Ultrasonic vibrator and ultrasonic motor

Abstract

The utility model is suitable for the technical field of driving equipment, and provides an ultrasonic vibrator and an ultrasonic motor, and the ultrasonic vibrator comprises a piezoelectric ceramic part and a friction part. The piezoelectric ceramic part comprises a first piezoelectric layer group, the first piezoelectric layer group comprises a plurality of first signal electrode plate groups and first ceramic plates, and the plurality of first signal electrode plate groups are arranged at intervals. The two opposite sides of each first signal electrode plate group are respectively provided with a first ceramic plate. The first signal electrode plate group comprises first signal electrode plates and second signal electrode plates, and the first signal electrode plates and the second signal electrode plates are arranged at intervals. The first ceramic plates are grounded and attached to the corresponding first signal electrode plates and the second signal electrode plates respectively, and the friction part is installed on one side, in the first direction, of the first piezoelectric layer set. The friction part can move along the elliptical track and drive the driving part of the ultrasonic motor to move, so that the driving precision of the ultrasonic motor is higher, the noise is lower, and the ultrasonic motor is more suitable for driving miniature products.

Description

Technical Field

[0001] The present application relates to the technical field of driving equipment, and more specifically, to an ultrasonic vibrator and an ultrasonic motor. Background Art

[0002] With the continuous development of science and technology, people have higher and higher requirements for the motion accuracy of some miniature products (such as small cameras, galvanometers, etc.). Taking the rotating galvanometer as an example, the rotating galvanometer needs to have a high rotation accuracy. At present, the main electromagnetic motors used in the market are used to drive the rotating galvanometer to rotate. The common setting method is to drive the rotating galvanometer to rotate through a stepper motor and a gearbox. However, the small and high-precision gearbox is not only difficult to manufacture and has high production costs, but also the small stepper motor has a small output torque, low output accuracy and high noise, which leads to low driving accuracy and high noise of electromagnetic motors for miniature products. Utility Model Content

[0003] The purpose of the embodiments of the present application is to provide an ultrasonic vibrator and an ultrasonic motor, aiming to solve the technical problems in the prior art that electromagnetic motors have low driving accuracy and high noise for micro products.

[0004] To achieve the above-mentioned purpose, the technical solution adopted in the present application is: to provide an ultrasonic vibrator, including a piezoelectric ceramic part and a friction part;

[0005] The piezoelectric ceramic part includes a first piezoelectric layer group, the first piezoelectric layer group includes a plurality of first signal electrode sheet groups and a first ceramic sheet, the plurality of first signal electrode sheet groups are arranged at intervals along a first direction, and the first ceramic sheets are respectively arranged on opposite sides of each first signal electrode sheet group in the first direction;

[0006] The polarization direction of each first ceramic sheet is the direction in which it approaches the corresponding first signal electrode sheet group along the first direction, or the polarization direction of each first ceramic sheet is the direction in which it moves away from the corresponding first signal electrode sheet group along the first direction;

[0007] The first signal electrode sheet group includes a first signal electrode sheet and a second signal electrode sheet, the first signal electrode sheet and the second signal electrode sheet are sequentially arranged at intervals along a second direction, and the first direction and the second direction are arranged at an angle; the first signal electrode sheet is used to input a first AC signal, and the second signal electrode sheet is used to input a second AC signal, and the first AC signal and the second AC signal have a first phase difference; each of the first ceramic sheets is grounded, and each of the first ceramic sheets is respectively attached to the first signal electrode sheet and the second signal electrode sheet in the corresponding first signal electrode sheet group, so that each of the first ceramic sheets is respectively electrically connected to the corresponding first signal electrode sheet and the corresponding second signal electrode sheet;

[0008] The friction part is installed on one side of the first piezoelectric layer group in the first direction.

[0009] In a possible design, the piezoelectric ceramic portion further includes a second piezoelectric layer group, the second piezoelectric layer group is connected to one side of the first piezoelectric layer group in the first direction; the second piezoelectric layer group includes a plurality of second signal electrode sheet groups and a plurality of second ceramic sheets, the plurality of second signal electrode sheet groups are arranged at intervals along the first direction, and the second ceramic sheets are respectively arranged on opposite sides of each second signal electrode sheet group in the first direction;

[0010] The polarization direction of each first ceramic sheet is the direction in which it approaches the corresponding first signal electrode sheet group along the first direction, and the polarization direction of each second ceramic sheet is the direction in which it moves away from the corresponding second signal electrode sheet group along the first direction;

[0011] The second signal electrode sheet group includes a first signal electrode sheet and a second signal electrode sheet, the first signal electrode sheet and the second signal electrode sheet are sequentially arranged at intervals along a third direction, and the second direction and the third direction are opposite directions;

[0012] Each of the second ceramic sheets is grounded, and each of the second ceramic sheets is respectively attached to the first signal electrode sheet and the second signal electrode sheet in the corresponding second signal electrode sheet group, so that each of the second ceramic sheets is respectively electrically connected to the corresponding first signal electrode sheet and the corresponding second signal electrode sheet;

[0013] The friction part is installed on a side of the first piezoelectric layer group that is away from the second piezoelectric layer group, or the friction part is installed on a side of the second piezoelectric layer group that is away from the first piezoelectric layer group.

[0014] In a possible design, the ultrasonic vibrator also includes a spring sheet, which has an elastic part and a clamping part that are connected to each other, the clamping part is clamped on two opposite sides of the piezoelectric ceramic part, the elastic part is located on the side of the piezoelectric ceramic part away from the friction part, and the elastic part is used to abut against the housing of the ultrasonic motor.

[0015] In a possible design, the number of the clamping parts is two, the two clamping parts are respectively connected to the elastic part, and the two clamping parts are spaced apart along a fourth direction, and the second direction and the fourth direction are arranged at an angle; in the fourth direction, the distance between the two clamping parts is equal to 40% to 60% of the length of the piezoelectric ceramic part in the fourth direction, and in the fourth direction, the two clamping parts are symmetrically arranged relative to the center point of the piezoelectric ceramic part.

[0016] In a possible design, the ultrasonic vibrator further includes a metal substrate, and the metal substrate is connected to one side of the first piezoelectric layer group in the first direction.

[0017] In a possible design, the friction portion is mounted on a side of the metal substrate facing away from the first piezoelectric layer group.

[0018] In a possible design, the metal substrate is penetrated by strip holes along a fifth direction, the fifth direction is set at an angle with the first direction, and the length direction of the strip holes is set at an angle with the first direction and the fifth direction respectively.

[0019] In a possible design, the metal substrate has a peripheral side surface parallel to the first direction, and a metal spring is protruding from the peripheral side surface. The metal spring is used to be connected to the housing of the ultrasonic motor.

[0020] The present application also provides an ultrasonic motor, comprising a driving part and an ultrasonic vibrator provided by any of the above technical solutions, wherein the friction part abuts against a surface of the driving part.

[0021] In a possible design, there are a plurality of ultrasonic vibrators, the plurality of ultrasonic vibrators are arranged at intervals, and the friction portion of each ultrasonic vibrator abuts against the surface of the driving portion respectively.

[0022] The beneficial effect of the ultrasonic vibrator provided by the present application is that, compared with the prior art, the ultrasonic vibrator provided by the present application, since the polarization direction of each first ceramic sheet is the direction of itself approaching or moving away from the corresponding first signal electrode sheet group along the first direction, and each first ceramic sheet is electrically connected to the first signal electrode sheet and the second signal electrode sheet respectively while being grounded, therefore, when the first signal electrode sheet inputs the first AC signal to the first ceramic sheet connected to itself, the area of ​​the first ceramic sheet corresponding to the connection to the first signal electrode sheet will continuously and alternately stretch and contract; when the second signal electrode sheet inputs the second AC signal to the first ceramic sheet connected to itself, the area of ​​the first ceramic sheet corresponding to the connection to the second signal electrode sheet will also continuously and alternately stretch and contract. Since the first AC signal and the second AC signal have a first phase difference, when the first signal electrode sheet and the second signal electrode sheet respectively input the first AC signal and the second AC signal to the corresponding first ceramic sheet, the areas of each first ceramic sheet of the entire first piezoelectric layer group that are respectively connected to the first signal electrode sheet and the second signal electrode sheet can be alternately stretched or contracted, so that the entire first piezoelectric layer group produces a certain regular deformation, so as to drive the friction part installed on the first piezoelectric layer group to move along an elliptical trajectory.

[0023] The ultrasonic vibrator provided by the present application can be applied to an ultrasonic motor. When the ultrasonic vibrator provided by the present application is applied to an ultrasonic motor, the friction part can be abutted against the driving part of the ultrasonic motor. When the friction part moves along the elliptical trajectory, the friction part can generate friction with the driving part, and the driving part is driven by the friction force to move. The extension or contraction amplitude of the first ceramic sheet after the first AC signal or the second AC signal is input is very small. The extension or contraction amplitude of the first ceramic sheet is usually at the nanometer level, so that the movement amplitude of the driving part can be controlled at the nanometer level, which effectively improves the accuracy of the ultrasonic motor. In addition, the friction part is directly abutted against the driving part, and the driving part is driven to move by friction. Therefore, the noise generated during the operation of the ultrasonic motor can be effectively reduced.

[0024] The beneficial effect of the ultrasonic motor provided in the present application is that, compared with the prior art, since the ultrasonic motor provided in the present application includes the ultrasonic vibrator provided by any of the above-mentioned technical solutions, the ultrasonic motor provided in the present application has at least all of the above-mentioned beneficial effects, which will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0026] Figure 1 is a schematic structural diagram of an ultrasonic vibrator provided by an embodiment of the present application;

[0027] Figure 2 It is a schematic diagram of the influence of voltage direction and polarization direction on the deformation of piezoelectric ceramics;

[0028] Figure 3 is a schematic structural diagram of an ultrasonic vibrator provided by another embodiment of the present application;

[0029] Figure 4 is a schematic structural diagram of an ultrasonic vibrator provided in yet another embodiment of the present application;

[0030] Figure 5 is a schematic diagram of an exploded view of parts of an ultrasonic vibrator provided in yet another embodiment of the present application;

[0031] Figure 6 is a schematic diagram of a cross-sectional structure of an ultrasonic vibrator provided in another embodiment of the present application on a cross section perpendicular to the fourth direction;

[0032] Figure 7 is a waveform diagram of a first alternating current signal and a second alternating current signal in an ultrasonic vibrator provided by an embodiment of the present application;

[0033] Figure 8 is a schematic diagram of the motion trajectory of a friction portion in an ultrasonic vibrator provided in an embodiment of the present application;

[0034] Fig. 9 It is a schematic diagram of the structure of a spring piece in an ultrasonic vibrator provided by an embodiment of the present application;

[0035] Fig.10 is a schematic structural diagram of an ultrasonic vibrator provided in yet another embodiment of the present application;

[0036] Fig.11 is a schematic structural diagram of an ultrasonic motor provided by an embodiment of the present application;

[0037] Fig.12 is an exploded schematic diagram of parts of an ultrasonic motor provided by an embodiment of the present application;

[0038] Fig.13 is a schematic cross-sectional structural diagram of an ultrasonic motor provided by an embodiment of the present application;

[0039] Fig.14 is a partial structural schematic diagram of an ultrasonic motor provided by an embodiment of the present application;

[0040] Fig.15 is a partial structural schematic diagram of an ultrasonic motor provided by another embodiment of the present application;

[0041] Fig.16 is a partial structural schematic diagram of an ultrasonic motor provided in yet another embodiment of the present application;

[0042] Fig.17 is a partial structural schematic diagram of an ultrasonic motor provided in yet another embodiment of the present application;

[0043] Fig.18 This is a partial structural schematic diagram of an ultrasonic motor provided in another embodiment of the present application. DETAILED DESCRIPTION

[0044] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0045] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0046] It should be understood that the orientation or position relationship indicated by terms such as "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the orientation or position relationship shown in the drawings and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the structure or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0047] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0048] In order to illustrate the technical solution described in this application, a detailed description is given below in conjunction with specific drawings and embodiments.

[0049] like Figures 1 to 6As shown, an embodiment of the present application provides an ultrasonic vibrator 10, including a piezoelectric ceramic part 100 and a friction part 200. The piezoelectric ceramic part 100 includes a first piezoelectric layer group 110, and the first piezoelectric layer group 110 includes a plurality of first signal electrode sheet groups and a first ceramic sheet 113, and the plurality of first signal electrode sheet groups are arranged at intervals along the first direction. The first ceramic sheets 113 are respectively arranged on the opposite sides of each first signal electrode sheet group in the first direction, that is, each first signal electrode sheet group corresponds to two first ceramic sheets 113, each first signal electrode sheet group is sandwiched between the corresponding two first ceramic sheets 113, and each two first ceramic sheets 113 correspond to one first signal electrode sheet group.

[0050] The polarization direction of each first ceramic sheet 113 is the direction in which it approaches the corresponding first signal electrode sheet group along the first direction, or the polarization direction of each first ceramic sheet 113 is the direction in which it moves away from the corresponding first signal electrode sheet group along the first direction. The first direction can be any direction. For the convenience of description, the following text will take the first direction as the vertical direction as an example for explanation. When the polarization direction of each first ceramic sheet 113 is the direction in which it approaches the corresponding first signal electrode sheet group along the first direction, specifically, the polarization direction of the first ceramic sheet 113 corresponding to the upper side of each first signal electrode sheet group is downward, and the polarization direction of the first ceramic sheet 113 corresponding to the lower side of each first signal electrode sheet group is upward. When the polarization direction of each first ceramic sheet 113 is the direction in which it moves away from the corresponding first signal electrode sheet group along the first direction, specifically, the polarization direction of the first ceramic sheet 113 corresponding to the upper side of each first signal electrode sheet group is upward, and the polarization direction of the first ceramic sheet 113 corresponding to the lower side of each first signal electrode sheet group is downward. For the convenience of description, the following description will be made by taking the polarization direction of each first ceramic sheet 113 as the direction in which the first ceramic sheet 113 approaches the corresponding first signal electrode sheet group along the first direction as an example.

[0051] The first signal electrode sheet group includes a first signal electrode sheet 101 and a second signal electrode sheet 102, and the first signal electrode sheet 101 and the second signal electrode sheet 102 are arranged in sequence along the second direction, and the first direction is arranged at an angle to the second direction. The first signal electrode sheet 101 is used to input a first AC signal, and the second signal electrode sheet 102 is used to input a second AC signal, and the first AC signal and the second AC signal have a first phase difference. Each first ceramic sheet 113 is grounded, and each first ceramic sheet 113 is respectively attached to the first signal electrode sheet 101 and the second signal electrode sheet 102 in the corresponding first signal electrode sheet group, so that each first ceramic sheet 113 is respectively electrically connected to the corresponding first signal electrode sheet 101 and the corresponding second signal electrode sheet 102. In some embodiments, the first direction and the second direction can be arranged at any angle. Optionally, the first direction and the second direction are arranged perpendicular to each other. In the drawings of the embodiments of the present application, the first direction is shown as the direction indicated by the EE arrow, and the second direction is shown as the direction indicated by the F arrow. For ease of description, the following text is described as an example in which the first direction and the second direction are perpendicular to each other.

[0052] The friction part 200 is installed on one side of the first piezoelectric layer group 110 in the first direction. In the first piezoelectric layer group 110, the plurality of first signal electrode sheet groups spaced apart along the first direction include two first signal electrode sheet groups located at the outermost side. The friction part 200 is installed on one side of the first piezoelectric layer group 110 in the first direction, specifically, the friction part 200 is installed on the first ceramic sheet 113 arranged on one side of one of the outermost first signal electrode sheet groups away from the other first signal electrode sheet groups. When the first direction is a vertical direction, among the plurality of first signal electrode sheet groups, the two first signal electrode sheet groups located at the outermost side are specifically the two first signal electrode sheet groups located at the top and the bottom. The friction part 200 can be installed above the first ceramic sheet 113 corresponding to the upper side of the top first signal electrode sheet group, or can also be installed below the first ceramic sheet 113 corresponding to the lower side of the bottom first signal electrode sheet group. Optionally, the friction part 200 can be a hemispherical structure, a spherical structure, a rectangular block structure or any other arbitrary shape structure, which is not limited here.

[0053] It is worth noting that the first ceramic sheet 113 is a piezoelectric ceramic sheet. The polarized piezoelectric ceramic sheet will stretch or shrink after being energized. The stretching or shrinking of the polarized piezoelectric ceramic sheet is specifically determined by the direction of the applied voltage and the polarization direction. For example, Figure 2 As shown, Figure 2 (1) represents the state of the unpolarized piezoelectric ceramic piece when no power is applied. The piezoelectric ceramic piece in (1) is neither stretched nor contracted. Figure 2The upper part of the piezoelectric ceramic piece in (2) is connected to a positive voltage, the lower part is grounded, and the polarization direction is in a direction away from the positive voltage, so that the piezoelectric ceramic piece in (2) can be contracted; Figure 2 The piezoelectric ceramic sheet in (3) is connected to a positive voltage at the top and grounded at the bottom, and the polarization direction is toward the positive voltage, so that the piezoelectric ceramic sheet in (3) can be extended. Conversely, when a piezoelectric ceramic sheet with a polarization direction away from the negative voltage is connected to a negative voltage, the piezoelectric ceramic sheet extends; when a piezoelectric ceramic sheet with a polarization direction toward the negative voltage is connected to a negative voltage, the piezoelectric ceramic sheet contracts.

[0054] Compared with the related art, in the ultrasonic vibrator 10 provided in the embodiment of the present application, since the polarization direction of each first ceramic sheet 113 is the direction of itself approaching or moving away from the corresponding first signal electrode sheet group along the first direction, and each first ceramic sheet 113 is electrically connected to the first signal electrode sheet 101 and the second signal electrode sheet 102 while being grounded, when the first signal electrode sheet 101 inputs the first AC signal to the first ceramic sheet 113 connected to itself, the area of ​​the first ceramic sheet 113 corresponding to the connection to the first signal electrode sheet 101 will continuously and alternately stretch and contract; when the second signal electrode sheet 102 inputs the second AC signal to the first ceramic sheet 113 connected to itself, the area of ​​the first ceramic sheet 113 corresponding to the connection to the second signal electrode sheet 102 will also continuously and alternately stretch and contract.

[0055] The area in the first ceramic sheet 113 connected to the first signal electrode sheet 101 specifically refers to the area in the first ceramic sheet 113 where the first AC signal passes through, and the area in the first ceramic sheet 113 connected to the second signal electrode sheet 102 specifically refers to the area in the first ceramic sheet 113 where the second AC signal passes through. The area in the first ceramic sheet 113 connected to the first signal electrode sheet 101 is referred to as the first area, and the area in the first ceramic sheet 113 connected to the second signal electrode sheet 102 is referred to as the second area. The first area and the second area are sequentially arranged along the second direction, the first signal electrode sheet 101 is attached to the first area, and the second signal electrode sheet 102 is attached to the second area.

[0056] When each first signal electrode sheet 101 inputs a first AC signal to the first region of the corresponding first ceramic sheet 113, the first region of each first ceramic sheet 113 continuously and alternately stretches and contracts, so that the partial structure on one side of the entire first piezoelectric layer group 110 in the second direction continuously and alternately stretches and contracts, so that the friction part 200 can be driven to move along the first oblique line, and the first oblique line is set at an angle with the first direction and the second direction respectively. When each second signal electrode sheet 102 inputs a second AC signal to the second region of the corresponding first ceramic sheet 113, the second region of each first ceramic sheet 113 continuously and alternately stretches and contracts, so that the partial structure on the other side of the entire first piezoelectric layer group 110 in the second direction continuously and alternately stretches and contracts, so that the friction part 200 can be driven to move along the second oblique line, and the first oblique line is set at an angle with the first direction and the second direction respectively, and the first oblique line and the second oblique line are set at an angle.

[0057] Since the first AC signal and the second AC signal have a first phase difference, when the first signal electrode sheet 101 and the second signal electrode sheet 102 respectively input the first AC signal and the second AC signal to the corresponding first ceramic sheet 113, the first area and the second area of ​​each first ceramic sheet 113 in the entire first piezoelectric layer group 110 can be alternately extended and contracted, so that the entire first piezoelectric layer group 110 produces a certain regular deformation, so as to drive the friction part 200 installed on the first piezoelectric layer group 110 to move along an elliptical trajectory.

[0058] The ultrasonic vibrator 10 provided in the embodiment of the present application can be applied to the ultrasonic motor 1. When the ultrasonic vibrator 10 provided in the embodiment of the present application is applied to the ultrasonic motor 1, the friction part 200 can be abutted against the driving part 20 of the ultrasonic motor 1. When the friction part 200 moves along the elliptical trajectory, the friction part 200 can generate friction with the driving part 20, and the driving part 20 can move under the driving force of the friction. The first ceramic sheet 113 is usually extended or contracted by tens to hundreds of nanometers after the first AC signal or the second AC signal is input, so that the movement amplitude of the friction part 200 can be controlled at the level of tens to hundreds of nanometers, so that the movement amplitude of the driving part 20 can be controlled at the level of tens to hundreds of nanometers, which effectively improves the accuracy of the ultrasonic motor 1. The friction part 200 is directly abutted against the driving part 20, and the driving part 20 is driven to move by the friction force. Therefore, the noise generated during the operation of the ultrasonic motor 1 can be effectively reduced. It can be seen from the above that when the ultrasonic vibrator 10 provided in the embodiment of the present application is applied to the ultrasonic motor 1, the driving accuracy of the ultrasonic motor 1 is higher and it is more suitable for driving micro products.

[0059] In the embodiment of the present application, when the first AC signal and the second AC signal are simultaneously input to each first ceramic sheet 113, the first piezoelectric layer group 110 can drive the friction part 200 to move along the elliptical trajectory at a periodic frequency of 100kHz to 200kHz (a frequency exceeding 20kHz can be called ultrasonic). Since the movement periodic frequency of the friction part 200 reaches the frequency range of ultrasonic waves, it can also be understood that the friction part 200 can generate vibrations of ultrasonic frequencies.

[0060] The specific value of the first phase difference can be obtained through simulation experiments or actual measurements according to actual needs. That is to say, the appropriate elliptical motion trajectory of the friction part 200 can be calculated according to the actual driving amount required by the ultrasonic motor 1, and finally the corresponding first phase difference can be obtained according to the simulation experiment or actual measurement. Optionally, the first phase difference can range from 70° to 110°. For example, the first phase difference can be 70°, 85°, 90°, 103° or 110°, etc.

[0061] In some embodiments, the first piezoelectric layer group 110 further includes a first grounding electrode sheet 111. Each first ceramic sheet 113 is provided with a first grounding electrode sheet 111 on a side away from the corresponding first signal electrode sheet group, and the first area and the second area of ​​each first ceramic sheet 113 are simultaneously attached to the corresponding first grounding electrode sheet 111, so that the first area and the second area of ​​each first ceramic sheet 113 can be grounded through the same first grounding electrode sheet 111. In the first direction, a first grounding electrode sheet 111 can be arranged between two adjacent first ceramic sheets 113, and the first grounding electrode sheet 111 is respectively attached to the first ceramic sheets 113 on both sides, so that the two adjacent first ceramic sheets 113 can be grounded through one first grounding electrode sheet 111. It is worth noting that the two adjacent first ceramic sheets 113 in the first direction are respectively the first ceramic sheet 113 corresponding to the lower side of the first signal electrode sheet group located above and the first ceramic sheet 113 corresponding to the upper side of the first signal electrode sheet group located below in the two adjacent first signal electrode sheet groups in the first direction.

[0062] In some embodiments, the first ceramic sheet 113 disposed on the side of the outermost first signal electrode sheet group facing away from the other first signal electrode sheet groups is also affixed with a first grounding electrode sheet 111. Exemplarily, the top surface of the first ceramic sheet 113 corresponding to the upper side of the topmost first signal electrode sheet group is affixed with a first grounding electrode sheet 111, and the first grounding electrode sheet 111 is the topmost first grounding electrode sheet 111. Alternatively, the bottom surface of the first ceramic sheet 113 corresponding to the lower side of the bottommost first signal electrode sheet group is affixed with a first grounding electrode sheet 111, and the first grounding electrode sheet 111 is the bottommost first grounding electrode sheet 111. Alternatively, the top surface of the first ceramic sheet 113 corresponding to the upper side of the topmost first signal electrode sheet group and the bottom surface of the first ceramic sheet 113 corresponding to the lower side of the bottommost first signal electrode sheet group are both affixed with a first grounding electrode sheet 111.

[0063] When the top first grounding electrode sheet 111 is provided, the top surface of the top first grounding electrode sheet 111 is attached with the first top insulating sheet. The friction part 200 can be installed above the first top insulating sheet, or below the first ceramic sheet 113 corresponding to the lower side of the bottom first signal electrode sheet 101. When the bottom first grounding electrode sheet 111 is provided, the bottom surface of the bottom first grounding electrode sheet 111 is attached with the first bottom insulating sheet. The friction part 200 can be installed above the first bottom insulating sheet, or above the first ceramic sheet 113 corresponding to the upper side of the top first signal electrode sheet 101. When the top first grounding electrode sheet 111 and the bottom first grounding electrode sheet 111 are provided at the same time, the top surface of the top first grounding electrode sheet 111 is attached with the first top insulating sheet, the bottom surface of the bottom first grounding electrode sheet 111 is attached with the first bottom insulating sheet, and the friction part 200 can be installed above the first top insulating sheet or below the first bottom insulating sheet. The first top insulating sheet and the first bottom insulating sheet may adopt the same structure, for example, both may adopt piezoelectric ceramic sheets or other structures that may have insulating properties.

[0064] In one possible design, Figure 3 As shown, the ultrasonic vibrator 10 further includes a metal substrate 300, which is connected to one side of the first piezoelectric layer group 110 in the first direction. Since the metal substrate 300 is made of a metal material, by providing the metal substrate 300, on the one hand, the structural strength of the entire ultrasonic vibrator 10 can be improved, and on the other hand, the metal substrate 300 has relatively strong plasticity, so the metal substrate 300 is more convenient to connect with other structures (such as the housing 30 of the ultrasonic motor 1), so as to facilitate the installation of the ultrasonic vibrator 10.

[0065] Optionally, the friction part 200 may be installed on a side of the metal substrate 300 away from the first piezoelectric layer group 110, or may be installed on a side of the first piezoelectric layer group 110 away from the metal substrate 300. Figure 3 As shown, taking the friction part 200 installed on the side of the metal substrate 300 away from the first piezoelectric layer group 110 as an example, since the metal substrate 300 has strong plasticity, a mounting groove can be provided on the metal substrate 300, and the friction part 200 can be installed in the mounting groove, or the friction part 200 can be directly welded to the metal substrate 300, so that the installation stability of the friction part 200 can be improved. When the friction part 200 is installed on the metal substrate 300, after the first piezoelectric layer group 110 is deformed, the metal substrate 300 can be deformed accordingly, thereby driving the friction part 200 on the metal substrate 300 to move along an elliptical trajectory.

[0066] In some optional embodiments, on a projection plane perpendicular to the first direction, the projection shape of the metal substrate 300 is the same as the projection shape of the first piezoelectric layer group 110, and the projection of the metal substrate 300 at least covers the projection of the first piezoelectric layer group 110. In this way, one side of the first piezoelectric layer group 110 can be completely attached to the metal substrate 300, so that the connection area between the first piezoelectric layer group 110 and the metal substrate 300 is large, so as to improve the connection stability between the first piezoelectric layer group 110 and the metal substrate 300, and enhance the structural strength of the ultrasonic vibrator 10. The projection shape of the first piezoelectric ceramic layer is specifically the projection shape of each first ceramic sheet 113 on the above-mentioned projection plane. Exemplarily, the first ceramic sheet 113 is a rectangular sheet structure, and on a projection plane perpendicular to the first direction, the projection shape of the first ceramic sheet 113 is a rectangle, and the projection shape of the metal substrate 300 is also a rectangle.

[0067] In a possible design, as shown in Figure 3, the metal substrate 300 is provided with a strip hole 423 along the fifth direction, the fifth direction is set at an angle to the first direction, and the length direction of the strip hole 423 is set at an angle to the first direction and the fifth direction respectively. Optionally, the fifth direction is set perpendicular to the first direction, and the length direction of the strip hole 423 is set perpendicular to the first direction and the fifth direction respectively. Optionally, the fifth direction is a direction parallel to the second direction. By providing the strip hole 423, when the first piezoelectric layer group 110 drives the metal substrate 300 to deform, the deformation of the metal substrate 300 can be made more obvious than the deformation of the first piezoelectric layer group 110. That is to say, by setting the strip hole 423 through the metal base 300, the deformation amplitude of the first piezoelectric layer group 110 can be amplified by the metal base 300, and then the movement amplitude of the friction part 200 can be increased to a certain extent. When the ultrasonic vibrator 10 is applied to the ultrasonic motor 1, it is also beneficial to increase the movement amplitude of the driving part 20 in the ultrasonic motor 1, thereby increasing the driving force of the driving part 20 on the micro product.

[0068] For example, the strip hole 423 has a length direction and a width direction that are perpendicular to each other, and the length direction and the width direction of the strip hole 423 are respectively arranged perpendicular to the fifth direction. The metal substrate 300 includes two middle regions and two end regions, the two middle regions are arranged at intervals on opposite sides of the strip hole 423 along the width direction of the strip hole 423, and the two end regions are arranged at intervals on opposite sides of the strip hole 423 along the length direction of the strip hole 423, and the two middle regions are connected to the two end regions respectively. The strip hole 423 has two inner walls arranged at intervals in its own length direction. Analogous to the seesaw principle, when the first piezoelectric layer group 110 is deformed to drive the metal substrate 300 to deform, each end region can use the two inner walls of the strip hole 423 as a fulcrum to lift each middle region, so that the deformation of the middle region and the end region is more obvious. It can be seen from this that when the first piezoelectric layer group 110 drives the metal base 300 to deform, the deformation of the metal base 300 can be more obvious than the deformation of the first piezoelectric layer group 110 .

[0069] In some embodiments, the width direction of the strip hole 423 is parallel to the first direction, that is, the two middle regions of the metal substrate 300 are spaced apart along the first direction on opposite sides of the strip hole 423. The friction part 200 is specifically installed on the middle region relatively far from the first piezoelectric layer group 110.

[0070] In some embodiments, the profile shape of the strip-shaped hole 423 in the cross section perpendicular to the fifth direction may be a rectangle, an ellipse, a racetrack, etc. Figure 3 As shown, the profile of the strip hole 423 on the cross section perpendicular to the fifth direction is a racetrack shape. Optionally, there can be multiple strip holes 423, the opening directions of the multiple strip holes 423 are all parallel to the fifth direction, and the multiple strip holes 423 are arranged on the metal substrate 300 at intervals.

[0071] In one possible design, Figure 3 As shown, the metal substrate 300 has a peripheral side surface parallel to the first direction, and a metal spring 420 is protruding from the peripheral side surface, and the metal spring 420 is used to connect with the housing 30 of the ultrasonic motor 1. In this arrangement, the metal substrate 300 is specifically connected to the housing 30 of the ultrasonic motor 1 through the metal spring 420, and the metal spring 420 has a certain elastic deformation ability. Therefore, by providing the metal spring 420, it is beneficial for the first piezoelectric layer group 110 to drive the metal substrate 300 to deform, thereby facilitating the friction part 200 installed on the metal substrate 300 to vibrate.

[0072] In the process of simulation experiment and actual experiment, it is found that when the first piezoelectric layer group 110 drives the metal matrix 300 to deform, the minimum deformation of the metal matrix 300 is mainly distributed in the area of ​​20% to 30% of the total length of the center point of the metal matrix 300 in its own length direction. In other words, the metal matrix 300 has two first minimum deformation sections, and in the length direction of the metal matrix 300, the two first minimum deformation sections are symmetrically arranged relative to the center point of the metal matrix 300, and the distance between the two first minimum deformation sections is equal to 40% to 60% of the total length of the metal matrix 300, and the center point of the metal matrix 300 is located in the middle of the metal matrix 300 in its own length direction.

[0073] In some embodiments, the metal substrate 300 has a first peripheral side surface and a second peripheral side surface that are spaced apart in the width direction thereof. The metal spring pieces 420 are at least distributed on two opposite sides of the metal substrate 300 in the fifth direction, or the metal spring pieces 420 are arranged around the peripheral side of the metal substrate 300. Figure 3 As shown, the metal spring 420 includes two first connection ends 421 and two second connection ends 422, the two first connection ends 421 are arranged at intervals on the first peripheral side along the length direction of the metal substrate 300, and the two second connection ends 422 are arranged at intervals on the second peripheral side along the length direction of the metal substrate 300, and the two first connection ends 421 and the two second connection ends 422 are connected to the metal substrate 300. In the length direction of the metal substrate 300, the distance between the two first connection ends 421 is equal to 40% to 60% of the length of the metal substrate 300, and the two first connection ends 421 are symmetrically arranged relative to the midline of the first peripheral side. The distance between the two second connection ends 422 is equal to 40% to 60% of the length of the metal substrate 300, and the two second connection ends 422 are symmetrically arranged relative to the midline of the second peripheral side. With such configuration, the first connection end 421 and the second connection end 422 can be respectively connected to the first minimum deformation section of the metal substrate 300 , thus effectively reducing the influence of the first connection end 421 and the second connection end on the deformation of the metal substrate 300 .

[0074] The length direction and width direction of the metal substrate 300 are the same as the length direction and width direction of the first piezoelectric layer group 110. In some embodiments, each first ceramic sheet 113 is a rectangular plate structure, so that the entire first piezoelectric layer group 110 is a rectangular parallelepiped structure. The metal substrate 300 is also a rectangular parallelepiped structure, and the length direction of the metal substrate 300 is parallel to the length direction of the first piezoelectric layer group 110, and the width direction of the metal substrate 300 is parallel to the width direction of the first piezoelectric layer group 110. The length direction and width direction of the metal substrate 300 are respectively arranged perpendicular to the first direction.

[0075] In one possible design, Figures 4 to 6As shown, the piezoelectric ceramic part 100 also includes a second piezoelectric layer group 120, and the second piezoelectric layer group 120 is connected to one side of the first piezoelectric layer group 110 in the first direction. The second piezoelectric layer group 120 includes a plurality of second signal electrode sheet groups and a plurality of second ceramic sheets 123, and the plurality of second signal electrode sheet groups are arranged at intervals along the first direction, and each second signal electrode sheet group is provided with a second ceramic sheet 123 on two opposite sides in the first direction. In other words, each second signal electrode sheet group corresponds to two second ceramic sheets 123, each second signal electrode sheet group is sandwiched between two corresponding second ceramic sheets 123, and each two second ceramic sheets 123 correspond to one second signal electrode sheet group. The polarization direction of each first ceramic sheet 113 is the direction in which it approaches the corresponding first signal electrode sheet group along the first direction, and the polarization direction of each second ceramic sheet 123 is the direction in which it moves away from the corresponding second signal electrode sheet group along the first direction. The second signal electrode sheet group includes a first signal electrode sheet 101 and a second signal electrode sheet 102, and the first signal electrode sheet 101 and the second signal electrode sheet 102 are arranged in sequence along the third direction, and the second direction and the third direction are opposite directions. In the various drawings of the embodiments of the present application, the third direction is shown as the direction indicated by the G arrow. Each second ceramic sheet 123 is grounded, and each second ceramic sheet 123 is respectively attached to the first signal electrode sheet 101 and the second signal electrode sheet 102 in the corresponding second signal electrode sheet group, so that each second ceramic sheet 123 is respectively electrically connected to the corresponding first signal electrode sheet 101 and the corresponding second signal electrode sheet 102. The friction part 200 is installed on the side of the first piezoelectric layer group 110 away from the second piezoelectric layer group 120, or the friction part 200 is installed on the side of the second piezoelectric layer group 120 away from the first piezoelectric layer group 110.

[0076] According to the above design scheme, since the polarization direction of each first ceramic sheet 113 is the direction of itself approaching the corresponding first signal electrode sheet group along the first direction, and the polarization direction of each second ceramic sheet 123 is the direction of itself away from the corresponding second signal electrode sheet group along the first direction. And the setting directions of the first signal electrode sheet 101 and the second signal electrode sheet 102 in the first signal electrode sheet group and the second signal electrode sheet group are just opposite, therefore, when the first ceramic sheet 113 and the second ceramic sheet 123 are both input with the first AC signal at the same time, when the area where the first ceramic sheet 113 is connected to the first signal electrode sheet 101 is extended, the area where the second ceramic sheet 123 is connected to the first signal electrode sheet 101 is contracted, and vice versa. When the first ceramic sheet 113 and the second ceramic sheet 123 are both input with the second AC signal at the same time, when the area where the first ceramic sheet 113 is connected to the second signal electrode sheet 102 is extended, the area where the second ceramic sheet 123 is connected to the second signal electrode sheet 102 is contracted, and vice versa. When the first ceramic sheet 113 and the second ceramic sheet 123 are simultaneously input with the first AC signal and the second AC signal, the first piezoelectric layer group 110 and the second piezoelectric layer group 120 are deformed, that is, the entire piezoelectric ceramic part 100 is deformed, thereby driving the friction part 200 to produce elliptical motion.

[0077] Optional, such as Figure 7 As shown, the first AC signal may be a sin signal, and the second AC signal may be a cos signal. That is, the first phase difference may be 90°. For ease of description, the following description is based on the example that the first AC signal is a sin signal, and the second AC signal is a cos signal.

[0078] For example, if Figure 6 As shown, an xy rectangular coordinate system is established in the piezoelectric ceramic part, the x-axis is parallel to the second direction and the third direction respectively, and the second direction points to the positive direction of the x-axis, and the third direction points to the negative direction of the x-axis; the y-axis is parallel to the first direction. The x-axis is located at the junction of the first piezoelectric layer group 110 and the second piezoelectric layer group 120, and the y-axis coincides with the midpoint of the piezoelectric ceramic part 100 in the width direction. The first piezoelectric layer is located above the y-axis, and the second piezoelectric layer is located below the y-axis. Figure 6In the figure, the piezoelectric ceramic part 100 includes four regions, namely the third region 510, the fourth region 520, the fifth region 530 and the sixth region 540. The third region 510 is located in the second quadrant of the xy rectangular coordinate system, the fourth region 520 is located in the first quadrant of the xy rectangular coordinate system, the fifth region 530 is located in the third quadrant of the xy rectangular coordinate system, and the sixth region 540 is located in the fourth quadrant of the xy rectangular coordinate system. The first ceramic sheets 113 in the first piezoelectric layer group 110 are located in the third region 510 and the fourth region 520, the first signal electrode sheet 101 in the first signal electrode sheet group is located in the third region 510, and the second signal electrode sheet 102 in the first signal electrode sheet group is located in the fourth region 520; the second ceramic sheets 123 in the second piezoelectric layer group 120 are located in the fifth region 530 and the sixth region 540, the first signal electrode sheet 101 in the second signal electrode sheet group is located in the sixth region 540, and the second signal electrode sheet 102 in the second signal electrode sheet group is located in the fifth region 530. Figures 6 to 8 As shown, when each first signal electrode sheet 101 inputs a first AC signal to the corresponding first ceramic sheet 113 and the second ceramic sheet 123, the area where the first ceramic sheet 113 is connected to the first signal electrode sheet 101 and the area where the second ceramic sheet 123 is connected to the first signal electrode sheet 101 are alternately extended or contracted, that is, the third area 510 and the sixth area 540 of the piezoelectric ceramic part 100 are alternately extended or contracted, thereby driving the friction part 200 to move along the ab oblique line. When each second signal electrode sheet 102 inputs a second AC signal to the corresponding first ceramic sheet 113 and the second ceramic sheet 123, the area where the first ceramic sheet 113 is connected to the second signal electrode sheet 102 and the area where the second ceramic sheet 123 is connected to the second signal electrode sheet 102 are alternately extended or contracted, that is, the fourth area 520 and the fifth area 530 of the piezoelectric ceramic part 100 are alternately extended or contracted, thereby driving the friction part 200 to move along the cd oblique line. When the first signal electrode sheet 101 and the second signal electrode sheet 102 simultaneously input the corresponding first AC signal and the second AC signal to the correspondingly connected first ceramic sheet 113 and the second ceramic sheet 123, the friction part 200 can move along an elliptical trajectory. The ab oblique line is set at an angle to the x-axis and the y-axis respectively, and the cd oblique line is also set at an angle to the x-axis and the y-axis respectively.

[0079] like Figure 7 and Figure 8 As shown, in Figure 7In the rectangular coordinate system shown, the solid line curve represents the first AC signal, and the dashed line curve represents the second AC signal; v represents voltage, v1 represents the first voltage, and v2 represents the second voltage. The absolute values ​​of the first voltage and the second voltage are equal, the first voltage is a positive voltage, and the second voltage is a negative voltage; t represents time, and tn (n includes 1, 2, 3, 4, 5, 6, 7, 8, and 9, that is, tn includes t1, t2, t3, t4, t5, t6, t7, t8, and t9) represents different time points. The difference between two adjacent time points in tn is π / 4, for example, t2-t1=π / 4. At time t1, the first AC signal is v1, the second AC signal is 0, and the friction part 200 is in Figure 8 At time t2, the first AC signal is 0.7 times v1, the second AC signal is 0.7 times v2, and the friction part 200 is in Figure 8 At time t3, the first AC signal is 0, the second AC signal is v2, and the friction part 200 is at Figure 8 At time t4, the first AC signal and the second AC signal are both 0.7 times v2, and the friction part 200 is in Figure 8 At time t5, the first AC signal is v2, the second AC signal is 0, and the friction part 200 is in Figure 8 At time t6, the first AC signal is 0.7 times v2, the second AC signal is 0.7 times v1, and the friction part 200 is in Figure 8 At time t7, the first AC signal is 0, the second AC signal is v1, and the friction part 200 is at Figure 8 At time t8, the first AC signal and the second AC signal are both 0.7 times v1, and the friction part 200 is in Figure 8 At time t9, the first cycle ends and the next cycle begins. The first AC signal is v1, the second AC signal is 0, and the friction part 200 returns to Figure 8 As can be seen from the above, when the first piezoelectric ceramic and the second piezoelectric ceramic are both input with the first AC signal and the second AC signal, the friction part 200 will sequentially move from point a to point ad, then to point d, then to point bd, then to point b, then to point bc, then to point c, and then back to point a, and so on, so that the friction part 200 moves along the Figure 8 The elliptical trajectory shown.

[0080] In some embodiments, Figure 6As shown, the first piezoelectric layer group 110 is located above the second piezoelectric layer group 120, and the first piezoelectric layer group 110 and the second piezoelectric layer group 120 are connected. Each first ceramic sheet 113 and each second ceramic sheet 123 are rectangular sheet structures, so that the entire piezoelectric ceramic part 100 is a rectangular parallelepiped structure. The piezoelectric ceramic part 100 has a thickness direction, a length direction and a width direction that are arranged perpendicularly in pairs. The thickness direction of the piezoelectric ceramic part 100 is parallel to the first direction, the width direction of the piezoelectric ceramic part 100 is parallel to the second direction, and the length direction of the piezoelectric ceramic part 100 is the fourth direction. In the various drawings of the embodiments of the present application, the fourth direction is shown as the HH direction.

[0081] In some embodiments, Figure 5 and Figure 6 As shown, the second piezoelectric layer group 120 also includes a second grounding electrode sheet 121. The second ceramic sheet 123 is sequentially provided with a seventh region and an eighth region along the third direction, the first signal electrode sheet 101 in the second signal electrode sheet group is attached to the seventh region, and the second signal electrode sheet 102 in the second signal electrode sheet group is attached to the eighth region. Each second ceramic sheet 123 is attached with a second grounding electrode sheet 121 on a side away from the corresponding second signal electrode sheet group, and the seventh region and the eighth region of each second ceramic sheet 123 are attached to the corresponding second grounding electrode sheet 121 at the same time, so that the seventh region and the eighth region of each second ceramic sheet 123 can be grounded through the same second grounding electrode sheet 121. In the first direction, a second grounding electrode sheet 121 can be arranged between two adjacent second ceramic sheets 123, and the second grounding electrode sheet 121 is attached to the second ceramic sheets 123 on both sides respectively, so that two adjacent second ceramic sheets 123 can be grounded through one second grounding electrode sheet 121. It is worth noting that the two second ceramic sheets 123 adjacent to each other in the first direction are respectively the second ceramic sheet 123 corresponding to the lower side of the second signal electrode sheet group located above and the second ceramic sheet 123 corresponding to the upper side of the second signal electrode sheet group located below in the two second signal electrode sheet groups adjacent to each other in the first direction.

[0082] In some embodiments, the second ceramic sheet 123 disposed on the side of the outermost second signal electrode sheet group facing away from the other second signal electrode sheet groups is also affixed with a second grounding electrode sheet 121. Exemplarily, the top surface of the second ceramic sheet 123 corresponding to the upper side of the top second signal electrode sheet group is affixed with a second grounding electrode sheet 121, and the second grounding electrode sheet 121 is the top second grounding electrode sheet 121. Alternatively, the bottom surface of the second ceramic sheet 123 corresponding to the lower side of the bottom second signal electrode sheet group is affixed with a second grounding electrode sheet 121, and the second grounding electrode sheet 121 is the bottom second grounding electrode sheet 121. Alternatively, the top surface of the second ceramic sheet 123 corresponding to the upper side of the top second signal electrode sheet group and the bottom surface of the second ceramic sheet 123 corresponding to the lower side of the bottom second signal electrode sheet group are both affixed with a second grounding electrode sheet 121.

[0083] When the top second grounding electrode sheet 121 is provided, the top surface of the top second grounding electrode sheet 121 is attached with the second top insulating sheet. The friction part 200 can be installed above the second top insulating sheet, or below the first ceramic sheet 113 corresponding to the lower side of the bottom first signal electrode sheet 101. When the bottom first grounding electrode sheet 111 is provided, the bottom surface of the bottom first grounding electrode sheet 111 is attached with the second bottom insulating sheet. The friction part 200 can be installed above the second bottom insulating sheet, or above the first ceramic sheet 113 corresponding to the upper side of the top first signal electrode sheet 101. When the top first grounding electrode sheet 111 and the bottom first grounding electrode sheet 111 are provided at the same time, the top surface of the top first grounding electrode sheet 111 is attached with the second top insulating sheet, the bottom surface of the bottom first grounding electrode sheet 111 is attached with the second bottom insulating sheet, and the friction part 200 can be installed above the first top insulating sheet or below the second bottom insulating sheet. The second top insulating sheet and the second bottom insulating sheet may adopt the same structure. For example, the second top insulating sheet and the second bottom insulating sheet may both adopt piezoelectric ceramic sheets or other structures having insulating properties.

[0084] In some examples, when the second ceramic corresponding to the upper side of the topmost second signal electrode sheet group is not provided with the second grounding electrode sheet 121, the bottom surface of the first ceramic corresponding to the lower side of the bottommost first signal electrode sheet group may be provided with the first grounding electrode sheet 111, and the first grounding electrode sheet 111 is directly bonded to the second ceramic corresponding to the upper side of the topmost second signal electrode sheet group; or, the first ceramic corresponding to the lower side of the bottommost first signal electrode sheet group and the second ceramic corresponding to the upper side of the topmost second signal electrode sheet group are an integrated structure, and the bottommost first ceramic and the topmost second ceramic are the same piezoelectric ceramic sheet, and the polarization direction of the piezoelectric ceramic sheet is close to the first signal electrode sheet group and away from the second signal electrode sheet group.

[0085] In some examples, when the second ceramic corresponding to the upper side of the top second signal electrode sheet group is provided with the second grounding electrode sheet 121, the bottom surface of the first ceramic corresponding to the lower side of the bottom first signal electrode sheet group may not be provided with the first grounding electrode sheet 111, and the top second grounding electrode sheet 121 is directly attached to the bottom first ceramic; or, the bottom surface of the first ceramic corresponding to the lower side of the bottom first signal electrode sheet group is also provided with the first grounding electrode sheet 111, and an insulating sheet is arranged between the bottom first grounding electrode sheet 111 and the top second grounding electrode sheet 121, and the insulating sheet may be a piezoelectric ceramic sheet, and the polarization direction of the piezoelectric ceramic sheet may be any polarization direction, or the piezoelectric ceramic sheet is not polarized.

[0086] In some embodiments, the friction part 200 can be installed on the top first ceramic sheet 113 or on the top first top insulating sheet, or the friction part 200 can also be installed on the bottom second ceramic sheet 123 or on the second bottom insulating sheet.

[0087] It is worth noting that, since the first signal electrode sheet 101, the second signal electrode sheet 102, the first grounding electrode sheet 111 and the second grounding electrode sheet 121 are respectively attached to the corresponding first ceramic sheet 113 and the second ceramic sheet 123, when the first AC signal and the second AC signal are input to the first ceramic sheet 113 and the second ceramic sheet 123, the first ceramic sheet 113 and the second ceramic sheet 123 respectively produce corresponding deformations, and drive the first signal electrode sheet 101, the second signal electrode sheet 102, the first grounding electrode sheet 111 and the second grounding electrode sheet 121 to produce deformations. Therefore, when each of the first ceramic sheet 113 and the second ceramic sheet 123 is deformed, it means that the first piezoelectric layer group 110 and the second piezoelectric layer group 120 are deformed as a whole, which means that the entire piezoelectric ceramic part 100 is deformed as a whole.

[0088] In some embodiments, Figure 4 and Figure 5As shown, the piezoelectric ceramic part 100 also includes a first total electrode sheet 131, a second total electrode sheet 132, a third total electrode sheet 133 and a fourth total electrode sheet 134. The first total electrode sheet 131 is used to input a first AC signal, and the second total electrode sheet 132 is used to input a second AC signal. The first signal electrode sheets 101 in each first signal electrode sheet group and the first signal electrode sheets 101 in each second signal electrode sheet group are electrically connected to the same first total electrode sheet 131, the second signal electrode sheets 102 in each first signal electrode sheet group and the second signal electrode sheets 102 in each second signal electrode sheet group are electrically connected to the same second total electrode sheet 132, each first grounding electrode sheet 111 is electrically connected to the same third total electrode sheet 133, and each second grounding electrode sheet 121 is electrically connected to the same fourth total electrode sheet 134. During the polarization of the first ceramic sheet 113, the third total electrode sheet 133 may be connected to a higher positive voltage or negative voltage for a period of time, and each first ceramic sheet 113 attached to the first grounding electrode sheet 111 is polarized, and the polarization direction of each first ceramic sheet 113 is the direction of approaching or moving away from the corresponding first signal electrode sheet group. During the polarization of the second ceramic sheet 123, the fourth total electrode sheet 134 may be connected to a voltage opposite to the third total electrode sheet 133, and after a period of time, each second ceramic sheet 123 attached to the second grounding electrode sheet 121 is polarized, and the polarization direction of each first ceramic sheet 113 is the direction of moving away from or moving toward the corresponding second signal electrode sheet group. Exemplarily, by connecting the third total electrode sheet 133 to a voltage of -100 V and connecting the fourth total electrode sheet 134 to a voltage of +100 V, after a period of time, the polarization direction of each first ceramic sheet 113 is the direction of itself approaching the first signal electrode sheet group along the first direction, and the polarization direction of each second ceramic sheet 123 is the direction of itself away from the second signal electrode sheet group along the first direction.

[0089] In one possible design, Figures 9 to 12As shown, the ultrasonic vibrator 10 further includes a spring piece 410, which has an elastic portion 411 and a clamping portion 412 connected to each other, the clamping portion 412 is clamped at two opposite sides of the piezoelectric ceramic portion 100, the elastic portion 411 is located on the side of the piezoelectric ceramic portion 100 away from the friction portion 200, and the elastic portion 411 is used to abut against the housing 30 of the ultrasonic motor 1. In this arrangement, the spring piece 410 is provided with the clamping portion 412 so that the spring piece 410 and the piezoelectric ceramic portion 100 have a relatively stable relative position relationship. Since the spring piece 410 is also provided with an elastic part 411, when the ultrasonic vibrator 10 is applied to the ultrasonic motor 1, the elastic part 411 abuts against the shell 30 of the ultrasonic motor 1, so that the elastic part 411 can exert an extrusion force on the piezoelectric ceramic part 100 toward the side of the friction part 200, so that the friction part 200 can abut against the driving part 20 with a pressure of 3N to 10N, thereby improving the abutment reliability between the friction part 200 and the driving part 20.

[0090] In one possible design, Fig. 9 and Fig.10 As shown, there are two clamping parts 412, the two clamping parts 412 are respectively connected to the elastic part 411, and the two clamping parts 412 are arranged at intervals along the fourth direction, and the second direction and the fourth direction are arranged at an angle. In the fourth direction, the distance between the two clamping parts 412 is equal to 40% to 60% of the length of the piezoelectric ceramic part 100 in the fourth direction, and in the fourth direction, the two clamping parts 412 are symmetrically arranged relative to the center point of the piezoelectric ceramic part 100.

[0091] During the simulation experiment and the actual experiment, it was found that when each first ceramic sheet 113 and each second ceramic sheet 123 undergoes elastic deformation, that is, when the entire piezoelectric ceramic part 100 undergoes elastic deformation, the minimum deformation of the piezoelectric ceramic part 100 is mainly distributed in the area which is 20% to 30% of the total length of its own center point in its own length direction. In other words, the piezoelectric ceramic part 100 has two second minimum deformation sections. In the length direction of the piezoelectric ceramic part 100, the two second minimum deformation sections are symmetrically arranged relative to the center point of the piezoelectric ceramic part 100, and the distance between the two second minimum deformation sections is equal to 40% to 60% of the total length of the piezoelectric ceramic part 100. The center point of the piezoelectric ceramic part 100 is located in the middle of the piezoelectric ceramic part 100 in its own length direction.

[0092] As can be seen from the above, according to the above design scheme, the two clamping parts 412 can be clamped on the opposite sides of the minimum deformation of the piezoelectric ceramic part 100, effectively reducing the influence of the clamping parts 412 on the deformation of the first ceramic sheets 113 and the second ceramic sheets 123 in the piezoelectric ceramic part 100.

[0093] Another embodiment of the present application provides an ultrasonic motor 1, such as Fig.11 and Fig.12 As shown, the ultrasonic motor 1 includes a driving part 20 and an ultrasonic vibrator 10 provided by any of the above technical solutions, and the friction part 200 abuts against the surface of the driving part 20. Compared with the related art, since the ultrasonic motor 1 provided in the embodiment of the present application includes the ultrasonic vibrator provided by any of the above technical solutions, the ultrasonic motor 1 provided in the embodiment of the present application has at least all the above beneficial effects, which will not be repeated here.

[0094] In some embodiments, the ultrasonic motor 1 includes a housing 30, and a part of the structure of the driving part 20 and the ultrasonic vibrator 10 are installed in the housing 30, and the friction part 200 of the ultrasonic vibrator 10 abuts against the surface of the driving part 20. The elastic part 411 of the spring 410 in the ultrasonic vibrator 10 is located on the side of the piezoelectric ceramic part 100 away from the driving part 20, and the elastic part 411 abuts against the inner wall of the piezoelectric ceramic part 100 and the housing 30 respectively, and the piezoelectric ceramic part 100 is pressed toward the driving part 20 by the elastic part 411, thereby improving the friction between the friction part 200 installed on the piezoelectric ceramic part 100 and the driving part 20 to a certain extent. The inner wall of the housing 30 is provided with a through hole 321 along its thickness direction, and one end of the driving part 20 extends out of the housing 30 through the through hole 321, so that the driving part 20 is connected to the structure to be driven (such as a miniature product such as a small camera, a galvanometer, etc.), so that the structure to be driven is driven by the driving part 20 to generate corresponding movement.

[0095] In some optional embodiments, such as Fig.13 As shown, the housing 30 includes an upper housing 31 and a lower housing 32, which are sequentially arranged along the first direction, and the upper housing 31 and the lower housing 32 are interlocked and enclosed to form a receiving cavity 50, in which at least part of the structure of the driving unit 20 and the ultrasonic vibrator 10 are installed. The driving unit 20 is installed on a side of the ultrasonic vibrator 10 close to the lower housing 32, and a through hole is provided on the side wall of the lower housing 32 along the first direction, and one end of the driving unit 20 extends out of the housing 30 through the through hole 321.

[0096] In some embodiments, the driving part 20 can be a turntable 21 structure or a bar structure. When the driving part 20 is a turntable 21 structure, the friction part 200 is spaced apart from the axis of the driving part 20, so that the friction part 200 can drive the driving rotation, so that the ultrasonic motor 1 can be a rotary driving motor. Fig.13As shown, the driving unit 20 includes a turntable 21 and a rotating shaft 22. The rotating shaft 22 is connected to one side of the turntable 21 along its own axial direction, and the rotating shaft 22 is coaxially arranged with the turntable 21. The ultrasonic motor 1 also includes a bearing 40, which is mounted on the housing 30 and sleeved on the rotating shaft 22. The friction part 200 is specifically in contact with one side of the turntable 21. The cooperation between the rotating shaft 22 and the bearing 40 can improve the rotation stability of the driving unit 20. Fig.14 As shown, when the driving part 20 is a bar-shaped structure, the driving part 20 can move along a straight line driven by the friction part 200, so that the ultrasonic motor 1 can be a linear driving motor.

[0097] In a possible design, there are multiple ultrasonic vibrators 10, and the multiple ultrasonic vibrators 10 are arranged at intervals, and the friction part 200 of each ultrasonic vibrator 10 is respectively in contact with the surface of the driving part 20. In this way, by arranging multiple ultrasonic vibrators 10, the driving force of the driving part 20 in the ultrasonic motor 1 can be improved.

[0098] In some examples, such as Figures 15 to 18 As shown, the number of ultrasonic vibrators 10 can be two, three or four. When the driving part 20 includes a turntable 21, the turntable 21 includes a rotation axis, such as Figures 15 to 17 As shown, the friction parts 200 of the plurality of ultrasonic vibrators 10 are spaced apart from the rotation axis, and each friction part 200 can abut against the side surface of the turntable 21 on the side of the rotation axis extending direction, or, as shown in FIG. Fig.18 As shown, each friction part 200 may also abut against an annular side surface of the rotating disk 21 that is spaced apart from and parallel to the rotation axis.

[0099] In some examples, such as Fig.14 As shown, the number of ultrasonic vibrators 10 can be two, the driving part 20 includes a long strip, and the two friction parts 200 can respectively abut against two opposite side surfaces of the long strip, thereby driving the long strip to move in a straight line.

[0100] In an embodiment of the present application, the output torque and speed of the driving unit 20 can be adjusted according to actual needs, specifically by adjusting the voltage values ​​of the input first AC signal and the second AC signal, or adjusting the first phase difference, so that the driving unit 20 outputs the required torque and speed. The number of ultrasonic vibrators 10 and the size of the shell 30 can also be adjusted according to actual needs. In one example, the number of ultrasonic vibrators 10 is two, and the length, width and height dimensions of the shell 30 are 14mm*8mm*6.4mm. The torque output by the driving unit 20 can be 1N·mm-2N·mm, and the minimum speed of the driving unit 20 can reach 500 rpm.

[0101] The above description is only an optional embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. An ultrasonic vibrator, characterized in that: including a piezoelectric ceramic part and a friction part; The piezoelectric ceramic part includes a first piezoelectric layer group, the first piezoelectric layer group includes a plurality of first signal electrode sheet groups and a first ceramic sheet, the plurality of first signal electrode sheet groups are arranged at intervals along a first direction, and the first ceramic sheets are respectively arranged on opposite sides of each first signal electrode sheet group in the first direction; The polarization direction of each first ceramic sheet is a direction in which it approaches the corresponding first signal electrode sheet group along the first direction, or the polarization direction of each first ceramic sheet is a direction in which it moves away from the corresponding first signal electrode sheet group along the first direction; The first signal electrode sheet group includes a first signal electrode sheet and a second signal electrode sheet, the first signal electrode sheet and the second signal electrode sheet are sequentially arranged at intervals along a second direction, and the first direction and the second direction are arranged at an angle; the first signal electrode sheet is used to input a first AC signal, and the second signal electrode sheet is used to input a second AC signal, and the first AC signal and the second AC signal have a first phase difference; each of the first ceramic sheets is grounded, and each of the first ceramic sheets is respectively attached to the first signal electrode sheet and the second signal electrode sheet in the corresponding first signal electrode sheet group, so that each of the first ceramic sheets is respectively electrically connected to the corresponding first signal electrode sheet and the corresponding second signal electrode sheet; The friction part is installed on one side of the first piezoelectric layer group in the first direction.

2. The ultrasonic vibrator according to claim 1, wherein: The piezoelectric ceramic part further includes a second piezoelectric layer group, which is connected to one side of the first piezoelectric layer group in the first direction; the second piezoelectric layer group includes a plurality of second signal electrode sheet groups and a plurality of second ceramic sheets, the plurality of second signal electrode sheet groups are arranged at intervals along the first direction, and the second ceramic sheets are respectively arranged on opposite sides of each second signal electrode sheet group in the first direction; The polarization direction of each first ceramic sheet is the direction in which it approaches the corresponding first signal electrode sheet group along the first direction, and the polarization direction of each second ceramic sheet is the direction in which it moves away from the corresponding second signal electrode sheet group along the first direction; The second signal electrode sheet group includes a first signal electrode sheet and a second signal electrode sheet, the first signal electrode sheet and the second signal electrode sheet are sequentially arranged at intervals along a third direction, and the second direction and the third direction are opposite directions; Each of the second ceramic sheets is grounded, and each of the second ceramic sheets is respectively attached to the first signal electrode sheet and the second signal electrode sheet in the corresponding second signal electrode sheet group, so that each of the second ceramic sheets is respectively electrically connected to the corresponding first signal electrode sheet and the corresponding second signal electrode sheet; The friction part is installed on a side of the first piezoelectric layer group that is away from the second piezoelectric layer group, or the friction part is installed on a side of the second piezoelectric layer group that is away from the first piezoelectric layer group.

3. The ultrasonic vibrator according to claim 2, characterized in that The ultrasonic vibrator also includes a spring sheet, which has an elastic part and a clamping part connected to each other, the clamping part is clamped on two opposite sides of the piezoelectric ceramic part, the elastic part is located on the side of the piezoelectric ceramic part away from the friction part, and the elastic part is used to abut against the shell of the ultrasonic motor.

4. The ultrasonic vibrator according to claim 3, characterized in that The number of the clamping parts is two, the two clamping parts are respectively connected to the elastic part, and the two clamping parts are arranged at intervals along the fourth direction, and the second direction and the fourth direction are arranged at an angle; in the fourth direction, the distance between the two clamping parts is equal to 40% to 60% of the length of the piezoelectric ceramic part in the fourth direction, and in the fourth direction, the two clamping parts are symmetrically arranged relative to the center point of the piezoelectric ceramic part.

5. The ultrasonic vibrator according to claim 1, wherein: The ultrasonic vibrator further includes a metal substrate, and the metal substrate is connected to one side of the first piezoelectric layer group in the first direction.

6. The ultrasonic vibrator according to claim 5, characterized in that The friction part is installed on a side of the metal substrate away from the first piezoelectric layer group.

7. The ultrasonic vibrator according to claim 6, wherein: The metal substrate is penetrated with a strip hole along a fifth direction, the fifth direction is arranged at an angle with the first direction, and the length direction of the strip hole is arranged at an angle with the first direction and the fifth direction respectively.

8. The ultrasonic vibrator according to claim 5, wherein: The metal substrate has a peripheral side surface parallel to the first direction, and a metal spring is protruding from the peripheral side surface. The metal spring is used to be connected to the shell of the ultrasonic motor.

9. An ultrasonic motor, characterized in that: The ultrasonic vibrator comprises a driving part and the ultrasonic vibrator according to any one of claims 1 to 8, wherein the friction part contacts a surface of the driving part.

10. The ultrasonic motor according to claim 9, wherein: The number of the ultrasonic vibrators is plural, and the plurality of ultrasonic vibrators are arranged at intervals, and the friction portion of each ultrasonic vibrator contacts the surface of the driving portion.

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