Cover plate lifting device and semiconductor processing equipment

Abstract

The utility model belongs to the technical field of semiconductor processing, and discloses a cover plate lifting device and semiconductor processing equipment, a transmission assembly of the cover plate lifting device comprises a first transmission part and a second transmission part which are arranged on a cover plate structure at an interval, and a driving assembly comprises a first lifting part and a second lifting part. The first transmission part is detachably connected to the first lifting part, the second transmission part is detachably connected to the second lifting part, and the first lifting part and the second lifting part simultaneously drive the first transmission part and the second transmission part to ascend and descend in a reciprocating mode so that the cover plate structure can ascend and descend in a reciprocating mode. When the cover plate lifting device is in a separated state, the first transmission part is separated from the first lifting part, the second transmission part is separated from the second lifting part, and the cover plate structure is in a free state. According to the cover plate lifting device, the movement stability and the position precision of the cover plate structure can be improved, and the degree of freedom of the cover plate structure during covering is guaranteed so that the technological operation convenience can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a cover lifting device and semiconductor processing equipment. Background Art

[0002] Chemical vapor deposition (CVD) is a technology that deposits the required thin film material on a substrate through a chemical reaction of gaseous substances under high temperature and vacuum conditions. It has the advantages of easy control of film composition and thickness, good uniformity and repeatability, wide application range, simple equipment, etc. It is widely used in integrated circuits, solar cells, semiconductor devices, coating materials and other fields. Chemical vapor deposition occurs in the reaction chamber of the CVD equipment. The structure of the reaction chamber usually includes a chamber body and an upper cover plate covering the chamber body. The chamber body has a vacuum environment required for the reaction.

[0003] There are several measuring components distributed on the upper cover. When debugging the process and replacing parts in the chamber, a motor or cylinder is needed as a power source to open the upper cover. The upper cover is generally made of metal material and has a large deadweight. When the power source lifts the upper cover on one side, it is easy to cause instability in the lifting action, affecting the position accuracy of the upper cover. In addition, the power source and the upper cover are connected by a transmission structure. Affected by the transmission accuracy of the transmission structure, the closing force of the upper cover on the chamber body is difficult to accurately control, thereby affecting the vacuum degree in the chamber body and having a greater impact on the consistency of the process. Moreover, during the closing of the upper cover, the transmission structure will affect the degree of freedom of the upper cover, causing inconvenience to the connection between the upper cover and the measuring components. Utility Model Content

[0004] One purpose of the utility model is to provide a cover plate lifting device, which is used to solve the problems that the existing cover plate lifting device has unstable lifting action for unilateral lifting of the upper cover plate, insufficient position accuracy of the upper cover plate, and the covering force of the upper cover plate on the chamber body is difficult to accurately control, and the transmission structure will affect the freedom of the upper cover plate during the covering period, thereby affecting the process operation.

[0005] Another object of the utility model is to provide semiconductor processing equipment, which has a cover lifting device that can solve the problems of unstable lifting action of unilateral lifting of the upper cover, insufficient position accuracy of the upper cover, and difficulty in accurately controlling the closing force of the upper cover, and the transmission structure affecting the freedom of the upper cover during closing, so as to improve the process operation convenience of the semiconductor processing equipment.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] In a first aspect, a cover lifting device is provided for lifting a cover structure, the cover lifting device comprising a driving assembly and a transmission assembly, the transmission assembly comprising a first transmission member and a second transmission member which are spaced apart and respectively arranged on the cover structure, the driving assembly comprising a first lifting member and a second lifting member, the cover lifting device having a lifting state and a separation state, when the cover lifting device is in the lifting state, the first transmission member is detachably connected to the first lifting member, and the second transmission member is detachably connected to the second lifting member, the first lifting member and the second lifting member can simultaneously drive the first transmission member and the second transmission member to lift and reciprocate, so that the cover structure can lift and reciprocate; when the cover lifting device is in the separation state, the first transmission member is detached from the first lifting member, and the second transmission member is detached from the second lifting member, so that the cover structure is in a free state.

[0008] In one embodiment, one of the first transmission member and the first lifting member has a first limiting groove, and the other has a first limiting block, and the first lifting member can move toward or away from the first transmission member so that the first limiting block is engaged with or disengaged from the first limiting groove; and / or,

[0009] One of the second transmission member and the second lifting member has a second limiting groove, and the other has a second limiting block. The second lifting member can move toward or away from the second transmission member so that the second limiting block is clamped in or disengaged from the second limiting groove.

[0010] In one embodiment, one of the first transmission member and the first lifting member has the first limit groove, and the other has the first limit block, and the first limit block can be clamped in the first limit groove, and one of the second transmission member and the second lifting member has the second limit groove, and the other has the second limit block, and the second limit block can be clamped in the second limit groove, and one of the first limit block and the second limit block is a rotating body, and the other is a non-rotating body, and the axis of the rotating body extends along the lifting direction of the cover structure.

[0011] In one embodiment, the rotating body is a conical pin stage, the first limiting groove is a conical pin hole, and along the lifting direction of the cover plate structure, the small diameter end and the large diameter end of the conical pin stage are arranged in sequence from bottom to top, and the small diameter end and the large diameter end of the conical pin hole are arranged in sequence from bottom to top, when the first limiting block is engaged with the first limiting groove, the outer side surface of the conical pin stage abuts against the inner hole wall of the conical pin hole, and the small diameter end of the conical pin hole can stop the conical pin stage;

[0012] The non-rotating body is a polyhedral frustum body, and the second limiting groove is a polyhedral cone pin hole. Along the lifting direction of the cover plate structure, the small diameter end and the large diameter end of the polyhedral cone body are arranged in sequence from bottom to top, and the small diameter end and the large diameter end of the polyhedral cone pin hole are arranged in sequence from bottom to top. When the second limiting block is engaged with the second limiting groove, the outer side surface of the polyhedral cone body abuts against the inner hole wall of the polyhedral cone pin hole, and the small diameter end of the polyhedral cone pin hole can stop the polyhedral cone body.

[0013] In one embodiment, the transmission assembly has the first limiting block and the second limiting block, and the driving assembly has the first limiting groove and the second limiting groove;

[0014] The first transmission member also includes a first support arm, and the second transmission member also includes a second support arm. The first support arm and the second support arm are respectively detachably connected to the cover structure. The first support arm and the second support arm are spaced apart and parallel to each other. The first limit block is connected to the first support arm, and the second limit block is connected to the second support arm; and / or, the first lifting member is a first fixed plate, and the second lifting member is a second fixed plate. The first limit groove is opened on the first fixed plate, and the second limit groove is opened on the second fixed plate.

[0015] In one embodiment, a plurality of first limit blocks are provided, and the plurality of first limit blocks are arranged at intervals along the lifting direction of the cover structure, and a plurality of first limit grooves are provided, and the plurality of first limit grooves correspond to the plurality of first limit blocks one by one; and / or,

[0016] There are a plurality of second limit blocks, which are spaced apart along the lifting direction of the cover structure. There are a plurality of second limit grooves, which correspond one to one to the plurality of second limit grooves.

[0017] In one embodiment, the driving assembly further includes a lifting plate and a lifting motor, the first lifting member and the second lifting member are detachably connected to the lifting plate, and the output end of the lifting motor is transmission-connected to the lifting plate so that the lifting plate drives the first lifting member and the second lifting member to lift and lower at the same time.

[0018] In one embodiment, the driving assembly includes two lifting motors, which are respectively arranged on both sides of the cover plate structure, and the two lifting motors respectively drive both ends of the lifting plate at the same time; and / or,

[0019] The driving assembly also includes a guide column and a guide bearing. The guide bearing is arranged on the lifting plate. The guide column extends along the lifting direction of the cover structure. The guide bearing is slidably connected to the guide column. The lifting motor is an electric push rod. The push rod of the electric push rod is connected to the guide bearing.

[0020] In one embodiment, the lifting motor is a variable frequency motor to adjust the lifting torque.

[0021] In a second aspect, a semiconductor processing device is provided, comprising a cover lifting device as described above, wherein the semiconductor processing device also comprises a cover structure and a chamber with an opening at one end, and the cover lifting device is connected to the cover structure to drive the cover structure to close or open the chamber.

[0022] Beneficial effects of the utility model:

[0023] The cover plate lifting device and semiconductor processing equipment provided by the utility model have a lifting state and a separation state. When the cover plate lifting device is in the lifting state, the first transmission member is detachably connected to the first lifting member, and the second transmission member is detachably connected to the second lifting member. The first lifting member and the second lifting member can simultaneously drive the first transmission member and the second transmission member to lift and lower back and forth, so that the cover plate structure can lift and lower back and forth. In this way, the first transmission member and the second transmission member form a two-side lifting of the cover plate structure. Compared with the unilateral lifting, the lifting force applied by the first lifting member and the second lifting member to the cover plate structure is more stable and uniform, ensuring the stability of the lifting action of the cover plate structure and the position accuracy of the cover plate structure on the process chamber. When the cover plate lifting device is in the separation state, the first transmission member is separated from the first lifting member, and the second transmission member is separated from the second lifting member, so that the cover plate structure is in a free state. The covering force of the cover plate structure on the process chamber is determined by its own weight, which can be accurately controlled and is not affected by the first lifting member and the second lifting member, thereby ensuring the vacuum degree in the process chamber and providing a consistent process environment. Moreover, since the first transmission member is separated from the first lifting member, and the second transmission member is separated from the second lifting member, the cover plate structure is in a free state, which is convenient for checking and replacing measuring components. Even if the driving component malfunctions, it will not affect the cover plate structure, ensuring the process consistency of semiconductor processing equipment and improving the process operation convenience of semiconductor processing equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a structural schematic diagram of the cover lifting device provided by an embodiment of the utility model;

[0025] Figure 2 It is a disassembly schematic diagram of the first lifting member connected to the first limiting block provided by an embodiment of the utility model;

[0026] Figure 3It is a disassembly schematic diagram of the second lifting member connected to the second limiting block provided by an embodiment of the utility model;

[0027] Figure 4 It is a structural sectional view of a cover lifting device provided in an embodiment of the utility model.

[0028] In the figure:

[0029] 1. Driving assembly; 11. First lifting member; 111. First limiting groove; 12. Second lifting member; 121. Second limiting groove; 13. Lifting plate; 14. Lifting motor; 15. Guide column; 16. Guide bearing;

[0030] 2. Transmission assembly; 21. First transmission member; 211. First limit block; 212. First support arm; 22. Second transmission member; 221. Second limit block; 222. Second support arm;

[0031] 100. Cover plate structure. DETAILED DESCRIPTION

[0032] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0033] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0035] In the description of this embodiment, the terms "upper", "lower", "left", "right" and other directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0036] like Figure 1 As shown, this embodiment first provides a cover lifting device, which is used to lift the cover structure 100. The cover structure 100 can be covered on the top of the process chamber (not shown in the figure) to maintain the vacuum environment in the process chamber. The cover lifting device includes a drive assembly 1 and a transmission assembly 2, the transmission assembly 2 includes a first transmission member 21 and a second transmission member 22 that are arranged at intervals and are respectively arranged on the cover structure 100, and the drive assembly 1 includes a first lifting member 11 and a second lifting member 12.

[0037] The cover lifting device has a lifting state and a separation state. When the cover lifting device is in the lifting state, the first transmission member 21 is detachably connected to the first lifting member 11, and the second transmission member 22 is detachably connected to the second lifting member 12. The first lifting member 11 and the second lifting member 12 can simultaneously drive the first transmission member 21 and the second transmission member 22 to lift and reciprocate, thereby realizing the reciprocating lifting of the cover structure 100; in this way, the first transmission member 21 and the second transmission member 22 form a two-side lifting of the cover structure 100. Compared with the unilateral lifting, the lifting force applied by the first lifting member 11 and the second lifting member 12 to the cover structure 100 is more stable and uniform, thereby ensuring the stability of the lifting action of the cover structure 100 and the position accuracy of the cover on the process chamber. When the cover plate lifting device is in a separated state, the first transmission member 21 is separated from the first lifting member 11, and the second transmission member 22 is separated from the second lifting member 12, so that the cover plate structure 100 is in a free state. At this time, the covering force of the cover plate structure 100 on the process chamber is determined by its own weight, which can be precisely controlled and is not affected by the first lifting member 11 and the second lifting member 12, thereby ensuring the vacuum degree in the process chamber and providing a consistent process environment. Moreover, since the first transmission member 21 is separated from the first lifting member 11, and the second transmission member 22 is separated from the second lifting member 12, the cover plate structure 100 is in a free state, which is convenient for checking and replacing measuring components. Even if the drive component 1 malfunctions, it will not affect the cover plate structure 100, thereby ensuring the reliability of covering.

[0038] In one embodiment, one of the first transmission member 21 and the first lifting member 11 has a first limiting groove 111, and the other has a first limiting block 211. The first lifting member 11 can move toward or away from the first transmission member 21, so that the first limiting block 211 is clamped in or disengaged from the first limiting groove 111. The clamping connection and connection and disengagement of the first limiting block 211 and the first limiting groove 111 are relatively easy to implement and have a simple structure.

[0039] In one embodiment, one of the second transmission member 22 and the second lifting member 12 has a second limiting groove 121, and the other has a second limiting block 221. The second lifting member 12 can move toward or away from the second transmission member 22, so that the second limiting block 221 is clamped in or disengaged from the second limiting groove 121. The clamping connection and connection and disengagement of the second limiting block 221 and the second limiting groove 121 are relatively easy to implement and have a simple structure.

[0040] In order to improve the convenience of processing, the above-mentioned clamping structure is simultaneously adopted between the driving component 1 and the transmission component 2. That is, one of the first transmission component 21 and the first lifting component 11 has a first limiting groove 111, and the other has a first limiting block 211, and the first limiting block 211 can be clamped in the first limiting groove 111, and one of the second transmission component 22 and the second lifting component 12 has a second limiting groove 121, and the other has a second limiting block 221, and the second limiting block 221 can be clamped in the second limiting groove 121, so that the synchronization of the clamping action of the first limiting block 211 and the second limiting block 221 can be ensured.

[0041] One of the first limit block 211 and the second limit block 221 is a rotating body, and the other is a non-rotating body. The axis of the rotating body extends along the lifting direction of the cover plate structure 100. The structure of the non-rotating body can limit relative rotation and prevent the cover plate structure 100 from rotating relative to the first transmission member 21 and the second transmission member 22. At the same time, the rotating body can avoid over-constraint between the drive assembly 1 and the transmission assembly 2. When the first limit block 211 and the second limit block 221 are installed on the cover plate structure 100, if there is a processing error in the non-rotating body or the corresponding limit groove, the position of the non-rotating body can be adjusted so that the non-rotating body and the corresponding limit groove can be snap-fitted. The assembly position between the non-rotating body and the corresponding limit groove does not need to be adjusted and is determined by the processing accuracy, thereby ensuring that the first limit block 211 and the second limit block 221 can always be lifted and lowered along their respective axes without getting stuck.

[0042] Specifically, in one embodiment, the rotating body is a conical pin table, such as Figure 2As shown, the first limiting groove 111 is a conical pin hole; along the lifting direction of the cover plate structure 100, the small diameter end and the large diameter end of the conical pin stage are arranged in sequence from bottom to top, and the small diameter end and the large diameter end of the conical pin hole are arranged in sequence from bottom to top. When the first limiting block 211 is clamped with the first limiting groove 111, the outer side surface of the conical pin stage abuts against the inner hole wall of the conical pin hole, and the small diameter end of the conical pin hole can stop the conical pin stage, as shown in FIG. Figure 4 As shown. When the cover plate lifting device is transformed from a free state to a lifting state, the first limiting groove 111 moves from bottom to top, and when the inner hole wall of the conical pin hole abuts against the outer side surface of the conical pin stage, the first limiting block 211 and the first limiting groove 111 are clamped together. At this time, the first lifting member 11 can drive the cover plate structure 100 to lift. Due to the limitation of the small diameter end of the conical pin hole, the first limiting block 211 will not be separated from the first limiting groove 111. On the contrary, when the cover plate lifting device is transformed from a lifting state to a free state, the first limiting groove 111 moves from top to bottom until the inner hole wall of the conical pin hole is separated from the outer side surface of the conical pin stage, completing the separation of the first limiting block 211 and the first limiting groove 111.

[0043] The non-rotating body is a polyhedral frustum, such as Figure 3 As shown, the second limiting groove 121 is a multifaceted cone pin hole. Along the lifting direction of the cover plate structure 100, the small diameter end and the large diameter end of the multifaceted cone body are arranged in sequence from bottom to top, and the small diameter end and the large diameter end of the multifaceted cone pin hole are arranged in sequence from bottom to top. When the second limiting block 221 is engaged with the second limiting groove 121, the outer side surface of the multifaceted cone body abuts against the inner hole wall of the multifaceted cone pin hole, and the small diameter end of the multifaceted cone pin hole can stop the multifaceted cone body. When the cover plate lifting device is transformed from a free state to a lifting state, the second limiting groove 121 moves from bottom to top, and when the inner hole wall of the multifaceted cone pin hole abuts against the outer side surface of the multifaceted cone body, the second limiting block 221 and the second limiting groove 121 are engaged. At this time, the second lifting member 12 can drive the cover plate structure 100 to lift. Due to the limitation of the small diameter end of the multifaceted cone pin hole, the second limiting block 221 will not be separated from the second limiting groove 121. On the contrary, when the cover lifting device is transformed from the lifting state to the free state, the second limiting groove 121 moves from top to bottom until the inner hole wall of the multi-faceted cone pin hole is separated from the outer side surface of the multi-faceted cone body, completing the separation of the second limiting block 221 and the second limiting groove 121.

[0044] In one embodiment, the transmission assembly 2 has a first limit block 211 and a second limit block 221, and the driving assembly 1 has a first limit groove 111 and a second limit groove 121. The first transmission member 21 also includes a first support arm 212, and the second transmission member 22 also includes a second support arm 222. The first support arm 212 and the second support arm 222 are respectively detachably connected to the cover structure 100, and the first support arm 212 and the second support arm 222 are spaced and parallel to each other. The first limit block 211 is connected to the first support arm 212, and the second limit block 221 is connected to the second support arm 222. The first support arm 212 and the second support arm 222 increase the supporting torque of the first limit block 211 and the second limit block 221 on the cover structure 100, so that the movement of the cover structure 100 is smoother.

[0045] When installing the first support arm 212 and the second support arm 222 on the cover plate structure 100, the first limit block 211 is a rotating body and the second limit block 221 is a non-rotating body. In order to ensure the parallelism between the first support arm 212 and the second support arm 222, the second limit block 221 and the second limit groove 121 are firstly engaged to confirm the position of the second support arm 222. Then, the first limit block 211 can be rotated in the first limit groove 111 to adjust the position of the first support arm 212 so that it is parallel to the second support arm 222. Then, the connection between the first support arm 212 and the second support arm 222 and the cover plate structure 100 is locked by fasteners such as screws. This cooperation of the rotating body and the non-rotating body not only realizes stable limiting during the movement, but also improves the assembly accuracy, thereby ensuring the movement accuracy of the cover plate structure 100.

[0046] The first lifting member 11 is a first fixed plate, the second lifting member 12 is a second fixed plate, the first limiting groove 111 is opened on the first fixed plate, the second limiting groove 121 is opened on the second fixed plate, the first fixed plate and the second fixed plate are both L-shaped plates, and the first limiting groove 111 and the second limiting groove 121 are both opened on the horizontal plate of the L-shaped plate.

[0047] In order to further improve the stability of the movement of the cover structure 100, a plurality of first limit blocks 211 are provided, and the plurality of first limit blocks 211 are arranged at intervals along the lifting direction of the cover structure 100. A plurality of first limit grooves 111 are provided, and the plurality of first limit grooves 111 correspond to the plurality of first limit blocks 211 one by one. Figure 1 As shown in the figure, two first limiting blocks 211 are arranged at intervals along the lifting direction of the cover plate structure 100, and correspondingly, two first fixing plates with first limiting grooves 111 are also arranged at corresponding intervals.

[0048] Similarly, a plurality of second limit blocks 221 may be provided, and the plurality of second limit blocks 221 are arranged at intervals along the lifting direction of the cover plate structure 100, and a plurality of second limit grooves 121 are provided, and the plurality of second limit grooves 121 correspond to the plurality of second limit blocks 221 one by one. Figure 1 As shown in the figure, two second limiting blocks 221 are arranged at intervals along the lifting direction of the cover plate structure 100, and correspondingly, two second fixing plates with second limiting grooves 121 are also arranged at corresponding intervals.

[0049] In order to improve the synchronization of the movement of the first lifting member 11 and the second lifting member 12, the driving assembly 1 also includes a lifting plate 13, and a lifting motor 14 is used as a power source. The first fixed plate and the second fixed plate can be detachably connected to the lifting plate 13, and the output end of the lifting motor 14 is connected to the lifting plate 13 in a transmission manner, so that the lifting plate 13 drives the first lifting member 11 and the second lifting member 12 to rise and fall at the same time. When it is necessary to improve the power performance, the driving assembly 1 can be provided with two lifting motors 14, and the two lifting motors 14 are respectively provided on both sides of the cover structure 100, and the two lifting motors 14 drive the two ends of the lifting plate 13 at the same time.

[0050] The driving assembly 1 is also provided with a guide column 15 and a guide bearing 16. The guide bearing 16 is provided on the lifting plate 13. The guide column 15 extends along the lifting direction of the cover plate structure 100. The guide bearing 16 is slidably connected to the guide column 15. The lifting motor 14 is an electric push rod, and the push rod of the electric push rod is connected to the guide bearing 16. The guide column 15 and the guide bearing 16 provide motion guidance for the lifting action of the lifting plate 13, thereby improving the position accuracy. The electric push rod has a simple structure, does not require an intermediate transmission structure, has a strong heavy-load capacity, and is suitable for the lifting requirements of the cover plate structure 100.

[0051] In one embodiment, the lifting motor 14 is a variable frequency motor to adjust the lifting torque. Through the change of the output torque, the lifting torque applied by the lifting motor 14 to the first transmission member 21 and the second transmission member 22 through the first lifting member 11 and the second lifting member 12 is changed. When the cover lifting device is transformed from the separation state to the lifting state, the first lifting member 11 connects to the first transmission member 21 and applies a lifting force to the first transmission member 21, and the second lifting member 12 connects to the second transmission member 22 and applies a lifting force to the second transmission member 22. The lifting force gradually increases until the lifting force is greater than the deadweight of the cover structure 100. Only then will the first lifting member 11 and the second lifting member 12 drive the cover structure 100 to lift, and the cover structure 100 is slowly subjected to force to avoid instantaneous lifting action. Correspondingly, the cover structure 100 is also slowly subjected to force during its descent, and the lifting force applied by the lifting motor 14 gradually decreases, while the covering force applied by the cover structure 100 on the process chamber gradually increases, until the cover lifting device is transformed from the lifting state to the separation state. The covering force of the cover structure 100 on the process chamber is its own gravity, which avoids the impact force on the process chamber caused by the instantaneous covering action, thereby increasing the service life of the semiconductor processing equipment.

[0052] In order to detect and control the lifting stroke of the cover plate structure 100, the cover plate lifting device is also provided with a lifting switch, which can detect the position of the cover plate structure 100, and after reaching the set position, the control system stops the lifting motor 14 to increase safety and avoid damage caused by over-lifting of the cover plate structure 100. The specific structure and control principle of the lifting switch can be set with reference to the prior art, and will not be described in detail in this embodiment.

[0053] This embodiment also provides a semiconductor processing equipment, which includes the above-mentioned cover lifting device, and the semiconductor processing equipment also includes a cover structure 100 and a chamber with one end open. The cover lifting device is connected to the cover structure 100 to drive the cover structure 100 to close or open the chamber.

[0054] When the cover plate lifting device is in the lifting state, the first lifting member 11 and the second lifting member 12 simultaneously drive the first transmission member 21 and the second transmission member 22 to lift and lower back and forth, forming lifting on both sides, and the lifting force applied to the cover plate structure 100 is more stable and uniform, ensuring the stability of the lifting action of the cover plate structure 100 and the position accuracy of the cover plate structure 100 on the process chamber. When the cover plate lifting device is in the separated state, the first transmission member 21 is separated from the first lifting member 11, and the second transmission member 22 is separated from the second lifting member 12. The covering force of the cover plate structure 100 on the process chamber is determined by its own weight and can be precisely controlled without being affected by the first lifting member 11 and the second lifting member 12, thereby ensuring the vacuum degree of the semiconductor processing equipment and providing a consistent process environment. Moreover, the cover plate structure 100 in the free state is convenient for inspection, replacement of measuring components and other operations, thereby improving the operating convenience of the semiconductor processing equipment.

[0055] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. A cover plate lifting device, used for lifting a cover plate structure (100), characterized in that: The cover plate lifting device comprises a driving assembly (1) and a transmission assembly (2), the transmission assembly (2) comprising a first transmission member (21) and a second transmission member (22) which are arranged at intervals and are respectively arranged on the cover plate structure (100), the driving assembly (1) comprising a first lifting member (11) and a second lifting member (12), the cover plate lifting device has a lifting state and a separation state, when the cover plate lifting device is in the lifting state, the first transmission member (21) is detachably connected to the first lifting member (11), and the second transmission member (22) is detachably connected to the first lifting member (11), and the second transmission member (22) is detachably connected to the first lifting member (11), and the second transmission member (22) is detachably connected to the first lifting member (11). The first lifting member (11) and the second lifting member (12) are detachably connected to the second lifting member (12); the first lifting member (11) and the second lifting member (12) can simultaneously drive the first transmission member (21) and the second transmission member (22) to be lifted and lowered reciprocatingly, so that the cover plate structure (100) is lifted and lowered reciprocatingly; when the cover plate lifting device is in a separated state, the first transmission member (21) is separated from the first lifting member (11), and the second transmission member (22) is separated from the second lifting member (12), so that the cover plate structure (100) is in a free state.

2. The cover lifting device according to claim 1, characterized in that: One of the first transmission member (21) and the first lifting member (11) has a first limiting groove (111), and the other has a first limiting block (211), and the first lifting member (11) is capable of moving toward or away from the first transmission member (21) so that the first limiting block (211) is engaged with or disengaged from the first limiting groove (111); and / or One of the second transmission member (22) and the second lifting member (12) has a second limiting groove (121), and the other has a second limiting block (221); the second lifting member (12) can move toward or away from the second transmission member (22) so that the second limiting block (221) is engaged with or disengaged from the second limiting groove (121).

3. The cover lifting device according to claim 2, characterized in that: One of the first transmission member (21) and the first lifting member (11) has the first limiting groove (111), and the other has the first limiting block (211), and the first limiting block (211) can be clamped in the first limiting groove (111); and one of the second transmission member (22) and the second lifting member (12) has the second limiting groove (121), and the other has the second limiting block (221), and the second limiting block (221) can be clamped in the second limiting groove (121); one of the first limiting block (211) and the second limiting block (221) is a rotating body, and the other is a non-rotating body, and the axis of the rotating body extends along the lifting direction of the cover plate structure (100).

4. The cover lifting device according to claim 3, characterized in that: The rotating body is a conical pin stage, the first limiting groove (111) is a conical pin hole, and along the lifting direction of the cover plate structure (100), the small diameter end and the large diameter end of the conical pin stage are arranged in sequence from bottom to top, and the small diameter end and the large diameter end of the conical pin hole are arranged in sequence from bottom to top, when the first limiting block (211) is engaged with the first limiting groove (111), the outer side surface of the conical pin stage abuts against the inner hole wall of the conical pin hole, and the small diameter end of the conical pin hole can stop the conical pin stage; The non-rotating body is a polyhedral frustum body, and the second limiting groove (121) is a polyhedral cone pin hole. Along the lifting direction of the cover plate structure (100), the small diameter end and the large diameter end of the polyhedral frustum body are arranged in sequence from bottom to top, and the small diameter end and the large diameter end of the polyhedral cone pin hole are arranged in sequence from bottom to top. When the second limiting block (221) is engaged with the second limiting groove (121), the outer side surface of the polyhedral frustum body abuts against the inner hole wall of the polyhedral cone pin hole, and the small diameter end of the polyhedral cone pin hole can stop the polyhedral frustum body.

5. The cover lifting device according to claim 2, characterized in that: The transmission assembly (2) comprises the first limiting block (211) and the second limiting block (221), and the driving assembly (1) comprises the first limiting groove (111) and the second limiting groove (121); The first transmission member (21) further comprises a first support arm (212), and the second transmission member (22) further comprises a second support arm (222); the first support arm (212) and the second support arm (222) are respectively detachably connected to the cover plate structure (100); the first support arm (212) and the second support arm (222) are spaced apart and parallel to each other; the first limit block (211) is connected to the first support arm (212), and the second limit block (221) is connected to the second support arm (222); and / or the first lifting member (11) is a first fixed plate, and the second lifting member (12) is a second fixed plate; the first limit groove (111) is provided on the first fixed plate, and the second limit groove (121) is provided on the second fixed plate.

6. The cover lifting device according to claim 2, characterized in that: A plurality of the first limiting blocks (211) are provided, and the plurality of the first limiting blocks (211) are arranged at intervals along the lifting direction of the cover plate structure (100); a plurality of the first limiting grooves (111) are provided, and the plurality of the first limiting grooves (111) and the plurality of the first limiting blocks (211) correspond one to one; and / or, A plurality of the second limit blocks (221) are provided, and the plurality of the second limit blocks (221) are arranged at intervals along the lifting direction of the cover plate structure (100); a plurality of the second limit grooves (121) are provided, and the plurality of the second limit grooves (121) correspond one to one to the plurality of the second limit blocks (221).

7. The cover lifting device according to any one of claims 1 to 6, characterized in that: The driving assembly (1) further comprises a lifting plate (13) and a lifting motor (14); the first lifting member (11) and the second lifting member (12) are detachably connected to the lifting plate (13); an output end of the lifting motor (14) is drivingly connected to the lifting plate (13), so that the lifting plate (13) drives the first lifting member (11) and the second lifting member (12) to rise and fall at the same time.

8. The cover lifting device according to claim 7, characterized in that: The driving assembly (1) comprises two lifting motors (14), the two lifting motors (14) are respectively arranged on two sides of the cover plate structure (100), and the two lifting motors (14) respectively drive two ends of the lifting plate (13) simultaneously; and / or, The driving assembly (1) further comprises a guide column (15) and a guide bearing (16), wherein the guide bearing (16) is arranged on the lifting plate (13), the guide column (15) extends along the lifting direction of the cover plate structure (100), the guide bearing (16) is slidably connected to the guide column (15), and the lifting motor (14) is an electric push rod, the push rod of the electric push rod is connected to the guide bearing (16).

9. The cover lifting device according to claim 7, characterized in that: The lifting motor (14) is a variable frequency motor to adjust the lifting torque.

10. Semiconductor processing equipment, characterized in that It comprises a cover lifting device as described in any one of claims 1 to 9, and the semiconductor processing equipment also comprises a cover structure (100) and a chamber with one end open, and the cover lifting device is connected to the cover structure (100) to drive the cover structure (100) to close or open the chamber.

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