Ultra-precision polishing micro-flow field observation device

Abstract

The utility model provides an ultra-precision polishing micro-flow field observation device, and belongs to the technical field of precision polishing. The device solves the problem of how to accurately control the flow rate of the polishing solution and ensure that the measurement result is more accurate at the same time. The ultra-precision polishing micro-flow field observation device comprises a die body with a flow channel inside, a micro-flow pump, a CCD camera, a liquid containing box and a fixing frame, the liquid containing box is connected with an inlet of the flow channel through a pipeline and connected with the micro-flow pump through a pipeline, the die body comprises a lower die plate provided with at least one strip-shaped groove and an upper die plate made of transparent materials, and the upper die plate is connected with the micro-flow pump through a pipeline. The upper mold plate and the lower mold plate are detachably connected so that a runner can be defined between the outer wall of the upper mold plate and the groove wall of the strip-shaped groove, the fixing frame is located on one side of the mold body, a carrier plate capable of sliding in the vertical direction and the horizontal direction is arranged on the fixing frame, and the CCD camera is fixed to the side face of the carrier plate. The ultra-precision polishing micro-flow field observation device can accurately control the flow rate of the polishing solution, and meanwhile it is guaranteed that the measurement result is more accurate.

Description

Technical Field

[0001] The utility model belongs to the technical field of precision polishing and relates to an ultra-precision polishing micro-flow field observation device. Background Art

[0002] Ultra-precision polishing is a non-contact polishing process. The commonly used polishing medium is a polishing liquid mixed with solid and liquid phases. Simply put, the surface of the object to be polished is repeatedly flushed by the flow of polishing liquid to achieve fine polishing of the surface of the object.

[0003] When performing the above-mentioned polishing work, there are many factors that affect the polishing effect, and the flow rate of the polishing liquid is the most important of these factors. In the prior art, the particle image velocimetry method is generally used in conjunction with the microflow field to measure the influence of the flow rate of the polishing liquid on the polishing effect. Specifically, the structure required includes a mold body made of transparent material and having a flow channel inside, a micro-flow pump connected to the flow channel through a pipeline, and a CCD camera fixed above or below the mold body and aimed at the flow channel; when performing the measurement, the polishing liquid added with tracer particles is input into the flow channel through the pipeline by the micro-flow pump to make it flow in the flow channel. During the flow process, the CCD camera is used to shoot, and with the cooperation of the tracer particles, the optical signal is converted into a digital signal and imaged. On this basis, the flow rate of the polishing liquid is controlled by adjusting the power of the micro-flow pump.

[0004] However, in actual operation, although the power control of the micro-flow pump can achieve flow rate control of the polishing liquid, the power of the micro-flow pump cannot be accurately controlled to meet the precise requirement that the polishing liquid flow at a specified flow rate. At the same time, the shooting range of the CCD camera is very limited when the polishing liquid is at different flow rates, and it is impossible to provide more data for experimental reference. Summary of the invention

[0005] The purpose of the utility model is to solve the above problems in the existing technology and propose an ultra-precision polishing micro-flow field observation device. The technical problem to be solved by the utility model is: how to accurately control the flow rate of the polishing liquid while ensuring more accurate measurement results.

[0006] The purpose of the utility model can be achieved through the following technical solutions: an ultra-precision polishing micro-fluidic field observation device, comprising a mold body with a flow channel inside, a micro-flow pump connected to the flow channel inlet through a pipeline, and a CCD camera located directly above the flow channel, characterized in that the ultra-precision polishing micro-fluidic field observation device also includes a liquid box, the liquid box is connected to the flow channel inlet through a pipeline, and the liquid box is connected to the micro-flow pump through a pipeline, the mold body includes a lower template with at least one strip groove and an upper template made of transparent material, the upper template and the lower template are detachably connected so that the outer wall of the upper template and the wall of the strip groove are enclosed to form the flow channel, the ultra-precision polishing micro-fluidic field observation device also includes a fixing frame located on one side of the mold body, the fixing frame is provided with a carrier plate that can slide in the vertical direction and the horizontal direction, and the CCD camera is fixed on the side of the carrier plate.

[0007] The working principle of this ultra-precision polishing micro-flow field observation device is as follows: when the micro-flow pump is started, the polishing liquid in the liquid storage box is extracted through the pipeline and input into the flow channel of the mold body, and under the subsequent hydraulic action, the polishing liquid is returned to the liquid storage box through the pipeline, thereby realizing the repeated circulation of the polishing liquid. At the same time, the CCD camera installed on the fixed frame shoots the polishing liquid in the flow channel through the transparent upper template. With the cooperation of the tracer particles, the optical signal is converted into a digital signal and imaged, so that the operator can observe from the map. Compared with the existing technology, the innovation of this case is that the flow rate control of the polishing liquid is no longer controlled by the power control of the micro-flow pump, but is realized by using flow channels of different shapes. Specifically, the flow channel is formed by the outer wall of the upper template and the strip groove wall opened on the lower template. That is to say, the operator can choose to replace the lower template with different strip groove shapes to achieve different sizes of flow channels, thereby ensuring the flow rate of the polishing liquid. Precise control can be performed. Furthermore, the shape of the flow channel formed can be a long strip, a step or a parabola, etc. In addition, when there is enough space on the surface of the lower template, the above-mentioned several strips can be opened on the same lower template, so that after the upper template and the lower template are fixed together, multiple flow channels are formed between the two for the operator to choose to use. In addition, the operator can also adjust the position of the carrier on the fixed frame. Specifically, the position adjustment of the carrier can be to move up or down in the vertical direction, or to move left or right in the horizontal direction. During the upward or downward movement, the CCD camera can be assisted to manually adjust the focal length to ensure the shooting clarity of the polishing liquid under different flow rate conditions, and at the same time ensure that the shooting range of the CCD camera can be adjusted according to actual needs. In the process of moving to the left or right, the shooting area can be adaptively adjusted according to the flow channels of different shapes, thereby ensuring that the subsequent measurement structure is more accurate.

[0008] In the above-mentioned ultra-precision polishing micro-flow field observation device, the ultra-precision polishing micro-flow field observation device also includes a microscope eyepiece, which is fixed on the side of the carrier plate and located directly above the CCD camera. The setting of the microscope eyepiece can ensure that during the experiment, the operator can observe and confirm the movement of the tracer particles in the polishing liquid with the naked eye.

[0009] In the above-mentioned ultra-precision polishing micro-flow field observation device, the lower template and the upper template are both rectangular plates, the strip grooves run through the two ends of the lower template plate surface along the length direction of the lower template, and the upper template and the lower template plate surface are screwed and locked together by bolts at the circumferential corners. It is ensured that the length of the formed flow channel meets the experimental requirements and the rigor of the experiment is ensured. At the same time, the upper and lower templates are locked by screws, ensuring the stability of the formed mold structure and the sealing of the flow channel.

[0010] In the above-mentioned ultra-precision polishing microfluidic field observation device, the fixing frame includes two vertical poles arranged at intervals along the length direction of the lower template, two horizontal poles are arranged at intervals between the two vertical poles along the horizontal direction, and the outer wall of the middle part of the two vertical poles has a horizontal positioning seat, and the horizontal control shaft is screwed on the carrier in the horizontal direction, and the two ends of the horizontal control shaft are inserted into the two horizontal positioning seats. Through this arrangement, the horizontal control shaft is limited by the two horizontal positioning seats so that it can only perform circumferential rotation in the horizontal direction, and at the same time, the operator screws the horizontal control shaft so that it and the carrier are threaded to realize the position adjustment of the carrier to the left or right in the horizontal direction.

[0011] In the above-mentioned ultra-precision polishing micro-fluid field observation device, the outer wall of the middle part of the two horizontal bars has a vertical positioning seat, and the carrier plate is screwed with a vertical control shaft in the vertical direction, and the two ends of the vertical control shaft are inserted into the two vertical positioning seats. Similarly, the vertical control rod is limited by the two vertical positioning seats so that it can only make a circumferential rotation along the vertical direction. At the same time, the operator screws the vertical control shaft so that it and the carrier plate can realize the upward or downward position adjustment of the carrier plate in the vertical direction in a threaded manner.

[0012] In the above-mentioned ultra-precision polishing microfluidic field observation device, the two vertical poles are both L-shaped, one end of each vertical pole is a mounting section, the other end is a fixed section, and each vertical pole is fixed with a reinforcing rod between the mounting section and the fixed section, thereby ensuring the structural firmness of the fixing frame itself and the installation stability of the fixing frame.

[0013] In the above-mentioned ultra-precision polishing micro-fluid field observation device, an anti-slip cap is fixed to one end of the horizontal control shaft and the vertical control shaft. The provision of the anti-slip cap can prevent the horizontal control shaft and the vertical control shaft from slipping during the screwing process.

[0014] Compared with the existing technology, this ultra-precision polishing micro-flow field observation device has the following advantages:

[0015] 1. The mold body is divided into an upper mold body made of transparent material and a lower mold body with strip grooves, and the two are combined to form a flow channel to ensure that the shape of the flow channel can be more complex and diversified and meet the experimental requirements, and the flow rate of the polishing liquid can be accurately controlled through the shape of each flow channel.

[0016] 2. The CCD camera and the microscope eyepiece are mounted on a carrier plate connected to the fixed frame by sliding, so as to adjust the observation range and observation area and ensure the accuracy of the experimental results. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the ultra-precision polishing micro-flow field observation device.

[0018] Figure 2 It is a cross-sectional view of the model.

[0019] Figure 3 This is an exploded view of the model.

[0020] Figure 4 It is a structural schematic diagram of a fixed frame and a carrier plate slidably connected to the fixed frame.

[0021] In the figure, 1, mold body; 11, flow channel; 12, upper template; 13, lower template; 131, strip groove; 2, micro flow pump; 3, CCD camera; 4, liquid box; 5, fixed frame; 51, carrier plate; 511, horizontal control axis; 512, vertical control axis; 52, vertical pole; 521, horizontal positioning seat; 522, installation section; 523, fixed section; 524, reinforcing rod; 53, cross bar; 531, vertical positioning seat; 6, microscope eyepiece; 7, anti-slip cap. DETAILED DESCRIPTION

[0022] The following are specific embodiments of the present invention and the accompanying drawings to further describe the technical solution of the present invention, but the present invention is not limited to these embodiments.

[0023] like Figure 1 As shown, the ultra-precision polishing micro-flow field observation device includes a mold body 1, a fixing frame 5, a micro-flow pump 2 and a liquid storage box 4, combined with Figure 2 and Figure 3The mold body 1 specifically includes an upper mold plate 12 and a lower mold plate 13 in the shape of a rectangular plate, wherein the upper mold plate 12 is made of a transparent material, and a strip groove 131 penetrating through both ends of the plate surface of the lower mold plate 13 is provided on the top surface of the lower mold plate 13 along the length direction of the lower mold plate 13, and an upper threaded hole is provided at the circumferential corner of the plate surface of the upper mold plate 12, and a lower threaded hole is provided at the circumferential corner of the plate surface of the lower mold plate 13. The upper mold plate 12 and the lower mold plate 13 are screwed together by screws with the upper threaded holes and the lower threaded holes, so that they are connected to form a complete mold body 1, and at the same time, the bottom surface of the upper mold plate 12 and the strip groove 131 provided on the lower mold plate 13 cooperate to enclose the flow channel 11, as A further specific scheme is to ensure precise control of the flow rate of the subsequent polishing liquid, the shape of the strip groove 131 opened on the lower template 13 can be a general long strip, or it can be a stepped shape, a parabola, etc. In addition, in order to reduce the inconvenience of replacing the lower template 13 during operation, if there is enough space on the surface of the lower template 13, you can choose to open a number of strip grooves 131 along the width direction on the lower template 13. After connecting with the upper template 12, the upper template 12 and the lower template 13 are combined to form a number of unconnected flow channels 11, thereby ensuring that the operator can selectively use each flow channel 11 to perform experimental work during the experiment.

[0024] like Figure 1 As shown, the outlet of the micro-flow pump 2 is connected to the mold body 1 (the inlet of the flow channel 11) through a pipe, the liquid storage box 4 is connected to the inlet of the micro-flow pump 2 through a pipe, and is connected to the mold body 1 (the outlet of the flow channel 11) through a pipe, thereby forming a complete circuit among the micro-flow pump 2, the flow channel 11 in the mold body 1 and the liquid storage box 4, ensuring that the polishing liquid can circulate and work under the driving action of the micro-flow pump 2.

[0025] Combination Figure 4The fixing frame 5, the mold body 1, the micro-flow pump 2 and the liquid storage box 4 are all placed on an experimental platform. The installation position of the fixing frame 5 is located on one side of the mold body 1. Specifically, the fixing frame 5 includes two L-shaped vertical poles 52 arranged at intervals along the length direction of the mold body 1 and two horizontal horizontal poles 53 arranged between the two vertical poles 52. The two vertical poles 52 specifically include a horizontally arranged fixed section 523 and a longitudinally arranged installation section 522. The fixed section 523 is screwed and locked on the experimental platform by screws, and An inclined reinforcing rod 524 is welded and fixed between the fixing section 523 and the mounting section 522 to ensure the structural strength of each upright rod 52, thereby ensuring the overall structural stability of the fixing frame 5. On the fixing frame 5, a vertically arranged rectangular plate-shaped carrier plate 51 is provided between each upright rod 52 and the cross bar 53. A CCD camera 3 and a microscope eyepiece 6 located directly above the mold body 1 and facing the flow channel 11 are fixed to the side surface of the carrier plate 51 close to the mold body 1 by screws, and the microscope eyepiece 6 is located at the CCD camera 3. Directly above, a horizontal positioning seat 521 is welded and fixed near the middle of the two vertical rods 52, a horizontal control shaft 511 is screwed in the horizontal direction in the carrier plate 51, and the two ends of the horizontal control shaft 511 are respectively inserted into the two horizontal positioning seats 521, so that the horizontal control shaft 511 is circumferentially limited by the two horizontal positioning seats 521, and a vertical positioning seat 531 is welded and fixed near the middle of the two cross bars 53, and a vertical control shaft 512 is screwed in the vertical direction in the carrier plate 51, and the vertical control shaft 512 is screwed in the vertical direction. The two ends are respectively inserted into the two vertical positioning seats 531, so that the vertical control shaft 512 is circumferentially limited by the two vertical positioning seats 531. In addition, an anti-slip cap 7 is fixed to the upper end of the vertical control shaft 512 and any one end of the horizontal control shaft 511 by means of clamping, screwing or welding. It is worth mentioning that the horizontal control shaft 511 is arranged on one side of the plate close to the carrier plate 51, and the vertical control shaft 512 is arranged on the other side of the plate close to the carrier plate 51, thereby ensuring that there is no interference between the two.

[0026] Working principle: The operator selects the lower template 13 and the upper template 12 with different shapes of strip grooves 131 according to the experimental requirements to assemble the mold body 1, and then connects the inlet and outlet of the flow channel 11 by connecting the pipeline, or selects the flow channel 11 of the corresponding shape on the mold body 1 according to the requirements, and then connects the inlet and outlet of the flow channel 11 by connecting the pipeline. When the micro-flow pump 2 is turned on, the polishing liquid in the liquid storage box 4 is extracted, flows through the flow channel 11, and then flows back to the liquid storage box 4 through the pipeline. The cycle is repeated during the experiment. At the same time, the operator stands on one side of the experimental platform and observes the polishing liquid in the flow channel 11 through the microscope according to the experimental requirements. The flow of the polishing liquid can be observed by screwing the anti-slip cap 7 on the horizontal control shaft 511 and the vertical control shaft 512 according to one's own habits, so as to drive the carrier plate 51 to drive the CCD camera 3 and the microscope objective lens to adjust their positions in the horizontal and vertical directions, ensuring that the operator can observe the flow of the polishing liquid in a clearly focused state. Later, during the shooting process of the CCD camera 3, the anti-slip cap 7 on the horizontal control shaft 511 or the vertical control shaft 512 can be selectively screwed to adjust the shooting area and shooting range of the CCD camera 3, and finally the optical signal can be converted into a digital signal through the CCD camera 3 for imaging.

[0027] The specific embodiments described herein are merely examples of the spirit of the present invention. A person skilled in the art of the present invention may make various modifications or additions to the specific embodiments described or replace them in a similar manner, but this will not deviate from the spirit of the present invention or exceed the scope defined by the appended claims.

[0028] Although this article uses more terms such as mold body 1, flow channel 11, upper template 12, lower template 13, strip groove 131, micro flow pump 2, CCD camera 3, liquid box 4, fixed frame 5, carrier plate 51, horizontal control axis 511, vertical control axis 512, vertical pole 52, horizontal positioning seat 521, installation section 522, fixed section 523, reinforcing rod 524, cross bar 53, vertical positioning seat 531, microscope eyepiece 6, anti-slip cap 7, etc., it does not exclude the possibility of using other terms. The use of these terms is only for more convenient description and explanation of the essence of the utility model; interpreting them as any additional restrictions is contrary to the spirit of the utility model.

Claims

1. An ultra-precision polishing micro-flow field observation device, comprising a mold body (1) having a flow channel (11) inside, a micro-flow pump (2) connected to the inlet of the flow channel (11) through a pipeline, and a CCD camera (3) located directly above the flow channel (11), characterized in that: The ultra-precision polishing micro-fluidic field observation device also includes a liquid storage box (4), the liquid storage box (4) is connected to the inlet of the flow channel (11) through a pipeline, and the liquid storage box (4) is connected to the micro-flow pump (2) through a pipeline. The mold body (1) includes a lower template (13) provided with at least one strip groove (131) and an upper template (12) made of a transparent material. The upper template (12) and the lower template (13) are detachably connected so that the outer wall of the upper template (12) and the groove wall of the strip groove (131) are surrounded to form the flow channel (11). The ultra-precision polishing micro-fluidic field observation device also includes a fixed frame (5) located on one side of the mold body (1), the fixed frame (5) is provided with a carrier plate (51) that can slide in the vertical direction and the horizontal direction, and the CCD camera (3) is fixed on the side of the carrier plate (51).

2. The ultra-precision polishing micro-flow field observation device according to claim 1, characterized in that: The ultra-precision polishing micro-flow field observation device also includes a microscope eyepiece (6), which is fixed on the side of the carrier plate (51) and is located directly above the CCD camera (3).

3. The ultra-precision polishing micro-flow field observation device according to claim 2, characterized in that: The lower template (13) and the upper template (12) are both in the shape of rectangular plates. The strip groove (131) passes through both ends of the plate surface of the lower template (13) along the length direction of the lower template (13). The circumferential corners of the plate surface of the upper template (12) and the lower template (13) are screwed and locked together by bolts.

4. The ultra-precision polishing micro-flow field observation device according to claim 3, characterized in that: The fixing frame (5) comprises two vertical rods (52) arranged at intervals along the length direction of the lower template (13), two horizontal rods (53) are arranged at intervals between the two vertical rods (52) in the horizontal direction, and a horizontal positioning seat (521) is provided on the outer wall of the middle part of the two vertical rods (52), and a horizontal control shaft (511) is screwed on the carrier plate (51) in the horizontal direction, and the two ends of the horizontal control shaft (511) are inserted into the two horizontal positioning seats (521).

5. The ultra-precision polishing micro-flow field observation device according to claim 4, characterized in that: A vertical positioning seat (531) is provided on the outer wall of the middle part of the two cross bars (53), a vertical control shaft (512) is screwed on the carrier plate (51) along the vertical direction, and two ends of the vertical control shaft (512) are inserted into the two vertical positioning seats (531).

6. The ultra-precision polishing micro-flow field observation device according to claim 4 or 5, characterized in that: The two vertical poles (52) are both L-shaped, one end of each vertical pole (52) is a mounting section (522), and the other end is a fixing section (523), and each vertical pole (52) is fixed with a reinforcing rod (524) between the mounting section (522) and the fixing section (523).

7. The ultra-precision polishing micro-flow field observation device according to claim 5, characterized in that: An anti-slip cap (7) is fixed to one end of the horizontal control shaft (511) and the vertical control shaft (512).

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