Polishing pad machining auxiliary tool

Abstract

The utility model discloses a polishing pad machining auxiliary tool which comprises a base plate, a product positioning ring matched with a polishing pad is arranged on the base plate, a light-emitting unit corresponding to a window of the polishing pad is arranged in the product positioning ring, and the light-emitting unit is used for positioning the window. According to the utility model, the covered area of the window can be quickly found out, and the window contour device is used for calibration and alignment, so that the accuracy of the cutting size is improved; the problem that cutting forming cannot be achieved due to the fact that the window position cannot be determined is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of chemical mechanical polishing, in particular to a polishing pad processing auxiliary tooling. Background Art

[0002] In the chip manufacturing process, polishing pads are important auxiliary tools, which are used to flatten and polish the surface of semiconductor wafers during chemical mechanical polishing (CMP). During the polishing process, the polishing pad is usually coated with polishing liquid to form friction between the high-speed rotating semiconductor wafer and the polishing pad to achieve the purpose of polishing and flattening the surface.

[0003] During the processing of some polishing pads with windows, after the buffer layer and the adhesive layer are attached, the window will be covered, causing the window to lose its function. Therefore, the part covering the window needs to be removed. However, during cutting, the position of the window cannot be determined due to the obstruction of the buffer layer and the adhesive layer, resulting in the inability to process the polishing pad. Utility Model Content

[0004] The purpose of the utility model is to solve the above problems and provide a polishing pad processing auxiliary tooling.

[0005] In order to achieve the above-mentioned purpose, the utility model specifically adopts the following technical solutions:

[0006] A polishing pad processing auxiliary tool comprises a chassis, wherein the chassis is provided with a product positioning ring adapted to the polishing pad, wherein a light emitting unit corresponding to a window of the polishing pad is provided in the product positioning ring, and the light emitting unit is used to realize positioning of the window.

[0007] As a further description of the above technical solution, two groups of positioning grooves are provided on the chassis, and the two groups of positioning grooves are in the same straight line with the light-emitting unit.

[0008] As a further description of the above technical solution, a positioning bar is also included, and positioning protrusions are arranged at both ends of the positioning bar, and the positioning protrusions are adapted to the positioning grooves.

[0009] As a further description of the above technical solution, an alignment area is provided on the positioning bar, and the alignment area corresponds to the positions of the light-emitting unit and the window.

[0010] As a further description of the above technical solution, the light-emitting unit is an LED lamp module, and a cooling module is provided on one side of the light-emitting unit, and the cooling module is used to cool the light-emitting unit.

[0011] As a further description of the above technical solution, the shape of the product positioning ring is circular, and the size of the product positioning ring is compatible with the size of the polishing pad to be processed.

[0012] As a further description of the above technical solution, the product positioning ring is a circular groove.

[0013] As a further description of the above technical solution, the product positioning ring is an annular protrusion.

[0014] As a further description of the above technical solution, the positioning strip is a long strip structure, and the alignment area opened on the positioning strip is a waist hole.

[0015] As a further description of the above technical solution, the chassis is a metal structure.

[0016] The beneficial effects of the utility model are as follows:

[0017] 1. The utility model can quickly find out the area covered by the window and use the window contour device for calibration and alignment, thereby improving the accuracy of the cutting size; and solves the problem that the cutting and forming cannot be performed due to the inability to determine the window position.

[0018] In order to more clearly illustrate the structural features and functions of the present invention, the present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of the chassis of the utility model;

[0020] Figure 2 It is a structural schematic diagram of the positioning strip of the utility model;

[0021] Figure 3 It is a schematic diagram of the auxiliary tooling of the utility model.

[0022] Figure numerals: 1, chassis; 2, product positioning ring; 3, light-emitting unit; 41, positioning groove one; 42, positioning groove two; 5, positioning strip; 61, positioning protrusion one; 62, positioning protrusion two; 7, alignment area. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solution and advantages of the embodiments of the present utility model clearer, the technical solution in the embodiments of the present utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the present utility model.

[0024] like Figure 1-Figure 3As shown, in one embodiment, a polishing pad processing auxiliary tooling includes a chassis 1, and a product positioning ring 2 is opened on the upper surface of the chassis 1, which is used to position the polishing pad to be processed, so that it can be accurately positioned when the window of the polishing pad is cut to avoid offset and affect the molding of the polishing pad. A light-emitting unit 3 is arranged inside the product positioning ring 2, and the light-emitting unit 3 corresponds to the position of the pre-opened window of the polishing pad. Specifically, when the polishing pad to be processed is placed in the product positioning ring 2, the position of the pre-opened window is overlapped with the position of the light-emitting unit 3. After turning on the light-emitting unit 3, the position of the window can be clearly identified to facilitate cutting, thereby improving the efficiency of the polishing pad processing and molding.

[0025] For further information, please refer to Figure 1 and Figure 2 Two groups of positioning grooves are provided on the chassis 1, and the two groups of positioning grooves are in the same straight line with the light-emitting unit 3. A positioning bar 5 is also included, and positioning protrusions are provided at both ends of the positioning bar 5, and the positioning protrusions are adapted to the positioning grooves. Specifically, a positioning groove 1 41 and a positioning groove 2 42 are provided on the chassis 1, and a positioning protrusion 1 61 and a positioning protrusion 2 62 adapted to the positioning groove 1 41 and the positioning groove 2 42 are provided on the corresponding positioning bar 5. After the positioning bar 5 is snap-fitted to the chassis 1, the alignment area 7 on the positioning bar 5 can correspond to the position of the light-emitting unit 3 and the window. When the cutting device is cutting, the origin of the cutting device can correspond to the center of the alignment area 7, wherein the cutting device can be a laser cutting device.

[0026] Furthermore, the light-emitting unit 3 is an LED lamp module, which can emit light by connecting to an external power source or by having a battery inside, which will not be elaborated here. A cooling module is provided on one side of the light-emitting unit 3, and the cooling module can be a fan, which can cool the light-emitting unit 3 to avoid damage after long-term operation.

[0027] Further, the shape of the product positioning ring 2 is circular, and the size of the product positioning ring 2 is adapted to the size of the polishing pad to be processed, so as to process the polishing pad. In this embodiment, the product positioning ring 2 is a circular groove, and in other feasible embodiments, the product positioning ring 2 can be an annular protrusion.

[0028] Furthermore, the chassis 1 or the entire auxiliary tooling is a metal structure.

[0029] Furthermore, the positioning strip 5 is a long strip structure, and the alignment area 7 provided on the positioning strip 5 is a waist hole.

[0030] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A polishing pad processing auxiliary tool, characterized in that: It comprises a chassis, on which a product positioning ring adapted to the polishing pad is provided, in which a light emitting unit corresponding to the window of the polishing pad is provided, and the light emitting unit is used to realize positioning of the window.

2. The polishing pad processing auxiliary tooling according to claim 1, characterized in that: Two groups of positioning grooves are provided on the chassis, and the two groups of positioning grooves are in the same straight line with the light emitting unit.

3. The polishing pad processing auxiliary tooling according to claim 2, characterized in that: It also includes a positioning bar, and positioning protrusions are arranged at both ends of the positioning bar, and the positioning protrusions are matched with the positioning grooves.

4. The polishing pad processing auxiliary tooling according to claim 3, characterized in that: An alignment area is provided on the positioning bar, and the alignment area corresponds to the positions of the light emitting unit and the window.

5. The polishing pad processing auxiliary tooling according to claim 1, characterized in that: The light emitting unit is an LED lamp module, and a cooling module is arranged on one side of the light emitting unit, and the cooling module is used to cool the light emitting unit.

6. The polishing pad processing auxiliary tooling according to claim 1, characterized in that: The shape of the product positioning ring is circular, and the size of the product positioning ring is matched with the size of the polishing pad to be processed.

7. The polishing pad processing auxiliary tooling according to claim 6, characterized in that: The product positioning ring is a circular groove.

8. The polishing pad processing auxiliary tooling according to claim 6, characterized in that: The product positioning ring is an annular protrusion.

9. The polishing pad processing auxiliary tooling according to claim 4, characterized in that: The positioning strip is a long strip structure, and the alignment area opened on the positioning strip is a waist hole.

10. The polishing pad processing auxiliary tooling according to claim 1, characterized in that: The chassis is a metal structure.

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