below is taken out, and the wafer counter communicates with the lifting mechanism to rise again after the adjacent wafer below is picked up by the wafer counter) or non-continuously (i.e., after picking up one wafer, the adjacent wafer below is no longer taken out), the wafer picked up by the picking finger is always the wafer that has just been exposed from the liquid surface of the chemical solution, because the liquid surface of the chemical solution basically does not change (even if the picked-up wafer will carry away some chemical solution), so the position of the wafer picked up by the picking finger is considered to be consistent, which simplifies the position adjustment of the picking finger and also avoids the defects caused by using the height size of the grid for placing wafers inside the wafer box as a reference standard. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1 This is a schematic diagram of an existing wafer supply method.
[0015] Figure 2 is a perspective view of a wafer supply device according to the present disclosure.
[0016] Figure 3 yes Figure 1 A three-dimensional image from another angle.
[0017] Figure 4 yes Figure 1 A three-dimensional image from another angle.
[0018] Figure 5 yes Figure 1 Front view of .
[0019] Figure 6 is along Figure 5 A cross-sectional view taken along line AA, showing the picking finger.
[0020] The reference numerals are described as follows:
[0021] 100 wafer feeding device 313 belt
[0022] D 314 tension wheel in up and down direction
[0023] 1 wafer box 32 synchronous lifting unit
[0024] 11 Open side 321 synchronous wheel
[0025] 12 grid 322 screw transmission structure
[0026] 2 liquid tank 323 sliding pair
[0027] 21 Imported 33 Connecting Frame
[0028] 22 High liquid level sensor 331 first board
[0029] 23 low liquid level sensor 332 second board
[0030] 24 Exit 333 Third Board
[0031] 25 horizontal bottom plate 34 connecting plate
[0032] 26 vertical side plate H through hole
[0033] 3 lifting mechanism 4 wafer counter
[0034] 31 drive unit 200 wafer
[0035] 311 motor 300 liquid
[0036] 311a Output shaft 400 Pick up finger
[0037] 312 Pulley 500 Wafer Box Fixture DETAILED DESCRIPTION
[0038] The accompanying drawings show embodiments of the present disclosure, and it will be understood that the disclosed embodiments are merely examples of the present disclosure, and the present disclosure can be implemented in various forms. Therefore, the specific details disclosed herein should not be interpreted as limiting, but merely as the basis for the claims and as a representative basis for teaching ordinary technicians in the field to implement the present disclosure in various ways.
[0039] In the description of the present disclosure, unless otherwise specified, the terms “first”, “second”, “third”, etc. are only used for the purpose of description and component identification and should not be understood as relative importance and mutual relationship.
[0040] Reference Figures 2 to 6 According to the present disclosure, a wafer supply device 100 includes a wafer box 1, a chemical solution tank 2, a lifting mechanism 3, and a wafer counter 4.
[0041] The wafer box 1 has an open side 11 and grids 12 spaced apart in the up-down direction D, each grid 12 being used to place a wafer 200 therein. The chemical solution tank 2 is used to contain chemical solution 300 . The lifting mechanism 3 is connected to the wafer box 1, and is used to lower the wafer box 1 together with the wafers 200 therein and immerse them into the liquid 300 in the liquid tank 2 when there is no need to take out the wafer 200 from the wafer box 1; to raise the wafer box 1 together with the wafers 200 therein and expose the uppermost wafer 200 in the wafer box 1 to the liquid surface of the liquid 300 when there is need to take out the wafer 200 from the wafer box 1 so that the picking finger 400 can take out the wafer 200 exposed to the liquid surface of the liquid 300 from the open side 11 of the wafer box 1; and to lower the wafer box 1 together with the remaining wafers 200 therein and immerse them into the liquid 300 in the liquid tank 2 when there is no need to take out the wafer 200 from the wafer box 1. The wafer counter 4 is located on the open side 11 of the wafer box 1. The wafer box 1 is used to count the wafers 200 in the wafer box 1. When the wafer 200 needs to be taken out from the wafer box 1, the lifting mechanism 3 raises the wafer box 1 together with the wafers 200 therein and exposes the top wafer 200 in the wafer box 1 to the liquid level of the chemical solution 300. The wafer 200 exposed to the liquid level of the chemical solution 300 is sensed and the lifting mechanism 3 is communicated to stop rising. When the wafer 200 does not need to be taken out from the wafer box 1, the lifting mechanism 3 is communicated to descend.
[0042] In the wafer supply device 100 according to the present disclosure, through the arrangement of the lifting mechanism 3 and the chemical solution tank 2, when there is no need to take out the wafer 200 from the wafer box 1, the lifting mechanism 3 causes the wafer box 1 together with the wafer 200 therein to descend and immerse it in the chemical solution 300 in the chemical solution tank 2, isolating the wafer 200 from contact with the air, thereby preventing the wafer 200 from being exposed to the air for a long time and being oxidized and contaminated by dust, thereby meeting special processing requirements and improving processing yield.
[0043] In the wafer supply device 100 according to the present disclosure, by setting the wafer counter 4, the wafers 200 in the wafer box 1 can be counted, so that the number of wafers 200 in the wafer box 1 can be counted, and then the picking fingers 400 can pick up the wafers 200 based on the wafers 200 counted by the wafer counter 4 to avoid empty picking (that is, all the wafers 200 in the wafer box 1 have been picked up, but the picking operation is still being performed).
[0044] In the wafer supply device 100 according to the present disclosure, even if the height of the grid 12 for placing the wafer 200 inside the wafer box 1 deviates, through the cooperation of the wafer counter 4 and the lifting mechanism 3, after the lifting mechanism 3 stops rising, the position of the top wafer 200 in the wafer box 1 when it is exposed to the liquid surface of the chemical solution 300 is accurately positioned, so that the picking finger 400 can pick up the wafer 200 exposed to the liquid surface of the chemical solution 300 according to the positioned position, so as not to break or scratch the wafer 200.
[0045] In the wafer supply device 100 according to the present disclosure, the wafer 200 exposed from the liquid level of the chemical solution 300 (i.e., the wafer 200 at the top in the wafer box 1) is sensed by the wafer counter 4 and communicates with the lifting mechanism 3 to stop rising, so that the wafer 200 to be picked up is only one and is at the top in the wafer box 1, regardless of whether the wafers 200 are picked up continuously (i.e., after picking up one wafer 200, the adjacent wafer 200 below is picked up, and the wafer counter 4 communicates with the lifting mechanism 3 to rise again after the upper wafer 200 is picked up) or The wafers 200 are picked up non-continuously (i.e., after picking up one wafer 200, the adjacent wafer 200 below is no longer picked up). The wafers picked up by the picking fingers 400 are always the wafers 200 that have just been exposed from the liquid surface of the drug solution 300, because the liquid surface of the drug solution 300 basically does not change (even if the picked-up wafer 200 will carry away some of the drug solution 300). Therefore, the positions of the wafers 200 picked up by the picking fingers 400 are considered to be consistent, which simplifies the position adjustment of the picking fingers 400 and also avoids the defects caused by using the height dimension of the grid 12 for placing the wafers 200 inside the wafer box 1 as a reference standard.
[0046] In the wafer supply device 100 according to the present disclosure, the counting method of the wafer counter 4 is preferably performed in the process of the lifting mechanism 3 lowering the wafer box 1 together with the wafers 200 therein and immersing them into the chemical solution 300 in the chemical solution tank 2 when all the wafers 200 in the wafer box 1 are to be stored in the chemical solution 300.
[0047] like Figure 4 As shown, in one example, the liquid medicine tank 2 includes an inlet 21, and the inlet 21 is used to supply the liquid medicine 300 into the liquid medicine tank 2. Figure 3 and Figure 6The liquid tank 2 further includes a high liquid level sensor 22 and a low liquid level sensor 23. The high liquid level sensor 22 is used to sense whether the liquid level of the liquid 300 in the liquid tank 2 has reached a high liquid level sufficient to immerse all the wafers 200 in the wafer box 1, so as to control the supply of the liquid 300 through the inlet 21; the low liquid level sensor 23 is used to sense whether the liquid level of the liquid 300 in the liquid tank 2 has reached a low liquid level sufficient to immerse the remaining wafers 200 in the wafer box 1, so as to control the supply of the liquid 300 through the inlet 21. Thus, it is ensured that when there are wafers 200 in the wafer box 1, the liquid 300 can immerse all the wafers 200 present.
[0048] like Figure 4 As shown, in one example, the medicine tank 2 further includes an outlet 24, and the outlet 24 is used to discharge the medicine 300 in the medicine tank 2. The arrangement of the outlet 24 facilitates the replacement of the medicine 300.
[0049] like Figure 4 As shown, in one example, the inlet 21 and the outlet 24 are arranged on a horizontal bottom plate 25 of the liquid medicine tank 2 .
[0050] Reference Figures 2 to 6 In one example, the lifting mechanism 3 includes a driving unit 31, two synchronous lifting units 32, and two connecting frames 33. The two connecting frames 33 are respectively fixedly connected to the wafer box 1 from both sides of the open side 11 of the wafer box 1. The two synchronous lifting units 32 are respectively connected between the driving unit 31 and the two connecting frames 33. The driving unit 31 is used to drive the two synchronous lifting units 32 together with the two connecting frames 33 and the wafer box 1 to rise and fall synchronously. Through the provision of the two synchronous lifting units 32, the posture of the wafer box 1 can be kept unchanged during the lifting process, thereby avoiding the adverse effects of the change in the posture of the wafer box 1 on the sensing of the wafer 200 exposed from the liquid surface of the liquid 300 by the wafer counter 4 and the picking up of the wafer 200 by the picking fingers 400.
[0051] Specifically, Figures 4 to 6As shown, the driving unit 31 includes a motor 311, a pulley 312, and a belt 313. The motor 311 provides rotation, and the pulley 312 is mounted on the output shaft 311a of the motor 311. Each synchronous lifting unit 32 includes a synchronous wheel 321 and a screw transmission structure 322. The lower end of the screw transmission structure 322 is mounted on the corresponding synchronous wheel 321, and the upper end is mounted on the corresponding connecting frame 33. The belt 313 is mounted on the pulley 312 of the driving unit 31 and the synchronous wheels 321 of the two synchronous lifting units 32, so that the synchronous wheels 321 of the two synchronous lifting units 32 rotate synchronously. The two synchronous wheels 321 are used to drive the two screw transmission structures 322 to rise and fall synchronously when rotating synchronously, and then drive the two connecting frames 33 to rise and fall synchronously together with the wafer box 1. In an alternative example not shown, the driving unit 31 can be in the form of a cylinder / oil cylinder, and the end of the piston rod of the cylinder / oil cylinder is connected to a U-shaped frame, and the U-shaped frame serves as two synchronous lifting units 32 and two connecting frames 33 at the same time. The U-shaped frame can be in an upright position or an inverted position.
[0052] like Figure 4 As shown, the pulley 312 and the synchronous wheels 321 of the two synchronous lifting units 32 are in the same horizontal plane. Further, the motor 311, the pulley 312, and the belt 313 are located below the horizontal bottom plate 25 of the liquid medicine tank 2; the synchronous wheels 321 of the two synchronous lifting units 32 are located below the horizontal bottom plate 25 of the liquid medicine tank 2 and are respectively located outside the two vertical side plates 26 of the liquid medicine tank 2; the lead screw transmission structures 322 of the two synchronous lifting units 32 are respectively arranged on the two vertical side plates 26 of the liquid medicine tank 2.
[0053] In order to adjust the tension of the belt 313, as Figure 4 As shown, the drive unit 31 further includes a tensioning wheel 314, which is used to adjust the tension of the belt 313. Figure 4 Two are shown in the figure, but the number may be one or three or more.
[0054] Reference Figures 2 to 5In one example, each connecting frame 33 includes a first plate 331, a second plate 332, and a third plate 333. The first plate 331 is located on the inner side of the corresponding vertical side plate 26 of the liquid medicine tank 2. The first plate 331 is fixedly connected to the wafer box 1 from one side of the open side 11 of the wafer box 1 in the horizontal direction, and the first plate 331 extends in the vertical plane. The second plate 332 is parallel to the first plate 331. The second plate 332 is located on the outer side of the corresponding vertical side plate 26 of the liquid medicine tank 2. The second plate 332 is connected to the corresponding lead screw transmission structure 322, and the second plate 332 extends in the vertical plane. The third plate 333 is located above the corresponding vertical side plate 26 of the liquid medicine tank 2. The third plate 333 connects the first plate 331 and the second plate 332, and the third plate 333 extends in the horizontal plane. The third plate 333 can serve as a limiter for the descending stroke of the lifting mechanism 3 , that is, the third plate 333 will contact the top surface of the corresponding vertical side plate 26 of the medicine tank 2 , so that the descending stroke of each connecting frame 33 reaches the maximum and cannot be further descended.
[0055] like Figure 3 As shown, in one example, the lifting mechanism 3 further includes a connecting plate 34, which connects the lower ends of the first plates 331 of the two connecting frames 33; the connecting plate 34 is used to support the wafer box 1, and the connecting plate 34 extends in a horizontal plane. The arrangement of the connecting plate 34 improves the synchronization of the two connecting frames 33 driven by the two synchronous lifting units 32, and also enhances the stability of the wafer box 1.
[0056] like Figure 3 and Figure 6 As shown, in one example, the connecting plate 34 and the first plate 331 are both provided with a through hole H. The through hole H is provided to facilitate the flow of the chemical liquid 300 through the through hole H when the wafer box 1 is immersed in the chemical liquid 300, thereby reducing the fluctuation amplitude of the liquid level of the chemical liquid 300 caused by the disturbance of the chemical liquid 300 when the connecting plate 34 and the first plate 331 are immersed in the chemical liquid 300.
[0057] like Figures 2 to 5 As shown, each synchronous lifting unit 32 also includes a sliding pair 323; the sliding pair 323 is arranged between the second plate 332 and the corresponding vertical side plate 26 of the liquid medicine tank 2 and is parallel to the lead screw transmission structure 322. The arrangement of the sliding pair 323 improves the stability of the vertical lifting of the two connecting frames 33. The sliding pair 323 can be a sliding rail and a sliding groove. The number of sliding pairs 323 of each synchronous lifting unit 32 can be one, or two or more as shown in the figure.
[0058] like Figure 2 , Figures 4 to 6 As shown, the wafer counter 4 is installed at a portion of the top of the chemical solution tank 2 facing the open side 11 .
[0059] The wafer counter 4 may adopt any suitable structure. For example, the wafer counter 4 is a laser sensor.
[0060] When the wafer box 200 is lowered and immersed in the liquid medicine 300, the laser sensor will scan the wafer 200, and the number of wafers 200 in the wafer box 1 can be counted. Specifically, during the process of the wafer box 1 being lowered, the laser sensor constantly detects whether there is a wafer 200 on the facing side. When there is a wafer 200 on the facing side, the laser sensor receives the light signal reflected by the wafer 200 and outputs an electrical signal. Each time the electrical signal is output, it represents that the number of wafers 200 is increased by 1, thereby completing the counting of the number of wafers 200 in the wafer box 1.
[0061] When it is necessary to pick up a wafer 200 from the wafer box 1, when the top wafer 200 in the wafer box 1 is exposed to the liquid surface of the liquid 300, the light signal emitted by the laser sensor is reflected by the wafer 200 exposed to the liquid surface of the liquid 300, and the laser sensor has a signal output. The laser sensor determines that there is a wafer 200 exposed to the liquid surface of the liquid 300, and the time has come for the picking finger 400 to pick up the wafer 200. The laser sensor communicates with the lifting mechanism 3 and the picking finger 400, the lifting mechanism 3 stops rising, and the picking finger 400 moves, thereby picking up the wafer 200 exposed to the liquid surface of the liquid 300. In the counting of the number of wafers 200 and the control of picking up by the laser sensor through the light signal reflected by the wafer 200, it belongs to a closed-loop control method. The laser sensor can use triangulation to collect the reflected signal.
[0062] The above detailed description is used to describe multiple exemplary embodiments, but this document is not intended to be limited to the explicitly disclosed combinations. Therefore, unless otherwise stated, the various features disclosed herein can be combined together to form multiple additional combinations that are not shown for the sake of simplicity.
Claims
1. A wafer supply device, characterized in that: The wafer supply device (100) comprises a wafer box (1), a chemical solution tank (2), a lifting mechanism (3), and a wafer counter (4); The wafer box (1) has an open side (11) and grids (12) spaced apart in an up-down direction (D), each grid (12) being used to place a wafer (200) therein; The medicine liquid tank (2) is used to contain the medicine liquid (300); The lifting mechanism (3) is connected to the wafer box (1), and is used to lower the wafer box (1) together with the wafers (200) therein and immerse them in the chemical solution (300) in the chemical solution tank (2) when it is not necessary to take out the wafers (200) from the wafer box (1), and to raise the wafer box (1) together with the wafers (200) therein and place them in the chemical solution tank (2) when it is necessary to take out the wafers (200) from the wafer box (1). The wafer (200) at the top is exposed to the liquid surface of the chemical solution (300) so that the pick-up finger (400) can take out the wafer (200) exposed to the liquid surface of the chemical solution (300) from the open side (11) of the wafer box (1), and when it is not necessary to take out the wafer (200) from the wafer box (1), the wafer box (1) and the remaining wafers (200) therein are lowered and immersed in the chemical solution (300) in the chemical solution tank (2); The wafer counter (4) is located on the open side (11) of the wafer box (1). The wafer box (1) is used to count the wafers (200) in the wafer box (1); when it is necessary to take out the wafers (200) from the wafer box (1), the lifting mechanism (3) causes the wafer box (1) and the wafers (200) therein to rise and causes the wafer (200) at the top of the wafer box (1) to be exposed from the liquid level of the chemical liquid (300); the wafer (200) exposed from the liquid level of the chemical liquid (300) is sensed and the lifting mechanism (3) is communicated to stop the rise; and when it is not necessary to take out the wafer (200) from the wafer box (1), the lifting mechanism (3) is communicated to descend.
2. The wafer supply device according to claim 1, characterized in that: The liquid medicine tank (2) includes an inlet (21), The inlet (21) is used to supply the medicine solution (300) into the medicine solution tank (2); The medicine liquid tank (2) also includes a high liquid level sensor (22) and a low liquid level sensor (23); The high liquid level sensor (22) is used to sense whether the liquid level of the drug solution (300) in the drug solution tank (2) reaches a high liquid level sufficient to immerse all the wafers (200) in the wafer box (1), so as to control the supply of the drug solution (300) through the inlet (21); The low liquid level sensor (23) is used to sense whether the liquid level of the drug solution (300) in the drug solution tank (2) reaches a low liquid level sufficient to immerse the remaining wafers (200) in the wafer box (1), so as to control the supply of the drug solution (300) through the inlet (21).
3. The wafer supply device according to claim 1, characterized in that: The lifting mechanism (3) comprises a driving unit (31), two synchronous lifting units (32), and two connecting frames (33); The two connecting frames (33) are respectively fixedly connected to the wafer box (1) from both sides of the open side (11) of the wafer box (1) in a lateral direction; The two synchronous lifting units (32) are respectively connected between the driving unit (31) and the two connecting frames (33); The driving unit (31) is used to drive the two synchronous lifting units (32) together with the two connecting frames (33) and the wafer box (1) to rise and fall synchronously.
4. The wafer supply device according to claim 3, characterized in that: The driving unit (31) includes a motor (311), a pulley (312), and a belt (313); The motor (311) provides rotation, and the pulley (312) is installed on the output shaft (311a) of the motor (311). Each synchronous lifting unit (32) comprises a synchronous wheel (321) and a lead screw transmission structure (322); The lower end of the screw transmission structure (322) is mounted on the corresponding synchronous wheel (321), and the upper end is mounted on the corresponding connecting frame (33); The belt (313) is installed on the pulley (312) of the driving unit (31) and the synchronous wheels (321) of the two synchronous lifting units (32) so that the synchronous wheels (321) of the two synchronous lifting units (32) rotate synchronously; The two synchronous wheels (321) are used to respectively drive the two lead screw transmission structures (322) to rise and fall synchronously when rotating synchronously, thereby driving the two connecting frames (33) and the wafer box (1) to rise and fall synchronously; The belt pulley (312) and the synchronous wheels (321) of the two synchronous lifting units (32) are located in the same horizontal plane.
5. The wafer supply device according to claim 4, characterized in that: The motor (311), the pulley (312), and the belt (313) are located below the horizontal bottom plate (25) of the liquid medicine tank (2); The synchronous wheels (321) of the two synchronous lifting units (32) are located below the horizontal bottom plate (25) of the medicine liquid tank (2) and are respectively located outside the two vertical side plates (26) of the medicine liquid tank (2); The lead screw transmission structures (322) of the two synchronous lifting units (32) are respectively arranged on the two vertical side plates (26) of the medicine liquid tank (2).
6. The wafer supply device according to claim 4, characterized in that: Each connecting frame (33) includes a first plate (331), a second plate (332), and a third plate (333); The first plate (331) is located on the inner side of the corresponding vertical side plate (26) of the chemical liquid tank (2), the first plate (331) is fixedly connected to the wafer box (1) from one side of the open side (11) of the wafer box (1) in a lateral direction, and the first plate (331) extends in a vertical plane; The second plate (332) is parallel to the first plate (331), the second plate (332) is located outside the corresponding vertical side plate (26) of the liquid medicine tank (2), the second plate (332) is connected to the corresponding lead screw transmission structure (322), and the second plate (332) extends in the vertical plane; The third plate (333) is located above the corresponding vertical side plate (26) of the medicine liquid tank (2). The third plate (333) connects the first plate (331) and the second plate (332). The third plate (333) extends in a horizontal plane.
7. The wafer supply device according to claim 6, characterized in that: The lifting mechanism (3) further comprises a connecting plate (34), wherein the connecting plate (34) connects the lower ends of the first plates (331) of the two connecting frames (33); The connecting plate (34) is used to support the wafer box (1), and the connecting plate (34) extends in a horizontal plane.
8. The wafer supply device according to claim 7, characterized in that: The connecting plate (34) and the first plate (331) are both provided with a through hole (H).
9. The wafer supply device according to claim 6, characterized in that: Each synchronous lifting unit (32) further includes a sliding pair (323); The sliding pair (323) is arranged between the second plate (332) and the corresponding vertical side plate (26) of the medicine liquid tank (2) and is parallel to the lead screw transmission structure (322).
10. The wafer supply device according to claim 1, characterized in that: The wafer counter (4) is a laser sensor.