Vacuum equipment cavity and PVD (Physical Vapor Deposition) equipment

Abstract

The utility model provides a vacuum equipment cavity and PVD (Physical Vapor Deposition) equipment. The vacuum equipment cavity comprises a cavity cover, a cavity body, a first hinge arm, a second hinge arm and a first pin joint piece, wherein the first hinge arm and the second hinge arm are connected with the cavity cover and the cavity body respectively; the first pin joint piece is used for mutually hinging the first hinge arm and the second hinge arm; the first hinge arm and the second hinge arm are respectively provided with a first through hole and a second through hole corresponding to the first pin joint piece, one of the first through hole and the second through hole is a round hole, the other one of the first through hole and the second through hole is a long round hole, and the part, larger than the round hole, of the long round hole is a rectangle in the middle of the long round hole. According to the utility model, the cavity cover can be horizontally settled in the vertical direction, and the sealing degree between the cavity body and the cavity cover of the flip type vacuum equipment cavity can be effectively improved.

Description

Technical Field

[0001] The utility model relates to the field of solar cell manufacturing, in particular to a vacuum equipment cavity and a PVD equipment. Background Art

[0002] Thin-film / crystalline silicon heterojunction solar cells (hereinafter referred to as heterojunction solar cells, also known as HIT or SHJ solar cells) belong to the third generation of high-efficiency solar cell technology. It combines the advantages of first-generation crystalline silicon and second-generation silicon thin film, and has the characteristics of high conversion efficiency and low temperature coefficient. In particular, the conversion efficiency of double-sided heterojunction solar cells can reach more than 26%, and has broad market prospects.

[0003] In the manufacture of heterojunction solar cells, a physical vapor deposition (PVD) process is required to be performed using a physical vapor deposition (PVD) device to deposit a transparent conductive film (TCO) on the P-type amorphous silicon and N-type amorphous silicon formed by the PECVD process.

[0004] In order to facilitate maintenance and save space, other vacuum equipment chambers of PVD equipment except process chamber, such as feed chamber, feed side buffer chamber, discharge side transmission transition chamber, discharge side buffer chamber and discharge chamber, can adopt flip cover design. Figures 1 to 3 , which are schematic diagrams of the composition structures of other vacuum equipment chambers other than the process chamber of the PVD equipment in the prior art in the open state and the closed state. Figures 1 to 3 As shown, the vacuum equipment chamber of the prior art includes a chamber cover 1, a chamber body 2, a sealing ring 3, a cylinder 4, a driving arm 5, a first articulated arm 6, a second articulated arm 7, a first pin joint 8 and a second pin joint 9. The first articulated arm 6 and the second articulated arm 7 are respectively connected to the chamber cover 1 and the chamber body 2. The first pin joint 8 articulates the first articulated arm 6 and the second articulated arm 7 to each other.

[0005] See also Figure 4 , which shows the exploded structure between the first articulated arm 6, the second articulated arm 7 and the first pin joint 8. Figure 4 As shown, the first hinged arm 6 and the second hinged arm 7 are provided with a first through hole 60 and a second through hole 70 corresponding to the first pin shaft 80 of the first pin connector 8 , respectively. Both the first through hole 60 and the second through hole 70 are round holes matching the first pin connector 8 .

[0006] When the vacuum equipment chamber is opened, the air cylinder 4 drives the second driving arm 5 connected thereto through the second pin joint 9 to move out of the chamber to open the chamber cover 1. The air cylinder 4 drives the second driving arm 5 to make the chamber cover 1 cover the chamber body 2. When the sealed chamber is evacuated, the sealing ring 3 will be compressed. To ensure the sealing, the chamber cover 1 needs to be able to move up and down in the vertical direction in a horizontal state. Since the first through hole 60 and the second through hole 70 are circular, the first hinged arm 6, the second hinged arm 7, and the first pin joint 8 constrain the chamber cover 1 in the vertical direction, and the chamber cover 1 cannot sink horizontally, so the sealing cannot be ensured.

[0007] Therefore, how to provide a vacuum equipment chamber and a PVD equipment so that the chamber cover can sink horizontally in the vertical direction and effectively improve the sealing between the chamber body and the chamber cover of the flip-top vacuum equipment chamber has become a technical problem that needs to be solved urgently in the industry. Utility Model Content

[0008] In view of the above-mentioned problems in the prior art, the utility model proposes a vacuum equipment chamber, which includes a chamber cover, a chamber body, a first hinged arm and a second hinged arm respectively connected to the chamber cover and the chamber body, and a first pin connection member for hingedly connecting the first hinged arm and the second hinged arm to each other, and a first through hole and a second through hole are respectively opened on the first hinged arm and the second hinged arm corresponding to the first pin connection member, one of the first through hole and the second through hole is a circular hole, and the other of the first through hole and the second through hole is an oblong hole, and the part of the oblong hole that is larger than the circular hole is a rectangle in the middle.

[0009] In one embodiment, the length of one side of the rectangle is equal to the diameter of the circular hole, and the length of the other side is in the range of 3mm-5mm. The diameter of the circular hole is in the range of 30mm-90mm.

[0010] In one embodiment, the vacuum equipment chamber includes a feed chamber, a feed side buffer chamber, a discharge side transmission transition chamber, a discharge side buffer chamber and a discharge chamber of a physical vapor chemical deposition device.

[0011] In one embodiment, the vacuum equipment chamber includes a cylinder and a driving arm arranged at the bottom of the chamber, one end of the driving arm is hinged to the cylinder rod through a second pin connection, and the other end is fixed to the chamber cover.

[0012] In one embodiment, a sealing member is further provided between the cavity cover and the cavity body.

[0013] In one embodiment, when the vacuum equipment chamber is in a vacuum state, the first pin connection piece is 1 mm-2 mm away from the bottom of the oblong hole.

[0014] In one embodiment, when the chamber cover of the vacuum equipment chamber is in an open state, the first pin connection member is located at the bottom of the oblong hole.

[0015] In one embodiment, the first pin connection member includes a first pin shaft passing through the first through hole and the second through hole, and a pin shaft stopper used to be combined with the end of the first pin shaft.

[0016] The utility model also provides a PVD device, which comprises a plurality of vacuum device chambers connected in series, wherein the vacuum device chamber is the vacuum device chamber as described in any one of the above items.

[0017] Compared with the prior art in which the two through holes corresponding to the first pin connection on the first hinged arm and the second hinged arm connecting the cavity body and the cavity cover of the vacuum equipment cavity are both circular, so that the cavity cover cannot sink horizontally and cannot achieve better sealing, the vacuum equipment cavity of the utility model includes a cavity cover, a cavity, a first hinged arm and a second hinged arm respectively connected to the cavity cover and the cavity, and a first pin connection for hingedly connecting the first hinged arm and the second hinged arm to each other, and a first through hole and a second through hole are respectively opened on the first hinged arm and the second hinged arm corresponding to the first pin connection, one of the first through hole and the second through hole is a circular hole, and it is characterized in that the other of the first through hole and the second through hole is an oblong hole, and the part of the oblong hole that is larger than the circular hole is a rectangle in the middle.

[0018] The utility model enables the cavity cover to sink horizontally in the vertical direction, and can effectively improve the sealing degree between the cavity body and the cavity cover of the flip-cover type vacuum equipment cavity. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The above features and advantages of the present invention can be better understood after reading the detailed description of the embodiments of the present disclosure in conjunction with the following drawings. In the drawings, the components are not necessarily drawn to scale, and components with similar related properties or features may have the same or similar reference numerals.

[0020] Figure 1 It is a schematic diagram of the side view structure of the vacuum equipment chamber in the prior art when it is in an open state.

[0021] Figure 2 It is a schematic diagram of an oblique front view of the structure of a vacuum equipment chamber in the prior art when it is in an open state.

[0022] Figure 3 It is a schematic diagram of the side view structure of the vacuum equipment chamber in the prior art when it is in a closed state.

[0023] Figure 4 for Figure 1 Schematic diagram of the exploded structure of the first articulated arm 6, the second articulated arm 7 and the first pin connection member 8.

[0024] Figure 5 It is a side view structural schematic diagram of the vacuum equipment chamber of the utility model when it is in an open state.

[0025] Figure 6 It is a side view structural schematic diagram of the vacuum equipment chamber of the utility model when it is in a closed state and not vacuumed.

[0026] Figure 7 It is a side view structural schematic diagram of the vacuum equipment chamber of the utility model in a closed state and after vacuuming.

[0027] Figure 8 for Figure 5 Schematic diagram of the exploded structure of the first articulated arm 6, the second articulated arm 7" and the first pin connection member 8. DETAILED DESCRIPTION

[0028] The present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments, so as to more clearly understand the purpose, characteristics and advantages of the present invention. It should be understood that the various aspects described below in conjunction with the accompanying drawings and specific embodiments are merely exemplary and should not be construed as limiting the scope of protection of the present invention in any way. Unless the context clearly indicates otherwise, the singular forms "one" and "the" include plural referents. The words "first", "second" and similar terms used in this specification and the claims do not indicate any order, quantity or importance, but are only used to distinguish different components.

[0029] The utility model proposes a vacuum equipment chamber, which includes a chamber cover, a chamber body, a first hinged arm and a second hinged arm respectively connected to the chamber cover and the chamber body, and a first pin joint for hingedly connecting the first hinged arm and the second hinged arm to each other, the first hinged arm and the second hinged arm are respectively provided with a first through hole and a second through hole corresponding to the first pin joint, one of the first through hole and the second through hole is a circular hole, the other of the first through hole and the second through hole is an oblong hole, and the part of the oblong hole larger than the circular hole is a rectangle in the middle thereof. The vacuum equipment chamber includes a feed chamber, a feed side buffer chamber, a discharge side transmission transition chamber, a discharge side buffer chamber and a discharge chamber of a physical vapor chemical deposition device. The length of one side of the rectangle is equal to the diameter of the circular hole, the length of the other side is in the range of 3mm-5mm, and the diameter of the circular hole is in the range of 30mm-90mm. The vacuum equipment chamber includes a cylinder and a driving arm arranged at the bottom of the chamber body, one end of the driving arm is hinged on the cylinder rod through the second pin joint, and the other end is fixed on the chamber cover. A sealing member is also provided between the chamber cover and the chamber body. When the vacuum equipment chamber is in a vacuum state, the first pin connector is located above the bottom of the oblong hole. When the chamber cover of the vacuum equipment chamber is in an open state, the first pin connector is located at the bottom of the oblong hole. The first pin connector includes a first pin shaft passing through the first through hole and the second through hole and a pin shaft baffle for combining with the end of the first pin shaft.

[0030] See also Figures 5 to 7 , Figure 5 This is a side view of the structure of the vacuum equipment chamber of the utility model when it is in an open state. Figure 6 and Figure 7 The schematic diagrams are respectively the side view of the vacuum equipment chamber of the utility model in the closed state, before vacuuming and after vacuuming. Figures 5 to 7 As shown, the vacuum equipment chamber in the embodiment of the utility model includes a chamber cover 1, a chamber body 2, a sealing ring 3, a cylinder 4, a driving arm 5, a first articulated arm 6, a second articulated arm 7", a first pin joint 8, and a second pin joint 9. The first articulated arm 6 and the second articulated arm 7" are respectively connected to the chamber cover 1 and the chamber body 2. The first pin joint 8 articulates the first articulated arm 6 and the second articulated arm 7" to each other, and the second pin joint 9 articulates the cylinder 4 and the driving arm 5.

[0031] The vacuum equipment chamber includes a feed chamber, a feed side buffer chamber, a discharge side transmission transition chamber, a discharge side buffer chamber, and a discharge chamber of a physical vapor chemical deposition (PVD) equipment.

[0032] See also Figure 8 , combined with reference to Figures 5 to 7 , Figure 8 for Figure 5 The first articulated arm 6, the second articulated arm 7" and the first pin connection member 8 are shown in FIG. Figure 8 As shown, the first pin connection member 8 includes a first pin shaft 80 and a pin shaft baffle 82. The first pin shaft 80 is used to pass through the first through hole 60 and the second through hole 70", and the pin shaft baffle 82 is used to combine with the end of the first pin shaft 80 and limit the axial displacement of the first pin shaft 80. The first through hole 60 and the second through hole 70" are respectively provided on the first hinged arm 6 and the second hinged arm 7" corresponding to the first pin connection member 8. One of the first through hole 60 and the second through hole 70" is a circular hole, and the other is an oblong hole. The part of the oblong hole that is larger than the circular hole is a rectangle in the middle. The length of one side of the rectangle is equal to the diameter of the circular hole, and the length of the other side ranges from 3mm to 5mm. The diameter of the circular hole ranges from 30mm to 90mm. Figure 8 In the illustrated embodiment, the first through hole 60 is a circular hole, and the second through hole 70 ″ is an oblong hole. In other embodiments, the first through hole 60 is an oblong hole, and the second through hole 70 ″ is a circular hole.

[0033] Continue to see Figure 5The vacuum equipment chamber also includes a cylinder 4 and a driving arm 5 arranged at the bottom of the chamber. One end of the driving arm 5 is hinged to the output rod of the cylinder 4 through a second pin joint 9, and the other end is fixed to the chamber cover 1. The vacuum equipment chamber also includes an inlet 20 and an outlet (not shown) arranged on two opposite side walls. A gate valve may be added to the inlet and outlet according to actual conditions or not. A sealing member 3 is also arranged between the chamber cover 1 and the chamber. When the vacuum equipment chamber is opened, the cylinder 4 drives the second driving arm 5 connected to it through the second pin joint 9 to move out of the chamber to open the chamber cover 1.

[0034] When the vacuum equipment chamber needs to be opened, the air cylinder 4 drives the second driving arm 5 connected to it through the second pin connector 9 to move out of the chamber until the chamber cover 1 is opened. Figure 5 As shown, when the chamber cover 1 of the vacuum equipment chamber is in an open state, the first pin connection member 8 is located at the bottom of the oblong hole 70".

[0035] When the vacuum equipment chamber needs to be closed, the cylinder 4 drives the second driving arm 5 to make the chamber cover 1 cover the chamber body 2. Figure 6 As shown, when the vacuum equipment chamber is in a closed state and not evacuated, the sealing ring 3 is arranged between the chamber cover 1 and the chamber body 2. Due to the gravity of the chamber cover 1 itself, the sealing ring 3 is slightly squeezed, and the first pin connector 8 is approximately located in the middle of the oblong hole 70".

[0036] like Figure 7 As shown, after the vacuum equipment chamber is in a closed state and evacuated, the first pin connector 8 is Figure 6 The approximately middle part of the oblong hole 70" sinks to a position 1mm-2mm away from its bottom, and the 1mm-2mm is approximately 1mm. Because the oblong hole 70" provides a space for the cavity cover 1 to move up and down in the vertical direction in a horizontal state, the sealing ring 3 can be fully squeezed by the cavity cover 1 to achieve a good seal between the cavity cover 1 and the cavity 2.

[0037] The utility model also provides a PVD device, which includes a plurality of vacuum device chambers connected in series, wherein the vacuum device chamber is as follows: Figures 5 to 7 The vacuum equipment chamber.

[0038] The vacuum equipment chamber of the utility model comprises a chamber cover, a chamber body, a first hinge arm and a second hinge arm respectively connected to the chamber cover and the chamber body, and a first pin joint for mutually hingedly connecting the first hinge arm and the second hinge arm, the first hinge arm and the second hinge arm are respectively provided with a first through hole and a second through hole corresponding to the first pin joint, one of the first through hole and the second through hole is a circular hole, and the other of the first through hole and the second through hole is an oblong hole, and the part of the oblong hole larger than the circular hole is a rectangle in the middle thereof. The utility model enables the chamber cover to sink horizontally in the vertical direction, and can effectively improve the sealing degree between the chamber body and the chamber cover of the flip-top vacuum equipment chamber.

[0039] The above embodiments are provided for persons familiar with the art to implement or use the present invention. Personnel familiar with the art can make various modifications or changes to the above embodiments without departing from the utility model concept of the present invention. Therefore, the protection scope of the present invention is not limited to the above embodiments, but should be the maximum scope of the innovative features mentioned in the claims.

Claims

1. A vacuum equipment chamber, comprising a chamber cover, a chamber body, a first hinged arm and a second hinged arm connected to the chamber cover and the chamber body respectively, and a first pin connection member for hingedly connecting the first hinged arm and the second hinged arm to each other, wherein the first hinged arm and the second hinged arm are respectively provided with a first through hole and a second through hole corresponding to the first pin connection member, wherein one of the first through hole and the second through hole is a circular hole, wherein: The other of the first through hole and the second through hole is an oblong hole, and the part of the oblong hole that is larger than the circular hole is a rectangle in the middle.

2. The vacuum equipment chamber according to claim 1, characterized in that: The length of one side of the rectangle is equal to the diameter of the circular hole, and the length of the other side ranges from 3mm to 5mm. The diameter of the circular hole ranges from 30mm to 90mm.

3. The vacuum equipment chamber according to claim 1, characterized in that: The vacuum equipment chamber comprises a feed chamber, a feed side buffer chamber, a discharge side transmission transition chamber, a discharge side buffer chamber and a discharge chamber of a physical vapor chemical deposition device.

4. The vacuum equipment chamber according to claim 1, characterized in that: The vacuum equipment chamber comprises a cylinder and a driving arm arranged at the bottom of the chamber, one end of the driving arm is hinged to the cylinder rod through a second pin joint, and the other end is fixed to the chamber cover.

5. The vacuum equipment chamber according to claim 1, characterized in that: The vacuum equipment chamber includes an inlet and an outlet arranged on two opposite side walls.

6. The vacuum equipment chamber according to claim 1, characterized in that: A sealing member is also provided between the cavity cover and the cavity body.

7. The vacuum equipment chamber according to claim 1, characterized in that: When the vacuum equipment chamber is in a vacuum state, the first pin connection piece is 1 mm to 2 mm away from the bottom of the oblong hole.

8. The vacuum equipment chamber according to claim 1, characterized in that: When the chamber cover of the vacuum equipment chamber is in an open state, the first pin connection member is located at the bottom of the oblong hole.

9. The vacuum equipment chamber according to claim 1, characterized in that: The first pin connection member includes a first pin shaft passing through the first through hole and the second through hole, and a pin shaft baffle plate used for combining with the end of the first pin shaft.

10. A PVD device comprising a plurality of vacuum device chambers connected in series, characterized in that: The vacuum equipment chamber is the vacuum equipment chamber according to any one of claims 1 to 9.

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