Flexible pressing springback type carrier locking mechanism

Abstract

The utility model discloses a flexible pressing springback type carrier locking mechanism, which belongs to the technical field of semiconductor equipment and comprises a locking assembly, a supporting assembly and a pressing and fixing assembly. The supporting assembly supports the whole mechanism to be fixed to a carrier table, the locking assembly locks the pressing and fixing assembly to a certain position, a material box placed on the carrier table jolts up and down in the equipment operation process, and the pressing and fixing assembly has the buffering function and prevents the material box from being excessively extruded and damaged. In the prior art, pressing is generally carried out through manual operation of one hinge mechanism, pressing and lifting both need complex manual procedures, and the working efficiency is also reduced due to complex operation. According to the utility model, the operation process is simplified, the downward pressing mechanism can be rebounded only by pressing the pressing plate after downward pressing, and the downward pressing mechanism does not need to be manually operated again to take out the material box, so that the material box has obvious advantages.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor equipment and relates to a flexible press-rebound carrier locking mechanism. Background Art

[0002] In the production process of semiconductor materials, some material boxes need to be placed in mechanical equipment. Due to the vibration of the machine, the material boxes may bump up and down slightly, making it difficult to take out the materials. The traditional solution is generally to press down a hinge mechanism manually. Both pressing down and lifting require complicated manual procedures, and the complicated operation also reduces work efficiency. Therefore, it is necessary to find a flexible press-rebound carrier locking mechanism that can solve the above problems. Utility Model Content

[0003] In view of this, it is necessary to overcome at least one of the above-mentioned defects in the prior art. The utility model provides a flexible press-rebound carrier locking mechanism.

[0004] A flexible press-rebound carrier locking mechanism, characterized in that it comprises: a locking assembly, a supporting assembly and a pressing assembly; the locking assembly comprises a pressing block, a rebound column, a locking column and a locking device; the upper ends of the rebound column and the locking column are respectively fixed to the pressing block through an upper fixing member, the rebound column and the locking column pass through a fixing plate on the supporting assembly, and the supporting plate is fixedly connected to the upper pressing block on the pressing assembly; the fixing plate is fixed to the upper end of the carrier platform, and the supporting plate is fixed to the fixing plate; the pressing assembly comprises an upper pressing block, a buffer column and a lower pressing block; the lower ends of the rebound column and the locking column are respectively fixed to the upper pressing block through a lower fixing member; the upper end of the buffer column passes through the upper pressing block, and the lower end is fixedly connected to the lower pressing block; the locking device comprises a card with a card hole, a pressing plate and a rebound member, and the card is fixed to the pressing plate; the rebound member penetrates into the rebound member slot of the supporting plate, one end of the rebound member is fixed inside the supporting plate, and the elastic contact point of the other end of the rebound member is pressed on the pressing plate.

[0005] Furthermore, the card moves back and forth through the card slot on the support plate.

[0006] Furthermore, the locking hole is composed of two intersecting circles, the locking column can move up and down in the large circle of the locking hole, and the diameter of the small circle of the locking hole is smaller than the diameter of the locking column and larger than the diameter of the locking groove on the locking column.

[0007] Furthermore, the rebound member pushes the pressing plate to cause the locking column to be locked into the small circle of the locking hole.

[0008] Furthermore, the rebound column comprises a left rebound column and a right rebound column, and a spring for rebounding is provided on the rebound column.

[0009] Furthermore, the carrier table is a carrier for placing raw material objects.

[0010] Furthermore, the buffer column includes a right buffer column and a left buffer column provided with a spring, the buffer column is a column structure with a column cap, the column cap has a diameter larger than the column body diameter, the column body of the buffer column passes through the hole of the upper pressure block, and the diameter of the hole of the upper pressure block is smaller than the column cap diameter.

[0011] Furthermore, the rebound member is an elastic device.

[0012] Furthermore, the fixing member, the upper fixing member, and the lower fixing member are bolts or screws.

[0013] Additional aspects and advantages of the present invention will be given in part in the following description and in part will become apparent from the following description or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the following description of the embodiments in conjunction with the accompanying drawings, in which:

[0015] Figure 1 is a three-dimensional diagram of a flexible push-to-rebound carrier locking mechanism;

[0016] Figure 2 It is an exploded view of the locking mechanism of the flexible press-rebound carrier;

[0017] Figure 3 is a side cross-sectional view of a flexible push-to-rebound carrier locking mechanism;

[0018] Figure 4 is an initial state diagram of the flexible press-rebound carrier locking mechanism;

[0019] Figure 5 is a diagram of the compression state of the flexible press-rebound carrier locking mechanism;

[0020] In the figure, 100 is a locking assembly, 110 is a pressing block, 120 is a rebound column, 121 is a right rebound column, 122 is a left rebound column, 130 is a locking column, 131 is a locking slot, 132 is an upper fixing part, 133 is a lower fixing part, 140 is a locking device, 141 is a card, 142 is a pressing plate, 143 is a rebound part, 200 is a supporting assembly, 210 is a fixing plate, 211 is a fixing hole, 220 is a supporting plate, 221 is a slot, 222 is a rebound part slot, 300 is a pressing assembly, 310 is an upper pressing block, 320 is a buffer column, 321 is a right buffer column, 322 is a left buffer column, 330 is a lower pressing block, 400 is a carrier, and 500 is a material box. DETAILED DESCRIPTION

[0021] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be interpreted as limiting the present invention.

[0022] In the description of the present invention, it should be understood that the terms "upper", "lower", "bottom", "top", "front", "back", "inside", "outside", "horizontal", "vertical", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0023] In the description of the present utility model, it should be noted that, unless otherwise clearly stipulated and limited, the terms "connection", "communication", "connected", "connection" and "fitting" should be understood in a broad sense. For example, it can be a fixed connection, an integral connection, or a detachable connection; it can be the internal communication of two elements; it can be a direct connection or an indirect connection through an intermediate medium; "fitting" can be the fit between surfaces, or the fit between points and surfaces or lines and surfaces, and also includes the fit between holes and axes. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0024] The inventive concept of the utility model is as follows: by adopting a pressing structure, after pressing down, only the pressing plate needs to be pressed to bounce the pressing mechanism back, and there is no need to manually operate the pressing mechanism again to take out the material box. In addition, the buffer component in the pressing component provided in the utility model can stabilize the material box and protect the material box from being crushed, so it has obvious advantages.

[0025] The following will describe the flexible push-to-rebound carrier locking mechanism of the present invention with reference to the accompanying drawings, wherein Figure 1 is a three-dimensional diagram of a flexible push-to-rebound carrier locking mechanism; Figure 2 It is an exploded view of the locking mechanism of the flexible press-rebound carrier; Figure 3 It is a side cross-sectional view of the flexible push-rebound carrier locking mechanism.

[0026] like Figures 1 to 5As shown, the utility model discloses a flexible press-rebound vehicle locking mechanism. In one embodiment of the utility model, the flexible press-rebound vehicle locking mechanism includes a locking assembly 100, a supporting assembly 200 and a pressing assembly 300; the locking assembly 100 includes a pressing block 110, a rebound column 120, a locking column 130, and a locking device 140; the upper ends of the rebound column 120 and the locking column 130 are respectively fixed to the pressing block 110 through an upper fixing member 132, and the rebound column 120 and the locking column 130 pass through the The fixing plate 210 and the supporting plate 220 on the supporting assembly 200 are fixedly connected to the upper pressing block 310 on the pressing assembly 300; the fixing plate 210 is fixed to the upper end of the carrier platform, and the supporting plate 220 is fixed to the fixing plate 210; the pressing assembly 300 includes an upper pressing block 310, a buffer column 320, and a lower pressing block 330; the lower ends of the rebound column 120 and the locking column 130 are respectively fixed to the upper pressing block 310 through the lower fixing member 133; the upper end of the buffer column 320 passes through the upper pressing block 310 (such as Figure 5 As shown), the lower end is fixedly connected to the lower pressing block 330; the locking device 140 includes a card 141 with a card hole, a pressing plate 142 and a rebound member 143, the card 141 is fixed on the pressing plate 142; the rebound member 143 penetrates into the rebound member groove 222 of the support plate 220, one end of the rebound member 143 is fixed inside the support plate 220, and the elastic contact point of the other end of the rebound member 143 is pressed on the pressing plate 142; the card 141 passes through the card slot 221 on the support plate 220 and moves back and forth, the card hole is composed of two intersecting circles, the locking column 130 can move up and down in the large circle of the card hole, the diameter of the small circle of the card hole is smaller than the diameter of the locking column 130, and larger than the diameter of the locking groove 131 on the locking column 130, and the rebound member pushes the pressing plate 142 to make the locking column 130 snap into the small circle of the card hole.

[0027] like Figure 4 In the initial state diagram of the present invention, the pressing block 110 is pressed, the locking column 130 descends, and at the same time, the pressing assembly 300 is driven to descend until the lower pressing block 330 contacts the material box 500, and the pressing block 110 is continued to be pressed until the rebound member 143 rebounds the pressing plate 142, so that the locking groove 131 and the small circular hole of the card 141 lock the locking column 130. At the same time, during the descending process of the pressing assembly 300, the material box 500 gives the pressing assembly 300 a reaction force, the upper pressing block 310 is stationary, and the force of the lower pressing block 330 presses the buffer column 320 to move upward, which plays a buffering role in preventing the material box 500 from being crushed, thereby putting the material box 500 in a pressing state. Figure 5When the material box 500 needs to be taken out, the pressing plate 142 is pressed, and the locking column 130 enters the large circular hole on the card 141. Under the action of the spring on the rebound column 120, the pressing block 110 moves upward, driving the pressing assembly 300 to move upward, thereby releasing the pressing effect on the material box 500.

[0028] According to the prior art described in the background technology of this patent, pressing down and lifting up manually through a hinge mechanism requires complicated manual procedures, and the complicated operation also reduces work efficiency. The flexible press-rebound carrier locking mechanism disclosed in the utility model adopts a pressing structure, and after pressing down, only the pressing plate needs to be pressed to rebound the pressing mechanism, and there is no need to manually operate the pressing mechanism again to take out the material box. In addition, the buffer component in the pressing component provided in the utility model can stabilize the material box and protect the material box from being crushed, so it has obvious advantages.

[0029] In addition, the flexible press-rebound carrier locking mechanism disclosed in the present invention also has the following additional technical features:

[0030] In another embodiment of the present invention, the rebound column comprises a right rebound column 121 and a left rebound column 122 , and a spring for rebounding is disposed on the rebound column.

[0031] In another embodiment of the present invention, the carrier platform is a carrier for placing raw material objects.

[0032] In another embodiment of the utility model, the buffer column includes a right buffer column 321 and a left buffer column 322 provided with a spring, and the buffer column is a column structure with a column cap, and the diameter of the column cap is larger than the diameter of the column 332, and the column body of the buffer column 320 passes through the hole of the upper pressure block, and the diameter of the hole of the upper pressure block is smaller than the diameter of the column cap.

[0033] In another embodiment of the present invention, the rebound member 143 is an elastic spring device.

[0034] In another embodiment of the present invention, the fixing member, the upper fixing member, and the lower fixing member are bolts or screws.

[0035] Any reference to "some embodiments", "one embodiment", "embodiment", "illustrative embodiment", etc. means that the specific components, structures, or features described in conjunction with the embodiment are included in at least one embodiment of the present invention. Such illustrative expressions throughout this specification do not necessarily refer to the same embodiment. Moreover, when specific components, structures, or features are described in conjunction with any embodiment, it is claimed that it is within the scope of those skilled in the art to implement such components, structures, or features in conjunction with other embodiments.

[0036] Although the specific implementation of the utility model has been described in detail with reference to a plurality of illustrative embodiments of the utility model, it must be understood that a person skilled in the art may design a variety of other modifications and embodiments that will fall within the spirit and scope of the principles of the utility model. Specifically, within the scope of the foregoing disclosure, the accompanying drawings, and the claims, reasonable variations and improvements may be made in the arrangement of the components and / or the dependent combination layout without departing from the spirit of the utility model. Except for variations and improvements in components and / or layout, the scope is defined by the appended claims and their equivalents.

Claims

1. A flexible press-rebound carrier locking mechanism, characterized in that ,include: A locking assembly, a supporting assembly and a pressing assembly; the locking assembly comprises a pressing block, a rebound column, a locking column and a locking device; the upper ends of the rebound column and the locking column are respectively fixed to the pressing block through an upper fixing member, the rebound column and the locking column pass through a fixing plate on the supporting assembly, and the supporting plate is fixedly connected to the upper pressing block on the pressing assembly; the fixing plate is fixed to the upper end of the carrier platform, and the supporting plate is fixed to the fixing plate; The pressing assembly comprises an upper pressing block, a buffer column, and a lower pressing block; the lower ends of the rebound column and the locking column are respectively fixed to the upper pressing block through lower fixing members; the upper end of the buffer column passes through the upper pressing block, and the lower end is fixedly connected to the lower pressing block; The locking device includes a card with a card hole, a pressing plate and a rebound member, wherein the card is fixed on the pressing plate; the rebound member is inserted into the rebound member slot of the support plate, one end of the rebound member is fixed inside the support plate, and the elastic contact point at the other end of the rebound member is pressed against the pressing plate.

2. The flexible push-to-rebound carrier locking mechanism according to claim 1, characterized in that: The card moves back and forth through the card slot on the support plate.

3. The flexible push-to-rebound carrier locking mechanism according to claim 1, characterized in that: The clamping hole is composed of two intersecting circles, and the locking column can move up and down in the large circle of the clamping hole. The diameter of the small circle of the clamping hole is smaller than the diameter of the locking column and larger than the diameter of the locking groove on the locking column.

4. The flexible push-to-rebound carrier locking mechanism according to claim 1, characterized in that: The rebound member pushes the pressing plate to make the locking column snap into the small circle of the snap hole.

5. The flexible push-to-rebound carrier locking mechanism according to claim 1, characterized in that: The rebound column comprises a left rebound column and a right rebound column, and a spring for rebounding is arranged on the rebound column.

6. The flexible push-to-rebound carrier locking mechanism according to claim 1, characterized in that: The carrier table is a carrier for placing raw material objects.

7. The flexible push-to-rebound carrier locking mechanism according to claim 1, characterized in that: The buffer column includes a right buffer column and a left buffer column provided with a spring. The buffer column is a column structure with a column cap. The diameter of the column cap is larger than the diameter of the column body. The column body of the buffer column passes through the hole of the upper pressure block. The diameter of the hole of the upper pressure block is smaller than the diameter of the column cap.

8. The flexible push-to-rebound carrier locking mechanism according to claim 1, characterized in that: The rebound member is an elastic device.

9. The flexible push-to-rebound carrier locking mechanism according to claim 1, characterized in that: The fixing member, the upper fixing member and the lower fixing member are bolts or screws.

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