Packaging and sealing base of piezoresistive pressure sensor

Abstract

The utility model discloses a packaging and sealing base of a piezoresistive pressure sensor, which relates to the technical field of sealing bases of pressure sensors and comprises a sealing base. According to the packaging and sealing base of the piezoresistive pressure sensor, in the connecting process of a first plug and a second plug, the second plug is inserted into an air guide hole, so that the end part of the second plug is in contact with a positioning block, and the positioning block moves along the interior of a moving groove; meanwhile, a sliding block is driven to be compressed along the interior of a sliding groove, a supporting spring is driven to be compressed till a positioning block completely enters a moving groove, so that a second plug is connected with an air guide hole till a positioning groove corresponds to the positioning block, and the positioning block is inserted into the positioning groove under the elastic potential energy of the supporting spring; therefore, tightness between the first plug and the second plug is improved, and oil leakage of the second cavity is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of handles, in particular to a packaging sealing base of a piezoresistive pressure sensor. Background Art

[0002] The piezoresistive pressure sensor is constructed by utilizing the piezoresistive effect of single crystal silicon. Using single crystal silicon wafer as elastic element, a group of equal value resistors are diffused in a specific direction of the single crystal silicon using the integrated circuit process on the single crystal silicon diaphragm, and the resistors are connected into a bridge circuit, and the single crystal silicon wafer is placed in the sensor cavity. When the pressure changes, the single crystal silicon produces strain, causing the strain resistor directly diffused on it to produce a change proportional to the measured pressure, and then the corresponding voltage output signal is obtained by the bridge circuit. It will be packaged during the processing process, and then a sealed base will be used.

[0003] The existing sealing base can seal the oil filling hole during use, but the connection between the first plug and the second plug is unstable. It is usually inserted with rubber elasticity and is prone to falling off for a long time, which leads to oil leakage in the chamber. Therefore, the utility model proposes a packaging sealing base for a piezoresistive pressure sensor. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model provides a packaging sealing base for a piezoresistive pressure sensor, which solves the problems in the above-mentioned background technology.

[0005] To achieve the above objectives, the utility model is implemented through the following technical solutions: a package sealing base for a piezoresistive pressure sensor, comprising a sealing base, a first chamber is provided at the upper end of the sealing base, a second chamber is provided at the bottom of the sealing base, a glass insulator is provided at the upper end of the sealing base, a lead is provided at the middle of the glass insulator, a first plug is provided at the upper end of the sealing base, an air guide hole is provided at the middle of the first plug, an oil filling hole adapted to the first plug is provided inside the first chamber, a second plug is provided inside the air guide hole, a pull ring is provided at the upper end of the second plug, and a fixing component is provided at the connection between the first plug and the second plug;

[0006] The fixing component includes a movable groove, a sliding groove is provided inside the movable groove, a positioning block is arranged inside the movable groove, a sliding block is arranged on one side of the positioning block, a supporting spring is arranged on one side of the sliding block, and a positioning groove is provided inside the second plug.

[0007] As a further technical solution of the utility model, a mounting hole matched with the glass insulator is opened in the middle of the sealing base, the lead wire is fixed in the mounting hole with the glass insulator, the air guide hole is matched with the second plug and fixed by a fixing assembly.

[0008] As a further technical solution of the utility model, the second plug and the pull ring are fixedly connected, and the first chamber and the second chamber are connected through a mounting hole.

[0009] As a further technical solution of the utility model, the movable groove is connected with the slide groove, the number of the movable groove and the slide groove are two groups and are symmetrically distributed, the movable groove is adapted to the positioning block, and the end of the positioning block is an arc structure.

[0010] As a further technical solution of the utility model, the slider is fixedly connected to the positioning block, the slider is adapted to the slide groove, the diameter of the slider is larger than the diameter of the positioning block, and the sliders and positioning blocks are both in two groups and are symmetrically distributed.

[0011] As a further technical solution of the utility model, the two ends of the support spring are respectively fixedly connected with the slider and the slide groove, and the positioning groove is adapted to the positioning block.

[0012] The utility model provides a packaging sealing base for a piezoresistive pressure sensor. Compared with the prior art, the utility model has the following beneficial effects:

[0013] A packaging sealing base for a piezoresistive pressure sensor is provided with a fixing component. During the connection process between a first plug and a second plug, the second plug is inserted into an air guide hole so that the end of the second plug contacts a positioning block, and the positioning block moves along the inside of a movable groove, while driving a sliding block to be compressed along the inside of the sliding groove and a supporting spring to be compressed until the positioning block completely enters the inside of the movable groove, thereby connecting the second plug to the air guide hole until the positioning groove and the positioning block correspond to each other. Under the elastic potential energy of the supporting spring, the positioning block is inserted into the inside of the positioning groove, thereby improving the tightness between the first plug and the second plug and avoiding oil leakage in the second chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a structural schematic diagram of a packaging sealing base of a piezoresistive pressure sensor;

[0015] Figure 2 A top view of a package sealing base of a piezoresistive pressure sensor;

[0016] Figure 3 A packaging sealing base for a piezoresistive pressure sensor Figure 2 Side section view of middle AA;

[0017] Figure 4 A packaging sealing base for a piezoresistive pressure sensor Figure 3 A is an enlarged view of the middle image.

[0018] In the figure: 1. sealing base; 11. first chamber; 12. second chamber; 2. glass insulator; 3. lead; 4. first plug; 5. second plug; 6. pull ring; 7. fixing component; 71. moving groove; 72. slide groove; 73. positioning block; 74. slider; 75. support spring; 76. positioning groove. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] See also Figure 1-4 The utility model provides a technical solution for a packaged sealing base of a piezoresistive pressure sensor: a packaged sealing base of a piezoresistive pressure sensor, comprising a sealing base 1, a first chamber 11 is provided at the upper end of the sealing base 1, a second chamber 12 is provided at the bottom of the sealing base 1, a glass insulator 2 is provided at the upper end of the sealing base 1, a lead 3 is provided in the middle of the glass insulator 2, a first plug 4 is provided at the upper end of the sealing base 1, an air guide hole is provided in the middle of the first plug 4, an oil filling hole adapted to the first plug 4 is provided inside the first chamber 11, a second plug 5 is provided inside the air guide hole, a pull ring 6 is provided at the upper end of the second plug 5, and a fixing component 7 is provided at the connection between the first plug 4 and the second plug 5;

[0021] Among them, the fixing component 7 includes a movable groove 71, a sliding groove 72 is opened inside the movable groove 71, a positioning block 73 is arranged inside the movable groove 71, a sliding block 74 is arranged on one side of the positioning block 73, a supporting spring 75 is arranged on one side of the sliding block 74, and a positioning groove 76 is opened inside the second plug 5.

[0022] See also Figure 1-4 A mounting hole matched with the glass insulator 2 is opened in the middle of the sealing base 1, and the lead 3 is fixed in the mounting hole with the glass insulator 2. The air guide hole is matched with the second plug 5 and fixed by the fixing component 7, which is conducive to the air guide of the lead 3 and avoids the blockage of the oil filling hole due to the gradual increase of gas pressure in the second chamber 12, ensuring that the oil filling process can continue smoothly and improve the oil filling efficiency.

[0023] See also Figure 1-4 The second plug 5 and the pull ring 6 are fixedly connected, and the first chamber 11 and the second chamber 12 are connected through the mounting hole, which is conducive to pulling out the second plug 5.

[0024] See also Figure 1-4 The movable groove 71 is connected with the slide groove 72, the number of movable grooves 71 and slide grooves 72 are both two groups and are symmetrically distributed, the movable groove 71 and the positioning block 73 are adapted to each other, the end of the positioning block 73 is an arc structure, the slider 74 and the positioning block 73 are fixedly connected, the slider 74 and the slide groove 72 are adapted to each other, the diameter of the slider 74 is larger than the diameter of the positioning block 73, the number of the slider 74 and the positioning block 73 are both two groups and are symmetrically distributed, the two ends of the support spring 75 are respectively fixedly connected with the slider 74 and the slide groove 72, the positioning groove 76 is adapted to the positioning block 73, which is conducive to the connection between the second plug 5 and the first plug 4.

[0025] The working principle of the utility model is as follows: during the use of the base, oil is injected through the oil injection hole, and at the same time, gas is discharged through the air guide hole to avoid blockage of the oil injection hole due to the gradual increase of gas pressure inside the second chamber 12, thereby ensuring that the oil injection process can proceed smoothly and continuously, and improving the oil filling efficiency. At the same time, the second plug 5 is tightly connected to the first plug 4 through the pull ring 6 to ensure the sealing of the first plug 4 and avoid oil leakage inside the second chamber 12.

[0026] It should be noted that, through the setting of the fixing component 7, during the connection between the first plug 4 and the second plug 5, the second plug 5 is inserted into the air guide hole, so that the end of the second plug 5 contacts the positioning block 73, so that the positioning block 73 moves along the inside of the movable groove 71, and at the same time drives the slider 74 to be compressed along the inside of the slide groove 72 and the support spring 75 to be compressed until the positioning block 73 completely enters the inside of the movable groove 71, thereby connecting the second plug 5 to the air guide hole until the positioning groove 76 corresponds to the positioning block 73, and under the elastic potential energy of the support spring 75, the positioning block 73 is inserted into the inside of the positioning groove 76, thereby improving the tightness between the first plug 4 and the second plug 5 and avoiding oil leakage in the second chamber 12.

Claims

1. A packaging sealing base for a piezoresistive pressure sensor, comprising a sealing base (1), characterized in that: The upper end of the sealing base (1) is provided with a first chamber (11), the bottom of the sealing base (1) is provided with a second chamber (12), the upper end of the sealing base (1) is provided with a glass insulator (2), the middle of the glass insulator (2) is provided with a lead wire (3), the upper end of the sealing base (1) is provided with a first plug (4), the middle of the first plug (4) is provided with an air guide hole, the interior of the first chamber (11) is provided with an oil injection hole matched with the first plug (4), the interior of the air guide hole is provided with a second plug (5), the upper end of the second plug (5) is provided with a pull ring (6), and a fixing component (7) is provided at the connection between the first plug (4) and the second plug (5); The fixing assembly (7) comprises a movable groove (71), a sliding groove (72) is provided inside the movable groove (71), a positioning block (73) is provided inside the movable groove (71), a sliding block (74) is provided on one side of the positioning block (73), a supporting spring (75) is provided on one side of the sliding block (74), and a positioning groove (76) is provided inside the second plug (5).

2. The packaging sealing base of a piezoresistive pressure sensor according to claim 1, characterized in that: A mounting hole matched with the glass insulator (2) is provided in the middle of the sealing base (1), the lead wire (3) is fixed in the mounting hole by the glass insulator (2), the air guide hole is matched with the second plug (5), and is fixed by a fixing assembly (7).

3. The packaging sealing base of a piezoresistive pressure sensor according to claim 1, characterized in that: The second plug (5) and the pull ring (6) are fixedly connected, and the first chamber (11) and the second chamber (12) are connected via a mounting hole.

4. The packaging sealing base of a piezoresistive pressure sensor according to claim 1, characterized in that: The movable groove (71) is connected to the slide groove (72), the movable groove (71) and the slide groove (72) are both in two groups and are symmetrically distributed, the movable groove (71) is matched with the positioning block (73), and the end of the positioning block (73) is an arc-shaped structure.

5. The packaging sealing base of a piezoresistive pressure sensor according to claim 1, characterized in that: The slider (74) and the positioning block (73) are fixedly connected, the slider (74) and the slide groove (72) are matched, the diameter of the slider (74) is larger than the diameter of the positioning block (73), and the sliders (74) and the positioning blocks (73) are both in two groups and are symmetrically distributed.

6. The packaging sealing base of a piezoresistive pressure sensor according to claim 1, characterized in that: The two ends of the support spring (75) are fixedly connected to the slider (74) and the slide groove (72) respectively, and the positioning groove (76) is matched with the positioning block (73).

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