Wafer blank positioning device

Abstract

The utility model provides a wafer blank positioning device which comprises a warning lamp and an inner clamping guide roller, the lower end of the warning lamp is provided with an upper seat shell used for sealing and shielding the outer side of a wafer cavity, and the left side of the front end of the upper seat shell is provided with a side door plate used for an operator to adjust a positioning detection frame. Compared with the prior art, the beneficial effects of the utility model are that the device is convenient to move by using the moving wheels, and the left-right moving position of the positioning detection frame is adjusted by using the guide rails, so that the positioning detection frame is convenient to move, and the working efficiency is improved. Wafers can be conveniently transported and guided by using the moving frame and a plurality of groups of guide wheels, the wafers with different cross section inner diameter lengths are positioned by using the adjusting opening plate, and the opening angle of the adjusting opening plate is adjusted by using the driving motor, the driving wheel and the transfer gear. Wafer reflection signals are received by using an infrared signal positioning transmitter and a signal receiver.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer positioning and relates to a wafer embryo positioning device. Background Art

[0002] Wafer embryos are an important part of the semiconductor manufacturing process. They are the basic materials for manufacturing integrated circuits. Based on wafer embryos, chips with specific functions can be made through a series of process steps. Wafer embryos are usually made of high-purity silicon materials. Silicon is a widely used semiconductor material that is favored for its stability, reliability and cost-effectiveness. The process of manufacturing wafer embryos includes the preparation of polycrystalline silicon, the growth of single crystal silicon, and the cutting and grinding of wafers. The positioning and clamping of wafer embryos during the processing is an important link to ensure the processing accuracy and quality. If it cannot be accurately positioned and clamped, it will cause a series of serious problems.

[0003] Inaccurate positioning and clamping will directly lead to a decrease in processing accuracy. As the core material of semiconductor manufacturing, the microstructure on the surface of the wafer embryo has a crucial impact on the performance of the final product. If the clamping is unstable or the positioning is deviated, it is difficult to ensure the accuracy of the operation when the processing equipment performs operations such as cutting, grinding or etching, resulting in the size, shape or surface quality of the wafer embryo not meeting the design requirements. Therefore, a wafer embryo positioning device is urgently needed to solve the above problems. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model aims to provide a wafer embryo positioning device to solve the problems raised in the above-mentioned background technology.

[0005] The utility model is realized by the following technical scheme: a wafer embryo positioning device, comprising: a warning light and an inner clamping guide roller, wherein the lower end of the warning light is provided with an upper seat shell for sealing and shielding the outer side of the wafer cavity;

[0006] The left side of the front end of the upper housing is provided with a side door panel for operators to adjust the positioning detection frame, and the right side of the side door panel is provided with two sets of main door panels for checking the wafer positioning position;

[0007] The lower end of the upper shell is provided with a lower shell for the staff to store equipment workpieces and support the upper shell, the front end of the lower shell is provided with a plurality of lockers for the staff to take out equipment workpieces, and the lower end of the lower shell is provided with a plurality of moving wheels for the staff to move the wafer cavity positioning device. The use of the moving wheels can facilitate the movement of the utility model.

[0008] As a preferred embodiment, a wafer cavity for positioning the wafer is provided inside the upper base shell, and a group of guide rails for adjusting the left and right movement position of the positioning and detection frame are provided at the upper front end of the wafer cavity. The left and right movement position of the positioning and detection frame can be adjusted by using the guide rails.

[0009] As a preferred embodiment, a group of guide rail plates for guiding the movement of the positioning detection frame are provided on the rear side of the guide rail, a positioning detection frame for limiting the position detection of the wafer is provided on the outer side of the guide rail plate, and several groups of mobile frames for limiting the guide wheels are provided on the rear side of the lower end of the guide rail. The wafer can be transported and guided by using the mobile frames and several groups of guide wheels.

[0010] As a preferred embodiment, several groups of guide wheels for anti-slip guiding of wafers are provided on the upper end of each group of the movable racks, and wafers are provided on the upper ends of several groups of the movable racks. A group of adjustment plates for positioning the wafers are provided on the left and right sides of the wafers, and wafers with different cross-sectional inner diameter lengths can be positioned by using the adjustment plates.

[0011] As a preferred embodiment, the inner side of the adjusting opening plate is provided with several groups of inner clamping guide rollers for movably positioning the outer side of the wafer, and the rear side of each group of adjusting opening plates is provided with a group of transfer gears for meshing the driving wheels.

[0012] As a preferred embodiment, a driving wheel for driving the transfer gear is provided on the outside of the transfer gear, a motor driving end for providing power is provided in the middle position of the driving wheel, and a group of driving motors are provided at the lower end of the motor driving end. The opening angle of the adjustment plate can be adjusted by using the driving motor, the driving wheel and the transfer gear.

[0013] As a preferred embodiment, several groups of infrared signal positioning transmitters for positioning the wafer and signal receivers for receiving wafer reflection signals are provided on the inner side of the positioning and detection frame, and the wafer reflection signals can be received by using infrared signal positioning transmitters and signal receivers.

[0014] After adopting the above technical scheme, the beneficial effects of the utility model are: by using moving wheels to facilitate the movement of the utility model, by using guide rails to adjust the left and right moving position of the positioning and detection frame, by using a moving frame and several groups of guide wheels to facilitate the transportation and guidance of wafers, by using an adjustable opening plate to position wafers with different cross-sectional inner diameter lengths, by using a driving motor, a driving wheel and a transfer gear to adjust the opening angle of the adjusting opening plate, and by using an infrared signal positioning transmitter and a signal receiver to receive the wafer reflection signal. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0016] Figure 1 This is a schematic diagram of a wafer embryo positioning device according to the utility model, viewed from the top of the right front oblique side;

[0017] Figure 2 This is a schematic diagram of a wafer embryo positioning device of the utility model, viewed from the left oblique front side;

[0018] Figure 3 It is a schematic diagram of the right side top view of the movable frame in the wafer embryo positioning device of the utility model;

[0019] Figure 4 It is a schematic diagram of the right side top view of the structure of two groups of adjustment plates in a wafer embryo positioning device of the utility model;

[0020] In the figure: 100- warning light, 110- upper seat shell, 120- side door panel, 130- main door panel, 140- lower seat shell, 150- locker, 160- internal ventilation fan, 170- moving wheel, 180- guide rail, 190- guide rail plate, 200- positioning detection frame, 210- moving frame, 220- guide wheel, 230- driving wheel, 240- transfer gear, 250- adjusting opening plate, 260- internal clamping guide roller. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] See also Figure 1-Figure 4 A wafer embryo positioning device includes: a warning light 100, a positioning detection frame 200, a driving wheel 230, an adjustment opening plate 250 and an inner clamping guide roller 260, and an upper base shell 110 for sealing and shielding the outer side of the wafer cavity is provided at the lower end of the warning light 100;

[0023] The left side of the front end of the upper housing 110 is provided with a side door panel 120 for operators to adjust the positioning detection frame 200, and the right side of the side door panel 120 is provided with two sets of main door panels 130 for checking the positioning position of the wafer;

[0024] A lower shell 140 is provided at the lower end of the upper shell 110 for the staff to store equipment workpieces and support the upper shell 110. A plurality of lockers 150 are provided at the front end of the lower shell 140 for the staff to conveniently take out equipment workpieces. A plurality of moving wheels 170 are provided at the lower end of the lower shell 140 for the staff to conveniently move the wafer cavity positioning device. The moving wheels 170 can be used to facilitate the movement of the utility model.

[0025] A wafer cavity for positioning the wafer is provided inside the upper base shell 110 , and a group of guide rails 180 for adjusting the left and right movement position of the positioning and detection frame 200 are provided at the upper front end of the wafer cavity. The left and right movement position of the positioning and detection frame 200 can be adjusted by using the guide rails 180 .

[0026] A group of guide rail plates 190 for guiding and moving the positioning detection frame 200 are provided on the rear side of the guide rail 180, and a positioning detection frame 200 for limiting and detecting the position of the wafer is provided on the outer side of the guide rail plate 190. A plurality of groups of movable frames 210 for limiting the position of the guide wheels 220 are provided on the rear side of the lower end of the guide rail 180. The movable frames 210 and a plurality of groups of guide wheels 220 can be used to facilitate the transportation and guidance of the wafer.

[0027] Several groups of guide wheels 220 for anti-slip guidance of wafers are arranged on the upper end of each group of movable racks 210. Wafers are arranged on the upper end of several groups of movable racks 210. A group of adjustment plates 250 for positioning the wafers are arranged on the left and right sides of the wafers. Wafers with different inner diameter lengths of cross-sections can be positioned by using the adjustment plates 250.

[0028] A plurality of groups of inner guide rollers 260 for movably positioning the outer side of the wafer are disposed on the inner side of the adjusting opening plate 250 , and a group of transfer gears 240 for meshing with the driving wheels 230 are disposed on the rear side of each group of adjusting opening plates 250 .

[0029] A driving wheel 230 for driving the transfer gear 240 is provided on the outside of the transfer gear 240, a motor driving end for providing power is provided in the middle of the driving wheel 230, and a group of driving motors are provided at the lower end of the motor driving end. The opening angle of the adjustment plate 250 can be adjusted by using the driving motor, the driving wheel 230 and the transfer gear 240.

[0030] See also Figure 1-Figure 4As the first embodiment of the utility model: In order to solve the problem that inaccurate positioning and clamping will directly lead to a decrease in processing accuracy, if the clamping is unstable or the positioning is deviated, it is difficult to ensure the accuracy of the operation when the processing equipment performs operations such as cutting, grinding or etching on it, thereby causing the size, shape or surface quality of the wafer embryo to not meet the design requirements. First, the staff will place the wafer embryo to be processed on the upper end of a plurality of groups of mobile racks 210, and the wafer embryo will be guided by a plurality of groups of guide wheels 220. Then, according to the position of the guided wafer embryo, the staff will place it into two groups of adjustable opening plates 25 0, and two groups of adjusting open plates 250 are positioned thereon. When the moving wheel 170 is located inside the two groups of adjusting open plates 250, several groups of inner clamping guide rollers 260 thereof can movably fit the outer side of the wafer embryo, so that the wafer is not restricted by the clamping pressure and damaged during the positioning process. At the same time, since several groups of infrared signal positioning transmitters for positioning the wafer and signal receivers for receiving the reflected signal of the wafer are arranged inside the positioning and detecting frame 200, the reflected signal of the wafer is received by using the infrared signal positioning transmitter and the signal receiver.

[0031] See also Figure 1-Figure 4 , as the second embodiment of the utility model: based on the description in the above embodiment, further, when the staff needs to position wafer embryos with different inner diameters, the staff adjusts the opening angles of the two sets of adjustment opening plates 250 according to the wafer embryos with different inner diameters. First, the driving motor is started, and the driving end of the driving motor drives the driving wheel 230 to rotate, and the driving wheel 230 drives the two sets of drive gears 240 to rotate independently, thereby driving the opening angles of the two sets of adjustment opening plates 250 to open or close.

[0032] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A wafer embryo positioning device, comprising: A warning light (100), a positioning detection frame (200), a driving wheel (230), an adjustment opening plate (250) and an inner clamping guide roller (260), characterized in that: an upper base shell (110) for sealing and shielding the outer side of the wafer cavity is provided at the lower end of the warning light (100); A side door panel (120) for operators to adjust the positioning detection frame (200) is provided on the left side of the front end of the upper housing (110), and two sets of main door panels (130) for checking the positioning position of the wafer are provided on the right side of the side door panel (120); The lower end of the upper housing (110) is provided with a lower housing (140) for workers to store equipment workpieces and to support the upper housing (110); the front end of the lower housing (140) is provided with a plurality of lockers (150) for workers to conveniently take out equipment workpieces; the lower end of the lower housing (140) is provided with a plurality of moving wheels (170) for workers to conveniently move the wafer cavity positioning device; A wafer cavity for positioning a wafer is provided inside the upper housing (110), and a group of guide rails (180) for adjusting the left and right movement position of the positioning detection frame (200) is provided at the upper front end of the wafer cavity; A group of guide rail plates (190) for guiding and moving the positioning detection frame (200) are provided on the rear side of the guide rail (180); a positioning detection frame (200) for limiting and detecting the position of a wafer is provided on the outer side of the guide rail plate (190); and a plurality of groups of moving frames (210) for limiting the position of a guide wheel (220) are provided on the rear side of the lower end of the guide rail (180); A plurality of guide wheels (220) for anti-slip guiding of wafers are arranged at the upper end of each group of the moving racks (210); wafer sheets are arranged at the upper ends of the plurality of groups of the moving racks (210); and a group of adjustment plates (250) for positioning the wafers are arranged on both left and right sides of the wafer sheets; The inner side of the adjusting opening plate (250) is provided with a plurality of groups of inner clamping guide rollers (260) for movably positioning the outer side of the wafer, and the rear side of each group of adjusting opening plates (250) is provided with a group of transfer gears (240) for mutually meshing with the driving wheels (230); A driving wheel (230) for driving the transfer gear (240) is disposed outside the transfer gear (240), a motor driving end for providing power is disposed in the middle of the driving wheel (230), and a group of driving motors is disposed at the lower end of the motor driving end; A plurality of groups of infrared signal positioning transmitters for positioning wafers and signal receivers for receiving reflected signals from wafers are arranged inside the positioning detection frame (200).

Images