Spraying assembly for tail gas treatment

Abstract

The utility model relates to the field of semiconductor tail gas treatment. The utility model provides a spraying assembly for tail gas treatment, which comprises a rotary cross fixing seat, a water spraying assembly and a middle water return pipe, the water spraying assembly comprises a spraying main body and a spraying arm, the spraying main body comprises an annular wall part, and the annular wall part and a second groove form a cavity capable of accommodating water; the first water through hole is communicated with a water through channel which is communicated with a middle water return pipe; a second water through hole is formed in the inner side of the spraying body, the spraying arm comprises a spraying channel, a spraying head and a third spraying opening, the second water through hole is communicated with the second groove, the spraying head is communicated with the spraying channel, and the third spraying opening is formed in the spraying head and located on the left side face of the spraying head; and water sprayed by the third spraying opening drives the water spraying assembly to slide and rotate along the rotating cross fixing seat. According to the spraying assembly for tail gas treatment, 360-degree dynamic spraying can be achieved, the cleaning range is wide, and the cleaning effect is good.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor tail gas treatment, in particular to a spray assembly for tail gas treatment. Background Art

[0002] The spray system for tail gas treatment is a widely used method for exhaust gas purification, especially suitable for exhaust gas containing particulate matter, acidic gases (such as sulfur dioxide SO2, nitrogen oxides NO x ), volatile organic compounds (VOCs) and other pollutants. Chinese Patent 202321491383.8 discloses an exhaust gas treatment device, which includes: a water tank and a vertical exhaust gas treatment pipeline and a vertical exhaust pipeline respectively connected to the two ends of the water tank; the exhaust gas treatment pipeline includes: an exhaust gas inlet; a rotating inner tube, which is arranged in the exhaust gas treatment pipeline and connected to the exhaust gas inlet, and the rotating inner tube is configured to rotate around the axis of the rotating inner tube; at least one air-guiding scraper, which is arranged in the rotating inner tube, and the air-guiding scraper includes an air-guiding pipe and a scraper installed on the air-guiding pipe, and the wall of the air-guiding pipe is provided with a plurality of air-guiding holes, and the air-guiding pipe guides air into the rotating inner tube through the plurality of air-guiding holes, and the scraper is close to the wall of the rotating inner tube for scraping off the attachments on the wall of the rotating inner tube. The exhaust gas after oxidation treatment is continuously cleaned by the water tank to remove some of the gas soluble in water in the exhaust gas. However, stagnant water can easily become a breeding ground for bacteria and other microorganisms, and the cleaning effect is poor.

[0003] How to design a spray assembly for tail gas treatment that can spray dynamically and has good cleaning effect is a problem to be solved by the utility model. Summary of the invention

[0004] The purpose of the utility model is to provide a spray assembly for exhaust gas treatment in view of the shortcomings of the prior art. Based on the above problems, the utility model proposes a spray assembly for exhaust gas treatment, which can achieve 360° dynamic spraying, a wide cleaning range and good cleaning effect.

[0005] The technical solution of the utility model is achieved in this way:

[0006] A spray assembly for exhaust gas treatment includes a rotating cross fixing seat, a water spray component and an intermediate water return pipe, the water spray component includes a spray body and a spray arm, the spray body includes an annular wall portion, the rotating cross fixing seat includes a second groove, a water channel and a first water through hole, the annular wall portion and the second groove form a cavity that can accommodate water; the first water through hole is connected to the water channel, and the water channel is connected to the intermediate water return pipe; a second water through hole is provided on the inner side of the spray body, the spray arm includes a spray channel, a spray head and a third spray port, the second water through hole is connected to the second groove, the spray head is connected to the spray channel, and the third spray port is provided on the spray head and is located on the left side of the spray head; the water sprayed from the third spray port drives the water spray assembly to slide and rotate along the rotating cross fixing seat.

[0007] In the exhaust gas treatment spray assembly as described above, the spray arm further comprises a first spray port (903c), which is arranged at one third of the spray channel and located on the left side of the spray channel.

[0008] In the exhaust gas treatment spray assembly as described above, the spray arm further includes a second spray port, and the second spray port is arranged on the left side of the spray head.

[0009] In the exhaust gas treatment spray assembly as described above, the area of ​​the third spray port is larger than the areas of the first spray port and the second spray port.

[0010] In the exhaust gas treatment spray assembly as described above, the spray body further includes an annular convex portion, and the rotating cross fixing seat further includes a first groove, and the annular convex portion is clearance-matched with the first groove.

[0011] In the exhaust gas treatment spray assembly as described above, the top of the rotating cross fixing seat is conical.

[0012] In the exhaust gas treatment spray assembly as described above, the number of the third spray ports is four, and water sprayed from the four third spray ports drives the water spray assembly to slide and rotate along the rotating cross fixing seat.

[0013] In the exhaust gas treatment spray assembly as described above, a first hole is opened on one side of the interior of the third spray port, the first hole is connected to the spray channel, and a second hole is opened on the other side of the interior of the third spray port, the second hole is connected to the second spray port.

[0014] In the exhaust gas treatment spray assembly as described above, a third groove is provided on the top of the rotating cross fixing seat.

[0015] The exhaust gas treatment spray assembly as described above further includes a connecting reducer, and the number of the first water holes is four.

[0016] Compared with the prior art, the utility model has the following advantages and beneficial effects:

[0017] 1. The utility model provides a spray assembly for exhaust gas treatment. The water sprayed from the third spray port drives the water spray component to slide and rotate along the rotating cross fixing seat. The kinetic energy of the water is used to drive the water spray component to rotate. The dynamic spraying method can cover the surface to be treated more comprehensively than the static water washing method, especially for the exhaust gas in the hidden area, the water washing effect is good, and the cleaning is more thorough.

[0018] 2. The utility model provides a spray assembly for exhaust gas treatment, which drives the water spray assembly to rotate by the kinetic energy of water, without the need for an additional mechanical power source, thus saving energy.

[0019] 3. The utility model provides a spray assembly for exhaust gas treatment, wherein the spray arm further comprises a first spray port and a second spray port. The first spray port, the second spray port and the third spray port spray simultaneously to improve the uniformity and thoroughness of cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solution of the utility model or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, what is described below is only one embodiment of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 A schematic diagram of the three-dimensional structure of a spray assembly for exhaust gas treatment provided by the utility model;

[0022] Figure 2 A side view of a spray assembly for exhaust gas treatment provided by the utility model;

[0023] Figure 3 for Figure 2 AA section view;

[0024] Figure 4 for Figure 2 BB cross-section diagram;

[0025] Figure 5 A schematic diagram of the three-dimensional structure of the water spray assembly provided by the utility model;

[0026] Figure 6 A schematic diagram of the three-dimensional structure of the rotating cross fixing seat provided by the utility model;

[0027] Figure 7 A side view of the rotating cross fixing seat provided by the utility model;

[0028] Figure 8 for Figure 7 CC cross-section diagram.

[0029] In the figure, 8-rotating cross fixing seat, 9-water spray assembly, 14-middle water return pipe, 801-first groove, 802-second groove, 803-water channel, 804-first water hole, 901-spray body, 903-spray arm, 901a-second water hole, 901b-annular wall, 901c-annular convex part, 903a-spray channel, 903b-spray head, 903c-first spray port, 903d-second spray port, 903e-third spray port, 9031-first hole, 9032-second hole. DETAILED DESCRIPTION

[0030] In the following description, it should be understood that the terms "first", "second", etc. are only used to distinguish one element from another, without requiring or implying any actual relationship or order between these elements. In fact, the first element can also be called the second element, and vice versa. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that the structure, device or equipment including a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also include elements inherent to such structure, device or equipment. In the absence of more restrictions, the elements defined by the statement "including one..." do not exclude the existence of other identical elements in the structure, device or equipment including the elements. Each embodiment is described in a progressive manner herein, and each embodiment focuses on the differences from other embodiments, and the same similar parts between the embodiments can be referred to each other. The terms "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. in this document indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing this document and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In the description of this document, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a mechanical connection or an electrical connection, or it can be the internal connection of two elements, it can be a direct connection, or it can be indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to the specific circumstances. In this document, unless otherwise specified, the term "plurality" means two or more.

[0031] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0032] like Figure 1-8 As shown, a spray assembly for exhaust gas treatment includes a rotating cross fixing seat 8, a water spray assembly 9 and an intermediate water return pipe 14, wherein the water spray assembly 9 includes a spray body 901 and a spray arm 903, wherein the spray body 901 includes an annular wall portion 901b, and the rotating cross fixing seat 8 includes a second groove 802, a water passage 803 and a first water through hole 804, wherein the annular wall portion 901b and the second groove 802 form a cavity that can accommodate water; the first water through hole 804 is connected to the water passage 803, and the water passage 803 is connected to the intermediate water return pipe 14 The inner side of the spray body 901 is provided with a second water hole 901a, the spray arm 903 includes a spray channel 903a, a spray head 903b and a third spray port 903e, the second water hole 901a is connected with the second groove 802, the spray head 903b is connected with the spray channel 903a, and the third spray port 903e is provided on the spray head 903b and is located on the left side of the spray head 903b; the water sprayed from the third spray port 903e drives the water spray assembly 9 to slide and rotate along the rotating cross fixing seat 8. The water spray assembly is driven to rotate by the kinetic energy of water, and no additional mechanical power source is required, which saves energy.

[0033] Preferably, the spray arm 903 further includes a first spray port 903c, which is disposed at one third of the spray channel 903a and located on the left side of the spray channel 903a. Preferably, the spray arm 903 further includes a second spray port 903d, which is disposed on the left side of the spray head 903b. The first spray port 903c, the second spray port 903d and the third spray port 903e spray at the same time. Compared with static spraying, the dynamic spraying method can more comprehensively cover the surface to be treated, improve the uniformity and thoroughness of cleaning, and is more effective for tail gas in hidden areas, with good water washing effect and more thorough cleaning.

[0034] Preferably, the area of ​​the third spray port 903e is larger than the area of ​​the first spray port 903c and the area of ​​the second spray port 903d. This is to allow the third spray port 903e to spray more water in the same time, provide stronger cleaning power, provide a stronger cleaning effect, and shorten the cleaning cycle; in addition, since the third spray port 903e provides the main power to drive the water spray assembly 9 to rotate along the rotating cross fixing seat 8, the area is larger.

[0035] Preferably, the spray body 901 further includes an annular protrusion 901c, and the rotating cross fixing seat 8 further includes a first groove 801, and the annular protrusion 901c is clearance-matched with the first groove 801. The annular protrusion 901c and the first groove 801 provide a good limiting effect.

[0036] Preferably, the top of the rotating cross fixing seat 8 is conical.

[0037] Preferably, the number of the third spray ports 903e is four, and the water sprayed from the four third spray ports 903e drives the water spray assembly 9 to slide and rotate along the rotating cross fixing seat 8.

[0038] Preferably, a first hole 9031 is formed on one side of the third spray port 903e, and the first hole 9031 is connected to the spray channel 903a. A second hole 9032 is formed on the other side of the third spray port 903e, and the second hole 9032 is connected to the second spray port 903d.

[0039] Preferably, a third groove 805 is provided on the top of the rotating cross fixing seat 8 .

[0040] Preferably, it further includes a connecting reducer 12 , and the number of the first water holes 804 is four; the first water holes 804 communicate with the cavity formed by the annular wall portion 901 b and the second groove 802 .

[0041] During use, water enters the water channel 803 of the rotating cross fixing seat 8 through the middle water return pipe 14, enters the cavity formed by the annular wall portion 901b and the second groove 802 through the first water hole 804, and then flows into the spray channel 903a of the spray arm 903 through the second water hole 901a; then it is sprayed out through the first spray port 903c, the second spray port 903d and the third spray port 903e provided on the spray arm 903 to clean the exhaust gas; the area of ​​the third spray port 903e is larger than that of the first spray port 903c and the second spray port 903d, and the sprayed water also provides power to drive the water spray assembly 9 to rotate along the rotating cross fixing seat 8, thereby realizing the dynamic 360° free rotation of the water spray assembly 9 to clean the exhaust gas.

[0042] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A spray assembly for exhaust gas treatment, characterized in that: The invention comprises a rotating cross fixing seat (8), a water spraying assembly (9) and an intermediate water return pipe (14); the water spraying assembly (9) comprises a spraying body (901) and a spraying arm (903); the spraying body (901) comprises an annular wall portion (901b); the rotating cross fixing seat (8) comprises a second groove (802), a water passage (803) and a first water passage hole (804); the annular wall portion (901b) and the second groove (802) form a cavity capable of accommodating water; the first water passage hole (804) is connected to the water passage (803); the water passage (803) is connected to the intermediate water return pipe (14); the spraying body (901) comprises a spraying body (901) and a spraying arm (903); the spraying body (901) comprises an annular wall portion (901b); the rotating cross fixing seat (8) comprises a second groove (802), a water passage (803) and a first water passage hole (804); the annular wall portion (901b) and the second groove (802) form a cavity capable of accommodating water; the first water passage hole (804) is connected to the water passage (803); the water passage (803) is connected to the intermediate water return pipe (14); A second water hole (901a) is provided on the inner side of the main body (901); the spray arm (903) comprises a spray channel (903a), a spray head (903b) and a third spray port (903e); the second water hole (901a) is connected to the second groove (802); the spray head (903b) is connected to the spray channel (903a); the third spray port (903e) is provided on the spray head (903b) and is located on the left side of the spray head (903b); the third spray port (903e) sprays water to drive the water spray assembly (9) to slide and rotate along the rotating cross fixing seat (8).

2. The spray assembly for exhaust gas treatment according to claim 1, characterized in that: The spray arm (903) further comprises a first spray port (903c), wherein the first spray port (903c) is arranged at one third of the spray channel (903a) and is located on the left side of the spray channel (903a).

3. The spray assembly for exhaust gas treatment according to claim 2, characterized in that: The spray arm (903) further comprises a second spray port (903d), and the second spray port (903d) is arranged on the left side of the spray head (903b).

4. The spray assembly for exhaust gas treatment according to claim 3, characterized in that: The area of ​​the third spray port (903e) is respectively larger than the areas of the first spray port (903c) and the second spray port (903d).

5. The spray assembly for exhaust gas treatment according to claim 3, characterized in that: The spray body (901) further comprises an annular convex portion (901c), and the rotating cross fixing seat (8) further comprises a first groove (801), and the annular convex portion (901c) is clearance-matched with the first groove (801).

6. The spray assembly for exhaust gas treatment according to claim 3, characterized in that: The top of the rotating cross fixing seat (8) is conical.

7. The spray assembly for exhaust gas treatment according to claim 3, characterized in that: The number of the third spray ports (903e) is four, and the water sprayed from the four third spray ports (903e) drives the water spray assembly (9) to slide and rotate along the rotating cross fixing seat (8).

8. The spray assembly for exhaust gas treatment according to claim 7, characterized in that: A first hole (9031) is provided on one side of the interior of the third spray port (903e), and the first hole (9031) is connected to the spray channel (903a). A second hole (9032) is provided on the other side of the interior of the third spray port (903e), and the second hole (9032) is connected to the second spray port (903d).

9. The spray assembly for exhaust gas treatment according to claim 7, characterized in that: A third groove (805) is provided on the top of the rotating cross fixing seat (8).

10. The spray assembly for exhaust gas treatment according to claim 7, characterized in that: It also includes a connecting reducer (12), and the number of the first water holes (804) is four.

Images