Boat supporting mechanism of vertical diffusion furnace

By designing removable support components and insulation, the problem of cumbersome maintenance after welding of heat insulation and support rods in existing vertical diffusion furnaces is solved, and convenient replacement and maintenance is achieved and maintenance costs are reduced.

CN222509894UActive Publication Date: 2025-02-18江苏小牛自动化设备有限公司
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202420940635.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-05-04
Publication Date
2025-02-18
Estimated Expiration
2034-05-04

AI Technical Summary

Technical Problem

After the insulation of the existing vertical diffusion furnace is welded to the support rod, the insulation performance becomes poor or damaged, and it needs to be replaced as a whole, resulting in cumbersome maintenance and high cost.

Method used

A vertical diffusion furnace boat holder mechanism is designed, adopting removable support components and thermal insulation. The support rod and thermal insulation are connected through removable support pad rings and sleeves for easy replacement and maintenance.

Benefits of technology

It realizes convenient replacement and maintenance of heat insulation parts and support components, reducing maintenance costs and complexity, while improving the reliability of heat insulation performance.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN222509894U_ABST
    Figure CN222509894U_ABST
Patent Text Reader

Abstract

The utility model relates to the technical field of diffusion furnaces, in particular to a vertical diffusion furnace boat supporting mechanism which comprises a lifting mechanism, a lifting arm, a furnace door, a heat insulation piece and a plurality of supporting assemblies. Each supporting assembly comprises a supporting rod, a first supporting sleeve, a first supporting backing ring, a second supporting sleeve and a second supporting backing ring, the supporting rod is sequentially sleeved with the first supporting sleeve, the first supporting backing ring, the second supporting sleeve and the second supporting backing ring from bottom to top, the outer diameter of the first supporting backing ring and the outer diameter of the second supporting backing ring are both larger than the outer diameter of the second supporting sleeve, and the first supporting backing ring is used for supporting the heat insulation part. The second supporting backing ring is used for supporting a wafer boat, the heat insulation part comprises a plurality of heat insulation plates which are vertically arranged between the first supporting backing ring and the second supporting backing ring at intervals, a plurality of first clamping grooves are formed in the outer edge of each heat insulation plate, each first clamping groove is matched with one second supporting sleeve in a limiting mode, and the heat insulation part is detachably connected with the supporting assembly. The maintenance is easy.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The utility model relates to the technical field of diffusion furnaces, in particular to a boat-supporting mechanism for a vertical diffusion furnace. Background Art

[0002] During the production process of photovoltaic cells, the photovoltaic cells need to be placed in a diffusion furnace to complete the diffusion process to form a PN junction on the surface of the photovoltaic cell.

[0003] In a vertical diffusion furnace, support rods for supporting a crystal boat are fixed on the furnace door, photovoltaic cells are placed in the crystal boat, and a heat insulating member is arranged between the crystal boat and the furnace door. The heat insulating member and the support rods are welded together. Although the heat insulating member is easy to install after being welded to the support rods, if the heat insulating performance of the heat insulating member deteriorates or is damaged, it needs to be replaced together with the support rods, which makes maintenance cumbersome and has high maintenance costs. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model provides a boat-supporting mechanism for a vertical diffusion furnace.

[0005] To achieve the above purpose, the utility model provides the following solutions:

[0006] The cam is an axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially axially

[0007] Furthermore, the vertical diffusion furnace boat supporting mechanism also includes a first boat support, a plurality of second slots are provided on the outer edge of the first boat support, each of the second slots is limitedly matched with one of the support rods, and the second support gasket ring supports the first boat support.

[0008] Furthermore, the vertical diffusion furnace boat support mechanism also includes a second boat support, a plurality of recessed areas are provided at the bottom of the second boat support, a top end of each of the support rods is limitedly matched with a recessed area, and the support rods support the second boat support.

[0009] Furthermore, a plurality of through holes are provided on the first boat support and the second boat support.

[0010] Furthermore, the support rod is a hollow rod.

[0011] Furthermore, the thermal insulation component also includes a plurality of third support gasket rings for isolating any two adjacent thermal insulation boards, and the third support gasket rings are sleeved on the second support sleeve.

[0012] Furthermore, the thermal insulation component also includes a support pad strip and a support pad block arranged between any two adjacent thermal insulation boards, each of the thermal insulation boards includes two fan-shaped boards spliced ​​to each other, the two ends of the support pad strip overlap with two of the first support pad rings, the support pad strip is used to support the two fan-shaped boards of the thermal insulation board located at the bottom, and the support pad block is used to support the two fan-shaped boards of the remaining thermal insulation boards.

[0013] Furthermore, a limiting groove is provided on the upper surface of each of the heat insulation boards, and the bottom of the supporting pad is located in the limiting groove.

[0014] Compared with the prior art, the utility model has the following advantages and beneficial effects:

[0015] The utility model provides a vertical diffusion furnace boat supporting mechanism, including: a lifting mechanism, a lifting arm, a furnace door, a heat insulating member and a plurality of supporting components, the lifting mechanism is used to drive the lifting arm to lift and lower, the furnace door is arranged on the lifting arm, each supporting component includes a support rod and a first supporting sleeve, a first supporting gasket, a second supporting sleeve and a second supporting gasket, which are sequentially sleeved on the support rod from bottom to top, the outer diameters of the first supporting gasket and the second supporting gasket are both larger than the outer diameter of the second supporting sleeve, the first supporting gasket is used to support the heat insulating member, the second supporting gasket is used to support the crystal boat, the heat insulating member includes a plurality of heat insulating plates which are spaced apart from each other between the first supporting gasket and the second supporting gasket, the outer edge of each heat insulating plate is provided with a plurality of first slots, each first slot is limitedly matched with a second supporting sleeve, the heat insulating member and the supporting component are detachably connected, and the installation is convenient and the maintenance is easy. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a left view of the first embodiment of the boat-supporting mechanism of the vertical diffusion furnace of the utility model;

[0017] Figure 2 It is a structural schematic diagram of the support assembly in the utility model;

[0018] Figure 3 It is a partial structural schematic diagram of the heat insulation component in the utility model;

[0019] Figure 4 It is a bottom view of the heat insulation member in the utility model;

[0020] Figure 5 This is a perspective view of a second embodiment of the boat-supporting mechanism of a vertical diffusion furnace of the utility model;

[0021] Figure 6 It is a bottom view of the first boat support in the utility model.

[0022] Among them: 10, lifting mechanism; 20, lifting arm; 30, furnace door; 40, heat insulation; 41, heat insulation board; 411, first slot; 42, third support gasket; 43, support pad; 44, support pad strip; 50, support assembly; 51, support rod; 52, first support sleeve; 53, second support sleeve; 54, first support gasket; 55, second support gasket; 61, first boat support; 611, second slot; 612, recessed area; 613, through hole; 62, second boat support. DETAILED DESCRIPTION

[0023] The technical solution and technical effects of the present invention are further described in detail below in conjunction with the accompanying drawings of the present invention.

[0024] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected" and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral body; it can be directly connected, or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. In the present invention, unless otherwise clearly specified and limited, the first feature "above" or "below" the second feature can include the first and second features directly contacting, and can also include the first and second features not directly contacting but contacting through another feature between them. Moreover, the first feature "above", "above" and "above" the second feature include the first feature directly above and obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature "below", "below" and "below" the second feature include the first feature directly below and obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0025] In the description of this embodiment, the terms "upper", "lower", "right" and other directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must be provided with a specific direction, constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present utility model. It should also be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish the first feature from the second feature, and do not necessarily require or imply any such actual relationship or order between these features.

[0026] like Figure 1-Figure 3 As shown, the utility model provides a vertical diffusion furnace boat support mechanism, which includes: a lifting mechanism 10, a lifting arm 20, a furnace door 30, a heat insulating member 40 and a plurality of support assemblies 50, the driving end of the lifting mechanism 10 is connected to the lifting arm 20 to make the lifting arm 20 move up and down, the furnace door 30 is arranged on the lifting arm 20, each support assembly 50 includes a support rod 51, a first support sleeve 52, a second support sleeve 53, a first support gasket ring 54 and a second support gasket ring 55, the bottom end of the support rod 51 passes through the furnace door 30 and is fixedly connected to the lifting arm 20, the first support sleeve 52 is provided on the lifting arm 20, and the second support sleeve 53 is provided on the lifting arm 20. The support sleeve 52, the first support gasket 54, the second support sleeve 53 and the second support gasket 55 are sequentially sleeved on the support rod 51 from bottom to top and are loosely matched with the support rod 51. The outer diameters of the first support gasket 54 and the second support gasket 55 are both larger than the outer diameter of the second support sleeve 53. The thermal insulation component 40 includes a plurality of thermal insulation plates 41 spaced apart from top to bottom between the first support gasket 54 and the second support gasket 55. The outer edge of each thermal insulation plate 41 is provided with a plurality of first grooves 411, and each first groove 411 is limitedly matched with a second support sleeve 53.

[0027] The lifting mechanism 10 is an electric drive device. The wafer boat carrying the photovoltaic cell is placed on the second support gasket 55 of the support assembly 50. The heat insulation 40 is placed on the first support gasket 54 and limited by the second support sleeve 53. The lifting mechanism 10 drives the lifting arm 20 to rise, and the photovoltaic cell is sent into the furnace body of the vertical diffusion furnace for diffusion, and the furnace door 30 is sealed and docked with the furnace body. A fixed seat is provided on the lifting arm 20, and the bottom end of the support rod 51 is assembled on the fixed seat. A hole is provided on the furnace door 30 for the support rod 51 to pass through. Since the second support gasket 55 is sleeved on the support rod 51, it is easy to remove the second support gasket 55 from the support rod 51 to install or replace the heat insulation 40, and it is easy to maintain. Preferably, the support assembly 50 is provided with four groups, and the support rod 51 is a hollow rod to reduce weight.

[0028] In an optional embodiment of the present utility model, Figure 3 and Figure 4As shown, the heat insulating member 40 also includes a plurality of third support gasket rings 42 for isolating any two adjacent heat insulating panels 41. The third support gasket rings 42 are sleeved on the second support sleeve 53. The heat insulating panel 41 is placed on the third support gasket rings 42. Gas is stored in the two adjacent heat insulating panels 41, which can further enhance the heat insulating effect. Optionally, the heat insulating member 40 also includes support gasket strips 44 and support gasket blocks 43 disposed between any two adjacent heat insulating panels 41. Each heat insulating panel 41 includes two mutually spliced ​​fan-shaped panels. The two ends of the support gasket strips 44 overlap with two of the first support gasket rings 54. The support gasket strips 44 are used to support the two fan-shaped panels of the heat insulating panel 41 at the bottom, and the support gasket blocks 43 are used to support the two fan-shaped panels of the remaining heat insulating panels 41. The heat insulation board 41 is composed of two fan-shaped boards. When one of the fan-shaped boards is lifted up and taken out, the other fan-shaped board can be directly taken out, and the entire heat insulation board 41 can be replaced without removing the second support ring 55 from the support rod 51, making the replacement and maintenance of the heat insulation component 40 more convenient. Furthermore, a limiting groove is provided on the upper surface of each heat insulation board 41, and the bottom of the support pad 43 is located in the limiting groove, which can prevent the support pad 43 from moving away from the joint gap of the two fan-shaped boards.

[0029] In an optional embodiment of the present utility model, Figure 5 and Figure 6 As shown, the vertical diffusion furnace boat support mechanism also includes a first boat support 61, and a plurality of second slots 611 are provided on the outer edge of the first boat support 61, each second slot 611 is limitedly matched with a support rod 51, and the second support pad ring 55 supports the first boat support 61. The first boat support 61 is used to place the wafer boat, and by providing the first boat support 61, the entire wafer boat can be dispersedly designed into a plurality of wafer boats, which are arranged in sequence on the first boat support 61, so as to facilitate the placement of photovoltaic cells in the wafer boat.

[0030] Furthermore, the vertical diffusion furnace boat support mechanism further includes a second boat support 62, the structure of the second boat support 62 is the same as that of the first boat support 61, and they can replace each other. The bottoms of the first boat support 61 and the second boat support 62 are provided with a plurality of recessed areas 612, the top of each support rod 51 is limitedly matched with a recessed area 612 of the second boat support 62, the support rod 51 supports the second boat support 62, and the second card slots 611 and the recessed areas 612 are alternately arranged at intervals. By providing the second boat support 62, the first boat support 61 and the second boat support 62 carry two layers of wafer boats, and the height of a single wafer boat can be reduced, so as to reduce the configuration requirements for the manipulator for transporting the wafer boat.

[0031] Furthermore, a plurality of through holes 613 are provided on the first boat support 61 and the second boat support 62, and the reaction gas in the furnace body can pass through the through holes 613, which is conducive to the reaction gas to quickly and evenly diffuse throughout the furnace body and react with the photovoltaic cells.

[0032] The above disclosure is only a preferred embodiment of the present invention, and certainly cannot be used to limit the scope of rights of the present invention. Ordinary technicians in this field can understand that all or part of the processes of the above embodiments and equivalent changes made according to the claims of the present invention still fall within the scope covered by the present invention.

Claims

1. A boat-supporting mechanism for a vertical diffusion furnace, characterized in that: include: A lifting mechanism (10), a lifting arm (20), a furnace door (30), a heat insulating member (40) and a plurality of support assemblies (50); a driving end of the lifting mechanism (10) is connected to the lifting arm (20) so as to enable the lifting arm (20) to move upward and downward; the furnace door (30) is arranged on the lifting arm (20); each of the support assemblies (50) comprises a support rod (51), a first support sleeve (52), a second support sleeve (53), a first support gasket (54) and a second support gasket (55); the bottom end of the support rod (51) passes through the furnace door (30) and is fixedly connected to the lifting arm (20); the first support sleeve (52), the first support gasket (54) and the second support gasket (55) are connected to the lifting arm (20); The support ring (54), the second support sleeve (53) and the second support ring (55) are sequentially sleeved on the support rod (51) from bottom to top and are loosely matched with the support rod (51); the outer diameters of the first support ring (54) and the second support ring (55) are both larger than the outer diameter of the second support sleeve (53); the thermal insulation component (40) comprises a plurality of thermal insulation plates (41) spaced apart from top to bottom and arranged between the first support ring (54) and the second support ring (55); the outer edge of each thermal insulation plate (41) is provided with a plurality of first grooves (411); each of the first grooves (411) is limitedly matched with a second support sleeve (53).

2. The boat-supporting mechanism for a vertical diffusion furnace according to claim 1, characterized in that: It also includes a first boat support (61), wherein the outer edge of the first boat support (61) is provided with a plurality of second slots (611), each of the second slots (611) is limitedly matched with one of the support rods (51), and the second support gasket (55) supports the first boat support (61).

3. The boat-supporting mechanism for a vertical diffusion furnace according to claim 2, characterized in that: It also includes a second boat support (62), the bottom of which is provided with a plurality of recessed areas (612), the top end of each of the support rods (51) is limitedly matched with one of the recessed areas (612), and the support rods (51) support the second boat support (62).

4. The boat-supporting mechanism for a vertical diffusion furnace according to claim 3, characterized in that: The first boat support (61) and the second boat support (62) are provided with a plurality of through holes (613).

5. The boat-supporting mechanism for a vertical diffusion furnace according to claim 1, characterized in that: The support rod (51) is a hollow rod.

6. The boat-supporting mechanism for a vertical diffusion furnace according to claim 1, characterized in that: The heat insulating member (40) further comprises a plurality of third support rings (42) for isolating any two adjacent heat insulating plates (41), and the third support rings (42) are sleeved on the second support sleeve (53).

7. The boat-supporting mechanism for a vertical diffusion furnace according to claim 1, characterized in that: The thermal insulation component (40) further comprises a support pad strip (44) and a support pad block (43) arranged between any two adjacent thermal insulation boards (41), each thermal insulation board (41) comprises two fan-shaped boards spliced ​​to each other, the two ends of the support pad strip (44) overlap with two of the first support pad rings (54), the support pad strip (44) is used to support the two fan-shaped boards of the thermal insulation board (41) located at the bottom, and the support pad block (43) is used to support the two fan-shaped boards of the remaining thermal insulation boards (41).

8. The boat-supporting mechanism for a vertical diffusion furnace according to claim 7, characterized in that: A limiting groove is provided on the upper surface of each of the heat insulation plates (41), and the bottom of the supporting pad (43) is located in the limiting groove.