Exposure light path assembly and proximity exposure equipment thereof

Abstract

The utility model discloses an exposure light path assembly and proximity exposure equipment thereof, one end of a transmitting assembly of the exposure light path assembly is matched in a groove of a first lens cone, a plurality of mounting holes and a plurality of first adjusting holes are formed on the transmitting assembly, and the plurality of mounting holes and the plurality of first adjusting holes are arranged in a staggered manner along the circumferential direction of the first lens cone. The plurality of first fasteners are in one-to-one correspondence with the plurality of mounting holes, and one end of each first fastener passes through the mounting hole to be connected with the first lens barrel. The plurality of first adjusting members are in one-to-one correspondence with the plurality of first adjusting holes, and the first adjusting members adjust the included angle between the transmitting assembly and the first lens barrel through the first adjusting holes. According to the exposure light path assembly provided by the utility model, the purpose of adjusting the included angle between the transmitting assembly and the first lens cone is achieved, the position accuracy of the signal light projected to the to-be-exposed piece is adjusted, and the exposure precision is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of laser imaging, in particular to an exposure optical path component and a proximity exposure device thereof. Background Art

[0002] In the related art, in order to improve the accuracy of laser emission of proximity exposure equipment, the relative position of the laser emitting end and the exposure end is usually adjusted left and right. However, due to the long optical path from the laser emitting end to the exposure end, it is difficult to ensure the position accuracy of the exposure surface of the exposure end by adjusting the laser emitting end left and right. For example, when the optical path from the laser emitting end to the exposure end is about 1280mm, within the allowable range of the light inclination angle (less than 0.55°), the maximum displacement that may occur is about 1280*sin0.55°=12.3mm, and the above displacement is difficult to adjust and compensate by moving the laser emitting end left and right. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, one purpose of the utility model is to provide an exposure optical path component, which achieves the purpose of adjusting the angle between the emission component and the first lens barrel, adjusts the position accuracy of the signal light projected to the object to be exposed, and improves the accuracy of exposure.

[0004] Another object of the present invention is to provide a proximity exposure device using the above exposure optical path component.

[0005] According to the first aspect of the utility model, the exposure optical path assembly comprises: a first lens barrel, a groove is formed at one axial end of the first lens barrel; a transmitting assembly, one end of the transmitting assembly is fitted in the groove, a plurality of mounting holes and a plurality of first adjustment holes are formed on the transmitting assembly, and the plurality of mounting holes and the plurality of first adjustment holes are arranged alternately along the circumference of the first lens barrel; a plurality of first fasteners, the plurality of first fasteners correspond to the plurality of mounting holes one by one, and one end of each first fastener passes through the mounting hole to connect with the first lens barrel; a plurality of first adjustment members, the plurality of first adjustment members correspond to the plurality of first adjustment holes one by one, and the first adjustment member adjusts the angle between the transmitting assembly and the first lens barrel through the first adjustment hole; a second lens barrel, the second lens barrel is connected to the other axial end of the first lens barrel, a first through hole is formed on the second lens barrel, and a reflector is provided at the first through hole; a third lens barrel, the third lens barrel is provided at one end of the second lens barrel away from the first lens barrel, and a lens is provided in the third lens barrel; wherein the signal light emitted by the transmitting assembly is projected on the reflector, and after being reflected by the reflector, passes through the lens to complete the exposure.

[0006] According to the exposure optical path assembly of the embodiment of the utility model, the emitting assembly and the first lens barrel are connected by the first fastener and the first adjusting member, and while ensuring the connection stability between the emitting assembly and the first lens barrel, the relative distance between the emitting assembly and the first lens barrel at multiple positions is adjusted, thereby achieving the purpose of adjusting the angle between the emitting assembly and the first lens barrel, and further adjusting the position accuracy of the signal light projected to the part to be exposed, thereby improving the accuracy of exposure.

[0007] According to some embodiments of the present invention, the diameter of the mounting hole is larger than the diameter of the adjustment hole.

[0008] According to some embodiments of the present utility model, the second lens barrel includes a lens barrel body and a lens cover, the first lens barrel and the reflector are respectively provided on opposite sides of the lens barrel body, and the mirror cover is provided on a side of the reflector away from the first lens barrel; a plurality of second adjustment members are provided on the mirror cover, the plurality of second adjustment members are spaced apart along the circumference of the mirror cover, and the second adjustment members are used to adjust the inclination angle of the reflector.

[0009] According to some embodiments of the utility model, the exposure optical path assembly also includes a plurality of stop plates, the plurality of stop plates are spaced apart along the circumference of the mirror cover, one end of each of the stop plates is connected to the lens barrel body, and the other end of each of the stop plates is opposite to the mirror cover; a plurality of third adjustment members, the plurality of third adjustment members correspond one-to-one to the plurality of stop plates, each of the third adjustment members passes through the stop plate and stops with the mirror cover, and the mirror cover and the reflector are pushed to translate through the plurality of third adjustment members.

[0010] According to some embodiments of the present utility model, the third lens barrel includes a first sub-lens barrel and a second sub-lens barrel, the first sub-lens barrel is connected between the second lens barrel and the second sub-lens barrel, the second sub-lens barrel is provided with a step portion at one end away from the first sub-lens barrel, the step portion extends in a direction toward the center of the second sub-lens barrel, and the lens is provided on the step portion; a plurality of fixing members are provided on the step portion, the plurality of fixing members are spaced apart along the circumference of the step portion, one end of each of the fixing members is connected to the step portion via a second fastener, and the other end of each of the fixing members is connected to the lens via a third fastener.

[0011] According to some embodiments of the present invention, the step portion includes a first boss segment and a second boss segment connected to each other, and the lens abuts against the first boss segment; wherein the outer diameter of the lens is smaller than the inner diameter of the second boss segment.

[0012] According to some embodiments of the present invention, the lens is coaxially arranged in the second sub-lens barrel, and the minimum distance between the lens and the second boss segment in the radial direction of the second sub-lens barrel is L, wherein L satisfies: 0.05mm≤L≤0.1mm.

[0013] According to some embodiments of the present invention, a plurality of limiting holes are formed on the second sub-lens barrel, and a plurality of second adjustment holes are formed on the step portion. The plurality of limiting holes and the plurality of second adjustment holes are spaced apart along the circumference of the second sub-lens barrel, each of the limiting holes extends radially along the second sub-lens barrel, and each of the second adjustment holes extends axially along the second sub-lens barrel.

[0014] According to some embodiments of the utility model, a plurality of elongated holes are formed on the second sub-barrel, and the plurality of elongated holes are spaced apart along the circumference of the second sub-barrel; a plurality of circular holes are formed on the first sub-barrel, and the plurality of circular holes are spaced apart along the circumference of the first sub-barrel, wherein the number of the elongated holes is the same as the number of the circular holes, and the plurality of elongated holes and the plurality of circular holes correspond one to one.

[0015] The proximity exposure device according to the second aspect of the utility model comprises the exposure optical path component according to the first aspect of the utility model.

[0016] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0018] Figure 1 is a schematic diagram of an exposure optical path component according to an embodiment of the utility model;

[0019] Figure 2 is a schematic diagram of an exposure optical path component according to another angle of the embodiment of the utility model;

[0020] Figure 3 is a schematic diagram of an exposure optical path component according to an embodiment of the utility model, wherein the emission component is not shown;

[0021] Figure 4 is a cross-sectional view of an exposure optical path assembly according to an embodiment of the utility model;

[0022] Figure 5 yes Figure 4 The enlarged view of the A part shown in the middle circle;

[0023] Figure 6 It is a schematic diagram of the second lens barrel and the third lens barrel of the exposure optical path assembly according to an embodiment of the utility model.

[0024] Reference numerals:

[0025] 100: exposure optical path component;

[0026] 1: first lens barrel; 11: groove; 2: emitting assembly; 21: mounting hole; 22: first adjustment hole; 3: second lens barrel; 31: first through hole; 32: reflector; 33: lens barrel body; 34: mirror cover; 35: limiting hole; 4: third lens barrel; 41: lens; 42: first sub-lens barrel; 421: circular hole; 43: second sub-lens barrel; 431: long strip hole; 44: step portion; 441: fixing piece; 442: second fastener; 443: first boss section; 444: second boss section; 445: second adjustment hole; 446: third fastener; 5: stop plate; 51: third adjustment hole. DETAILED DESCRIPTION

[0027] Reference below Figure 1-Figure 6 The exposure optical path component 100 according to a novel embodiment of the first aspect of the utility model is described.

[0028] like Figure 1-Figure 6 As shown, the exposure optical path assembly 100 according to the first embodiment of the utility model comprises a first lens barrel 1, an emission assembly 2, a plurality of first fasteners, a plurality of first adjustment members, a second lens barrel 3 and a third lens barrel 4. In the description of the utility model, the meaning of "plurality" is two or more.

[0029] Specifically, a groove 11 is formed at one end of the axial direction of the first lens barrel 1. One end of the emitting assembly 2 is fitted in the groove 11, and a plurality of mounting holes 21 and a plurality of first adjustment holes 22 are formed on the emitting assembly 2, and the plurality of mounting holes 21 and the plurality of first adjustment holes 22 are arranged alternately along the circumference of the first lens barrel 1. A plurality of first fasteners correspond to a plurality of mounting holes 21 one by one, and one end of each first fastener passes through the mounting hole 21 and is connected to the first lens barrel 1. A plurality of first adjustment members correspond to a plurality of first adjustment holes 22 one by one, and the first adjustment member adjusts the angle between the emitting assembly 2 and the first lens barrel 1 through the first adjustment hole 22. The second lens barrel 3 is connected to the other end of the axial direction of the first lens barrel 1, and a first through hole 31 is formed on the second lens barrel 3, and a reflector 32 is provided at the first through hole 31. The third lens barrel 4 is provided at one end of the second lens barrel 3 away from the first lens barrel 1, and a lens 41 is provided in the third lens barrel 4. Among them, the signal light emitted by the emitting assembly 2 is projected on the reflector 32, and after being reflected by the reflector 32, it passes through the lens 41 to complete the exposure.

[0030] For example, in Figure 1-Figure 4In the example, a groove 11 is formed along the axial direction of the first lens barrel 1 and at one end of the first lens barrel 1, a transmitting assembly 2 is installed in the groove 11, a second lens barrel 3 is provided at the other end of the first lens barrel 1, and a third lens barrel 4 is provided at one end of the second lens barrel 3 away from the first lens barrel 1, that is, the first lens barrel 1, the second lens barrel 3 and the third lens barrel 4 are connected in sequence, so that the transmitting assembly 2 on the first lens barrel 1, the reflector 32 of the second lens barrel 3 and the lens 41 of the third lens barrel 4 correspond in sequence. The end of the third lens barrel 4 away from the second lens barrel 3 is suitable for placing the exposed part. Therefore, the signal light emitted by the transmitting assembly 2 enters the second lens barrel 3 along the first lens barrel 1 and is projected onto the reflector 32 in the second lens barrel 3. After being reflected by the reflector 32, the signal light passes through the lens 41 along the third lens barrel 4 and is projected onto the exposed part to complete the exposure of the exposed part.

[0031] Reference Figure 2 , four mounting holes 21 and four first adjustment holes 22 are formed on the emitting assembly 2. A first fastener is correspondingly provided in each mounting hole 21 to improve the connection stability between the emitting assembly 2 and the first lens barrel 1. A first adjustment member is correspondingly provided in each first adjustment hole 22, wherein one end of the first adjustment member is abutted against the surface of the first lens barrel 1. When the first adjustment member moves toward the first lens barrel 1, it is beneficial to increase the distance of the gap between the emitting assembly 2 and the first lens barrel 1. When the first adjustment member moves in a direction away from the first lens barrel 1, it is beneficial to reduce the distance of the gap between the emitting assembly 2 and the first lens barrel 1. Thus, the relative distance between the emitting assembly 2 and the first lens barrel 1 at four positions can be adjusted by using the four first adjustment members, so as to achieve the purpose of adjusting the angle between the emitting assembly 2 and the first lens barrel 1, and further adjust the position accuracy of the signal light projected to the part to be exposed.

[0032] The four mounting holes 21 and the four first adjustment holes 22 are staggeredly arranged along the circumference of the first lens barrel 1, so as to improve the connection stability between the emitting assembly 2 and the first lens barrel 1 while ensuring the adjustment of the angle of the emitting assembly 2, and also improve the stability of the angle adjustment of the emitting assembly 2, thereby improving the use stability of the exposure optical path assembly 100 and improving the accuracy of exposure.

[0033] Among them, the transmitting component 2 includes a laser transmitting end, a straight lens and a compound eye. The laser transmitting end transmits signal light, and the signal light reaches the reflector 32 after passing through the straight lens and the compound eye. After being reflected at the reflector 32, the signal light passes through the lens 41 to form an exposure area of ​​a certain area.

[0034] According to the exposure optical path component 100 of the embodiment of the utility model, the emitting component 2 and the first lens barrel 1 are connected by the first fastener and the first adjusting component, and while ensuring the connection stability between the emitting component 2 and the first lens barrel 1, the relative distance between the emitting component 2 and the first lens barrel 1 at multiple positions is adjusted, thereby achieving the purpose of adjusting the angle between the emitting component 2 and the first lens barrel 1, and further adjusting the position accuracy of the signal light projected to the part to be exposed, thereby improving the accuracy of exposure.

[0035] According to some embodiments of the present invention, referring to Figure 2 , the aperture of the mounting hole 21 is larger than the aperture of the adjustment hole. Therefore, the first fastener has a greater stability in connecting the emitting assembly 2 and the first lens barrel 1, and the first adjustment member has a smaller angle adjustment range for the emitting assembly 2 and the first lens barrel 1, thereby preventing the emitting assembly 2 and the first lens barrel 1 from loosening during the process of adjusting the angle of the emitting assembly 2 and the first lens barrel 1, thereby improving the use stability of the exposure optical path assembly 100, and further improving the stability and accuracy of exposure.

[0036] According to some embodiments of the present invention, referring to Figure 1 and Figure 6 The second lens barrel 3 includes a lens barrel body 33 and a lens cover 34. The first lens barrel 1 and the reflector 32 are respectively disposed on opposite sides of the lens barrel body 33. The lens cover 34 is disposed on the side of the reflector 32 away from the first lens barrel 1. The first lens barrel 1 and the reflector 32 are opposite to each other, so that the signal light emitted by the transmitting assembly 2 at the end of the first lens barrel 1 can be correspondingly projected on the reflector 32 for reflection after passing through the first lens barrel 1 and the second lens barrel 3. The first through hole 31 is blocked by the lens cover 34. On the one hand, the lens cover 34 limits the reflector 32 to increase the installation stability of the reflector 32 at the first through hole 31. On the other hand, it prevents external light from entering the second lens barrel 3, thereby improving the propagation stability of the signal light emitted by the transmitting assembly 2 in the second lens barrel 3.

[0037] The mirror cover 34 is provided with a plurality of second adjustment members, which are spaced apart along the circumference of the mirror cover 34 and are used to adjust the inclination angle of the reflector 32. Figure 1 and Figure 6In the example, eight second adjusting members are provided on the mirror cover 34, wherein one end of the second adjusting member abuts against the surface of the second lens barrel 3. When the second adjusting member moves toward the second lens barrel 3, it is helpful to increase the distance of the gap between the mirror cover 34 and the second lens barrel 3. When the second adjusting member moves in a direction away from the second lens barrel 3, it is helpful to reduce the distance of the gap between the mirror cover 34 and the second lens barrel 3. The eight second adjusting members are spaced apart along the circumference of the mirror cover 34. The eight second adjusting members can be used to adjust the relative distance between the mirror cover 34 and the second lens barrel 3 at multiple positions, thereby achieving the purpose of adjusting the inclination angle of the reflector 32, ensuring the relative angle between the reflector 32 and the lens 41, ensuring the uniformity of the exposure area, and further adjusting the position accuracy of the signal light projected to the part to be exposed.

[0038] Further, the exposure optical path assembly 100 further includes a plurality of stop plates 5 and a plurality of third adjustment members, wherein the plurality of stop plates 5 are spaced apart along the circumference of the lens cover 34, one end of each stop plate 5 is connected to the lens barrel body 33, and the other end of each stop plate 5 is opposite to the lens cover 34. The plurality of third adjustment members correspond to the plurality of stop plates 5 one by one, and each third adjustment member passes through the stop plate 5 and abuts against the lens cover 34, and the lens cover 34 and the reflector 32 are pushed to translate by the plurality of third adjustment members. Figure 1-Figure 4 , combined with Figure 6 Four abutment plates 5 are arranged at intervals on the circumference of the mirror cover 34, wherein two abutment plates 5 are arranged on opposite sides of the mirror cover 34, so as to clamp the mirror cover 34 by means of the third adjustment members on the abutment plates 5. The two third adjustment members on the same side of the mirror cover 34 can be adjusted to move away from the mirror cover 34, while the two third adjustment members on the other side of the mirror cover 34 can be adjusted to move toward the mirror cover 34, so as to achieve the purpose of translating the mirror cover 34 and the reflector 32, so that the reflector 32 can reflect all the signal light emitted by the transmitting assembly 2 to the lens 41. The use of multiple second adjustment members and multiple third adjustment members is conducive to making the angle and position of the reflector 32 suitable for the exposure requirements, so that the exposed parts are covered by the signal light, that is, the accuracy of exposure is improved.

[0039] According to some embodiments of the present invention, referring to Figure 1-Figure 6 The third lens barrel 4 includes a first sub-lens barrel 42 and a second sub-lens barrel 43. The first sub-lens barrel 42 is connected between the second lens barrel 3 and the second sub-lens barrel 43. The second sub-lens barrel 43 is provided with a step portion 44 at one end away from the first sub-lens barrel 42. The step portion 44 extends in a direction toward the center of the second sub-lens barrel 43. The lens 41 is provided on the step portion 44. Therefore, compared with the conventional exposure device, the connecting parts such as the large lens flange are eliminated, and the lens 41 is directly mounted on the third lens barrel 4, thereby reducing the size of the exposure optical path assembly 100 and improving the applicability of the exposure optical path assembly 100.

[0040] The first lens barrel 1, the second lens barrel 3, the first sub-lens barrel 42 and the second sub-lens barrel 43 are connected in sequence, and the step portion 44 is provided at one end of the second sub-lens barrel 43 away from the second lens barrel 3, thereby increasing the optical distance between the emitting assembly 2 and the lens 41 to meet the optical distance requirement of the signal light. The step portion 44 supports the lens 41, improves the installation stability of the lens 41 on the third lens barrel 4, thereby improving the use stability of the exposure optical path assembly 100 and improving the exposure stability.

[0041] like Figure 4 As shown, a plurality of fixing members 441 are provided on the step portion 44, and the plurality of fixing members 441 are spaced apart along the circumference of the step portion 44, one end of each fixing member 441 is connected to the step portion 44 through a second fastener 442, and the other end of each fixing member 441 is connected to the lens 41 through a third fastener 446. Eight fixing members 441 may be symmetrically provided on the step portion 44, and the eight fixing members 441 are spaced apart in the circumference of the step portion 44. No specific limitation is made here. One end of the third fastener 446 is connected to the lens 41, so that the third fastener 446 and the step portion 44 clamp the lens 41, which is conducive to improving the installation stability of the lens 41 on the step portion 44.

[0042] Further, refer to Figure 4 The step portion 44 includes a first boss section 443 and a second boss section 444 connected to each other, and the lens 41 abuts against the first boss section 443. The outer diameter of the lens 41 is smaller than the inner diameter of the second boss section 444. The second boss section 444 is arranged on a side of the first boss section 443 away from the first sub-lens barrel 42, so as to form a placement space suitable for the lens 41 on the step portion 44. The lens 41 is abutted against the first boss section 443, and the second boss section 444 limits the lens 41 to prevent the lens 41 from moving out of the end of the third lens barrel 4 away from the second lens barrel 3, thereby improving the stability of the installation and use of the lens 41. At the same time, the second boss section 444 and the fixing member 441 clamp the axial ends of the lens 41, further improving the installation stability of the lens 41.

[0043] Furthermore, if Figure 5As shown, the lens 41 is coaxially arranged in the second sub-barrel 43, and the minimum distance between the lens 41 and the second boss section 444 in the radial direction of the second sub-barrel 43 is L, where L satisfies: 0.05mm≤L≤0.1mm. When L<0.05mm, the minimum distance between the lens 41 and the second boss section 444 in the radial direction of the second sub-barrel 43 is small, which is not convenient for assembling the lens 41 on the second sub-barrel 43, and increases the difficulty of installing the lens 41; when L>0.1mm, the minimum distance between the lens 41 and the second boss section 444 in the radial direction of the second sub-barrel 43 is large, which increases the difficulty of aligning the central axis of the lens 41 with the central axis of the second sub-barrel 43, thereby reducing the accuracy of exposure. Therefore, by setting the minimum distance between the lens 41 and the second boss segment 444 in the radial direction of the second sub-lens barrel 43 to 0.05mm≤L≤0.1mm, the installation of the lens 41 is facilitated while reducing the difficulty of aligning the central axis of the lens 41 and the central axis of the second sub-lens barrel 43, thereby improving the accuracy of exposure.

[0044] According to some embodiments of the present invention, referring to Figure 5 A plurality of limiting holes 35 are formed on the second sub-barrel 43, and a plurality of second adjustment holes 445 are formed on the step portion 44. The plurality of limiting holes 35 and the plurality of second adjustment holes 445 are spaced apart along the circumference of the second sub-barrel 43, each limiting hole 35 extends along the radial direction of the second sub-barrel 43, and each second adjustment hole 445 extends along the axial direction of the second sub-barrel 43.

[0045] The plurality of limiting holes 35 are suitable for installing the fourth adjusting member, which passes through the side wall of the second sub-lens barrel 43 and then stops on the lens 41, which is conducive to limiting the lens 41 in the circumferential direction of the lens 41, and avoiding the relative movement between the lens 41 and the first boss section 443 in the radial direction of the second sub-lens barrel 43, thereby increasing the use stability of the lens 41. At the same time, the relative position of the lens 41 in the second sub-lens barrel 43 can be adjusted by adjusting the length of the plurality of fourth adjusting members extending into the second sub-lens barrel 43.

[0046] The extension direction of the second adjustment hole 445 intersects with the extension direction of the limiting hole 35, and the fifth adjustment member is suitable for installing in the plurality of second adjustment holes 445. The fifth adjustment member passes through the step portion 44 and stops on the lens 41, which is conducive to positioning the lens 41 in the axial direction of the lens 41, avoiding the angle deviation of the lens 41 relative to the step portion 44, and further improving the use stability of the lens 41. At the same time, the inclination angle between the lens 41 and the step portion 44 can be adjusted by adjusting the length of the plurality of fifth adjustment members stopping the lens 41, thereby reducing the influence of the inclination angle of the lens 41 on the uniformity of the optical path.

[0047] Further, the second sub-barrel 43 is formed with a plurality of long strip holes 431, which are spaced apart along the circumference of the second sub-barrel 43, and the first sub-barrel 42 is formed with a plurality of circular holes 421, which are spaced apart along the circumference of the first sub-barrel 42. Figure 6 Eight circular holes 421 are formed at one end of the first sub-barrel 42 facing the second sub-barrel 43, and fasteners are suitable for being installed in the circular holes 421 to connect the first sub-barrel 42 and the second sub-barrel 43. Eight long strip holes 431 are formed at one end of the second sub-barrel 43 facing the first sub-barrel 42, and connecting members are suitable for being passed through the long strip holes 431 to connect the second sub-barrel 43 and the mounting table of the exposure optical path assembly 100.

[0048] The number of the long strip holes 431 is the same as the number of the round holes 421, and the plurality of long strip holes 431 correspond to the plurality of round holes 421. Thus, the difficulty of assembling the first sub-barrel 42 and the second sub-barrel 43 is reduced, so that the installation angle of the first barrel 1 is suitable for the requirements of the proximity exposure device, thereby avoiding interference between the first barrel 1 and other components on the proximity exposure device, and improving the applicability of the exposure optical path assembly 100.

[0049] During the actual assembly process, the emitting assembly 2 is first installed on the first lens barrel 1, the reflecting mirror 32 and the lens cover 34 are installed on the second lens barrel 3, and the lens 41 is installed on the third lens barrel 4. Then, the first lens barrel 1, the second lens barrel 3 and the third lens barrel 4 are connected in sequence to complete the installation of the exposure optical path assembly 100. Then, the exposure optical path assembly 100 is installed on the mounting table of the proximity exposure equipment to complete the assembly of the proximity exposure equipment.

[0050] The proximity exposure device according to the second aspect of the present invention comprises the exposure optical path component 100 according to the first aspect of the present invention.

[0051] The proximity exposure device according to the embodiment of the utility model, by adopting the above-mentioned exposure optical path component 100, is conducive to improving the assembly efficiency of the proximity exposure device, while improving the accuracy and stability of exposure, thereby improving the market competitiveness of the proximity exposure device.

[0052] Other structures and operations of the exposure optical path assembly 100 and the proximity exposure device according to the embodiment of the utility model are known to ordinary technicians in the field and will not be described in detail here.

[0053] In the description of the present invention, it should be understood that the terms "center", "length", "up", "down", "back", "left", "right", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential" and the like indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0054] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0055] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example.

[0056] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. An exposure optical path component, characterized in that: include: A first lens barrel, wherein a groove is formed at one axial end of the first lens barrel; A transmitting assembly, one end of which is fitted in the groove, a plurality of mounting holes and a plurality of first adjustment holes are formed on the transmitting assembly, and the plurality of mounting holes and the plurality of first adjustment holes are arranged alternately along the circumference of the first lens barrel; A plurality of first fasteners, the plurality of first fasteners corresponding to the plurality of mounting holes one by one, one end of each of the first fasteners passing through the mounting hole to be connected to the first lens barrel; A plurality of first adjusting members, wherein the plurality of first adjusting members correspond to the plurality of first adjusting holes one by one, and the first adjusting members adjust the angle between the emitting assembly and the first lens barrel through the first adjusting holes; A second lens barrel, the second lens barrel is connected to the other axial end of the first lens barrel, a first through hole is formed on the second lens barrel, and a reflecting mirror is disposed at the first through hole; a third lens barrel, the third lens barrel being arranged at an end of the second lens barrel away from the first lens barrel, and a lens being arranged in the third lens barrel; The signal light emitted by the transmitting component is projected onto the reflector, and after being reflected by the reflector, passes through the lens to complete exposure.

2. The exposure optical path assembly according to claim 1, characterized in that: The diameter of the mounting hole is larger than the diameter of the adjusting hole.

3. The exposure optical path assembly according to claim 1, characterized in that: The second lens barrel comprises a lens barrel body and a lens cover, the first lens barrel and the reflector are respectively arranged on two opposite sides of the lens barrel body, and the mirror cover is arranged on a side of the reflector away from the first lens barrel; The mirror cover is provided with a plurality of second adjusting members, which are spaced apart along the circumference of the mirror cover, and the second adjusting members are used to adjust the inclination angle of the reflecting mirror.

4. The exposure optical path assembly according to claim 3, characterized in that: Also includes: A plurality of abutment plates, wherein the plurality of abutment plates are spaced apart along the circumference of the lens cover, one end of each of the abutment plates is connected to the lens barrel body, and the other end of each of the abutment plates is opposite to the lens cover; A plurality of third adjusting members, the plurality of third adjusting members correspond one to one with the plurality of abutment plates, each of the third adjusting members passes through the abutment plate to abut against the mirror cover, and the mirror cover and the reflector are pushed to translate by the plurality of third adjusting members.

5. The exposure optical path assembly according to claim 1, characterized in that: The third lens barrel comprises a first sub-lens barrel and a second sub-lens barrel, the first sub-lens barrel is connected between the second lens barrel and the second sub-lens barrel, the second sub-lens barrel is provided with a step portion at one end away from the first sub-lens barrel, the step portion extends in a direction toward the center of the second sub-lens barrel, and the lens is provided on the step portion; A plurality of fixing members are arranged on the step portion, and the plurality of fixing members are spaced apart along the circumference of the step portion, one end of each of the fixing members is connected to the step portion via a second fastener, and the other end of each of the fixing members is connected to the lens via a third fastener.

6. The exposure optical path assembly according to claim 5, characterized in that: The step portion includes a first boss section and a second boss section connected to each other, and the lens abuts against the first boss section; Wherein, the outer diameter of the lens is smaller than the inner diameter of the second boss segment.

7. The exposure optical path assembly according to claim 6, characterized in that: The lens is coaxially arranged in the second sub-barrel, and the minimum distance between the lens and the second boss segment in the radial direction of the second sub-barrel is L, wherein L satisfies: 0.05mm≤L≤0.1mm.

8. The exposure optical path assembly according to claim 6, characterized in that: A plurality of limiting holes are formed on the second sub-lens barrel, and a plurality of second adjustment holes are formed on the step portion. The plurality of limiting holes and the plurality of second adjustment holes are spaced apart along the circumference of the second sub-lens barrel, each of the limiting holes extends along the radial direction of the second sub-lens barrel, and each of the second adjustment holes extends along the axial direction of the second sub-lens barrel.

9. The exposure optical path assembly according to claim 8, characterized in that: The second sub-lens barrel is formed with a plurality of long strip holes, and the plurality of long strip holes are spaced apart along the circumference of the second sub-lens barrel. A plurality of circular holes are formed on the first sub-barrel, and the plurality of circular holes are spaced apart along the circumference of the first sub-barrel. The number of the elongated holes is the same as the number of the circular holes, and the plurality of elongated holes and the plurality of circular holes correspond one to one.

10. A proximity exposure device, characterized in that: Comprising the exposure optical path component according to any one of claims 1-9.

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