Novel reduction furnace structure with 72 pairs of rods
By designing the combination of main mechanism and auxiliary mechanism in the 72-pair rod reduction furnace, using technical means such as electric heater and pulling spring, the problem of uneven polysilicon deposition caused by the tilt of the silicon core is solved, and a safer and more convenient silicon is achieved Stick generation process.
Patent Information
- Application Number
- CN202421134089.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-23
- Publication Date
- 2025-02-07
- Estimated Expiration
- 2034-05-23
AI Technical Summary
In the existing 72 pairs of rod reduction furnaces, the silicon core is prone to tilt during the intake of the furnace body, resulting in uneven deposition of polycrystalline silicon.
A new 72 pair of rod reduction furnace structure is designed, using a combination of main mechanism and auxiliary mechanism, the silicon core is heated through an electric heater, and the coupling of pulling spring and sliders is used to achieve limiting the silicon rod and prevent tilting. , and at the same time, the intake pipe and exhaust pipe are arranged to ensure uniform gas in and out.
It effectively prevents the tilt of the silicon rod, ensures uniform deposition of polysilicon, and improves the safety and convenience of the structure.
Smart Images
Figure CN222438524U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of 72-pair-rod reduction furnaces, in particular to a novel 72-pair-rod reduction furnace structure. Background Art
[0002] The mixed gas of trichlorosilane gas + hydrogen continuously enters the reduction furnace through the main air inlet and then through 38 air inlets, and then the silicon core is heated to 1050-1000℃ through the electrodes. The polysilicon generated after the reaction is continuously deposited on the silicon core, causing the silicon core to continue to grow and become a silicon rod. At the same time, the newly generated gas and the unreacted gas (collectively referred to as tail gas) are continuously discharged from the outlet.
[0003] The existing patent CN211896050U, a 72-pair rod reduction furnace, proposes that the furnace body of the reduction furnace of the utility model is provided with 72 pairs of electrode rods, and the electrode rods are arranged in the reduction furnace in a concentric circle structure; the electrode rods constitute a 6-layer concentric circle structure, which is the first electrode rod circle, the second electrode rod circle, the third electrode rod circle, the fourth electrode rod circle, the fifth electrode rod circle and the sixth electrode rod circle, and the radius of each electrode rod circle is set to R1: R2: R3: R4: R5: R6 = 1: 2: 3: 5: 7: 8.5. By arranging the setting position of the electrode rods in the reduction furnace, the problem of overheating in the center of the furnace body in the traditional reduction furnace is avoided. In addition, the setting position of the electrode rods is also conducive to the smooth entry of gas into the upper area of the furnace body, realizing uniform air intake of the furnace body, thereby improving the generation efficiency of each electrode rod.
[0004] However, the existing patent CN211896050U has arranged the positions of the electrode rods in the reduction furnace to avoid the problem of overheating in the center of the furnace body in the traditional reduction furnace, which is prone to furnace collapse. In addition, the position of the electrode rods is also conducive to the smooth entry of gas into the upper area of the furnace body, achieving uniform air intake in the furnace body, thereby improving the generation efficiency of each electrode rod. However, during the process of air intake in the furnace body, the silicon core is prone to tilt, which may lead to uneven deposition of polysilicon. Utility Model Content
[0005] 1. Technical issues to be resolved
[0006] The purpose of the utility model is to provide a novel 72-pair rod reduction furnace structure to solve the problem mentioned in the above background technology that the silicon core is prone to tilt during the process of furnace air intake, which may lead to uneven polysilicon deposition.
[0007] (II) Technical solution
[0008] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a new type of rod reduction furnace structure, including a main mechanism and an auxiliary mechanism, the auxiliary mechanism is located at the outer end of the main mechanism, the main mechanism includes a machine body, a machine cover and a working component, the machine cover is movably installed on the upper end of the machine body, and the working component is fixedly installed on the inner end of the machine body; the working component includes an electric heater, a temperature controller and an electrode wire, the electric heater is fixedly installed on the upper end of the machine cover, the temperature controller is fixedly installed on the outside of the electric heater, and the electrode wire is fixedly installed on the inner side of the machine body.
[0009] Preferably, the working component also includes a silicon core, a limit piece, a sliding piece, a pulling spring and a rod body. The silicon core is fixedly installed inside the machine body. The electric heater heats the electrode wire through a temperature controller to heat the silicon core to 1050-1000°C. The polysilicon generated after the reaction is continuously deposited on the silicon core, causing the silicon core to continue to grow and become a silicon rod, effectively improving the practicality of the structure.
[0010] Preferably, the limiting member is fixedly installed on the outer side of the lower end of the silicon core, and the sliding member is movably installed on the inner side of the limiting member. The installation of the limiting member is used to limit the silicon rod, which effectively improves the safety of the structure.
[0011] Preferably, the pulling spring is movably installed in the middle of the sliding member and the limiting member, and the rod bodies are evenly distributed at the lower end of the inner end of the body. The pulling spring pulls the sliding member to the right to squeeze the silicon rod, thereby limiting the silicon rod and preventing the silicon rod from tilting, thereby effectively improving the safety of the structure.
[0012] Preferably, the auxiliary mechanism includes an intake pipe 1, an intake valve 1, an exhaust pipe 2, an exhaust valve 2 and a support frame. The intake pipe 1 is fixedly installed on the left side of the body. When the intake valve 1 is opened, a mixture of trichlorosilane gas and hydrogen enters the interior of the body through the intake pipe 1, which effectively improves the convenience of the structure.
[0013] Preferably, the intake valve 1 is fixedly mounted on the upper end of the intake pipe 1, and the exhaust pipe 2 is fixedly mounted on the right side of the body. When the intake valve 1 is opened, a mixture of trichlorosilane gas and hydrogen enters the interior of the body through the intake pipe 1, which effectively improves the convenience of the structure.
[0014] Preferably, the second exhaust valve is fixedly mounted on the upper end of the second exhaust pipe, and the support frame is fixedly mounted on the lower end of the machine body. The installation of the support frame supports the machine body and effectively improves the convenience of the structure.
[0015] Compared with the prior art, the beneficial effects of the utility model are:
[0016] 1. The new 72-pair rod reduction furnace structure, through the installation of the main mechanism, the electric heater heats the electrode wire through the temperature controller, and heats the silicon core to 1050-1000℃. The polysilicon generated after the reaction is continuously deposited on the silicon core, so that the silicon core continues to grow into silicon rods. The pulling spring pulls the sliding part to the right to squeeze the silicon rod, and then the silicon rod is limited to prevent the silicon rod from tilting, which effectively improves the safety of the structure;
[0017] 2. The new 72-pair rod reduction furnace structure, through the installation of auxiliary mechanisms, opens the air intake valve 1, and the mixed gas of trichlorosilane gas and hydrogen enters the interior of the body through the air intake pipe 1. Open the exhaust valve 2, and the excess gas produced by the reaction can be discharged from the body through the exhaust pipe 2. The installation of the support frame supports the body and effectively improves the convenience of the structure. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;
[0019] Figure 2 This is a schematic diagram of the cross-sectional structure of the bottom of the machine body of the utility model;
[0020] Figure 3 This is a schematic diagram of the internal cross-sectional structure of the machine body of the utility model;
[0021] Figure 4 It is a schematic diagram of the partial cross-section structure of the utility model.
[0022] In the figure: 1. main mechanism; 101. machine body; 102. machine cover; 103. working assembly; 1031. electric heater; 1032. temperature controller; 1033. electrode wire; 1034. silicon core; 1035. limiter; 1036. sliding member; 1037. pulling spring; 1038. 72 pairs of rod bodies; 2. auxiliary mechanism; 201. intake pipe 1; 202. intake valve 1; 203. exhaust pipe 2; 204. exhaust valve 2; 205. support frame. DETAILED DESCRIPTION
[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0024] See also Figure 1-Figure 4The utility model provides a technical solution: a novel 72-pair rod reduction furnace structure, comprising a main mechanism 1 and an auxiliary mechanism 2, the auxiliary mechanism 2 is located at the outer end of the main mechanism 1, the main mechanism 1 comprises a body 101, a cover 102 and a working assembly 103, the cover 102 is movably mounted on the upper end of the body 101, and the working assembly 103 is fixedly mounted on the inner end of the body 101; the working assembly 103 comprises an electric heater 1031, a temperature controller 1032 and an electrode wire 1033, the electric heater 1031 is fixedly mounted on the upper end of the cover 102, the temperature controller 1032 is fixedly mounted on the electric heater 10 31, the electrode wire 1033 is fixedly mounted on the inner side of the body 101, the working component 103 also includes a silicon core 1034, a limiter 1035, a sliding member 1036, a pulling spring 1037 and 72 pairs of rod bodies 1038, the silicon core 1034 is fixedly mounted on the inside of the body 101, the limiter 1035 is fixedly mounted on the outer side of the lower end of the silicon core 1034, the sliding member 1036 is movably mounted on the inner side of the limiter 1035, the pulling spring 1037 is movably mounted on the middle part of the sliding member 1036 and the limiter 1035, and the 72 pairs of rod bodies 1038 are evenly distributed at the lower end of the inner end of the body 101.
[0025] The auxiliary mechanism 2 includes an intake pipe 1 201, an intake valve 1 202, an exhaust pipe 203, an exhaust valve 204 and a support frame 205. The intake pipe 1 201 is fixedly installed on the left side of the machine body 101, the intake valve 1 202 is fixedly installed on the upper end of the intake pipe 1 201, the exhaust pipe 203 is fixedly installed on the right side of the machine body 101, the exhaust valve 204 is fixedly installed on the upper end of the exhaust pipe 203, and the support frame 205 is fixedly installed on the lower end of the machine body 101. When the new 72-pair rod reduction furnace structure is used, the electric heater 1031 heats the electrode wire 1033 through the temperature controller 1032 to heat the silicon core 1034. After heating to 1050-1000°C, the polysilicon generated after the reaction is continuously deposited on the silicon core 1034, causing the silicon core 1034 to continuously grow and become a silicon rod. The pulling spring 1037 pulls the sliding member 1036 to the right to squeeze the silicon rod, thereby limiting the position of the silicon rod to prevent the silicon rod from tilting. The air intake valve 202 is opened, and the mixed gas of trichlorosilane gas and hydrogen enters the interior of the body 101 through the air intake pipe 201. The exhaust valve 204 is opened, and the excess gas generated by the reaction can be discharged from the body 101 through the exhaust pipe 203. The installation of the support frame 205 supports the body 101.
[0026] Working principle: When using the new 72-pair rod reduction furnace structure, the electric heater 1031 heats the electrode wire 1033 through the temperature controller 1032, and heats the silicon core 1034 to 1050-1000°C. The polysilicon generated after the reaction is continuously deposited on the silicon core 1034, causing the silicon core 1034 to grow continuously and become a silicon rod. The pulling spring 1037 pulls the sliding member 1036 to the right to squeeze the silicon rod, thereby limiting the silicon rod and preventing it from tilting. The air intake valve 202 is opened, and the mixed gas of trichlorosilane gas and hydrogen enters the interior of the body 101 through the air intake pipe 201. The exhaust valve 204 is opened, and the excess gas generated by the reaction can be discharged from the body 101 through the exhaust pipe 203. The installation of the support frame 205 supports the body 101.
[0027] Finally, it should be noted that the above content is only used to illustrate the technical solution of the utility model, rather than to limit the protection scope of the utility model. Simple modifications or equivalent substitutions of the technical solution of the utility model by ordinary technicians in this field do not deviate from the essence and scope of the technical solution of the utility model.
Claims
1. A novel 72-pair rod reduction furnace structure, comprising a main mechanism (1) and an auxiliary mechanism (2), characterized in that: The auxiliary mechanism (2) is located at the outer end of the main mechanism (1); the main mechanism (1) comprises a machine body (101), a machine cover (102) and a working assembly (103); the machine cover (102) is movably mounted on the upper end of the machine body (101); the working assembly (103) is fixedly mounted on the inner end of the machine body (101); the working assembly (103) comprises an electric heater (1031), a temperature controller (1032) and an electrode wire (1033); the electric heater (1031) is fixedly mounted on the upper end of the machine cover (102); the temperature controller (1032) is fixedly mounted on the outer side of the electric heater (1031); and the electrode wire (1033) is fixedly mounted on the inner end of the machine body (101). The working component (103) is mounted on the inner side of the body (101), the working component (103) further comprises a silicon core (1034), a stopper (1035), a sliding member (1036), a pulling spring (1037) and 72 pairs of rod bodies (1038), the silicon core (1034) is fixedly mounted inside the body (101), the stopper (1035) is fixedly mounted on the outer side of the lower end of the silicon core (1034), the sliding member (1036) is movably mounted on the inner side of the stopper (1035), the pulling spring (1037) is movably mounted in the middle of the sliding member (1036) and the stopper (1035), and the 72 pairs of rod bodies (1038) are evenly distributed at the lower end of the inner end of the body (101).
2. A novel 72-pair rod reduction furnace structure according to claim 1, characterized in that: The auxiliary mechanism (2) comprises an air intake pipe (201), an air intake valve (202), an exhaust pipe (203), an exhaust valve (204) and a support frame (205); the air intake pipe (201) is fixedly mounted on the left side of the machine body (101).
3. A novel 72-pair rod reduction furnace structure according to claim 2, characterized in that: The air intake valve 1 (202) is fixedly mounted on the upper end of the air intake pipe 1 (201), and the air exhaust pipe 2 (203) is fixedly mounted on the right side of the machine body (101).
4. A novel 72-pair rod reduction furnace structure according to claim 3, characterized in that: The second exhaust valve (204) is fixedly mounted on the upper end of the second exhaust pipe (203), and the support frame (205) is fixedly mounted on the lower end of the machine body (101).