Durable quartz boat structure

Abstract

The utility model relates to the field of quartz boats, in particular to a durable quartz boat structure, which is characterized in that two sides of a base are bent upwards to form supporting rods, a plurality of positioning grooves are formed in the supporting rods in an array manner, and the end parts, the middle parts and the rear parts of the supporting rods are respectively connected with one ends of first reinforcing ribs, second reinforcing ribs and third reinforcing ribs; the other ends of the first reinforcing rib, the second reinforcing rib and the third reinforcing rib are connected with a supporting rod, the supporting rod extends upwards to form a baffle, the upper end of the baffle is bent inwards by 90 degrees to form a flange, and a plurality of containing grooves are formed in the flange in an array mode. The quartz boat structure designed by the utility model mainly solves the problems that the traditional quartz boat is easy to damage and age in a severe environment and the like, has remarkably improved durability and stable performance, reduced maintenance cost and wide application scenarios, and is suitable for various fields needing high-performance quartz boats.

Description

Technical Field

[0001] The utility model relates to the field of quartz boats, in particular to a durable quartz boat structure. Background Art

[0002] At present, the card slots set on the quartz boat are rectangular slots. It is not easy to position the silicon wafer when inserting it, which is easy to damage the structure on both sides of the silicon wafer, affecting the quality of the silicon wafer and having a narrow scope of application. As an important tool widely used in high-temperature environments, chemical treatment and other fields, the durability of the quartz boat is of key significance for improving production efficiency and reducing maintenance costs. However, when dealing with harsh conditions such as high temperature and chemical corrosion, the traditional quartz boat structure is often prone to problems such as breakage and aging, which affects its service life and performance stability. Therefore, it is necessary to design a durable quartz boat structure to improve its ability to adapt to harsh environments. Utility Model Content

[0003] Based on the problems existing in the above-mentioned background technology, the utility model proposes a durable quartz boat structure, including a base, a plurality of rectangular grooves are arrayed on the base, support rods are bent upward on both sides of the base, a plurality of positioning grooves are arrayed on the support rods, the end, middle and rear parts of the support rods are respectively connected with one end of the first reinforcing rib, the second reinforcing rib and the third reinforcing rib, the other ends of the first reinforcing rib, the second reinforcing rib and the third reinforcing rib are connected to the support rod, the support rod is extended upward to form a baffle, the upper end of the baffle is bent inward 90° to form a flange, a plurality of placement grooves are arrayed on the flange, the middle parts of the first reinforcing rib, the second reinforcing rib and the third reinforcing rib are respectively extended downward to form the first support column, the second support column and the third support column, and the lower ends of the first support column, the second support column and the third support column are connected to the support.

[0004] Preferably, the groove depth of the positioning groove runs through the support rod.

[0005] Preferably, the reinforcing rib is L-shaped, one end of the reinforcing rib is fixedly connected to one side of the support rod, and the other end of the reinforcing rib is fixedly connected to the support rod.

[0006] Preferably, the front ends of the placement groove and the positioning groove are on the same plane, and the rear ends of the placement groove and the positioning groove are on the same plane.

[0007] Preferably, the distance between two adjacent placement grooves is 2.25 mm to 2.35 mm, and the distance between two adjacent positioning grooves is 2.25 mm to 2.35 mm.

[0008] Preferably, there are four rectangular grooves on the base.

[0009] Preferably, the support rod is in an arc shape with an opening facing downward.

[0010] Compared with the prior art, the beneficial effects of the utility model are as follows: the durable quartz boat structure designed by the utility model mainly solves the problems of easy breakage and aging of traditional quartz boats in harsh environments. The present invention adopts high-strength and high-purity quartz glass as the substrate, and enhances the resistance of the quartz boat to thermal stress and chemical corrosion by optimizing the structural design. The present invention has significantly improved durability, stable performance, reduced maintenance costs and a wide range of application scenarios, and is suitable for various fields requiring high-performance quartz boats. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 A schematic diagram of the structure of a durable quartz boat.

[0012] In the accompanying drawings, the names of the components represented by each reference numeral are as follows: 1. base; 2. rectangular groove; 3. support rod; 4. positioning groove; 5. first reinforcing rib; 6. second reinforcing rib; 7. third reinforcing rib; 8. support rod; 9. baffle; 10. flange; 11. placement groove; 12. first support column; 13. second support column; 14. third support column; 15. support. DETAILED DESCRIPTION

[0013] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0014] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly. In the present invention, unless otherwise clearly specified and limited, the terms "connection", "fixed", etc. should be understood in a broad sense. For example, "fixed" can be a fixed connection, a detachable connection, or an integral whole; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.

[0015] The utility model relates to a durable quartz boat structure, including a base 1, a plurality of rectangular grooves 2 are arranged in an array on the base 1, support rods 3 are bent upwardly on both sides of the base 1, a plurality of positioning grooves 4 are arranged in an array on the support rods 3, the end, middle and rear parts of the support rods 3 are respectively connected with one end of the first reinforcing rib 5, the second reinforcing rib 6 and the third reinforcing rib 7, the other ends of the first reinforcing rib 5, the second reinforcing rib 6 and the third reinforcing rib 7 are connected with the support rod 8, the support rod 8 is extended upward to form a baffle plate 9, the upper end of the baffle plate 9 is bent inwardly 90° to form a flange 10, a plurality of placement grooves 11 are arranged on the flange 10, the middle parts of the first reinforcing rib 5, the second reinforcing rib 6 and the third reinforcing rib 7 are respectively extended downward to form a first support column 12, a second support column 13 and a third support column 14, and the lower ends of the first support column 12, the second support column 13 and the third support column 14 are connected with a support.

[0016] Furthermore, the depth of the positioning groove 4 runs through the support rod 3 .

[0017] Furthermore, the reinforcing rib is L-shaped, one end of the reinforcing rib is fixedly connected to one side of the support rod 3 , and the other end is fixedly connected to the support rod 8 .

[0018] Furthermore, the front ends of the placement groove 11 and the positioning groove 4 are on the same plane, and the rear ends of the placement groove 11 and the positioning groove 4 are on the same plane.

[0019] Furthermore, the distance between two adjacent placement grooves 11 is 2.25 mm to 2.35 mm, and the distance between two adjacent positioning grooves 4 is 2.25 mm to 2.35 mm.

[0020] Furthermore, four rectangular grooves 2 are formed on the base 1 .

[0021] Furthermore, the support rod 3 is in an arc shape with an opening facing downward.

[0022] The above are only preferred embodiments of the present invention. It should be noted that the above preferred embodiments should not be regarded as limiting the present invention. The protection scope of the present invention should be based on the scope defined by the claims. For ordinary technicians in this technical field, several improvements and modifications can be made without departing from the spirit and scope of the present invention, and these improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A durable quartz boat structure, characterized by: The invention comprises a base, a plurality of rectangular grooves are arranged in an array on the base, support rods are bent upward on both sides of the base, a plurality of positioning grooves are arranged in an array on the support rods, the end, middle and rear parts of the support rods are respectively connected with one end of the first reinforcing rib, the second reinforcing rib and the third reinforcing rib, the other ends of the first reinforcing rib, the second reinforcing rib and the third reinforcing rib are connected to the support rod, the support rod is extended upward to form a baffle, the upper end of the baffle is bent inward 90° to form a flange, a plurality of placement grooves are arranged in an array on the flange, the middle parts of the first reinforcing rib, the second reinforcing rib and the third reinforcing rib respectively extend downward to form the first supporting column, the second supporting column and the third supporting column, and the lower ends of the first supporting column, the second supporting column and the third supporting column are connected with a support.

2. A durable quartz boat structure according to claim 1, characterized in that: The groove depth of the positioning groove runs through the support rod.

3. A durable quartz boat structure according to claim 1, characterized in that: The reinforcing rib is L-shaped, one end of the reinforcing rib is fixedly connected to one side of the support rod, and the other end is fixedly connected to the support rod.

4. A durable quartz boat structure according to claim 1, characterized in that: The front ends of the placement groove and the positioning groove are on the same plane, and the rear ends of the placement groove and the positioning groove are on the same plane.

5. A durable quartz boat structure according to claim 1, characterized in that: The distance between two adjacent placement grooves is 2.25mm to 2.35mm, and the distance between two adjacent positioning grooves is 2.25mm to 2.35mm.

6. A durable quartz boat structure according to claim 1, characterized in that: There are four rectangular grooves on the base.

7. A durable quartz boat structure according to claim 1, characterized in that: The support rod is in an arc shape with an opening downward.

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