Wafer carrying mechanism

Abstract

The utility model discloses a wafer carrying mechanism, which comprises a main mounting vertical plate, an auxiliary mounting plate arranged on the main mounting vertical plate, a top plate arranged at the top end of a lifting plate frame, a clamping control motor arranged on the top plate, a transverse transmission screw rod arranged at the output end of the clamping control motor, a movable nut arranged on the transverse transmission screw rod, and a movable nut arranged on the movable nut. A clamping guide control block is arranged on the moving nut, auxiliary guide assemblies are arranged on the portions, located on the two sides of the transmission lead screw, of the top plate, the moving portions of the auxiliary guide assemblies are connected with the clamping guide control block through right-angle pieces, an auxiliary mounting bearing seat is arranged on the top plate, a rotating rod is arranged on the auxiliary mounting bearing seat, and a clamping guide block is arranged on the rotating rod. The rotating rod is provided with a wafer clamping assembly, and the rotating rod is provided with an auxiliary connecting assembly. By applying the wafer carrying mechanism, stable clamping and carrying of the wafer are realized, the wafer clamping and carrying efficiency is effectively improved, and the wafer clamping and carrying stability is also improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer cleaning machine chip box transportation, in particular to a wafer transportation mechanism. Background Art

[0002] Wafer refers to the silicon chip used to make silicon semiconductor circuits. Its original material is silicon. High-purity polycrystalline silicon is dissolved and doped with silicon crystal seeds, which are then slowly pulled out to form cylindrical single crystal silicon. After grinding, polishing and slicing, the silicon crystal rods are formed into silicon wafers, that is, wafers. Domestic wafer production lines are mainly 8-inch and 12-inch.

[0003] The main processing methods for wafers are piece processing and batch processing, that is, processing one or more wafers at the same time. As the feature size of semiconductors becomes smaller and smaller, and the processing and measurement equipment becomes more and more advanced, new data characteristics have emerged in wafer processing.

[0004] During the processing of wafers, the wafers need to be transported. The existing transport mechanisms have complex structures, inconvenient operations, unstable transport processes, and low transport efficiency. Therefore, a wafer transport mechanism is designed. Utility Model Content

[0005] The utility model aims to solve the above problems and designs a wafer transport mechanism.

[0006] The technical solution of the utility model for achieving the above-mentioned purpose is a kind of wafer handling mechanism, comprising a main mounting vertical plate, an auxiliary mounting plate is arranged on the main mounting vertical plate, the auxiliary mounting plate is arranged on the lifting guide rail, the lifting guide rail is arranged on the lifting slide block, the lifting slide block is arranged on the lifting plate frame, the top of the lifting plate frame is arranged on the top of the lifting plate frame, a top plate is arranged on the top plate, a clamping control motor is arranged on the output end of the clamping control motor, a transverse transmission screw rod is arranged on the transverse transmission screw rod, a moving nut is arranged on the moving nut, a clamping guide control block is arranged on the moving nut, an auxiliary guide assembly is arranged on both sides of the transmission screw rod on the top plate, the moving part of the auxiliary guide assembly is connected with the clamping guide control block through a right-angle piece, an auxiliary mounting bearing seat is arranged on the top plate, a rotating rod is arranged on the auxiliary mounting bearing seat, a wafer clamping assembly is arranged on the rotating rod, and an auxiliary connecting assembly is arranged on the rotating rod.

[0007] As a further description of the technical solution, a top connecting plate is arranged at the top end of the auxiliary mounting plate, and a mounting base plate is arranged at the bottom end of the auxiliary mounting plate.

[0008] As a further description of the technical solution, a lifting control power motor is arranged on the mounting base plate, a lifting screw rod is arranged on the mounting base plate and the top connecting plate, and a lifting nut is arranged on the lifting screw rod.

[0009] As a further description of the technical solution, the lifting nut is connected to the lifting plate frame, and the output end of the lifting control power motor is connected to the lifting screw rod through a transmission assembly.

[0010] As a further description of the technical solution, the clamping guide control block is provided with an inclined installation guide groove, and the auxiliary connection assembly includes an auxiliary connection long rod clamp arranged on the rotating rod.

[0011] As a further description of the technical solution, a joint bearing is arranged on the auxiliary connecting long rod clamp, and the joint bearing is arranged in a mounting guide groove.

[0012] As a further description of the technical solution, the auxiliary guide assembly includes auxiliary guide rails arranged on the top plate on both sides of the transmission screw, the auxiliary guide rails are provided with auxiliary movable sliders, and the auxiliary movable sliders are provided with right-angle pieces.

[0013] As a further description of the technical solution, the wafer clamping assembly includes a wafer clamping arm arranged on a rotating rod.

[0014] The beneficial effect is that the wafer handling mechanism of the technical solution has an ingenious structural design, strong practicality, and stable operation. By using this wafer handling mechanism, stable clamping and handling of wafers is achieved, which effectively improves the efficiency of wafer clamping and handling, and also improves the stability of wafer clamping and handling. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the installation structure of the lifting guide rail of the utility model;

[0017] Figure 3 It is a schematic diagram of the installation structure of the clamping guide control block of the utility model.

[0018] In the figure, 1. main mounting plate; 2. auxiliary mounting plate; 3. lifting guide rail; 4. lifting slider; 5. lifting plate frame; 6. top plate; 7. clamping control motor; 8. lateral transmission screw; 9. moving nut; 10. clamping guide control block; 11. auxiliary guide assembly; 12. right-angle piece; 13. auxiliary mounting bearing seat; 14. rotating rod; 15. wafer clamping assembly; 16. auxiliary connection assembly; 17. top connecting plate; 18. mounting bottom plate; 19. lifting control power motor; 20. lifting screw; 21. lifting nut; 22. transmission assembly; 23. mounting guide groove; 24. auxiliary connecting long rod clamp; 25. joint bearing; 26. auxiliary guide rail; 27. auxiliary moving slider; 28. wafer clamping arm. DETAILED DESCRIPTION

[0019] The utility model is described in detail below in conjunction with the accompanying drawings. Figure 1-Figure 3 As shown, a wafer handling mechanism includes a main mounting plate 1, on which an auxiliary mounting plate 2 is arranged. In order to facilitate lifting and guiding, a lifting guide rail 3 is arranged on the auxiliary mounting plate 2, and a lifting slider 4 is arranged on the lifting guide rail 3.

[0020] A lifting plate frame 5 is arranged on the lifting slider 4, and a top plate 6 is arranged on the top of the lifting plate frame 5. In order to control the rotation of the transverse transmission screw 8, a clamping control motor 7 is arranged on the top plate 6, and a transverse transmission screw 8 is arranged at the output end of the clamping control motor 7. A moving nut 9 is arranged on the transverse transmission screw 8, and a clamping guide control block 10 is arranged on the moving nut 9.

[0021] In order to facilitate the guidance of the movement process of the clamping guide control block 10, an auxiliary guide assembly 11 is arranged on both sides of the transmission screw on the top plate 6. The auxiliary guide assembly 11 will be described in detail below. The auxiliary guide assembly 11 includes an auxiliary guide rail 26 arranged on both sides of the transmission screw on the top plate 6, an auxiliary movable slider 27 is arranged on the auxiliary guide rail 26, and a right-angle piece 12 is arranged on the auxiliary movable slider 27.

[0022] The moving part of the auxiliary guide assembly 11 is connected to the clamping guide control block 10 via a right-angle piece 12 .

[0023] In order to facilitate the installation of the rotating rod 14, an auxiliary mounting bearing seat 13 is arranged on the top plate 6, and the rotating rod 14 is arranged on the auxiliary mounting bearing seat 13. In order to facilitate the clamping of the wafer, a wafer clamping assembly 15 is arranged on the rotating rod 14. The wafer clamping assembly 15 will be introduced in detail below. The wafer clamping assembly 15 includes a wafer clamping arm 28 arranged on the rotating rod 14.

[0024] In order to facilitate the connection between the rotating rod 14 and the clamping guide control block 10, an auxiliary connecting component 16 is arranged on the rotating rod 14, and an inclined mounting guide groove 23 is arranged on the clamping guide control block 10. The auxiliary connecting component 16 will be described in detail below. The auxiliary connecting component 16 includes an auxiliary connecting long rod clamp 24 arranged on the rotating rod 14, and a joint bearing 25 is arranged on the auxiliary connecting long rod clamp 24, and the joint bearing 25 is arranged in the mounting guide groove 23.

[0025] In order to facilitate the installation of the lifting screw 20, a top connecting plate 17 is provided at the top end of the auxiliary mounting plate 2, a mounting base plate 18 is provided at the bottom end of the auxiliary mounting plate 2, the lifting screw 20 is provided on the mounting base plate 18 and the top connecting plate 17, and a lifting nut 21 is provided on the lifting screw 20.

[0026] In order to facilitate the control of the rotation of the lifting screw 20, a lifting control power motor 19 is arranged on the mounting base 18, the lifting nut 21 is connected to the lifting plate frame 5, and the output end of the lifting control power motor 19 is connected to the lifting screw 20 through a transmission assembly 22.

[0027] The specific structure of the utility model is described in detail above. The working principle of the utility model will be described below: the transmission assembly 22 is driven by the lifting control power motor 19 to transmit, and then the lifting screw rod 20 is driven to rotate. The lifting screw rod 20 rotates, so that the lifting nut 21 drives the lifting plate frame 5 to move up and down, thereby realizing the lifting of the wafer. The horizontal transmission screw rod 8 is driven to rotate by the clamping control motor 7, and then the moving nut 9 is driven to move. The moving nut 9 drives the clamping guide control block 10 to move. As the clamping guide control block 10 moves back and forth, under the cooperation of the installation guide groove 23 and the joint bearing 25, the auxiliary connecting long rod clamp 24 and the rotating rod 14 are driven to rotate, so that the rotating rod 14 drives the wafer clamping arm 28 to clamp the wafer. The wafer handling mechanism of the present technical solution has a clever structural design, strong practicality, and stable working operation. The use of this wafer handling mechanism can realize stable clamping and handling of the wafer, effectively improve the efficiency of wafer clamping and handling, and also improve the stability of wafer clamping and handling.

[0028] The above technical solutions only reflect the preferred technical solutions of the technical solutions of the utility model. Some changes that may be made to certain parts thereof by technicians in this technical field all reflect the principles of the utility model and fall within the protection scope of the utility model.

Claims

1. A wafer transport mechanism, characterized in that: The invention comprises a main mounting plate (1), an auxiliary mounting plate (2) is arranged on the main mounting plate (1), a lifting guide rail (3) is arranged on the auxiliary mounting plate (2), a lifting slider (4) is arranged on the lifting guide rail (3), a lifting plate frame (5) is arranged on the lifting slider (4), a top plate (6) is arranged at the top of the lifting plate frame (5), a clamping control motor (7) is arranged on the top plate (6), a transverse transmission screw rod (8) is arranged at the output end of the clamping control motor (7), and a movable nut (9) is arranged on the transverse transmission screw rod (8) The movable nut (9) is provided with a clamping guide control block (10), the top plate (6) is provided with auxiliary guide components (11) on both sides of the transmission screw, the movable part of the auxiliary guide component (11) is connected to the clamping guide control block (10) through a right-angle piece (12), the top plate (6) is provided with an auxiliary mounting bearing seat (13), the auxiliary mounting bearing seat (13) is provided with a rotating rod (14), the rotating rod (14) is provided with a wafer clamping component (15), and the rotating rod (14) is provided with an auxiliary connecting component (16).

2. A wafer transport mechanism according to claim 1, characterized in that: A top connecting plate (17) is arranged at the top end of the auxiliary mounting plate (2), and a mounting bottom plate (18) is arranged at the bottom end of the auxiliary mounting plate (2).

3. A wafer transport mechanism according to claim 2, characterized in that: A lifting control power motor (19) is arranged on the installation base plate (18), a lifting screw rod (20) is arranged on the installation base plate (18) and the top connecting plate (17), and a lifting nut (21) is arranged on the lifting screw rod (20).

4. A wafer transport mechanism according to claim 3, characterized in that: The lifting nut (21) is connected to the lifting plate frame (5), and the output end of the lifting control power motor (19) is connected to the lifting screw rod (20) through a transmission component (22).

5. The wafer transport mechanism according to claim 1, characterized in that: The clamping guide control block (10) is provided with an inclined installation guide groove (23), and the auxiliary connection assembly (16) comprises an auxiliary connection long rod clamp (24) arranged on the rotating rod (14).

6. The wafer transport mechanism according to claim 5, characterized in that: The auxiliary connecting long rod clamp (24) is provided with a joint bearing (25), and the joint bearing (25) is arranged in the installation guide groove (23).

7. The wafer transport mechanism according to claim 1, characterized in that: The auxiliary guide assembly (11) comprises auxiliary guide rails (26) arranged on the top plate (6) and located on both sides of the transmission screw rod, the auxiliary guide rails (26) are provided with auxiliary movable sliders (27), and the auxiliary movable sliders (27) are provided with right-angle pieces (12).

8. The wafer transport mechanism according to claim 1, characterized in that: The wafer clamping assembly (15) comprises a wafer clamping arm (28) arranged on a rotating rod (14).

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