Jig for assisting in machining silicon carbide crystals

Abstract

The utility model relates to semiconductor processing, and provides an auxiliary silicon carbide crystal processing jig, which comprises an outer circle jig, the outer circle jig is used for placing a silicon carbide crystal, the outer circle jig is arranged on a jig base, a locking mechanism and a positioning mechanism are arranged between the outer circle jig and the jig base, the silicon carbide crystal is fixed on the outer circle jig by using wax, and the silicon carbide crystal is fixed on the outer circle jig. The silicon carbide crystals do not need to be loaded and unloaded for many times in the machining process, and the machining efficiency of the silicon carbide crystals is effectively improved.

Description

Technical Field

[0001] The present disclosure relates to semiconductor processing, and in particular to a tool for assisting in processing silicon carbide crystals. Background Art

[0002] The production process of silicon carbide is complicated and requires multiple steps. During the rough processing of silicon carbide, a variety of processing equipment is needed, and the required jigs are different, resulting in the need to load or unload silicon carbide multiple times during the crystal processing. The process requires the use of a wax dipping process, which requires heating and then cooling the jig to fix the silicon carbide. The jig needs to be heated again when the silicon carbide is removed, making the processing of silicon carbide time-consuming and labor-intensive, reducing the processing efficiency of silicon carbide. Utility Model Content

[0003] A technical problem to be solved by the present disclosure is to provide a jig for assisting in processing silicon carbide crystals, so as to solve the problem that during the processing of silicon carbide, the jig needs to be disassembled multiple times, which is time-consuming and labor-intensive, thereby reducing the processing efficiency.

[0004] To solve the above technical problems, the embodiments of the present disclosure provide a jig for assisting in processing silicon carbide crystals, including: an outer cylindrical jig, which is used to place silicon carbide crystals; a jig base, which is used to install the outer cylindrical jig; a locking mechanism and a positioning mechanism are provided between the outer cylindrical jig and the jig base.

[0005] In some embodiments, the jig base is provided with a mounting groove for mounting the external circular jig, and the external circular jig is at least partially located in the mounting groove.

[0006] In some embodiments, the positioning mechanism includes a guide post, which is arranged on one side of the outer circle fixture close to the bottom of the installation groove, and the bottom of the installation groove is provided with a guide groove that matches the guide post.

[0007] In some embodiments, the positioning mechanism includes a positioning pin, which is arranged in one of the external cylindrical jig and the mounting groove, and the other is provided with a positioning pin groove matching with the positioning pin to limit the rotational freedom between the external cylindrical jig and the mounting groove around the central axis of the guide column.

[0008] In some embodiments, the jig base is a cylindrical part, the outer cylindrical jig is a cylindrical part, and the outer cylindrical jig, the jig base and the guide column are coaxially arranged.

[0009] In some embodiments, a groove is disposed on a side wall of the mounting groove, and a bottom of the groove is lower than a bottom surface of the mounting groove.

[0010] In some embodiments, a plurality of grooves are arranged in an annular manner on the peripheral wall of the mounting groove.

[0011] In some embodiments, the locking mechanism includes a screw, a threaded hole is formed on the side wall of the mounting groove, and the screw passes through the threaded hole and abuts against the peripheral wall of the outer cylindrical fixture.

[0012] In some embodiments, a countersunk hole is provided on the peripheral wall of the outer cylindrical fixture at a position corresponding to the threaded hole, and the screw passes through the threaded hole and is at least partially located in the countersunk hole.

[0013] In some embodiments, a plurality of threaded holes are arranged in a circle on the peripheral wall of the fixture base, and a plurality of countersunk holes are arranged in a circle on the peripheral wall of the outer cylindrical fixture.

[0014] Through the above technical scheme, the present invention provides a jig for assisting in processing silicon carbide crystals, including an outer cylindrical jig, the outer cylindrical jig is used to place the silicon carbide crystals, the outer cylindrical jig is installed on a jig base, a locking mechanism and a positioning mechanism are provided between the outer cylindrical jig and the jig base, when processing the silicon carbide crystals, the outer cylindrical jig is heated and the silicon carbide crystals are fixed with wax, the outer cylindrical jig and the jig base are assembled and processed, and the silicon carbide crystals are removed after the processing is completed, and there is no need to load and unload the silicon carbide crystals during the processing, thereby effectively improving the processing efficiency of the silicon carbide crystals. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0016] Figure 1 is a schematic structural diagram of an outer circle fixture disclosed in an embodiment of the present disclosure;

[0017] Figure 2 is a top view of the outer circle jig disclosed in the embodiment of the present disclosure;

[0018] Figure 3 is a cross-sectional view of an outer circle jig disclosed in an embodiment of the present disclosure;

[0019] Figure 4 is a schematic diagram of the structure of a fixture base disclosed in an embodiment of the present disclosure;

[0020] Figure 5 is a front view of a fixture base disclosed in an embodiment of the present disclosure;

[0021] Figure 6 is a top view of a fixture base disclosed in an embodiment of the present disclosure;

[0022] Figure 7 It is a left view of the fixture base disclosed in the embodiment of the present disclosure.

[0023] Description of reference numerals:

[0024] 1. External cylindrical jig; 2. Jig base; 3. Guide column; 4. Guide groove; 5. Locating pin; 6. Locating pin groove; 7. Mounting groove; 8. Groove; 9. Threaded hole; 10. Countersunk hole. DETAILED DESCRIPTION

[0025] The following is a further detailed description of the embodiments of the present disclosure in conjunction with the accompanying drawings and examples. The detailed description of the following embodiments and the accompanying drawings are used to exemplarily illustrate the principles of the present disclosure, but cannot be used to limit the scope of the present disclosure. The present disclosure can be implemented in many different forms and is not limited to the specific embodiments disclosed herein, but includes all technical solutions that fall within the scope of the claims.

[0026] The present disclosure provides these embodiments to make the present disclosure thorough and complete, and to fully express the scope of the present disclosure to those skilled in the art. It should be noted that unless otherwise specifically stated, the relative arrangement of the parts and steps, the composition of the materials, the numerical expressions and the numerical values ​​set forth in these embodiments should be interpreted as being merely exemplary, and not as limiting.

[0027] It should be noted that, in the description of the present disclosure, unless otherwise specified, the meaning of "multiple" is greater than or equal to two; the terms "upper", "lower", "left", "right", "inner", "outer", etc., indicating the orientation or positional relationship, are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present disclosure. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0028] In addition, the words "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different parts. "Vertical" does not mean vertical in the strict sense, but is within the tolerance range. "Parallel" does not mean parallel in the strict sense, but is within the tolerance range. "Include" or "comprising" and similar words mean that the elements before the word include the elements listed after the word, and do not exclude the possibility of including other elements.

[0029] It should also be noted that in the description of the present disclosure, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present disclosure can be understood according to the specific circumstances.

[0030] All terms used in the present disclosure have the same meanings as those understood by those of ordinary skill in the art to which the present disclosure belongs, unless otherwise specifically defined. It should also be understood that terms defined in general dictionaries, for example, should be interpreted as having meanings consistent with their meanings in the context of the relevant technology, and should not be interpreted in an idealized or extremely formal sense, unless explicitly defined as such herein.

[0031] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered part of the specification.

[0032] The present invention provides a tool for assisting in processing silicon carbide crystals. Figure 1 and Figure 4 , including an outer cylindrical jig 1, the outer cylindrical jig 1 is used to place the silicon carbide crystal, the jig base 2 is used to install the outer cylindrical jig 1, and a locking mechanism and a positioning mechanism are arranged between the outer cylindrical jig 1 and the jig base 2. When processing the silicon carbide crystal, the outer cylindrical jig 1 is heated and the silicon carbide crystal is fixed with wax, and then the outer cylindrical jig 1 and the jig base 2 are assembled and processed. After the processing is completed, the silicon carbide crystal is removed. During the processing, there is no need to heat and separate the outer cylindrical jig 1 from the silicon carbide crystal, which effectively improves the processing efficiency of the silicon carbide crystal.

[0033] In some embodiments, see Figure 6 The fixture base 2 is provided with a mounting groove 7 for mounting the outer cylindrical fixture 1. The outer cylindrical fixture 1 is at least partially located in the mounting groove 7. During the processing, the high-speed running tool will generate vibrations when processing the silicon carbide crystal. These vibrations will cause the outer cylindrical fixture 1 to move. However, the size and shape of the outer cylindrical fixture 1 fit the mounting groove 7. The mounting groove 7 can limit the movement of the outer cylindrical fixture 1, which is beneficial to ensure the processing quality and accuracy of the silicon carbide crystal.

[0034] In some embodiments, see Figure 3 and Figure 6 The positioning mechanism includes a guide column 3, which is arranged on the side of the outer cylindrical jig 1 close to the bottom of the mounting groove 7. The bottom of the mounting groove 7 is provided with a guide groove 4 matched with the guide column 3. The cooperation between the guide column 3 and the guide groove 4 is conducive to the assembly of the outer cylindrical jig 1 and the jig base 2. At the same time, the guide groove 4 constrains the radial freedom of the guide column 3, which provides support for the outer cylindrical jig 1 so that the outer cylindrical jig 1 will not separate from the jig base 2 during processing. When the outer cylindrical jig 1 and the jig base 2 are assembled or disassembled, the guide column 3 needs to be in contact with or separated from the guide groove 4, which reduces the collision between the outer cylindrical jig 1 and the mounting groove 7, and helps to extend the service life of the jig.

[0035] In some embodiments, see Figure 2 and Figure 4The positioning mechanism includes a positioning pin 5, which is arranged in one of the outer cylindrical fixture 1 and the mounting groove 7, and the other is provided with a positioning pin groove 6 matched with the positioning pin 5 to limit the rotational freedom between the outer cylindrical fixture 1 and the mounting groove 7 around the central axis of the guide column 3. When processing the silicon carbide crystal on the outer cylindrical fixture 1, if the outer cylindrical fixture 1 rotates with the tool, it will not only reduce the processing efficiency, but also affect the accuracy and quality of the processed surface of the silicon carbide crystal. At the same time, the wear of the contact surface between the outer cylindrical fixture 1 and the fixture base 2 will increase. By limiting the rotation of the outer cylindrical fixture 1 around the guide column 3, it is beneficial to improve the processing quality and efficiency of the carbide crystal. In addition, it provides convenience for the alignment and installation of the locking mechanism.

[0036] In some embodiments, see Figure 1 and Figure 4 The jig base 2 is a cylindrical part, the outer cylindrical jig 1 is a cylindrical part, the outer cylindrical jig 1, the jig base 2 and the guide column 3 are coaxially arranged. Since the outer cylindrical jig 1 and the jig base 2 are both cylindrical parts, the structure of the cylindrical part has good rigidity and stability. When the outer cylindrical jig 1 and the jig base 2 are both designed as cylindrical parts and coaxially arranged, the overall rigidity and stability of the jig are further enhanced to prevent the jig from deformation during processing.

[0037] In some embodiments, see Figure 4 and Figure 7 A groove 8 is provided on the side wall of the mounting groove 7, and the bottom of the groove 8 is lower than the bottom surface of the mounting groove 7. The groove 8 can reduce the contact area between the outer cylindrical jig 1 and the side wall of the mounting groove 7, thereby reducing the friction and resistance when removing or assembling the outer cylindrical jig 1. At the same time, the groove 8 provides an operating space for the operator to remove or assemble the outer cylindrical jig 1, which is convenient for the operator to clamp the outer cylindrical jig 1 with his hands or other tools, so that the operator can easily remove the outer cylindrical jig 1.

[0038] In some embodiments, see Figure 4 A plurality of grooves 8 are arranged in a ring shape on the peripheral wall of the mounting groove 7 so that the operator can more conveniently remove or install the external cylindrical fixture 1 .

[0039] In some embodiments, see Figure 4 and Figure 5The locking mechanism includes a screw, which can be a ball screw. A threaded hole 9 is formed on the side wall of the mounting groove 7. The screw passes through the threaded hole 9 and abuts against the peripheral wall of the outer cylindrical fixture 1. A sheath is arranged at the end of the screw to increase the contact area between the screw and the outer cylindrical fixture 1, and at the same time protects the surface of the outer cylindrical fixture 1. The screw, as a fastener, has the characteristics of simple structure, easy use, and high reliability. A threaded hole 9 is formed on the side wall of the mounting groove 7. The screw passes through the threaded hole 9 and forms a threaded connection therewith. After the screw is tightened, it will abut against the peripheral wall of the outer cylindrical fixture 1, so as to fix the outer cylindrical fixture 1 on the fixture base 2. This locking structure is not only simple, but also has low process cost.

[0040] In some embodiments, see Figure 1 and Figure 4 A countersunk hole 10 is provided on the peripheral wall of the outer cylindrical jig 1 at a position corresponding to the threaded hole 9. The screw passes through the threaded hole 9 and is at least partially located in the countersunk hole 10, so that the end face of the screw does not exceed the outer peripheral wall of the outer cylindrical jig 1. The part where the screw is inserted into the countersunk hole 10 is not provided with threads, which facilitates the screw to be installed in the countersunk hole 10. The insertion of the screw into the countersunk hole 10 increases the contact area between the screw and the outer cylindrical jig 1. The screw provides a large locking force for the outer cylindrical jig 1 and the jig base 2 to prevent the outer cylindrical jig 1 from shifting during operation.

[0041] In some embodiments, a plurality of threaded holes 9 are provided on the peripheral wall of the peripheral jig 1, and the plurality of threaded holes 9 are arranged in a ring along the peripheral wall of the jig bottom 2, and a corresponding plurality of countersunk holes 10 are also arranged in a ring along the peripheral wall of the jig bottom 2, so as to better form a fixation between the outer circle jig 1 and the jig base 2.

[0042] In order to better understand the technical solution of the jig for assisting in processing silicon carbide crystals disclosed in the present invention, it is described below in combination with relatively preferred technical features.

[0043] See also Figure 1 and Figure 2The present invention provides a jig for assisting in processing silicon carbide crystals, including an outer cylindrical jig 1, the outer cylindrical jig 1 is used to place the silicon carbide crystal, the jig base 2 is provided with a mounting groove 7 for mounting the outer cylindrical jig 1, the mounting groove 7 can limit the movement of the outer cylindrical jig 1, the outer cylindrical jig 1 is at least partially located in the mounting groove 7, the side wall of the mounting groove 7 is provided with a groove 8, the bottom of the groove 8 is lower than the bottom surface of the mounting groove 7, a plurality of grooves 8 are arranged in an annular manner on the peripheral wall of the mounting groove 7, the groove 8 can reduce the contact area between the outer cylindrical jig 1 and the side wall of the mounting groove 7, thereby reducing the removal or The friction and resistance when assembling the external cylindrical jig 1, the annularly distributed grooves 8 avoid local force when clamping the external cylindrical jig 1, which helps to reduce the wear of the jig and extend its service life. A locking mechanism and a positioning mechanism are arranged between the external cylindrical jig 1 and the jig base 2. The positioning mechanism includes a guide column 3 and a positioning pin 5. The guide column 3 is arranged on the side of the external cylindrical jig 1 close to the bottom of the mounting groove 7. The bottom of the mounting groove 7 is provided with a guide groove 4 that matches the guide column 3. The guide column 3 and the guide groove 4 make the assembly process of the external cylindrical jig 1 and the jig base 2 fast and accurate, and the guide groove 4 constrains the guide column 3 provides support for the outer cylindrical jig 1, the positioning pin 5 is arranged on the outer cylindrical jig 1, and the jig base 2 is provided with a positioning pin groove 6 matched with the positioning pin 5 to limit the rotational freedom between the outer cylindrical jig 1 and the mounting groove 7 around the central axis of the guide column 3. By limiting the rotation of the outer cylindrical jig 1 around the guide column 3, it is beneficial to improve the processing quality and efficiency of the carbide crystal. The locking mechanism includes a screw, a threaded hole 9 is formed on the side wall of the mounting groove 7, and a countersunk hole 10 is arranged on the peripheral wall of the outer cylindrical jig 1 corresponding to the threaded hole 9. The screw passes through the threaded hole 9 and is at least partially located in the countersunk hole 10. The screw is inserted into the countersunk hole 10. The portion entering the countersunk hole 10 is not threaded, which facilitates the installation of the screw into the external cylindrical jig 1. The insertion of the screw into the countersunk hole 10 increases the contact area between the screw and the external cylindrical jig 1. The screw provides a locking force for fixing the external cylindrical jig 1. The external cylindrical jig 1 is a cylindrical part. The external cylindrical jig 1, the jig base 2 and the guide column 3 are coaxially arranged. Since the external cylindrical jig 1 and the jig base 2 are both cylindrical parts, the structure of the cylindrical part has good rigidity and stability. When the external cylindrical jig 1 and the jig base 2 are both designed as cylindrical parts and are coaxially arranged, the overall rigidity and stability of the jig are further enhanced.

[0044] In summary, the method for auxiliary processing of silicon carbide crystal disclosed in the present invention has the following advantages:

[0045] The jig for assisting in processing silicon carbide crystals fixes the silicon carbide crystals on an outer cylindrical jig 1, which is mounted on a jig base 2. A locking mechanism and a positioning mechanism are provided between the outer cylindrical jig 1 and the jig base 2. During the processing, there is no need to install or disassemble the silicon carbide crystals multiple times, which is beneficial to improving the processing efficiency of the silicon carbide crystals.

[0046] So far, various embodiments of the present disclosure have been described in detail. In order to avoid obscuring the concept of the present disclosure, some details known in the art are not described. Based on the above description, those skilled in the art can fully understand how to implement the technical solution disclosed here.

[0047] Although some specific embodiments of the present disclosure have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present disclosure. It should be understood by those skilled in the art that the above embodiments may be modified or some technical features may be replaced by equivalents without departing from the scope and spirit of the present disclosure. In particular, the various technical features mentioned in the various embodiments may be combined in any manner as long as there is no structural conflict.

Claims

1. A tool for assisting in processing silicon carbide crystals, characterized in that: include: An outer circular jig (1), the outer circular jig (1) being used to place a silicon carbide crystal; A jig base (2), the jig base (2) being used for mounting the outer circle jig (1); A locking mechanism and a positioning mechanism are provided between the outer circle jig (1) and the jig base (2).

2. The jig for assisting in processing silicon carbide crystal according to claim 1, characterized in that: The jig base (2) is provided with a mounting groove (7) for mounting the external circular jig (1), and the external circular jig (1) is at least partially located in the mounting groove (7).

3. The jig for assisting in processing silicon carbide crystal according to claim 2, characterized in that: The positioning mechanism comprises a guide column (3), wherein the guide column (3) is arranged on one side of the external cylindrical fixture (1) close to the bottom of the mounting groove (7), and the bottom of the mounting groove (7) is provided with a guide groove (4) matching with the guide column (3).

4. The jig for assisting in processing silicon carbide crystal according to claim 3, characterized in that: The positioning mechanism comprises a positioning pin (5), wherein the positioning pin (5) is arranged on one of the outer cylindrical jig (1) and the mounting groove (7), and the other is provided with a positioning pin groove (6) matching with the positioning pin (5) to limit the rotational freedom between the outer cylindrical jig (1) and the mounting groove (7) around the central axis of the guide column (3).

5. The jig for assisting in processing silicon carbide crystal according to claim 3, characterized in that: The jig base (2) is a cylindrical part, the outer circle jig (1) is a cylindrical part, and the outer circle jig (1), the jig base (2) and the guide column (3) are coaxially arranged.

6. The jig for assisting in processing silicon carbide crystal according to claim 2, characterized in that: A groove (8) is provided on the side wall of the installation groove (7), and the bottom of the groove (8) is lower than the bottom surface of the installation groove (7).

7. The jig for assisting in processing silicon carbide crystal according to claim 6, characterized in that: A plurality of grooves (8) are arranged in an annular manner on the peripheral wall of the mounting groove (7).

8. The jig for assisting in processing silicon carbide crystals according to any one of claims 2 to 7, characterized in that: The locking mechanism comprises a screw, a threaded hole (9) is formed on the side wall of the mounting groove (7), and the screw passes through the threaded hole (9) and abuts against the peripheral wall of the outer cylindrical fixture (1).

9. The jig for assisting in processing silicon carbide crystal according to claim 8, characterized in that: A countersunk hole (10) is provided on the peripheral wall of the external cylindrical jig (1) at a position corresponding to the threaded hole (9), and the screw passes through the threaded hole (9) and is at least partially located in the countersunk hole (10).

10. The jig for assisting in processing silicon carbide crystal according to claim 9, characterized in that: The plurality of threaded holes (9) are arranged in a ring shape on the peripheral wall of the fixture base (2), and the plurality of countersunk holes (10) are arranged in a ring shape on the peripheral wall of the outer cylindrical fixture (1).

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