Slow pulling dehydration structure of ultrasonic cleaning machine

Abstract

The utility model discloses a slow pulling dehydration structure of an ultrasonic cleaning machine, which comprises the ultrasonic cleaning machine, and a slow pulling dehydration mechanism is arranged on the surface of the rear side of the ultrasonic cleaning machine; the ultrasonic cleaning machine comprises a machine body and an inner container installed in an inner cavity of the machine body. The slow pulling dehydration mechanism comprises a base, a servo electric cylinder fixed on the upper surface of the base and a movable block fixed at the top end of a telescopic rod piece of the servo electric cylinder, two cross beams are fixed on the front side of the movable block, and two groups of silicon wafer clamps are arranged on the bottom surfaces of the cross beams. According to the technical scheme, the servo electric cylinder, the cross beam and the supporting beam form the slow pulling dehydration mechanism for lifting the workpiece, and at least two groups of clamps for clamping the silicon wafer are arranged at the tail end of the mechanism, so that the problem that the silicon wafer cannot be lifted by using a silk thread or a hook when the silicon wafer workpiece is ultrasonically cleaned is solved, the slow pulling dehydration stage of the silicon wafer is helped to be smoothly carried out, and the working efficiency is improved. And the aim of keeping the posture of the silicon wafer in the cleaning process is fulfilled.

Description

Technical Field

[0001] The utility model relates to the technical field of ultrasonic cleaning equipment, in particular to a slow-pull dehydration structure of an ultrasonic cleaning machine. Background Art

[0002] Slow pull extraction in ultrasonic cleaning machines refers to the process of removing water from the object or part being cleaned at a slower speed using ultrasonic cleaning equipment. When the cleaning cycle is completed, the object is lifted or pulled out of the cleaning solution at a slower speed, allowing excess water and cleaning solution to be gradually drained out. It is often used to ensure effective drying and minimize the risk of water spots or residue on the cleaned surface.

[0003] However, the inventors have found that the current slow-pull dehydration mechanism generally uses a wire or a hook to suspend the workpiece and immerse it in the cleaning solution. If the workpiece is relatively strong and does not have a wire or a hook to hang, such as a silicon wafer, the pulling operation will become more difficult; even if the silicon wafer is placed in a hollow basket and the hollow basket is pulled, there is a defect that a large number of silicon wafers are stacked on each other and affect the slow-pull dehydration effect. Therefore, those skilled in the art propose a slow-pull dehydration structure for an ultrasonic cleaning machine. Utility Model Content

[0004] The purpose of the utility model is to provide a slow pull dehydration structure of an ultrasonic cleaning machine to solve the shortcomings mentioned in the background technology. In order to solve the disadvantages and defects mentioned in the background technology, the utility model provides the following technical solutions:

[0005] It comprises an ultrasonic cleaning machine, the rear side surface of which is provided with a slow-pull dehydration mechanism; wherein the ultrasonic cleaning machine comprises a body and an inner tank installed in the inner cavity of the body; the slow-pull dehydration mechanism comprises a base, a servo electric cylinder fixed on the upper surface of the base, and a movable block fixed on the top of the telescopic rod of the servo electric cylinder, and two beams are fixed on the front side of the movable block, and two groups of silicon wafer clamps are provided on the bottom surface of the beam.

[0006] The silicon wafer clamp includes a waterproof stepping motor, clamping arms hinged on the left and right sides of the waterproof stepping motor, and a screw connected to the output end of the waterproof stepping motor. A spiral tube is movably arranged on the outer ring surface of the screw rod, and a traction arm is hinged between the left and right sides of the spiral tube and the side where the clamping arms are close to each other.

[0007] As a preferred solution of the utility model, the front side surface of the base is fixedly connected to the rear side surface of the body, guide rails are fixed on the left and right sides of the top surface of the base, and the top ends of the guide rails penetrate the movable block.

[0008] As a preferred solution of the utility model, circular holes for the guide rail to pass through are opened at both sides of the inside of the movable block, and a disc with a diameter larger than the circular hole is fixed to the top of the guide rail.

[0009] As a preferred solution of the utility model, two protrusions are fixed on the front side surface of the movable block, and the bottom surface of the protrusion is fixedly connected to the upper surface of the crossbeam.

[0010] As a preferred solution of the utility model, two supporting beams are fixed to the surface of one side of the cross beam close to each other, and the top surface of the waterproof stepping motor is connected to the lower surface of the supporting beam.

[0011] As a preferred solution of the utility model, side blocks are fixed on both the left and right sides of the waterproof stepping motor, and the top end of the clamping arm is hinged to the side blocks.

[0012] As a preferred solution of the utility model, the clamp arm is L-shaped as a whole and an opening is provided in the inner middle section of the clamp arm. The left and right ends of the spiral tube are hinged to the end of the traction arm that is close to each other, and the end of the traction arm that is away from each other is hinged to the inner middle section of the clamp arm through an axle pin.

[0013] As a preferred solution of the utility model, a threaded hole which matches with the threaded teeth of the outer ring of the screw rod is provided at the inner central position of the screw tube, and a silicon wafer is clamped on one side of the silicone blocks which are close to each other.

[0014] As a preferred solution of the utility model, the inner tank is placed on the top port of the body, and handles are installed on the left and right side walls of the body, a control panel is installed on the front surface of the body, and cleaning liquid is contained in the inner cavity of the inner tank.

[0015] In the above technical solution, the technical effects and advantages provided by the utility model are:

[0016] In the technical solution, a servo electric cylinder, a crossbeam and a support beam are used to form a slow-pull dehydration mechanism for lifting the workpiece, and at least two sets of clamps for clamping silicon wafers are arranged at the end of the mechanism to solve the problem that silk threads or hooks cannot be used to lift silicon wafers when ultrasonically cleaning silicon wafer workpieces, thereby helping the smooth progress of the slow-pull dehydration stage of the silicon wafer and achieving the purpose of maintaining the posture of the silicon wafer during the cleaning process. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present utility model. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0018] Figure 1It is a schematic diagram of the ultrasonic cleaning machine and the slow-pull dehydration mechanism after assembly;

[0019] Figure 2 This is a disassembled schematic diagram of an ultrasonic cleaning machine;

[0020] Figure 3 It is an enlarged schematic diagram of the slow-pull dehydration mechanism;

[0021] Figure 4 Schematic diagram of the silicon wafer fixture in the slow pull dehydration mechanism.

[0022] Description of reference numerals:

[0023] 1. Ultrasonic cleaning machine; 11. Machine body; 12. Inner tank; 2. Slow pull dehydration mechanism; 21. Base; 22. Servo electric cylinder; 23. Crossbeam; 24. Bump; 25. Guide rail; 26. Movable block; 27. Support beam; 28. Silicone wafer fixture; 281. Waterproof stepping motor; 282. Side block; 283. Clamp arm; 284. Pull arm; 285. Screw; 286. Silicone block; 287. Screw. DETAILED DESCRIPTION

[0024] In order to more clearly explain and illustrate the technical solution and implementation of the present utility model, several preferred specific embodiments for implementing the technical solution of the present utility model are introduced below.

[0025] The following description is merely exemplary in nature and is not intended to limit the present disclosure, application and use. It should be understood that in all these figures, the same or similar figure numbers indicate the same or similar parts and features. The various figures only schematically represent the concepts and principles of the embodiments of the present disclosure, and do not necessarily show the specific dimensions and proportions of the various embodiments of the present disclosure. Specific parts in specific drawings may use exaggerated methods to illustrate the relevant details or structures of the embodiments of the present disclosure. The various publications, patents and published patent specifications cited herein are incorporated herein by reference in their entirety. The technical solutions of the present utility model will be clearly and completely described below in conjunction with the embodiments of the present utility model. Obviously, the described embodiments are only part of the embodiments of the present utility model.

[0026] For example, refer to the attached Figure 1 and attached Figure 2 As shown; a preferred technical solution of the slow-pull dehydration structure includes the following: a slow-pull dehydration mechanism 2 is provided on the rear surface of the ultrasonic cleaning machine 1; wherein the ultrasonic cleaning machine 1 includes a body 11, and an inner tank 12 installed in the inner cavity of the body 11; the inner tank 12 is placed on the top port of the body 11, and handles are installed on the left and right side walls of the body 11, a control panel is installed on the front surface of the body 11, and the inner cavity of the inner tank 12 is filled with cleaning liquid.

[0027] Refer to the instruction manual Figure 3 As shown; the slow pull dehydration mechanism 2 includes a base 21, a servo electric cylinder 22 fixed on the upper surface of the base 21, and a movable block 26 fixed on the top of the telescopic rod of the servo electric cylinder 22, and two beams 23 are fixed on the front side of the movable block 26, and two groups of silicon wafer clamps 28 are arranged on the bottom surface of the beam 23.

[0028] Refer to the instruction manual Figure 4 As shown; the silicon wafer clamp 28 includes a waterproof stepping motor 281, a clamping arm 283 hinged on the left and right sides of the waterproof stepping motor 281, and a screw rod 287 connected to the output end of the waterproof stepping motor 281, and a screw 285 is movably arranged on the outer ring surface of the screw rod 287, and a traction arm 284 is hinged between the left and right sides of the screw rod 285 and the side close to the clamping arm 283.

[0029] Refer to the instruction manual Figure 3 As shown; the front side surface of the base 21 is fixedly connected to the rear side surface of the body 11, guide rails 25 are fixed on the left and right sides of the top surface of the base 21, and the top end of the guide rail 25 passes through the movable block 26, and circular holes for the guide rail 25 to pass through are opened at the two sides of the inside of the movable block 26, and a disk with a diameter larger than the circular hole is fixed to the top end of the guide rail 25; two protrusions 24 are fixed on the front side surface of the movable block 26, and the bottom surface of the protrusion 24 is fixedly connected to the upper surface of the beam 23.

[0030] Refer to the instruction manual Figure 3 and attached Figure 4 As shown; two support beams 27 are fixed on the surface of the side of the cross beam 23 close to each other, and the top surface of the waterproof stepping motor 281 is connected to the lower surface of the support beam 27. Side blocks 282 are fixed on the left and right sides of the waterproof stepping motor 281, and the top of the clamping arm 283 is hinged to the side block 282. The clamping arm 283 is L-shaped as a whole, and an opening is opened at the inner middle section of the clamping arm 283, and the left and right ends of the screw tube 285 are hinged to the end of the traction arm 284 close to each other, and the end of the traction arm 284 away from each other is hinged to the inner middle section of the clamping arm 283 through an axle pin, and a threaded hole that matches the outer thread of the screw rod 287 is opened at the inner center of the screw tube 285, and the silicone block 286 clamps the silicon wafer on the side close to each other.

[0031] According to the above-mentioned preferred technical solution, the workflow of the technical solution is described as follows:

[0032] The cleaning liquid is poured into the inner tank 12 and the machine body 11 is started. The screw tube 285 on the outer ring of the screw rod 287 is moved upward or downward from the middle position to pull the traction arm 284 to drive the clamping arm 283 to move closer to each other. The clamping arm 283 clamps the silicon wafer to be cleaned with the silicone block 286 at the end; the servo electric cylinder 22 drives the movable block 26 to move downward, and the crossbeam 23 and the support beam 27 pull the silicon wafer clamp 28 that clamps the silicon wafer downward into the cleaning liquid. After cleaning, the servo electric cylinder 22 drives the movable block 26 to move upward, and the silicon wafer clamp 28 clamps the silicon wafer to slowly and evenly pull the silicon wafer out of the cleaning liquid, so that the cleaning liquid on the surface of the silicon wafer is slowly discharged.

[0033] The above only describes some exemplary embodiments of the present invention by way of illustration. It is undoubted that those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A slow-pull dehydration structure of an ultrasonic cleaning machine, comprising an ultrasonic cleaning machine (1), characterized in that: The rear surface of the ultrasonic cleaning machine (1) is provided with a slow-pull dehydration mechanism (2); wherein the ultrasonic cleaning machine (1) comprises a body (11) and an inner tank (12) installed in the inner cavity of the body (11); The slow-pull dehydration mechanism (2) comprises a base (21), a servo electric cylinder (22) fixed on the upper surface of the base (21), and a movable block (26) fixed on the top of the telescopic rod of the servo electric cylinder (22), and two cross beams (23) are fixed on the front side of the movable block (26), and two groups of silicon wafer clamps (28) are arranged on the bottom surface of the cross beam (23); The silicon wafer clamp (28) comprises a waterproof stepping motor (281), clamping arms (283) hinged on the left and right sides of the waterproof stepping motor (281), and a screw rod (287) connected to the output end of the waterproof stepping motor (281), and a screw tube (285) is movably arranged on the outer ring surface of the screw rod (287) in an upward and downward manner, and a traction arm (284) is hinged between the left and right sides of the screw tube (285) and the side close to the clamping arm (283).

2. The slow-pull dehydration structure of an ultrasonic cleaning machine according to claim 1, characterized in that: The front surface of the base (21) is fixedly connected to the rear surface of the body (11), and guide rails (25) are fixed on the left and right sides of the top surface of the base (21), and the top ends of the guide rails (25) penetrate the movable block (26).

3. The slow-pull dehydration structure of an ultrasonic cleaning machine according to claim 1, characterized in that: Circular holes for the guide rail (25) to pass through are provided at both sides of the inside of the movable block (26), and a disc having a diameter larger than the circular hole is fixed at the top of the guide rail (25).

4. The slow-pull dehydration structure of an ultrasonic cleaning machine according to claim 1, characterized in that: Two protrusions (24) are fixed on the front side surface of the movable block (26), and the bottom surface of the protrusion (24) is fixedly connected to the upper surface of the crossbeam (23).

5. The slow-pull dehydration structure of an ultrasonic cleaning machine according to claim 1, characterized in that: Two supporting beams (27) are fixed on one side surface of the cross beam (23) close to each other, and the top surface of the waterproof stepping motor (281) is connected to the lower surface of the supporting beam (27).

6. The slow-pull dehydration structure of an ultrasonic cleaning machine according to claim 1, characterized in that: Side blocks (282) are fixed to both left and right sides of the waterproof stepping motor (281), and the top end of the clamping arm (283) is hinged to the side blocks (282).

7. The slow-pull dehydration structure of an ultrasonic cleaning machine according to claim 1, characterized in that: The clamp arm (283) is L-shaped as a whole and an opening is provided at the inner middle section of the clamp arm (283). The left and right ends of the screw tube (285) are hinged to the end of the traction arm (284) that is close to each other, and the end of the traction arm (284) that is far away from each other is hinged to the inner middle section of the clamp arm (283) through an axle pin.

8. The slow-pull dehydration structure of an ultrasonic cleaning machine according to claim 1, characterized in that: A threaded hole that matches the outer thread of the screw rod (287) is provided at the inner center of the screw tube (285), and a silicon wafer is clamped on one side of the silicone block (286) that is close to each other.

9. The slow-pull dehydration structure of an ultrasonic cleaning machine according to claim 1, characterized in that: The inner container (12) is placed on the top port of the body (11), and handles are installed on the left and right side walls of the body (11), a control panel is installed on the front surface of the body (11), and the inner cavity of the inner container (12) contains cleaning liquid.

Images