Telescopic pedal for magnetron sputtering foil penetrating

Abstract

A telescopic pedal for magnetron sputtering foil penetrating is characterized in that a second movable pedal (3) and a first movable pedal (4) are movably installed at the two ends of a main body frame (2) through two movable pedal limiting wheel sets (5) respectively, the height of the second movable pedal (3) and the height of the first movable pedal (4) are staggered, and driving motors (6) are installed at the two ends of the main body frame (2) respectively; the two driving motors (6) are meshed with toothed belts on the lower portion of the second movable pedal (3) and the lower portion of the first movable pedal (4) through gears respectively, and the second movable pedal (3) and the first movable pedal (4) which are telescopic are controlled through the driving motors (6) arranged on the two sides of the main body frame (2). And a stable foil penetrating platform can be provided for workers.

Description

Technical Field

[0001] The utility model relates to a retractable pedal, in particular to a retractable pedal for magnetron sputtering foil penetration. Background Art

[0002] The basic principle of magnetron sputtering is that under vacuum conditions, electrons collide with argon atoms under the action of an electric field to generate Ar positive ions and new electrons; the new electrons fly to the substrate, and the Ar ions are accelerated to fly to the cathode target under the action of the electric field, and bombard the target surface with high energy, causing the target material to sputter. In the prior art, magnetron sputtering vacuum coating machines have been applied to many fields, especially in the fields of composite copper foil, and have broad prospects. Usually, the equipment used for magnetron sputtering is large in size and requires a vacuum chamber to be set up. When starting the machine, it is necessary to manually pierce the foil first. The foil piercing needs to be done while standing on an overhead pedal. The use of a fixed pedal will affect the closing of the cabin door on the one hand, and the installation of a fixed pedal will affect other components on the other hand. Summary of the invention

[0003] In view of the problems existing in the above-mentioned prior art, the utility model provides a retractable pedal for magnetron sputtering foil penetration, which can provide a stable foil penetration platform for workers without affecting the opening and closing of the compartment door or the operation of other components.

[0004] In order to achieve the above-mentioned purpose, the utility model discloses a retractable pedal for magnetron sputtering foil penetration, comprising a pedal, a main frame, a movable pedal second, a movable pedal first, a movable pedal limiting wheel group, a wheel group frame, a movable pedal side limiting wheel, a movable pedal vertical limiting wheel, and a driving motor. The two ends of the main frame are respectively equipped with two sets of movable pedal limiting wheel groups for movably mounting the movable pedal second and the movable pedal first. The movable pedal second and the movable pedal one are staggered in height. The driving motors are respectively installed at the two ends of the main frame. The two driving motors respectively engage the movable pedal second and the toothed belt at the bottom of the movable pedal through gears. The pedal is fixedly installed on the upper surface of the main frame. The movable pedal second and the movable pedal one have the same structure but opposite directions.

[0005] Furthermore, the upper surfaces of the pedal, movable pedal 2 and movable pedal 1 of the utility model are all made of aluminum alloy, and anti-slip patterns are arranged on the surfaces.

[0006] Furthermore, the main frame of the utility model is made by welding steel pipes.

[0007] Furthermore, the driving motor of the utility model is equipped with a reducer.

[0008] Furthermore, the ends of the movable pedal 2 and the movable pedal 1 of the utility model are equipped with anti-collision tapes and are installed with contact indicators.

[0009] Compared with the prior art, the utility model provides retractable movable pedals 2 and 1 on both sides of the main frame, and the driving motor cooperates with the gear to drive the rack arranged under the pedal to push the pedal to extend and retract, and the stability of the movable pedals 2 and 1 is maintained by the movable pedal side limiting wheels on both sides and the upper and lower sides and the movable pedal vertical limiting wheels. The movable pedals 2 and 1 are pushed out by the driving motor, and their front ends are pushed onto the frame components inside the cabin, thereby fixing the movable pedals 2 and 1, so that workers can enter the cabin from the movable pedals 2 and 1 to wear foil. The utility model can not affect the opening and closing of the cabin door and will not affect the operation of other components, thereby providing the staff with a stable foil wearing platform. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0011] Figure 2 yes Figure 1 A partial enlarged view of A in FIG.

[0012] In the figure: 1, pedal, 2, main frame, 3, movable pedal two, 4, movable pedal one, 5, movable pedal limiting wheel group, 5-1, wheel group frame, 5-2, movable pedal side limiting wheel, 5-3, movable pedal vertical limiting wheel, 6, driving motor. DETAILED DESCRIPTION

[0013] The telescopic pedal for magnetron sputtering foil penetration of the present invention is described below in conjunction with the accompanying drawings.

[0014] In the first embodiment of the present application, Figure 1 and Figure 2 As shown, a retractable pedal for magnetron sputtering foil penetration comprises a pedal 1, a main frame 2, a movable pedal 3, a movable pedal 1 4, a movable pedal limiting wheel group 5, a wheel group frame 5-1, a movable pedal side limiting wheel 5-2, a movable pedal vertical limiting wheel 5-3, and a driving motor 6. The two ends of the main frame 2 are respectively provided with two groups of movable pedal limiting wheel groups 5 for movably mounting the movable pedal 2 3 and the movable pedal 1 4. The movable pedal 2 3 and the movable pedal 1 4 are staggered in height. The two movable pedals are at different heights, and staggered storage is achieved, which can effectively extend the length of the movable pedal 2 3 and the movable pedal 1 4. The driving motors 6 are respectively installed at the two ends of the main frame 2. The two driving motors 6 respectively engage the toothed belts at the bottom of the movable pedal 2 3 and the movable pedal 1 4 through gears. The pedal 1 is fixedly mounted on the upper surface of the main frame 2. The movable pedal 2 3 and the movable pedal 1 4 have the same structure but opposite directions.

[0015] The structure of the second embodiment is basically the same as that of the first embodiment, except that the upper surfaces of the pedal 1, movable pedal 2 3 and movable pedal 1 4 of the utility model are all made of aluminum alloy, and anti-slip patterns are provided on the surface, thereby effectively reducing the weight of the pedal and ensuring good structural strength.

[0016] In order to further optimize the working efficiency of the present application, ensure the overall strength of the present invention and reduce the overall weight, the main frame 2 is made of welded steel pipes. In order to make the extension and retraction of the movable pedal 2 3 and the movable pedal 1 4 more stable, the drive motor 6 is equipped with a reducer.

[0017] In order to enable the operator to understand the extension and retraction of the movable pedal 2 3 and the movable pedal 1 4 and stop them in time after contacting the structural parts, the ends of the movable pedal 2 3 and the movable pedal 1 4 are equipped with anti-collision tapes and contact prompters are installed.

[0018] When in use, the magnetron sputtering foil penetration device is installed with a retractable pedal, and then the main frame 2 can be fixed on a vertical mounting frame through the fixing structures on both sides, or installed on the external surface of the machine.

[0019] When the utility model is in use, the specific operations are as follows:

[0020] The pedal is extended and retracted by driving the rack arranged under the pedal through the driving motor 6 in cooperation with the gear, and the movable pedal 2 3 and the movable pedal 1 4 are kept stable through the movable pedal side limiting wheels 5-2 on both sides and the upper and lower sides and the movable pedal vertical limiting wheels 5-3; the movable pedal 2 3 and the movable pedal 1 4 are pushed out by the driving motor 6, and their front ends are pushed onto the frame components inside the cabin, thereby fixing the movable pedal 2 3 and the movable pedal 1 4, so that the worker can enter the cabin from the movable pedal 2 3 and the movable pedal 1 4 to penetrate the foil, and return through this patent after completing the foil penetration, and retract the movable pedal 2 3 and the movable pedal 1 4 through the driving motor 6, so as not to affect the closing of the chamber door of the vacuum chamber and the operation of other components.

[0021] In summary, the retractable pedal for magnetron sputtering foil penetration in the embodiment of the utility model controls the retractable movable pedal 2 3 and the movable pedal 1 4 through the driving motor 6 arranged on both sides of the main frame 2. It can not affect the operation of other components while not affecting the opening and closing of the warehouse door, and can provide the staff with a stable foil penetration platform.

[0022] Those skilled in the art should understand that the discussion of any of the above embodiments is only exemplary and is not intended to imply that the scope of the present invention is limited to these examples; under the concept of the present invention, the technical features in the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other changes in different aspects of the present invention as described above, which are not provided in detail for the sake of simplicity. Any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A retractable pedal for magnetron sputtering foil penetration, comprising a main frame (2), characterized in that: The two ends of the main frame (2) are respectively provided with two sets of movable pedal limiting wheel groups (5) to movably install movable pedal 2 (3) and movable pedal 1 (4), and the movable pedal 2 (3) and movable pedal 1 (4) are staggered in height. Drive motors (6) are respectively installed at the two ends of the main frame (2), and the two drive motors (6) respectively engage the toothed belts at the lower parts of movable pedal 2 (3) and movable pedal 1 (4) through gears. The pedal (1) is fixedly installed on the upper surface of the main frame (2), and the movable pedal 2 (3) and movable pedal 1 (4) have the same structure and opposite directions.

2. The retractable pedal for magnetron sputtering foil penetration according to claim 1, characterized in that: The upper surfaces of the pedal (1), movable pedal 2 (3) and movable pedal 1 (4) are all made of aluminum alloy, and anti-slip patterns are arranged on the surfaces.

3. The retractable pedal for magnetron sputtering foil penetration according to claim 2, characterized in that: The main frame (2) is made by welding steel pipes.

4. The retractable pedal for magnetron sputtering foil penetration according to claim 1, characterized in that: The driving motor (6) is equipped with a reducer.

5. The retractable pedal for magnetron sputtering foil penetration according to claim 4, characterized in that: The ends of the movable pedal 2 (3) and the movable pedal 1 (4) are equipped with anti-collision tapes and are installed with contact indicators.

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