Air uniformizing sleeve assembling tool

Abstract

The utility model belongs to the technical field of tools, and particularly relates to a gas uniformizing sleeve assembling tool which comprises a base, a positioning piece, an upper cover and a pushing and pressing piece, the base is provided with a containing groove for containing a gas uniformizing sleeve, the positioning piece is located at one end of the base in the axial direction of the positioning piece and magnetically attracted with the base, and the positioning piece comprises a positioning rod used for being inserted into the containing groove. A capillary tube is filled between the gas uniformizing sleeve and the positioning rod, the upper cover is located at the other end of the base in the axial direction, a through groove is formed in the center of the upper cover, a tensioning pin is arranged in the through groove in a sliding mode, and the pushing piece is matched with the side, away from the base, of the upper cover and comprises a push rod used for pushing the tensioning pin; the capillary tube and the gas uniformizing sleeve are initially positioned through the positioning rod, then the tensioning pin is pressed into the gas uniformizing sleeve through the push rod, the capillary tube is fixed, operation is simple, the assembling efficiency of the gas uniformizing sleeve is greatly improved, a large amount of time is saved, and therefore the shipment yield of MFC is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of tooling, and in particular relates to an air-uniform sleeve assembly tooling. Background Art

[0002] MFC is an instrument for controlling gas flow, which is widely used in various occasions where precise control of gas flow is required. It is used in many fields, such as semiconductor manufacturing, chemical engineering, biotechnology, environmental monitoring, etc. It can improve the accuracy of the process, reduce waste, reduce costs, and can be connected with other control systems to achieve automatic gas flow control.

[0003] During the assembly and debugging of the MFC main valve, the capillaries need to be installed into the gas uniforming sleeve and fixed. However, there are a large number of capillaries, and it is difficult to fix them after installation, resulting in low assembly efficiency. Utility Model Content

[0004] The technical problem to be solved by the utility model is: in order to solve the problem in the prior art that when capillaries are installed into a gas uniforming sleeve, it is difficult to fix them after installation due to a large number of capillaries, resulting in low assembly efficiency, a gas uniforming sleeve assembly tool is now provided.

[0005] In order to solve the above technical problems, the utility model adopts the following technical solutions: an air-uniform sleeve assembly tool, comprising:

[0006] A base, wherein the base is provided with a receiving groove for the gas uniformity sleeve to be placed therein;

[0007] A positioning member is located at one end of the base along the axial direction thereof and is magnetically attracted to the base, and includes a positioning rod for inserting into the receiving groove, and a capillary is filled between the gas uniformity sleeve and the positioning rod;

[0008] The upper cover is located at the other end of the base along the axial direction thereof, and a through slot is provided at the center thereof, and a tensioning pin is slidably arranged inside the through slot;

[0009] The push piece cooperates with the side of the upper cover away from the base, and includes a push rod, which is used to push the tensioning pin so that the tensioning pin is pressed into the gas-uniform sleeve to push the positioning rod away from the base, and at the same time fix the capillary in the gas-uniform sleeve.

[0010] During operation, push the positioning rod into the base, fix the positioning rod in the base through the magnetic attraction of the magnet between the positioning piece and the base, put an air-leveling sleeve in the base, and then fill the capillary into the air-leveling sleeve until it is full, buckle the upper cover on the base, and put the tensioning pin into the through groove of the upper cover, then insert the push rod into the through groove in the middle of the upper cover, use the pressure device to push the push rod to completely press the tensioning pin into the air-leveling sleeve, and tighten and fix the capillary in the air-leveling sleeve through the interference fit between the tensioning pin and the capillary. At the same time, during the process of pressing the tensioning pin, push the positioning rod to separate from the base, and the filling is completed.

[0011] The above technical solution first uses the positioning rod to initially position the capillary and the gas uniforming sleeve, and then uses the push rod to press the tensioning pin into the gas uniforming sleeve to fix the capillary. The operation is simple, which greatly improves the assembly efficiency of the gas uniforming sleeve and saves a lot of time, thereby increasing the shipment output of MFC.

[0012] Furthermore, the positioning member also includes a positioning seat fixed to the positioning rod, and a positioning groove for the positioning seat to be embedded is formed on one side of the base close to the positioning seat.

[0013] Furthermore, a plurality of flanges extend outward from one side of the base close to the positioning member, and the plurality of flanges are spaced apart along the circumference of the base, with a gap formed between two adjacent flanges, through which the positioning member can be conveniently taken and placed, and the inner wall of each flange is coplanar with the groove wall of the positioning groove, so as to provide a guiding effect when taking and placing the positioning member.

[0014] Furthermore, there are two flanges, and the two flanges are symmetrically distributed, and the end faces of both ends of each flange along the circumference are located on the same straight line.

[0015] Furthermore, a mounting groove for mounting a magnetic attraction component is provided on one side of the base and the positioning seat opposite to each other, and the base and the positioning seat are fitted together by the mutual attraction of the magnetic attraction components in the mounting groove.

[0016] Furthermore, a guide groove for installing a guide pin is provided on a side of the base opposite to the upper cover, and the guide pin in the guide groove can provide a guide for the assembly of the upper cover and the base.

[0017] The beneficial effects of the utility model are as follows: the utility model utilizes a positioning rod to initially position the capillary and the gas uniforming sleeve, and then utilizes a push rod to press the tensioning pin into the gas uniforming sleeve to fix the capillary; the operation is simple, and the assembly efficiency of the gas uniforming sleeve is greatly improved, a great deal of time is saved, and thus the delivery output of MFC is increased. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The utility model is further described below in conjunction with the accompanying drawings and embodiments.

[0019] Figure 1 It is a structural schematic diagram of the utility model;

[0020] Figure 2 It is an exploded view of the utility model;

[0021] Figure 3 It is a cross-sectional view of the utility model;

[0022] In the figure:

[0023] 1. Base; 101. Accommodating groove; 102. Positioning groove; 103. Flange;

[0024] 2. Positioning member; 201. Positioning rod; 202. Positioning seat;

[0025] 3. Upper cover; 301. Through groove; 302. Ring groove;

[0026] 4. Pushing member; 401. Push rod; 402. Pushing seat.

[0027] 5. Installation slot;

[0028] 6. Guide groove. DETAILED DESCRIPTION

[0029] Now the utility model is further described in detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, which only illustrate the basic structure of the utility model in a schematic manner, and therefore only show the components related to the utility model.

[0030] Embodiment 1:

[0031] like Figure 1-Figure 3 As shown, the utility model is an air-uniform sleeve assembly tool, comprising:

[0032] A base 1, wherein the base 1 is provided with a receiving groove 101 for receiving a gas-uniform sleeve, and the gas-uniform sleeve is an annular structure;

[0033] The positioning member 2 is located at one end of the base 1 along its axial direction and is magnetically attracted to the base 1, and includes a positioning rod 201 for inserting into the receiving groove 101 and a positioning seat 202 fixed to the positioning rod 201. A capillary is filled between the gas uniformity sleeve and the positioning rod 201. A positioning groove 102 for the positioning seat 202 to be embedded is provided on one side of the base 1 close to the positioning member 2, and a mounting groove 5 for installing a magnetic member is provided on the side opposite to the positioning seat 202. When the positioning rod 201 is inserted into the receiving groove 101, the positioning seat 202 is embedded in the positioning groove 102, and the magnetic members in the mounting groove 5 are mutually attracted to fix the base 1 and the positioning seat 202;

[0034] The base 1 has a plurality of flanges 103 extending outward from one side close to the positioning seat 202. In the present embodiment, there are two flanges 103, which are symmetrically distributed. A gap is formed between two adjacent flanges 103, through which the positioning member 2 can be conveniently placed. The inner wall of each flange 103 is coplanar with the groove wall of the positioning groove 102, and the end faces of each flange 103 at both ends along its circumference are located on the same straight line.

[0035] The upper cover 3 is located at the other end of the base 1 along its axial direction, and a through groove 301 is provided at the center thereof. A tensioning pin is slidably arranged inside the through groove 301, and a guide groove 6 for installing the guide pin is provided on the side opposite to the base 1 and the upper cover 3. The guide pin in the guide groove 6 can provide a guide for the assembly of the upper cover 3 and the base 1, and an annular groove 302 for inserting the air uniforming sleeve is provided at one end of the upper cover 3 close to the base 1, that is, the air uniforming sleeve is partially located in the accommodating groove 101 and partially located in the annular groove 302.

[0036] The push piece 4 cooperates with the side of the upper cover 3 away from the base 1, and includes a push rod 401 and a push seat 402 fixed to the push rod 401. The push rod 401 is used to push the tensioning pin so that the tensioning pin is pressed into the air-distributing sleeve to push the positioning rod 201 away from the base 1, and at the same time fix the capillary in the air-distributing sleeve.

[0037] Working principle:

[0038] During operation, push the positioning rod 201 into the base 1, and fix the positioning rod 201 in the base 1 through the magnetic attraction of the magnet between the positioning seat 202 and the base 1, put an air-leveling sleeve in the base 1, and then fill the capillary into the air-leveling sleeve until it is completely filled, buckle the upper cover 3 on the base 1, and at the same time, put the tensioning pin into the through groove 301 of the upper cover 3, and then insert the push rod 401 into the through groove 301 in the middle of the upper cover 3, use the pressure device to push the push rod 401 to completely press the tensioning pin into the air-leveling sleeve, and through the interference fit between the tensioning pin and the capillary, the capillary is tightened and fixed in the air-leveling sleeve. At the same time, during the process of pressing the tensioning pin, the positioning rod 201 is pushed to separate from the base 1, and the filling is completed.

[0039] Based on the above ideal embodiments of the utility model, the relevant staff can make various changes and modifications without deviating from the technical concept of the utility model through the above description. The technical scope of the utility model is not limited to the content of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A gas uniforming sleeve assembly tool, characterized in that: include: A base (1), wherein the base (1) is provided with a receiving groove (101) for the gas uniforming sleeve to be placed therein; A positioning member (2) is located at one end of the base (1) along its axial direction and is magnetically attracted to the base (1), and comprises a positioning rod (201) for inserting into the receiving groove (101), and a capillary is filled between the gas-uniform sleeve and the positioning rod (201); The upper cover (3) is located at the other end of the base (1) along its axial direction, and a through slot (301) is provided at the center thereof, and a tensioning pin is provided inside the through slot (301); The push piece (4) cooperates with the side of the upper cover (3) away from the base (1), and includes a push rod (401). The push rod (401) is used to push the tensioning pin so that the tensioning pin is pressed into the gas-uniform sleeve to push the positioning rod (201) away from the base (1), and at the same time fix the capillary in the gas-uniform sleeve.

2. The gas uniforming sleeve assembly tool according to claim 1, characterized in that: The positioning member (2) further comprises a positioning seat (202) fixed to the positioning rod (201); a positioning groove (102) for the positioning seat (202) to be embedded is provided on a side of the base (1) close to the positioning seat (202).

3. The gas uniforming sleeve assembly tool according to claim 2 is characterized in that: A plurality of flanges (103) extend outwardly from one side of the base (1) close to the positioning seat (202), gaps are formed between adjacent flanges (103), and the inner wall of each flange (103) is coplanar with the groove wall of the positioning groove (102).

4. The gas uniforming sleeve assembly tool according to claim 3 is characterized in that: There are two flanges (103), and the two flanges (103) are symmetrically distributed, and the end surfaces of both ends of each flange (103) along the circumference are located on the same straight line.

5. The gas uniforming sleeve assembly tool according to claim 2, characterized in that: A mounting groove (5) for mounting a magnetic attraction member is provided on a side of the base (1) opposite to the positioning seat (202).

6. The gas uniforming sleeve assembly tool according to claim 3, characterized in that: A guide groove (6) for installing a guide pin is provided on a side of the base (1) opposite to the upper cover (3).

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