Wafer front surface film pasting track cutting knife structure
By designing a wafer film track cutting knife structure containing multiple motion and adjustment platforms, the problem of low manual cutting efficiency in the prior art is solved, and automatic cutting of wafer film is realized, and work efficiency and cutting quality are improved. .
Patent Information
- Application Number
- CN202421189856.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-29
- Publication Date
- 2025-02-11
- Estimated Expiration
- 2034-05-29
AI Technical Summary
In the prior art, the cutting method of film before thinning wafer grinding mainly relies on manual labor, which has problems such as time-consuming, labor-intensive and low efficiency, and lacks automatic equipment for cutting.
A wafer front film track cutting tool structure is designed, including a frame, lifting cylinder, rotating platform, electric screw slide platform, lower cutting platform and blade angle adjustment platform. Through the synergy of these components, wafer film is achieved. automatic cutting.
Automatic cutting of circular and diaphragm with transverse edges is achieved, which improves work efficiency and cutting quality and saves labor costs.
Smart Images
Figure CN222450608U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of wafer cutting equipment, in particular to a wafer front film pasting track cutting knife structure. Background Art
[0002] Wafer refers to the silicon chip used to make silicon semiconductor circuits. Its raw material is silicon. During the specific production, high-purity polysilicon is dissolved and doped with silicon crystal seeds, and then slowly pulled out to form a cylindrical single silicon crystal rod. After grinding, polishing, and slicing, the silicon crystal rod forms a silicon wafer, that is, a wafer. During the production of wafers, it is necessary to press-fit the photoresist film on the surface. The photoresist at the lower side of the photoresist film (the upper side is the release film) (the lowermost side also has a release protective film, which is torn off in advance) is a compound composed of soluble polymers and photosensitive materials. After the pressing is completed, in the subsequent production process and the photolithography process of the wafer, the photoresist on the surface of the wafer can be used to create circuit patterns. It can also be used in the subsequent electroplating process to form a barrier layer by electroplating metal wires, etc., which meets the needs of the subsequent processing procedures of the wafer. In actual production, wafer thinning and grinding are required after the photoresist film is pressed and bonded. Before wafer thinning and grinding, the film that is larger than the wafer needs to be cut to ensure that the subsequent wafer thinning and grinding work proceeds smoothly.
[0003] In the prior art, the cutting method used for wafer thinning and grinding is generally manual cutting, which has the disadvantages of being time-consuming and labor-intensive, and is correspondingly not conducive to improving work efficiency. In summary, it is particularly necessary to provide a device that can automatically realize wafer film cutting. Utility Model Content
[0004] In order to overcome the existing method of cutting the film before wafer thinning and grinding, due to the lack of suitable equipment, the manual cutting method has the disadvantages as described in the background. The utility model provides a wafer front film track cutting knife structure that can automatically control the blade's up and down directions, circumferential directions, front and back directions, etc. along the wafer film to be cut under the joint action of relevant mechanisms. It can not only cut circular film sheets, but also cut film sheets with cross-cut edges, thereby bringing convenience to the staff, saving labor costs, and correspondingly improving work efficiency and cutting quality.
[0005] The technical solution adopted by the utility model to solve its technical problems is:
[0006] A wafer front film laminating track cutting knife structure comprises a frame and a lifting cylinder, characterized in that it also has a rotating platform, an electric lead screw slide, a lower cutting platform, and a blade angle adjustment platform; the lifting cylinder is installed at the side end of the frame, the rotating platform comprises a connecting plate and a motor reduction mechanism, the motor reduction mechanism is vertically distributed and installed at one side end of the connecting plate, and the other side end of the connecting plate and the piston rod of the lifting cylinder are installed together; a connecting seat is welded and installed on one side of the upper end of the electric lead screw slide, and the lower power output shaft of the motor reduction mechanism and the upper end of the connecting seat are installed together; the blade angle adjustment platform comprises a limit seat, a linear guide, a tension spring, and a guide seat, at least two sets of linear guide shafts are respectively installed on both sides of the upper end of the limit seat, the upper end of the guide seat is installed at the lower ends of the sleeves of the two sets of linear guides, the rear side end of the guide seat is installed with a front spring fixing seat, the front end of the spring and the opening of the front spring fixing seat are installed together, the rear side end of the limit seat is installed with a rear spring fixing seat, and the rear end of the spring and the rear spring fixing seat are installed Together, the upper end of the limit seat is installed on the lower end of the sliding block of the electric lead screw slide; the front and rear ends of the guide seat are respectively provided with guide grooves and axial holes on both sides of the lower part; the lower cutting platform includes a lifting cylinder A, a blade, a blade protection cover, a motor reduction mechanism A, a transmission wheel, a transmission belt, a steering seat, a fixed plate, and a blade seat. The upper end of the steering seat is respectively provided with shaft rods on the left and right sides, and the front and rear ends of the two shaft rods are respectively rotatably installed in the guide groove and the axial hole of the guide seat; a bearing is rotatably installed at the lower middle part of the steering seat, there are at least two transmission wheels, a transmission rod is installed at the upper end of the blade seat, the upper end of the transmission rod is installed in the inner ring of the bearing, and the first transmission wheel is installed at the upper end of the transmission rod; the fixed plate is installed on the side end of the steering seat, the electric reduction mechanism A and the lifting cylinder A are respectively installed on the side ends of the fixed plate, the second transmission wheel is installed on the upper end of the power output shaft of the motor reduction mechanism A, the transmission belt is annularly sleeved on the outer ends of the two transmission wheels, the side end of the blade protection cover is installed on the side end of the sliding block of the lifting gas, and the upper end of the blade is installed on the lower end of the blade seat.
[0007] Furthermore, the lower part of the side end of the blade protection cover has an opening, and the lower end of the blade is located outside the lower end of the opening.
[0008] Furthermore, the lower edge of the blade is an inclined structure.
[0009] Furthermore, a screw hole is provided at the front part of the shaft rod on one side of the upper end of the steering seat, and an adjusting bolt is screwed into the screw hole.
[0010] Furthermore, the guide groove is arc-shaped, and the inner lateral width of the guide groove is greater than the outer diameter of the adjusting bolt.
[0011] The beneficial effects of the utility model are as follows: in the application of the utility model, the wafer to be cut is set at the lower end of the blade, and the staff can drive the blade to rotate 360 degrees for film cutting by controlling the steering direction of the power output shaft of the motor reduction mechanism, and can drive the blade to move horizontally left and right for film cutting by controlling the electric lead screw slide, and can adjust the front and rear displacement of the blade by the blade angle adjustment platform, and ensure that the blade can be closely attached to the outer side of the wafer for film cutting, and can adjust the angle of the blade by adjusting the left or right angle of the steering seat; through the above, the utility model can not only cut circular film sheets, but also cut circular film sheets with cross-cut edges, etc., thereby bringing convenience to the staff, saving labor costs, and correspondingly improving work efficiency and cutting quality. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0013] Figure 1 , 2 It is a schematic diagram of the overall structure and the partially enlarged structure of the utility model.
[0014] Figure 3 It is a schematic diagram of the cut wafer film structure. DETAILED DESCRIPTION
[0015] Figure 1 , 2As shown in , 3, a wafer front film laminating track cutting knife structure includes a frame (not shown in the figure), a lifting cylinder (not shown in the figure, existing mature technology, this application does not repeat the principle), and also has a rotating platform, an electric screw slide 2, a lower cutting platform, and a blade angle adjustment platform; the lifting cylinder is vertically installed on the left end of the frame, and the rotating platform includes a connecting plate 101 and a motor reduction mechanism 102 (a finished product of a motor gear reducer, existing mature technology, this application does not repeat the principle), the motor reduction mechanism 102 is vertically distributed and installed on the left end of the connecting plate 101 by bolts, and the right end of the connecting plate 101 and the lower end of the piston rod of the lifting cylinder are bolted. The upper left side of the electric lead screw slide 2 is welded with a connecting seat 21, and the lower end of the power output shaft of the motor reduction mechanism 102 is vertically welded to the middle part of the upper end of the connecting seat 21; the blade angle adjustment platform includes a "Π"-shaped limit seat 31, a linear guide 32, a tension spring 33, and a "Π"-shaped guide seat 34. The shafts 321 of the two sets of linear guides are longitudinally distributed and respectively installed on both sides of the upper end of the limit seat 31 by bolts. The upper end of the guide seat 34 is longitudinally distributed and welded to the outer side of the lower end of the sleeve 322 between the two sets of linear guides. A front spring fixing seat 341 with an opening is welded in the middle of the rear side end of the guide seat 34. The front end and The openings of the front spring fixing seat 341 are installed together, a rear spring fixing seat 311 with an opening is provided in the middle of the rear side end of the limit seat 31, the rear end of the spring 33 and the opening of the rear spring fixing seat 311 are installed together, and the outer side of the upper end of the limit seat 31 and the lower end of the sliding block of the electric lead screw slide are welded together; the guide seat 34 has a guide groove 341 and an axis hole 342 on the left and right sides of the middle of the lower front and rear ends; the lower cutting platform includes a lifting cylinder A41 (existing mature technology, the principle is not repeated in this application), a blade 42, a blade protection cover 43, and a motor reduction mechanism A44 (existing mature technology, the principle is not repeated in this application) , a transmission wheel 45, a transmission belt (not shown), a "U"-shaped steering seat 46, a fixing plate 47, and a blade seat 48. The upper end of the steering seat 46 is distributed on the left and right sides and the front and rear sides are respectively welded with a shaft rod 461 transversely. The front and rear ends of the two shaft rods 461 are respectively rotatably mounted in the arc-shaped guide grooves 341 and the shaft holes 342 on the left and right sides of the middle of the lower part of the front and rear ends of the guide seat 34; a bearing 49 is rotatably mounted on the lower middle part of the steering seat 46, there are two transmission wheels 45, and a transmission rod 482 is vertically welded on the middle part of the upper end of the blade seat. The upper end of the transmission rod 482 is tightly sleeved in the inner ring of the bearing 49, and the first transmission wheel 45 is welded to the upper end of the transmission rod 482;The right end of the fixed plate 47 is welded to the left end of the steering seat 46, the electric reduction mechanism A44 and the lifting cylinder A41 are respectively installed at the left rear end and front end of the "L"-shaped fixed plate 47 by bolts, the second transmission wheel 45 is welded to the upper end of the power output shaft of the motor reduction mechanism A44, the left and right ends of the transmission belt (not shown) are tightly sleeved on the outer ends of the two transmission wheels 44, the front side end of the blade protection cover 43 is welded inside the front side end of the sliding block of the lifting cylinder A41, and the upper end of the blade 42 is installed in the middle of the lower end of the blade seat. ;
[0016] Figure 1 , 2 As shown in Figures 3 and 4, there is a rectangular opening 431 at the lower right end of the blade guard, and the lower end of the blade 42 is located outside the lower end of the opening 431. The lower edge of the blade 42 is an inclined structure. There is a screw hole at the front of the shaft rod on the left side of the upper end of the steering seat 46, and an adjusting bolt 462 is screwed into the screw hole. After the adjusting bolt 462 is screwed into the rear stop point in the screw hole of the shaft rod, the front limit washer of the adjusting bolt 462 is in tight and fixed contact with the front side of the guide groove 341 (the guide seat is inactive, and when it is loosened, the guide seat rotates). The guide groove 341 is arc-shaped, and the inner lateral width of the guide groove 341 is greater than the outer diameter of the adjusting bolt 462.
[0017] Figure 1 , 2As shown in , 3, in the present novel application, the wafer 5 to be cut is set on the cutting table (with a groove at the upper end, the wafer is located in the groove, and the film is located outside the groove 6) at the lower end of the blade 42. The staff can control the blade 42 to be located at different heights of the side end of the wafer cutting position by controlling the height of the lifting cylinder; the blade 42 can be controlled to be located at different positions on the left or right side of the cutting position of the wafer 5 by controlling the left or right position of the sliding block of the electric lead screw slide 2; the motor reducer mechanism 101 can drive the blade 42 to rotate clockwise or counterclockwise to the side end of the wafer cutting position by controlling the direction of the power output shaft of the motor reducer mechanism 102; loosen the bolt 46 2, the pitch angle and height of the blade 42 can be adjusted along the arc-shaped guide groove 341 and located at the side end of the wafer cutting position (adjust to the right position and tighten the bolt, the blade is in a locked state); by adjusting the height of the blade protection cover 43 at the side end of the power output shaft sliding block of the lifting cylinder A (mature technology, this application does not elaborate on the working principle, the side end power output shaft of the lifting cylinder A is located at the side end and can move up and down), the blade 42 can be protected or the cutting work can be facilitated (when the blade protection cover 43 is located at the lower side of the blade, it can prevent other foreign objects from colliding and damaging the blade 42; when the blade protection cover 43 is located at the upper side of the blade, the blade 42 can facilitate cutting of wafer film). After the blade contacts the side end of the wafer film up or down, left or right, in the circumferential direction, or at a pitch angle, due to the backward pulling force of the spring 33, the guide seat moves toward the rear side end along the linear slide rail 32, so that the rear side end of the blade edge will move toward the rear side end along the wafer film 5 and close to the outer side end of the wafer, laying the foundation for the subsequent complete redundant film cutting. The motor reduction mechanism A44 drives the blade 42 to rotate to the corresponding angle through the transmission wheel and the transmission belt, so that the blade edge can effectively cut the film on the side end of the wafer (the motor reduction mechanism 102 drives the blade to rotate and cut along the wafer film). In this application, if only the electric lead screw slide is controlled to move left or right, and the motor reduction mechanism is not controlled to work, the wafer 5 film can also be cut in the horizontal direction. Through the above, the new type can not only cut circular film sheets, but also cut circular film sheets with cross-cut edges, thereby bringing convenience to the staff, saving labor costs, and correspondingly improving work efficiency and cutting quality.
[0018] The above shows and describes the basic principles and main features of the utility model and the advantages of the utility model. For those skilled in the art, it is obvious that the utility model is limited to the details of the above exemplary embodiments, and the utility model can be implemented in other specific forms without departing from the spirit or basic features of the utility model. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is defined by the attached claims rather than the above description, and it is intended that all changes that fall within the meaning and scope of the equivalent elements of the claims are included in the utility model.
[0019] In addition, it should be understood that although the present specification is described according to the implementation mode, the implementation mode does not only include an independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in the embodiments can also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.
Claims
1. A wafer front film laminating track cutting knife structure, comprising a frame and a lifting cylinder, characterized in that: It also has a rotating platform, an electric lead screw slide, a lower cutting platform, and a blade angle adjustment platform; the lifting cylinder is installed at the side end of the frame, the rotating platform includes a connecting plate and a motor reduction mechanism, the motor reduction mechanism is vertically distributed and installed on one side end of the connecting plate, and the other side end of the connecting plate is installed together with the piston rod of the lifting cylinder; a connecting seat is welded and installed on one side of the upper end of the electric lead screw slide, and the lower end of the power output shaft of the motor reduction mechanism and the upper end of the connecting seat are installed together; the blade angle adjustment platform includes a limit seat, a linear guide, a tension spring, and a guide seat, and the shafts of at least two sets of linear guides are respectively installed on both sides of the upper end of the limit seat, the upper end of the guide seat is installed on the lower ends of the sleeves of the two sets of linear guides, and the rear end of the guide seat is installed with a front spring fixing seat, the front end of the spring and the opening of the front spring fixing seat are installed together, the rear end of the limit seat is installed with a rear spring fixing seat, the rear end of the spring and the rear spring fixing seat are installed together, and the upper end of the limit seat is installed on the electric lead screw The lower end of the sliding block of the slide; the front and rear ends of the guide seat are respectively provided with guide grooves and axial holes on both sides of the lower part; the lower cutting platform includes a lifting cylinder A, a blade, a blade protection cover, a motor reduction mechanism A, a transmission wheel, a transmission belt, a steering seat, a fixed plate, and a blade seat. The upper end of the steering seat is respectively provided with shaft rods on the left and right sides, and the front and rear ends of the two shaft rods are respectively rotatably installed in the guide groove and the axial hole of the guide seat; a bearing is rotatably installed at the lower middle part of the steering seat, there are at least two transmission wheels, a transmission rod is installed at the upper end of the blade seat, the upper end of the transmission rod is installed in the inner ring of the bearing, and the first transmission wheel is installed at the upper end of the transmission rod; the fixed plate is installed at the side end of the steering seat, the electric reduction mechanism A and the lifting cylinder A are respectively installed at the side ends of the fixed plate, the second transmission wheel is installed at the upper end of the power output shaft of the motor reduction mechanism A, the transmission belt is annularly sleeved on the outer ends of the two transmission wheels, the side end of the blade protection cover is installed at the side end of the sliding block of the lifting air, and the upper end of the blade is installed at the lower end of the blade seat.
2. The wafer front film laminating track cutting knife structure according to claim 1, characterized in that: The lower part of the side end of the blade protection cover is provided with an opening, and the lower end of the blade is located outside the lower end of the opening.
3. The wafer front film laminating track cutting knife structure according to claim 1, characterized in that: The lower edge of the blade is an inclined structure.
4. The wafer front film laminating track cutting knife structure according to claim 1, characterized in that: A screw hole is arranged at the front part of the shaft rod on one side of the upper end of the steering seat, and an adjusting bolt is screwed into the screw hole.
5. The wafer front film laminating track cutting knife structure according to claim 1, characterized in that: The guide groove is arc-shaped, and the inner lateral width of the guide groove is greater than the outer diameter of the adjusting bolt.