Universal mask baking equipment

Abstract

The utility model discloses a general mask baking device which comprises a box body, the interior of the box body is divided into two parts, a baking area is located on the upper portion of the interior of the box body, a device area is located on the lower portion of the interior of the box body, a heat transmission channel is arranged on the back of the device area, and a box door is arranged on the baking area. A baking area is arranged in the oven body, the interior of the baking area is divided into two sealed heating areas through a partition plate, sliding grooves are formed in the two side edges of the sealed heating areas and located on the edge of the oven body, a mask plate bearing table is slidably connected into the sliding grooves, a through hole is formed in a back plate of the oven body, the through hole is communicated with a heat transmission channel, and a sealing block is arranged on one side of the through hole; the baking area is divided into two sealed heating areas through the partition plate, double-layer process cavities are achieved, temperature control can be conducted on each process cavity through cooperation of the sealing block and the rotating rod, and when a single process cavity works, only the temperature of the single process cavity can be increased, and energy control is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of mask manufacturing, in particular to universal mask baking equipment. Background Art

[0002] A mask is a mold required for the semiconductor industry and integrated circuit manufacturing. The pattern on the mask can be copied onto the wafer through an exposure process. The mask factory converts the graphic data according to the customer's design, and uses a mask exposure machine to expose it on a photosensitive quartz substrate. After baking, developing, and etching processes, extremely fine logical patterns that are translucent and opaque are produced on its surface. In the mask process, mature commercial baking equipment only supports single-size mask operations and has only one layer of process chamber, so the work efficiency is low, and different equipment is required for 6-inch and 5-inch versions. Utility Model Content

[0003] The purpose of the utility model is to provide a universal mask baking device to solve the problems raised in the above background technology.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a universal mask baking equipment, including a box body, the inner part of the box body is divided into two parts, the baking area is located at the upper part of the box body, and the equipment area is located at the lower part of the box body. A heat transfer channel is provided on the back of the equipment area, and a box door is provided on the baking area. The interior of the baking area is divided into two sealed heating areas by a partition. Slide grooves are provided on both sides of the sealed heating area, and the mask plate carrier is slidably connected in the slide groove. A through hole is provided on the back plate of the box body, and the through hole is connected with the heat transfer channel. A sealing block is provided on one side of the through hole, and a rotating rod is fixedly provided on one side of the sealing block. The rotating rod passes through one side of the box body, and one side of the equipment area is connected to a control panel through a pipe, and the control panel is fixedly set on the side of the box body.

[0005] Preferably, a power supply, a circuit board and a hot air blower are fixedly provided inside the equipment area, and an air outlet of the hot air blower is connected to the heat transfer channel.

[0006] Preferably, the rotating rod is rotatably connected to the box body, and a handle is fixedly provided at one end of the rotating rod located outside the box body.

[0007] Preferably, a plurality of positioning columns are provided on the mask supporting platform.

[0008] Preferably, an observation window is provided on the box door, and a sealing strip is provided on the edge of the box door.

[0009] Compared with the prior art, the beneficial effects of the utility model are: the baking area is divided into two sealed heating areas by a partition to realize a double-layer process chamber, and the temperature of each process chamber can be controlled by the cooperation of the sealing block and the rotating rod. When a single process chamber is working, it is also possible to heat up only a single process chamber to achieve energy control. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0011] Figure 2 It is a schematic diagram of the structure of the mask carrier platform of the utility model.

[0012] In the figure: 1. Box body; 2. Baking area; 3. Equipment area; 4. Heat transfer channel; 5. Box door; 6. Slide; 7. Mask carrier; 8. Sealing block; 9. Rotating rod; 10. Control panel. DETAILED DESCRIPTION

[0013] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0014] Please refer to 1-2, an embodiment of the utility model provided: a universal mask baking equipment, including a box body 1, the interior of the box body 1 is divided into two parts, the upper part of the box body 1 is a baking area 2, the lower part of the box body 1 is an equipment area 3, the back of the equipment area 3 is provided with a heat transfer channel 4, the baking area 2 is provided with a box door 5, the inside of the baking area 2 is divided into two sealed heating areas by a partition, and the two sides of the sealed heating area are provided with a slide groove 6 on the side of the box body 1, and the slide groove 6 is slidably connected to the mask plate carrier 7, a through hole is provided on the back plate of the box body 1, the through hole is connected with the heat transfer channel 4, and a sealing block 8 is provided on one side of the through hole A rotating rod 9 is fixedly provided on one side of the sealing block 8, and the rotating rod 9 passes through one side of the box body 1. One side of the equipment area 3 is connected to the control panel 10 through a pipeline, and the control panel 10 is fixedly arranged on the side of the box body 1; the temperature generated inside the equipment area 3 is transmitted to each sealed heating area through the heat transfer channel 4, and the mask is placed on the mask carrier 7, and the mask carrier 7 is slid into the slide groove 6. After closing the box door 5, the condition of the mask is observed through the observation window, and the sealing block 8 is driven to rotate by rotating the rotating rod 9. The rotation of the sealing block 8 can be used to block the through hole, and the sealing block 8 can also be used to change the wind direction.

[0015] A power supply, a circuit board and a hot air blower are fixedly installed inside the equipment area 3. The air outlet of the hot air blower is connected to the heat transfer channel 4. The hot air blower is used to provide heat, and the power supply is connected to an external socket strip to realize power supply.

[0016] The rotating rod 9 is rotatably connected to the box body 1 , and a handle is fixedly provided at one end of the rotating rod 9 located outside the box body 1 to facilitate the rotation of the rotating rod 9 .

[0017] A plurality of positioning posts are provided on the mask carrier 7, and the mask carrier 7 can be made large enough to position and carry two 6-inch masks.

[0018] An observation window is provided on the box door 5, and a sealing strip is provided on the edge of the box door 5, so as to facilitate observation of the condition of the mask through the observation window, and the sealing strip is used to improve the sealing performance.

[0019] Working principle: When in use, first place the mask on the mask carrier 7, use the positioning columns on the mask carrier 7 to fix the mask, then slide the mask carrier 7 into the slide slot 6, and then start the power through the control panel 10 to make the hot air blower work and generate temperature. The temperature enters each sealed heating area through the heat transfer channel 4. According to the number of processes, different numbers of sealed heating areas are selected. For the unused sealed heating areas, use the handle to turn the rotating rod 9 to make the sealing block 8 block the through hole. When baking, the sealing block 8 can be driven to rotate by turning the rotating rod 9 to adjust the wind direction.

Claims

1. A universal mask baking device, comprising a box (1), characterized in that: The interior of the box (1) is divided into two parts. The upper part of the box (1) is a baking area (2), and the lower part of the box (1) is an equipment area (3). A heat transfer channel (4) is provided on the back of the equipment area (3). The baking area (2) is provided with a box door (5). The interior of the baking area (2) is divided into two sealed heating areas by a partition. Slide grooves (6) are provided on both sides of the sealed heating area, and the mask carrier platform (7) is slidably connected in the slide grooves (6). A through hole is provided on the back plate of the box (1), and the through hole is connected with the heat transfer channel (4). A sealing block (8) is provided on one side of the through hole. A rotating rod (9) is fixedly provided on one side of the sealing block (8). The rotating rod (9) passes through one side of the box (1). One side of the equipment area (3) is connected to a control panel (10) through a pipeline. The control panel (10) is fixedly arranged on the side of the box (1).

2. A universal mask baking device according to claim 1, characterized in that: A power supply, a circuit board and a hot air blower are fixedly arranged inside the equipment area (3), and an air outlet of the hot air blower is connected to the heat transfer channel (4).

3. A universal mask baking device according to claim 1, characterized in that: The rotating rod (9) is rotatably connected to the box body (1), and a handle is fixedly provided on one end of the rotating rod (9) located outside the box body (1).

4. A universal mask baking device according to claim 1, characterized in that: A plurality of positioning columns are provided on the mask supporting platform (7).

5. The universal mask baking device according to claim 1, characterized in that: An observation window is provided on the box door (5), and a sealing strip is provided on the edge of the box door (5).

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