Vacuum cavity winding lifting device for silicon core furnace

Abstract

The utility model relates to a vacuum cavity winding lifting device for a silicon core furnace, which is mounted above an auxiliary chamber of the silicon core furnace and comprises a servo motor and a winding wheel, the output end of the servo motor is connected with a spline shaft through a coupler, the winding wheel is mounted on the spline shaft, and a flexible cable is wound on the winding wheel in a single-layer manner. A reel magnetofluid is further installed on the spline shaft between the reel and the coupler, the reel magnetofluid is fixed to a reel cover plate, the reel cover plate is fixed to the side wall of the silicon core furnace auxiliary chamber, and a motor installation plate is arranged on the outer side of the reel magnetofluid on the outer side of the reel cover plate in a covering mode. A limiting block is arranged on the spline shaft on the side, close to the reel, of the reel magnetofluid, a sliding electric ring is arranged on the spline shaft on the inner side of the outer end of the reel, and glands are arranged at the sliding electric ring and the outer end of the reel. The winding mechanism has the advantages that the single-layer winding structure design is adopted, the groove jumping phenomenon possibly occurring to the flexible cable in the rotating process of the winding mechanism can be effectively avoided, accurate control over the servo motor is facilitated, faults are reduced, and the production stability is improved.

Description

Technical Field

[0001] The utility model relates to a silicon core furnace vacuum cavity lifting device, in particular to a silicon core furnace vacuum cavity winding lifting device, belonging to the technical field of silicon core furnaces. Background Art

[0002] Polysilicon is the main raw material that is indispensable for monocrystalline silicon production enterprises, and silicon core is the carrier for growing silicon core in the process of polysilicon production. Silicon core furnace is an important equipment that can produce multiple silicon cores. Silicon core furnace includes a vacuum chamber, a lifting plate assembly that can rotate in the vacuum chamber, a lifting mechanism above the vacuum chamber that controls the lifting of the lifting plate assembly, and a winding mechanism used in conjunction with the motor of the lifting plate assembly.

[0003] The winding mechanism is used to wind the flexible cable connected to the lifting tungsten wire rope. It is an important structure to drive the lifting and lowering of the lifting plate assembly. The flexible cable may jump during the rotation of the winding mechanism in the existing technology, and generally multi-layer winding is adopted. The precise control of the servo motor is very difficult and prone to failure, affecting production stability. Utility Model Content

[0004] The utility model provides a vacuum chamber winding lifting device for a silicon core furnace, which aims to overcome the above-mentioned deficiencies in the prior art, avoid the flexible cable jumping phenomenon, facilitate precise control of the servo motor, and reduce the occurrence of faults.

[0005] The technical solution of the utility model is: a vacuum chamber winding lifting device for silicon core furnace, installed above the silicon core furnace sub-chamber, including a servo motor and a winding wheel, the output end of the servo motor is connected to the spline shaft through a coupling, a winding wheel is installed on the spline shaft, a single layer of flexible cable is wound on the winding wheel, and a winding wheel magnetic fluid is also installed on the spline shaft between the winding wheel and the coupling, the winding wheel magnetic fluid is fixed on the winding wheel cover plate, the winding wheel cover plate is fixed on the side wall of the silicon core furnace sub-chamber, the outer cover of the winding wheel magnetic fluid outside the winding wheel cover plate is provided with a motor mounting plate, a limit block is installed on the spline shaft on the side of the winding wheel magnetic fluid close to the winding wheel, a slip electric ring is installed on the spline shaft on the inner side of the outer end of the winding wheel, and a pressure cover is provided on the slip electric ring and the outer end of the winding wheel. When working, the servo motor drives the winding wheel to rotate through the spline shaft, and the winding wheel can move back and forth on the spline shaft. The winding wheel magnetic fluid is used for the rotary sealing function in the vacuum chamber. The wire of the motor on the lifting disk is wound on the winding wheel, and the wound wire passes through the outer ring of the slip ring, while the wire output from the inner ring of the slip ring itself is connected to the motor end.

[0006] Preferably, an inverted L-shaped main mounting plate is fixed to the inner wall of the silicon core furnace auxiliary chamber, and the lower end of the upper part of the main mounting plate is connected to a guide wheel mounting plate, and a guide wheel assembly and an eccentric wheel are mounted on the guide wheel mounting plate. The guide wheel assembly is used to guide the winding wheel to move forward and backward.

[0007] Preferably, a wire pressing wheel assembly is installed at the lower end of the main mounting plate, and the wire pressing wheel assembly is close to the side of the winding wheel, so as to avoid the motor wire from jumping during the rotation process.

[0008] The advantages of the utility model are as follows: the structural design is reasonable, and the single-layer winding structure design is adopted, which can effectively avoid the possible slot jumping phenomenon of the flexible cable during the rotation of the winding mechanism, facilitate the precise control of the servo motor, reduce failures, and improve production stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 The utility model is a schematic cross-sectional structure diagram of a vacuum cavity winding lifting device for a silicon core furnace.

[0010] Figure 2 The utility model is a three-dimensional structural schematic diagram of a vacuum cavity winding lifting device for a silicon core furnace.

[0011] Figure 3 The utility model is a schematic diagram of the installation state of the vacuum chamber winding lifting device for the silicon core furnace.

[0012] In the figure, 1 is the servo motor, 2 is the coupling, 3 is the motor mounting plate, 4 is the winding wheel magnetic fluid, 5 is the winding wheel cover plate, 6 is the spline shaft, 7 is the winding wheel, 8 is the sliding electric ring, 9 is the pressure cover, 10 is the guide wheel assembly, 11 is the pressure wheel assembly, 12 is the guide wheel mounting plate, 13 is the eccentric wheel, 14 is the main mounting plate, 15 is the limit block, and A is the winding lifting device body. DETAILED DESCRIPTION

[0013] The present invention is further described in detail below in conjunction with embodiments and specific implementation methods.

[0014] like Figure 1 , 2 As shown, a vacuum chamber winding lifting device for a silicon core furnace is installed above the silicon core furnace sub-chamber, including a servo motor 1 and a winding wheel 7. The output end of the servo motor 1 is connected to the spline shaft 6 through a coupling 2. The spline shaft 6 is provided with a winding wheel 7. A single-layer flexible cable is wound on the winding wheel 7. The spline shaft 6 between the winding wheel 7 and the coupling 2 is also provided with a winding wheel magnetic fluid 4. The winding wheel magnetic fluid 4 is fixed on a winding wheel cover plate 5. The winding wheel cover plate 5 is fixed on the side wall of the silicon core furnace sub-chamber. A motor mounting plate 3 is provided on the outer side cover of the winding wheel magnetic fluid 4 outside the winding wheel cover plate 5. A limit block 15 is provided on the spline shaft 6 on the side of the winding wheel magnetic fluid 4 close to the winding wheel 7. A slipping electric ring 8 is provided on the spline shaft 6 on the inner side of the outer end of the winding wheel 7. A pressure cover 9 is provided on the slipping electric ring 8 and the outer end of the winding wheel 7.

[0015] A guide wire pressing mechanism is also provided next to the winding wheel 7, which includes an inverted L-shaped main mounting plate 14 fixed to the inner wall of the silicon core furnace sub-chamber, a wire pressing wheel assembly 11 is installed at the lower end of the main mounting plate 14, and the wire pressing wheel assembly 11 is close to the side of the winding wheel 7. The lower end of the upper part of the main mounting plate 14 is connected to a guide wheel mounting plate 12, and the guide wheel mounting plate 12 is equipped with a guide wheel assembly 10 and an eccentric wheel 13.

[0016] According to the above structure, when working, the servo motor 1 drives the winding wheel 7 to rotate through the spline shaft 6, and the winding wheel 7 can move back and forth on the spline shaft 6. The winding wheel magnetic fluid 4 is used for the rotary sealing function in the vacuum chamber. The wire of the motor on the lifting disk is wound on the winding wheel 7, and the winding wheel 7 is guided by the guide wheel assembly 10 to move back and forth. In order to avoid the phenomenon of the motor wire jumping during the rotation process, a wire pressing wheel assembly 11 is installed on the side of the winding wheel 7. Finally, the wound wire passes through the outer ring of the slip ring 8, and the inner ring of the slip ring 8 itself is connected to the motor end.

[0017] like Figure 3 As shown, the flexible cable configured by the motor is wound in a single layer on the winding wheel 7, which plays an important role in realizing the rising and falling of the entire lifting plate. The single-layer winding rotation can ensure the precise control of the servo motor on the winding device. The servo motor on the lifting plate lifting mechanism above can realize the precise control of the rising and falling of the entire lifting plate. The lifting plate and the lifting plate motor should rise and fall synchronously, that is, the two motors of the winding device and the lifting plate lifting device should be synchronized, thereby realizing the integrity of the control.

[0018] All the components mentioned above are prior art, and those skilled in the art can use any model and existing design that can achieve their corresponding functions.

[0019] The above is only a preferred embodiment of the present invention. It should be pointed out that a person skilled in the art can make several modifications and improvements without departing from the inventive concept of the present invention, and these modifications and improvements all fall within the protection scope of the present invention.

Claims

1. A vacuum chamber winding lifting device for a silicon core furnace, characterized in that: The invention is installed above the silicon core furnace auxiliary chamber, and comprises a servo motor (1) and a winding wheel (7). The output end of the servo motor (1) is connected to a spline shaft (6) through a coupling (2). The spline shaft (6) is provided with a winding wheel (7). A single layer of flexible cable is wound on the winding wheel (7). A winding wheel magnetic fluid (4) is also provided on the spline shaft (6) between the winding wheel (7) and the coupling (2). The winding wheel magnetic fluid (4) is fixed on the winding wheel cover plate (5). ), a winding wheel cover plate (5) is fixed on the side wall of the silicon core furnace auxiliary chamber, an outer cover of the winding wheel magnetic fluid (4) outside the winding wheel cover plate (5) is provided with a motor mounting plate (3), a spline shaft (6) on the side of the winding wheel magnetic fluid (4) close to the winding wheel (7) is provided with a limit block (15), a spline shaft (6) on the inner side of the outer end of the winding wheel (7) is provided with a sliding electric ring (8), and a pressure cover (9) is provided on the outer end of the sliding electric ring (8) and the winding wheel (7).

2. The vacuum chamber winding lifting device for silicon core furnace according to claim 1, characterized in that: An inverted L-shaped main mounting plate (14) is fixed to the inner wall of the silicon core furnace auxiliary chamber, the lower end of the upper part of the main mounting plate (14) is connected to the guide wheel mounting plate (12), and the guide wheel mounting plate (12) is equipped with a guide wheel assembly (10) and an eccentric wheel (13).

3. The vacuum chamber winding lifting device for silicon core furnace according to claim 2, characterized in that: A wire pressing wheel assembly (11) is installed at the lower end of the main mounting plate (14), and the wire pressing wheel assembly (11) is close to the side of the winding wheel (7).

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