Full-automatic welding device for fin supporting legs

Abstract

The utility model relates to the technical field of semiconductor part production equipment, in particular to a full-automatic welding device for fin supporting legs. Comprising a rack, and a bearing assembly, a visual positioning detection assembly, a feeding assembly and a welding gun are arranged on the rack; the device further comprises a control end, and the control end is electrically connected with the bearing assembly, the visual positioning detection assembly, the feeding assembly and the welding gun. Aiming at the technical problem of low welding efficiency of the existing quartz boat fin support leg, the visual positioning detection assembly, the feeding assembly and the bearing assembly are combined for use, so that the relative position of the quartz fin and the support leg can be accurately adjusted, and the welding between the quartz fin and the support leg can be automatically realized through the welding gun.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor component production equipment, in particular to a fully automatic welding device for fin legs. Background Art

[0002] In the production process of semiconductor quartz boat parts, due to the diversification of wafer bearing structures, the technical requirements for quartz boat fin production personnel are getting higher and higher, requiring high-precision, miniaturization and high repeatability operations. The existing quartz boat fin legs are all manually welded, completed by a certain auxiliary jig block, requiring operators to have extremely high manual technical skills and experience to ensure high flatness, position, and integrity and consistency of the welded parts. Due to the above factors, the production efficiency and pass rate of this product are low, and the quality stability is poor, which cannot meet customer needs. Utility Model Content

[0003] In view of the technical problem of low efficiency in the existing fin support welding, the utility model provides a fully automatic welding device for fin supports, which can accurately adjust the relative position of quartz fins and supports through the combined use of a visual positioning detection component, a feeding component and a bearing component, and automatically realize the welding between the quartz fins and the supports through a welding gun.

[0004] The technical solution provided by the utility model is: a fully automatic welding device for fin legs, comprising a frame, on which a bearing assembly, a visual positioning detection assembly, a feeding assembly and a welding gun are arranged; further comprising a control end, which is electrically connected to the bearing assembly, the visual positioning detection assembly, the feeding assembly and the welding gun; the bearing assembly comprises a rotating power unit, a rotating shaft, a rotating bearing platform, a lifting power unit, a lifting bearing platform and a bearing bracket arranged on the frame; the output end of the rotating power unit is transmission-connected to the rotating shaft, and the rotating bearing platform is fixed to one end of the rotating shaft; the rotating bearing platform is circumferentially provided with a plurality of first supporting members, the first supporting members being used to support the fins; the lifting power unit The output end is transmission-connected to the lifting load-bearing platform, the lifting load-bearing platform is fixedly connected to the load-bearing bracket, one end of the rotating shaft passes through the lifting load-bearing platform and the load-bearing bracket, and the rotating load-bearing platform is located on the upper side of the load-bearing bracket; the load-bearing bracket is circumferentially provided with a plurality of second support members, and the second support members are used to support the fins; the feeding assembly is adjacent to the load-bearing assembly, and the feeding assembly is used to move the support legs close to or away from the fins on the load-bearing assembly; the welding gun is adjacent to the load-bearing assembly, and the gun head of the welding gun is facing the fins on the load-bearing assembly; the visual positioning detection assembly at least includes a visual sensor element, and the visual sensor element is used to detect and record the welding position of the support legs on the fins.

[0005] Optionally, the visual positioning detection component is a CCD visual positioning detection module, the visual sensor element includes a CCD camera, the CCD camera is electrically connected to the control end, and the CCD camera is located on the upper side of the rotating support platform and faces the fin.

[0006] Optionally, the CCD visual positioning detection module also includes a longitudinal support rod, a movable bracket and a locking piece, the longitudinal support rod is fixedly connected to the frame and extends in a direction perpendicular to the bottom surface, the movable bracket is movably cooperated with the longitudinal support rod, the locking piece is used for relative fixation of the longitudinal support rod and the movable bracket, and the CCD camera is fixed on the movable bracket.

[0007] Optionally, the feeding assembly includes a horizontal moving part, a vertical moving part, a first bracket, a second bracket, a clamping power part and clamping fingers; the horizontal moving part, the vertical moving part and the clamping power part are all electrically connected to the control end; the first bracket is fixedly connected to the output end of the horizontal moving part, the vertical moving part is fixed on the first bracket, the second bracket is fixedly connected to the output end of the vertical moving part, the clamping power part is fixed on the second bracket, the clamping fingers are transmission-connected to the output end of the clamping power part, and the clamping fingers are used to clamp the support foot.

[0008] Optionally, the horizontal moving part is a first cylinder arranged horizontally, and the first bracket is fixedly connected to the output end of the first cylinder; the vertical moving part is a second cylinder arranged longitudinally along the height direction, and the second bracket is fixedly connected to the output end of the second cylinder; the clamping power part is a clamping cylinder, and the clamping finger is fixedly connected to the clamping claw of the clamping cylinder.

[0009] Optionally, the clamping fingers are made of isostatically pressed high-purity graphite.

[0010] Optionally, a first contact end is provided on the first support member, and the first contact end is used to abut against the fin; a second contact end is provided on the second support member, and the second contact end is used to abut against the fin; the first contact end and the second contact end are both made of isostatically pressed high-purity graphite material.

[0011] Optionally, the rotating power unit is a motor, the motor is electrically connected to the control end, and the output end of the motor is directly or indirectly connected to the rotating shaft; the lifting power unit includes a driving unit and a lifting shaft, the driving unit is electrically connected to the control end, the driving unit is power-connected to the lifting shaft, and one end of the lifting shaft is fixedly connected to the lifting support platform.

[0012] Optionally, the lifting shaft is located on one side of the rotating shaft, a limiting shaft is provided on the other side of the rotating shaft, the limiting shaft is fixedly connected to the lifting bearing platform, a limiting hole is provided on the frame, and the limiting hole is movably matched with the limiting shaft.

[0013] Optionally, the welding gun is an oxyhydrogen flame gun.

[0014] Beneficial Effects

[0015] The technical solution provided by the utility model has the following beneficial effects compared with the prior art: in view of the technical problem of low welding efficiency of the existing quartz boat fin legs, the utility model can accurately adjust the relative position of the quartz fin and the legs through the combined use of a visual positioning detection component, a feeding component and a bearing component, and automatically realize the welding between the quartz fin and the legs through a welding gun. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic structural diagram of the fully automatic welding device for fin legs proposed in an embodiment of the utility model.

[0017] Figure 2 This is a working schematic diagram of the fully automatic welding device for fin legs proposed in an embodiment of the utility model. DETAILED DESCRIPTION

[0018] In order to further understand the content of the utility model, the utility model is described in detail in conjunction with the accompanying drawings and embodiments.

[0019] The present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It is understood that the specific embodiments described herein are only used to explain the relevant utility model, rather than to limit the utility model. It should also be noted that, for the convenience of description, only the parts related to the utility model are shown in the accompanying drawings. The words "first", "second", etc. described in the present utility model are set for the convenience of describing the technical solution of the present utility model, and have no specific limiting effect. They are all general references and do not constitute a limiting effect on the technical solution of the present utility model. It should be noted that, in the absence of conflict, the embodiments and features in the embodiments in the present application can be combined with each other. In the description of the present utility model, it should be noted that the orientation or position relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. Unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be a connection between the insides of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances. Multiple technical solutions in the same embodiment, and multiple technical solutions in different embodiments, can be arranged and combined to form new technical solutions that do not have contradictions or conflicts, all of which are within the scope of protection required by the present utility model.

[0020] Example 1

[0021] Combined with Figure 1-2 This embodiment proposes a fully automatic welding device for fin legs, including a frame 10, on which a bearing assembly, a visual positioning detection assembly, a feeding assembly and a welding gun 11 are provided; it also includes a control end, which is electrically connected to the bearing assembly, the visual positioning detection assembly, the feeding assembly and the welding gun 11.

[0022] The bearing assembly includes a rotating power unit, a rotating shaft 12, a rotating bearing platform 13, a lifting power unit 14, a lifting bearing platform 15 and a bearing bracket 16 arranged on the frame 10. The output end of the rotating power unit is connected to the rotating shaft 12 by transmission, and the rotating bearing platform 13 is fixed to one end of the rotating shaft 12; the rotating bearing platform 13 is provided with a plurality of first support members 101 along the circumferential direction, and the first support members 101 are used to support the fins. The output end of the lifting power unit 14 is connected to the lifting bearing platform 15 by transmission, and the lifting bearing platform 15 is fixedly connected to the bearing bracket 16. One end of the rotating shaft 12 passes through the lifting bearing platform 15 and the bearing bracket 16, and the rotating bearing platform 13 is located on the upper side of the bearing bracket 16; the bearing bracket 16 is provided with a plurality of second support members 102 along the circumferential direction, and the second support members 102 are used to support the fins.

[0023] The feeding assembly is arranged adjacent to the supporting assembly, and the feeding assembly is used to move the supporting legs closer to or away from the fins on the supporting assembly; the welding gun 11 is arranged adjacent to the supporting assembly, and the gun head of the welding gun 11 is facing the fins on the supporting assembly; the visual positioning detection assembly includes at least a visual sensor element 103, and the visual sensor element 103 is used to detect and record the welding position of the supporting legs on the fins.

[0024] A fully automatic fin support welding device of the present embodiment can accurately adjust the relative position of the quartz fin and the support through the combined use of a visual positioning detection component, a feeding component and a bearing component, and automatically realize the welding between the quartz fin and the support through a welding gun 11.

[0025] The working method of a fully automatic welding device for fin legs of the present embodiment is as follows: taking the welding of the legs to the circumferential notch of a quartz annular fin as an example, the quartz annular fin needs to be placed on the supporting bracket 16 first, and the control end controls the feeding assembly to drive the legs to move forward in the direction of the annular fin, and at the same time the control end controls the lifting power unit 14 to lower the lifting bearing platform 15 until the annular fin is supported by the first support member 101 arranged circumferentially on the rotating bearing platform 13, and then the control end controls the rotating power unit to start, and drives the rotating bearing platform 13 to rotate through the rotating shaft 12, and the annular fin rotates accordingly, and the welding notch of the fin will pass under the visual positioning detection component, and when the visual sensor element 103 detects the welding position of the legs on the fin, the welding position coordinates, that is, the notch coordinates, are recorded and sent to the control end, and the control end controls the rotating power unit to start, and according to the welding position coordinate information, The rotating bearing platform 13 is driven to rotate by the rotating shaft 12 until the welding position is rotated to the lower side of the support leg fixed by the feeding assembly and then stopped. The control end controls the lifting power unit 14 to drive the lifting bearing platform 15 to rise, and the annular fin is lifted by the second support member 102. At the same time, the control end controls the feeding assembly to drive the support leg to descend until a certain fire-moving space is left between the fin and the support leg. The control end controls the welding gun 11 to start, and the flame will be accurately sprayed between the support leg and the annular fin to heat both. After heating for a certain period of time, the control end controls the feeding assembly to drive the support leg to descend to the welding position of the support leg and the fin to contact, and the welding operation is completed. At this time, the flame stops spraying. After cooling for a specified time, the control end controls the feeding assembly to release the support leg and move away from the fin. Then the feeding assembly reloads the support leg, and the above process is repeated several times until the welding operation of all the support legs and the annular fins is completed. The control end in this embodiment is a controller, a control terminal or a control module with a control function, such as a single-chip microcomputer module, a PLC module or other industrial control host.

[0026] The feeding assembly is a mechanism that can drive the support leg to achieve translation and lifting movement, and can be a feeding mechanism in a robotic arm or other automated equipment. In a preferred embodiment, the feeding assembly includes a horizontal moving part 20, a vertical moving part 23, a first bracket 21, a second bracket 22, a clamping power part 24 and a clamping finger 25; the horizontal moving part 20, the vertical moving part 23 and the clamping power part 24 are all electrically connected to the control end; the first bracket 21 is fixedly connected to the output end of the horizontal moving part 20, the vertical moving part 23 is fixed on the first bracket 21, the second bracket 22 is fixedly connected to the output end of the vertical moving part 23, the clamping power part 24 is fixed on the second bracket 22, the clamping finger 25 is transmission-connected to the output end of the clamping power part 24, and the clamping finger 25 is used to clamp the support leg. The horizontal moving part 20 is a driving mechanism for realizing horizontal movement of the support leg, the vertical moving part 23 is a driving mechanism for realizing height movement of the support leg, and the clamping power part 24 is a driving mechanism for realizing the clamping and opening of the clamping finger 25. The horizontal moving part 20 and the vertical moving part 23 can be mechanisms such as electric push rods, cylinders, hydraulic cylinders and screws. The clamping power part 24 is a clamping claw mechanism, and the clamping fingers 25 are fixed on the clamping claws to achieve clamping of the support legs.

[0027] In a further embodiment, the horizontal moving part 20 is a first cylinder arranged horizontally, and the first bracket 21 is fixedly connected to the output end of the first cylinder; the vertical moving part 23 is a second cylinder arranged longitudinally along the height direction, and the second bracket 22 is fixedly connected to the output end of the second cylinder; the clamping power part 24 is a clamping cylinder, and the clamping finger 25 is fixedly connected to the clamping claw of the clamping cylinder. Among them, the clamping cylinder is a clamping claw cylinder, or a cylinder clamping claw, and the clamping fingers 25 are respectively fixed on the clamping claws of the clamping cylinder, so as to follow the opening and closing of the clamping claws to achieve the clamping of the support leg.

[0028] In a further embodiment, the clamping fingers 25 are made of isostatically pressed high-purity graphite. In this embodiment, since the purity of the isostatically pressed high-purity graphite material used by the clamping fingers 25 can reach below 5ppm, it can be fully ensured that the quartz boat fins will not be scratched by the clamping fingers 25 to cause defects, and the clamping fingers 25 can be replaced to prevent excessive wear and tear during use from affecting the positioning accuracy.

[0029] In this embodiment, the welding gun 11 is preferably an oxyhydrogen flame gun, which is suitable for welding the quartz boat fins and legs.

[0030] Furthermore, the rotating power unit is preferably a motor, and the output end of the motor is directly connected to the rotating shaft 12, or is indirectly connected to the rotating shaft 12 through a gear set or a reduction mechanism.

[0031] Furthermore, the lifting power unit 14 is preferably a mechanism including a motor, a hydraulic cylinder, a gas cylinder, an electric push rod or a screw, etc., and the output end of the lifting power unit 14 is directly connected to the lifting platform 15, or can be indirectly connected to the lifting platform 15 through a connecting rod mechanism, a slide rail assembly, etc. In a more preferred embodiment, the lifting power unit 14 includes a driving unit and a lifting shaft, the driving unit is connected to the lifting shaft power, and one end of the lifting shaft is fixedly connected to the lifting platform 15, wherein the driving unit can be a hydraulic cylinder, a gas cylinder, an electric push rod or a screw, etc., and the output end of the driving unit drives the lifting platform 15 to move through the lifting shaft.

[0032] When the lifting power unit 14 includes a driving unit and a lifting shaft, since one end of the rotating shaft 12 passes through the lifting load platform 15 and the load bracket 16, that is, the lifting load platform 15 and the load bracket 16 are sleeved on the outside of the rotating shaft 12, the lifting shaft is located on one side of the rotating shaft 12. In a further embodiment, a limiting shaft 26 is provided on the other side of the rotating shaft 12, and the limiting shaft 26 is fixedly connected to the lifting load platform 15. A limiting hole is provided on the frame 10, and the limiting hole is movably matched with the limiting shaft 26. Therefore, the setting of the limiting shaft 26 can prevent the lifting load platform 15 and the load bracket 16 from being offset during the lifting process, thereby making the movement of the lifting load platform 15 and the load bracket 16 more stable, thereby ensuring the welding accuracy of the fins and the support legs.

[0033] In this embodiment, the visual positioning detection component is preferably a CCD visual positioning detection module, and the visual sensor element 103 includes a CCD camera, which is electrically connected to the control end and is located on the upper side of the rotating support platform 13 and faces the fins.

[0034] In a further embodiment, the CCD visual positioning detection module further includes a longitudinal support rod 17, a movable bracket 18 and a locking member 19, wherein the longitudinal support rod 17 is fixedly connected to the frame 10 and extends in a direction perpendicular to the bottom surface, the movable bracket 18 is movably matched with the longitudinal support rod 17, the locking member 19 is used for relative fixation of the longitudinal support rod 17 and the movable bracket 18, and the CCD camera is fixed on the movable bracket 18. Thus, in this embodiment, the movable bracket 18 can be moved relative to the longitudinal support rod 17, and the locking member 19 such as a screw or a latch can be used to keep the movable bracket 18 fixed to the longitudinal support rod 17 after the height of the movable bracket 18 is adjusted, thereby adjusting the height of the CCD camera and adjusting the relative distance between the CCD camera and the fin, thereby more accurately detecting the welding position.

[0035] In combination with the above working method, the rotating bearing platform 13 supports the fins through the first supporting member 101, and the supporting bracket 16 supports the fins through the second supporting member 102. In a further embodiment, the first supporting member 101 is provided with a first contact end 111, and the first contact end 111 is used to abut against the fin; the second supporting member 102 is provided with a second contact end 112, and the second contact end 112 is used to abut against the fin; the first contact end 111 and the second contact end 112 are both made of isostatically pressed high-purity graphite. This embodiment further provides a first contact end 111 on the first support member 101, and a second contact end 112 on the second support member 102, so as to support the quartz boat fins through the first contact end 111 and the second contact end 112. The first contact end 111 and the second contact end 112 are both made of isostatically pressed high-purity graphite with a purity of less than 5 ppm, which can fully ensure that the quartz boat fins will not be scratched and cause defects, and the first contact end 111 and the second contact end 112 can be replaced to prevent the positioning accuracy from being affected by gradual consumption and wear during use.

[0036] The above schematically describes the present invention and its implementation methods, which are not restrictive. The drawings show only one implementation method of the present invention, and the actual structure is not limited thereto. Therefore, if ordinary technicians in this field are inspired by it and design structural methods and embodiments similar to the technical solution without creative design without departing from the purpose of the present invention, they should all fall within the protection scope of the present invention.

Claims

1. A fully automatic welding device for fin legs, characterized in that: The machine comprises a frame on which a bearing assembly, a visual positioning detection assembly, a feeding assembly and a welding gun are arranged; and a control end is further comprised, wherein the control end is electrically connected to the bearing assembly, the visual positioning detection assembly, the feeding assembly and the welding gun; The bearing assembly includes a rotating power unit, a rotating shaft, a rotating bearing platform, a lifting power unit, a lifting bearing platform and a bearing bracket arranged on the frame; The output end of the rotating power unit is in transmission connection with the rotating shaft, and the rotating bearing platform is fixed to one end of the rotating shaft; the rotating bearing platform is provided with a plurality of first supporting members along the circumferential direction, and the first supporting members are used to support the fins; The output end of the lifting power unit is connected to the lifting platform in a transmission manner, the lifting platform is fixedly connected to the supporting bracket, one end of the rotating shaft passes through the lifting platform and the supporting bracket, and the rotating platform is located on the upper side of the supporting bracket; the supporting bracket is provided with a plurality of second supporting members along the circumferential direction, and the second supporting members are used to support the fins; The feeding assembly is arranged adjacent to the supporting assembly, and the feeding assembly is used to move the supporting legs closer to or away from the fins on the supporting assembly; the welding gun is arranged adjacent to the supporting assembly, and the gun head of the welding gun is facing the fins on the supporting assembly; the visual positioning detection assembly includes at least a visual sensor element, and the visual sensor element is used to detect and record the welding position of the supporting legs on the fins.

2. The fully automatic welding device for fin legs according to claim 1 is characterized in that: The visual positioning detection component is a CCD visual positioning detection module, and the visual sensor element includes a CCD camera, which is electrically connected to the control end and is located on the upper side of the rotating support platform and faces the fins.

3. The fully automatic welding device for fin legs according to claim 2 is characterized in that: The CCD visual positioning detection module also includes a longitudinal support rod, a movable bracket and a locking piece. The longitudinal support rod is fixedly connected to the frame and extends in a direction perpendicular to the bottom surface. The movable bracket is movably cooperated with the longitudinal support rod. The locking piece is used for relative fixation of the longitudinal support rod and the movable bracket. The CCD camera is fixed on the movable bracket.

4. The fully automatic welding device for fin legs according to claim 1 is characterized in that: The feeding assembly comprises a horizontal moving part, a vertical moving part, a first bracket, a second bracket, a clamping power part and a clamping finger; the horizontal moving part, the vertical moving part and the clamping power part are all electrically connected to the control end; The first bracket is fixedly connected to the output end of the horizontal moving part, the vertical moving part is fixed on the first bracket, the second bracket is fixedly connected to the output end of the vertical moving part, the clamping power part is fixed on the second bracket, the clamping fingers are transmission-connected to the output end of the clamping power part, and the clamping fingers are used to clamp the supporting feet.

5. The fully automatic welding device for fin legs according to claim 4 is characterized in that: The horizontal moving part is a first cylinder arranged horizontally, and the first bracket is fixedly connected to the output end of the first cylinder; the vertical moving part is a second cylinder arranged longitudinally along the height direction, and the second bracket is fixedly connected to the output end of the second cylinder; the clamping power part is a clamping cylinder, and the clamping finger is fixedly connected to the clamping claw of the clamping cylinder.

6. The fully automatic welding device for fin legs according to claim 4 is characterized in that: The clamping fingers are made of isostatically pressed high-purity graphite.

7. The fully automatic welding device for fin legs according to claim 1 is characterized in that: The first support member is provided with a first contact end, and the first contact end is used to abut against the fin; the second support member is provided with a second contact end, and the second contact end is used to abut against the fin; the first contact end and the second contact end are both made of isostatic high-purity graphite material.

8. The fully automatic welding device for fin legs according to claim 1, characterized in that: The rotating power unit is a motor, which is electrically connected to the control end, and the output end of the motor is directly or indirectly connected to the rotating shaft; the lifting power unit includes a driving unit and a lifting shaft, the driving unit is electrically connected to the control end, the driving unit is dynamically connected to the lifting shaft, and one end of the lifting shaft is fixedly connected to the lifting support platform.

9. The fully automatic welding device for fin legs according to claim 8, characterized in that: The lifting shaft is located on one side of the rotating shaft, and a limiting shaft is arranged on the other side of the rotating shaft. The limiting shaft is fixedly connected to the lifting bearing platform, and a limiting hole is arranged on the frame, and the limiting hole is movably matched with the limiting shaft.

10. A fin support leg fully automatic welding device according to any one of claims 1 to 9, characterized in that: The welding gun is an oxyhydrogen flame gun.

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