Hot-pressing mounting module

Abstract

The utility model discloses a hot-pressing mounting module, comprising a driving mechanism, a movable end of the driving mechanism is provided with an adsorption module, and the adsorption module outputs a first negative pressure and a second negative pressure; the adsorption module adsorbs the mounting unit through first negative pressure, the mounting unit is connected with second negative pressure and adsorbs a workpiece through the second negative pressure, a heating unit is arranged in the mounting unit and is used for heating the workpiece when the workpiece is mounted, and when the adsorption module adsorbs the mounting unit, the heating unit is used for heating the workpiece when the workpiece is mounted. And a lead on the heating unit is propped against and communicated with the adsorption module. According to the utility model, the adsorption module is detachably connected with the mounting unit in an adsorption manner, so that the mounting unit can be quickly disassembled or replaced, and when the adsorption module sucks the mounting unit, the heating unit on the mounting unit is electrically connected, so that the heating time and temperature can be effectively controlled, and the mounting effect is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of chip mounting, and in particular relates to a hot pressing mounting module. Background Art

[0002] Chip mounting is a widely used processing technology in semiconductor manufacturing. The traditional method only requires placing the pick-up chip directly at the mounting position. At present, some mounting processes require hot pressing while the chip is mounted, so a mounting module with hot pressing function is required. However, the current hot pressing mounting module is usually an integral structure, and each part is fixed by screw connection. Therefore, there are the following problems: complex structure, inconvenient disassembly and replacement process. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art.

[0004] To this end, the utility model provides a hot pressing mounting module, which has the advantages of simple structure and quick disassembly and replacement of mounting units.

[0005] According to the embodiment of the utility model, the hot pressing mounting module includes: a driving mechanism, the movable end of the driving mechanism is provided with an adsorption module, the adsorption module outputs a first negative pressure and a second negative pressure; a mounting unit, the adsorption module adsorbs the mounting unit through the first negative pressure, the mounting unit is connected to the second negative pressure and adsorbs the workpiece through the second negative pressure, the mounting unit has a heating unit, the heating unit is used to heat the workpiece when the workpiece is mounted, and when the adsorption module adsorbs the mounting unit, the leads on the heating unit are abutted and connected with the adsorption module.

[0006] The beneficial effect of the utility model is that the utility model utilizes a driving mechanism to drive the adsorption module to move, so as to drive the mounting unit to move between the workpiece and the mounting position. The adsorption module is detachably connected to the mounting unit by adsorption, which is convenient for rapid disassembly or replacement of the mounting unit. When the adsorption module absorbs the mounting unit, the heating unit on the mounting unit completes the electrical connection, so as to effectively control the heating time and temperature, thereby improving the mounting effect.

[0007] According to one embodiment of the utility model, the adsorption module includes: a first shell; a shaft body, the shaft body is rotatably arranged in the first shell, the top end of the shaft body is transmission-connected to the driving mechanism, the bottom end of the shaft body adsorbs the mounting unit, and the shaft body drives the mounting unit to rotate to adjust the mounting angle of the workpiece.

[0008] According to one embodiment of the utility model, a plurality of sealing rings are arranged between the shaft body and the inner wall of the first shell, a first channel and a second channel are opened in the shaft body, one end of the first channel is separated from one end of the second channel by the sealing ring, the second negative pressure is connected to the first channel, and the first negative pressure is connected to the second channel.

[0009] According to an embodiment of the utility model, a plurality of first terminals are installed on the shaft, and the heating unit includes a plurality of second terminals, and the first terminals are in abutment with corresponding second terminals.

[0010] According to an embodiment of the utility model, a positioning groove is formed at the bottom end of the shaft body, and a positioning rod matched with the positioning groove is installed on the mounting unit.

[0011] According to an embodiment of the utility model, a plurality of magnets are further provided at the bottom end of the shaft, and the magnets are used to adsorb the mounting unit.

[0012] According to one embodiment of the utility model, the mounting unit includes: a second shell, the heating unit is arranged in the second shell; a heat transfer block, the heat transfer block is installed at the bottom end of the second shell, the heat transfer block is connected to the heating unit; the suction head, the suction head is located at the lower end of the heat transfer block, and the suction head is fixed to the second shell through a connecting piece.

[0013] According to an embodiment of the utility model, a third channel is opened in the connecting member, a fourth channel is opened in the suction head, and the first channel, the third channel and the fourth channel are connected in series in sequence.

[0014] According to an embodiment of the utility model, a hose is installed in the first channel, the hose is a hollow part, the hose connects the first channel and the third channel, one end of the hose forms a bell mouth, and the bell mouth abuts against the connecting piece.

[0015] According to an embodiment of the present invention, a plurality of heat dissipation holes are formed on the second shell.

[0016] According to one embodiment of the utility model, the heating unit further includes a heating block and a temperature detector, the heating block contacts the heat transfer block, the heating block is also connected to the temperature detector, and the heating block and the temperature detector are connected to corresponding second terminals.

[0017] According to an embodiment of the utility model, the driving mechanism includes a z-direction driving mechanism and a rotation driving mechanism, the rotation driving mechanism is mounted on the z-direction driving mechanism, and the adsorption module is mounted on the rotation driving mechanism.

[0018] According to one embodiment of the utility model, the z-axis driving mechanism includes a seat body, and a servo motor, a guide rail slider mechanism and a screw rod installed on the seat body, the output end of the servo motor is connected to the screw rod, a screw nut is sleeved on the screw rod, the screw nut is slidably connected to the guide rail slider mechanism, and the rotary driving mechanism is installed on the screw nut.

[0019] Other features and advantages of the present invention will be set forth in the following description, and in part will become apparent from the description, or may be understood by implementing the present invention.

[0020] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the following description of the embodiments of the present invention, in which:

[0022] Figure 1 It is a three-dimensional structural schematic diagram of the operating mechanism of the utility model;

[0023] Figure 2 It is a main structural diagram of the operating mechanism of the utility model;

[0024] Figure 3 It is a cross-sectional structural schematic diagram of the operating mechanism of the utility model;

[0025] Figure 4 It is a structural schematic diagram of the middle adsorption module of the operating mechanism of the utility model;

[0026] Figure 5 It is a schematic cross-sectional structure diagram of the middle adsorption module of the operating mechanism of the utility model;

[0027] Figure 6 It is a structural schematic diagram of the hot pressing mounting module of the utility model;

[0028] Figure 7 It is a schematic diagram of the internal structure of the hot pressing mounting module;

[0029] Figure 8 is a schematic diagram of the cross-sectional structure of a thermal compression mounting module;

[0030] Reference numerals:

[0031] Z-axis driving mechanism 1, rotating driving mechanism 2, adsorption module 3, mounting unit 4, seat body 11, servo motor 12, guide rail slider mechanism 13, screw rod 14, screw rod nut 15, connecting seat 21, rotating motor 22, first shell body 31, shaft body 32, first terminal 33, magnet 34, joint 35, sealing ring 36, hose 37, positioning groove 320, first channel 321, second channel 322, second shell body 41, heat transfer block 42, second terminal 43, connector 44, suction head 45, heating block 46, temperature detector 47, inner block body 48, outer block body 49, positioning rod 411, calibration rod 412, positioning part 413, third channel 441, fourth channel 445. DETAILED DESCRIPTION

[0032] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0033] In the description of the present utility model, it is necessary to understand that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, features defined as "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.

[0034] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0035] The hot pressing mounting module of the embodiment of the utility model is described in detail below with reference to the accompanying drawings.

[0036] like Figure 1-Figure 8 As shown, the hot pressing mounting module according to the embodiment of the utility model includes: a driving mechanism and a mounting unit 4, the active end of the driving mechanism is provided with an adsorption module 3, the adsorption module 3 outputs a first negative pressure and a second negative pressure; the adsorption module 3 adsorbs the mounting unit 4 through the first negative pressure, the mounting unit 4 is connected to the second negative pressure and adsorbs the workpiece through the second negative pressure, the mounting unit 4 has a heating unit, the heating unit is used to heat the workpiece when the workpiece is mounted, and when the adsorption module 3 adsorbs the mounting unit 4, the leads on the heating unit are connected to the adsorption module.

[0037] In other words, the driving mechanism is mainly used to drive the adsorption module 3 to move to the tool magazine where the mounting unit 4 is stored, so as to facilitate the assembly or replacement of the mounting unit 4, and can move to the workpiece loading place to facilitate the adsorption of the workpiece, and can also move to the mounting position for mounting. On the one hand, the adsorption module 3 adsorbs the mounting unit 4 through the first negative pressure, and on the other hand, the second negative pressure is applied to the workpiece through the mounting unit 4 for adsorption. The first negative pressure and the second negative pressure are independent of each other. The mounting unit 4 is mainly in contact with the workpiece, and heats the workpiece through the heating unit.

[0038] Therefore, the utility model utilizes a driving mechanism to drive the adsorption module 3 to move, so as to drive the mounting unit 4 to move between the workpiece and the mounting position. The adsorption module 3 is detachably connected to the mounting unit 4 by adsorption, which is convenient for rapid disassembly or replacement of the mounting unit 4. When the adsorption module 3 absorbs the mounting unit 4, the heating unit on the mounting unit 4 completes the electrical connection, so as to effectively control the heating time and temperature, thereby improving the mounting effect.

[0039] As for the driving mechanism, the driving mechanism includes a z-direction driving mechanism 1 and a rotation driving mechanism 2 . The rotation driving mechanism 2 is mounted on the z-direction driving mechanism 1 , and the adsorption module 3 is mounted on the rotation driving mechanism 2 .

[0040] Among them, the z-axis driving mechanism 1 includes a base body 11, and a servo motor 12, a guide rail slider mechanism 13 and a screw rod 14 installed on the base body 11. The output end of the servo motor 12 is connected to the screw rod 14 through a coupling. A screw nut 15 is sleeved on the screw rod 14. The screw nut 15 is slidably connected to the guide rail slider mechanism 13, and the rotary driving mechanism 2 is installed on the screw nut 15.

[0041] In this embodiment, there are two guide rail slider mechanisms 13, which are respectively arranged on the left and right sides of the screw rod 14. The two guide rail slider mechanisms 13 can maintain the stability of the movement of the screw rod nut 15. In this embodiment, a servo motor is used as the power for clamping, and the power is transmitted through the screw rod. When the workpiece is mounted, a stable pressure can be output for mounting. The output pressure can reach 30kg through testing, which can meet the pressure requirements of most workpieces when mounting.

[0042] Among them, the rotary drive mechanism 2 includes a connecting seat 21 and a rotary motor 22. The connecting seat 21 is installed on the screw nut 15, and the rotary motor 22 is installed on the connecting seat 21. The output end of the rotary motor 22 is directly connected to the shaft 32, thereby driving the shaft 32 to rotate, so as to adjust the mounting angle of the adsorbed workpiece.

[0043] That is to say, semiconductor products require high mounting accuracy. When the workpiece is sucked, it is usually necessary to take a picture with an upward camera to identify whether the angle of the sucked workpiece is correct. The workpiece is driven to rotate by the rotating motor 22 to match the mounting position. This can improve the mounting accuracy and ensure the mounting quality.

[0044] According to one embodiment of the utility model, the adsorption module 3 includes: a first shell 31 and a shaft 32. The shaft 32 is rotatably arranged in the first shell 31. The top end of the shaft 32 is transmission-connected to the driving mechanism. The bottom end of the shaft 32 adsorbs the mounting unit 4. The shaft 32 drives the mounting unit 4 to rotate to adjust the mounting angle of the workpiece.

[0045] In this embodiment, the first housing 31 is installed at the lower end of the connecting seat 21, and an angular contact bearing is provided between the first housing 31 and the shaft 32 for rotational connection. The top end of the shaft 32 is connected to the output end of the rotating motor 22 through a coupling.

[0046] Furthermore, a plurality of sealing rings 36 are arranged between the shaft body 32 and the inner wall of the first shell 31 , a first channel 321 and a second channel 322 are opened in the shaft body 32 , one end of the first channel 321 is separated from one end of the second channel 322 by the sealing ring 36 , the second negative pressure is connected to the first channel 321 , and the first negative pressure is connected to the second channel 322 .

[0047] In this embodiment, a plurality of connectors 35 are installed on the outside of the first shell 31, and the connectors 35 are mainly used to connect the negative pressure generator. The first channel 321 and the second channel 322 in the shaft body 32 are independent of each other. One end of the first channel 321 and one end of the second channel 322 extend on the side wall of the shaft body 32. One connector 35 is connected to one end of the first channel 321, and another connector 35 is connected to one end of the second channel 322. By arranging a plurality of sealing rings 36 between the shaft body 32 and the first shell 31, leakage of the first negative pressure and the second negative pressure is avoided, and at the same time, the first negative pressure and the second negative pressure can be separated, thereby ensuring that the first negative pressure and the second negative pressure are independent of each other.

[0048] According to an embodiment of the present invention, a plurality of first terminals 33 are mounted on the shaft 32 , and the heating unit includes a plurality of second terminals 43 . The first terminals 33 abut against the corresponding second terminals 43 .

[0049] Multiple first terminals 33 correspond to multiple second terminals 43 one by one. The first terminals 33 are elastic terminals. The second terminals 43 are connected to the leads on the heating block 46 and the temperature detector 47. When the adsorption module 3 is adsorbed and connected to the mounting unit 4, the lower end of the first terminal 33 is abutted against the upper surface of the corresponding second terminal 43, thereby realizing the electrical connection of the heating block 46 and the signal connection of the temperature detector 47. The outer peripheral surfaces of the first terminal 33 and the second terminal 43 are both provided with an insulating coating, as long as the contacting parts are metal.

[0050] On this basis, a positioning groove 320 is formed at the bottom end of the shaft body 32 , and a positioning rod 411 matching with the positioning groove 320 is installed on the mounting unit 4 .

[0051] In order to ensure the assembly accuracy between the first terminal 33 and the second terminal 43, it is necessary to ensure that the assembly position between the adsorption module 3 and the mounting unit 4 remains fixed each time. The bottom end of the shaft 32 has an annular protrusion, and the mounting unit 4 is installed inside the annular protrusion. During assembly, the positioning rod 411 is inserted into the positioning groove 320, so that the mounting unit 4 is accurately installed at the lower end of the shaft 32.

[0052] According to an embodiment of the present invention, a plurality of magnets 34 are further disposed at the bottom end of the shaft 32 , and the magnets 34 are used to adsorb the mounting unit 4 .

[0053] In this embodiment, the plurality of magnets 34 and the plurality of first terminals 33 are evenly spaced apart along the circumferential direction, so that the uniformity of the adsorption force can be ensured.

[0054] According to one embodiment of the utility model, the mounting unit 4 includes: a second housing 41, a heat transfer block 42 and a suction head 45, the heating unit is arranged in the second housing 41; the heat transfer block 42 is installed at the bottom end of the second housing 41, and the heat transfer block 42 is connected to the heating unit; the suction head 45 is located at the lower end of the heat transfer block 42, and the suction head 45 is fixed to the second housing 41 through a connecting member 44. Furthermore, a plurality of heat dissipation holes are provided on the second housing 41. When not mounting, air can be blown into the second housing 41 through the heat dissipation holes, thereby quickly cooling down.

[0055] The lower end of the second housing 41 is provided with four positioning parts 413, which protrude downwards, and the heat transfer block 42 is located inside the four positioning parts 413. The four sides of the heat transfer block 42 are respectively matched with the four positioning parts 413. The connecting member 44 is a screw, and the lower end of the connecting member 44 is threadedly connected with the suction head 45. The upper end of the connecting member 44 is limited on the second housing 41. When the screw is tightened, the suction head 45 and the heat transfer block 42 are pressed upward against the second housing 41.

[0056] Preferably, a third channel 441 is defined in the connecting member 44, a fourth channel 445 is defined in the suction head 45, and the first channel 321, the third channel 441 and the fourth channel 445 are sequentially connected in series.

[0057] More preferably, a hose 37 is installed in the first channel 321 . The hose 37 is a hollow part. The hose 37 connects the first channel 321 and the third channel 441 . One end of the hose 37 forms a bell mouth, which abuts against the connecting piece 44 .

[0058] That is to say, the connecting part 44 and the suction head 45 are both hollow parts, the first channel 321, the hose 37, the third channel 441 and the fourth channel 445 are connected in sequence, the hose 37 is made of rubber, and when the mounting unit 4 is installed on the adsorption module 3, the connecting part 44 is abutted against the bell-shaped mouth of the hose 37, and the bell-shaped mouth is deformed to facilitate sealing.

[0059] On this basis, the heating unit 4 further includes a heating block 46 and a temperature detector 47 . The heating block 46 contacts the heat transfer block 42 . The heating block 46 is also connected to the temperature detector 47 . The heating block 46 and the temperature detector 47 are connected to the corresponding second terminals 43 .

[0060] In this embodiment, there are two heating blocks 46, the lower end surface of the heating block 46 is in contact with the heat transfer block 42, the leads of the heating block 46 and the leads of the temperature detector 47 are respectively connected to the corresponding second terminals 43, an inner block 48 is arranged inside the second shell 41, an outer block 49 is arranged above the second shell 41, the inner block 48 and the outer block 49 are fixed to the second shell 41 by screws, the inner block 48 is mainly used to install the second terminal 43, an insulating ring is arranged between the outer block 49 and the second terminal 43, and the upper surface of the outer block 49 is lower than the second terminal 43 after assembly.

[0061] A calibration rod 412 is also provided on the side of the second housing 41 . When the camera is shooting, calibration can be performed through the calibration rod 412 to determine whether the workpiece mounting angle is correct.

[0062] In summary, the utility model has a simple and compact structure, the mounting unit 4 and the adsorption module 3 are detachably connected to facilitate replacement, and the heating unit in the mounting unit 4 can be quickly heated during mounting to ensure the mounting effect.

[0063] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0064] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A thermal compression mounting module, characterized in that: include: A driving mechanism, wherein a movable end of the driving mechanism is provided with an adsorption module (3), and the adsorption module (3) outputs a first negative pressure and a second negative pressure; A mounting unit (4), wherein the adsorption module (3) adsorbs the mounting unit (4) through the first negative pressure, the mounting unit (4) is connected to the second negative pressure and adsorbs the workpiece through the second negative pressure, the mounting unit (4) has a heating unit therein, the heating unit is used to heat the workpiece when the workpiece is mounted, and when the adsorption module (3) adsorbs the mounting unit (4), the leads on the heating unit are in contact with and connected to the adsorption module.

2. The thermal compression mounting module according to claim 1, characterized in that: The adsorption module (3) comprises: A first housing (31); A shaft body (32), the shaft body (32) is rotatably arranged in the first shell body (31), the top end of the shaft body (32) is transmission-connected with the driving mechanism, the bottom end of the shaft body (32) adsorbs the mounting unit (4), and the shaft body (32) drives the mounting unit (4) to rotate so as to adjust the mounting angle of the workpiece.

3. The thermal compression mounting module according to claim 2, characterized in that: A plurality of sealing rings (36) are arranged between the shaft body (32) and the inner wall of the first shell (31); a first channel (321) and a second channel (322) are opened in the shaft body (32); one end of the first channel (321) and one end of the second channel (322) are separated by the sealing ring (36); the second negative pressure is connected to the first channel (321), and the first negative pressure is connected to the second channel (322).

4. The thermal compression mounting module according to claim 2, characterized in that: A plurality of first terminals (33) are mounted on the shaft (32); the heating unit comprises a plurality of second terminals (43); and the first terminals (33) are in abutment with corresponding second terminals (43).

5. The thermal compression mounting module according to claim 2, characterized in that: A positioning groove (320) is provided at the bottom end of the shaft body (32), and a positioning rod (411) matching with the positioning groove (320) is installed on the mounting unit (4).

6. The thermal compression mounting module according to claim 2, characterized in that: A plurality of magnets (34) are also provided at the bottom end of the shaft body (32), and the magnets (34) are used to adsorb the mounting unit (4).

7. The thermal compression mounting module according to claim 3, characterized in that: The mounting unit (4) comprises: A second shell (41), wherein the heating unit is arranged in the second shell (41); a heat transfer block (42), the heat transfer block (42) being mounted at the bottom end of the second shell (41), the heat transfer block (42) being connected to the heating unit; A suction head (45), the suction head (45) is located at the lower end of the heat transfer block (42), and the suction head (45) is fixed to the second shell (41) through a connecting piece (44).

8. The thermal compression mounting module according to claim 7, characterized in that: A third channel (441) is provided in the connecting member (44), a fourth channel (445) is provided in the suction head (45), and the first channel (321), the third channel (441) and the fourth channel (445) are sequentially connected in series.

9. The thermal compression mounting module according to claim 8, characterized in that: A rubber hose (37) is installed in the first channel (321). The rubber hose (37) is a hollow part. The rubber hose (37) connects the first channel (321) and the third channel (441). One end of the rubber hose (37) forms a bell mouth, and the bell mouth abuts against the connecting piece (44).

10. The thermal compression mounting module according to claim 7, characterized in that: The second shell (41) is provided with a plurality of heat dissipation holes.

11. The thermal compression mounting module according to claim 7, characterized in that: The heating unit further comprises a heating block (46) and a temperature detector (47), wherein the heating block (46) contacts the heat transfer block (42), and the heating block (46) is also connected to the temperature detector (47), and the heating block (46) and the temperature detector (47) are connected to corresponding second terminals (43).

12. The thermal compression mounting module according to claim 1, characterized in that: The driving mechanism comprises a z-direction driving mechanism (1) and a rotation driving mechanism (2); the rotation driving mechanism (2) is mounted on the z-direction driving mechanism (1); and the adsorption module (3) is mounted on the rotation driving mechanism (2).

13. The thermal compression mounting module according to claim 12, characterized in that: The z-axis driving mechanism (1) comprises a seat body (11), and a servo motor (12), a guide rail slider mechanism (13) and a screw rod (14) mounted on the seat body (11); the output end of the servo motor (12) is connected to the screw rod (14); a screw rod nut (15) is sleeved on the screw rod (14); the screw rod nut (15) is slidably connected to the guide rail slider mechanism (13); and the rotary driving mechanism (2) is mounted on the screw rod nut (15).

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