Crucible assembly and single crystal furnace

Abstract

The utility model discloses a crucible assembly and a single crystal furnace, and the crucible assembly comprises an outer layer crucible, the inner side wall of the first upper edge of the outer layer crucible is in an outward and upward expanding arc shape; the quartz crucible is arranged in the outer-layer crucible in a sleeved mode, the outer side wall of a second upper edge of the quartz crucible is in an arc shape extending outwards and upwards, the outer side wall of the second upper edge is attached to the inner side wall of the first upper edge, and the top of the second upper edge is higher than the top of the first upper edge; the central angle of the outer side wall of the second upper edge is smaller than 90 degrees and larger than the central angle of the inner side wall of the first upper edge, and the included angle between the tangent line of the bottom end point of the outer side wall of the second upper edge and the vertical direction ranges from 1.8 degrees to 2.2 degrees. According to the crucible assembly and the single crystal furnace, the risks of silicon overflow, quartz crucible deformation, quartz crucible collision with the guide cylinder, crystal bar breakage, quartz crucible breakage, silicon leakage and the like are not prone to occurring, safety, stability and reliability are high, the service life of a product is prolonged, and the production cost is reduced.

Description

Technical Field

[0001] The present application relates to a single crystal furnace, and in particular to a crucible assembly and a single crystal furnace. Background Art

[0002] Quartz crucible is one of the important components of crystal pulling equipment. It plays a huge role in the process of refining crystalline silicon. As the surface area of ​​quartz crucible continues to increase, the requirements for quartz crucible are getting higher and higher.

[0003] During the crystal pulling process, the quartz crucible is placed in the outer crucible. Since the upper edge of the quartz crucible is usually vertical, under high temperature conditions, as the crystal pulling proceeds, the upper edge of the quartz crucible is easily softened by the high temperature, causing the upper edge of the quartz crucible to bend and curl inward to varying degrees, or even collapse, and the height of the quartz crucible is shortened, causing silicon liquid to overflow from the upper edge. The collapsed edge of the quartz crucible can easily lead to risks such as deformation of the quartz crucible, collision of the quartz crucible with the guide tube, breakage of the crystal rod, and rupture and silicon leakage of the quartz crucible, which reduces the service life of the product and increases production costs. Utility Model Content

[0004] The purpose of the present application is to provide a crucible assembly and a single crystal furnace to prevent the upper edge of the quartz crucible from bending and rolling inward, collapsing, and shortening of the overall height of the quartz crucible.

[0005] In order to solve at least one of the above technical problems, the technical solution of the present application is as follows:

[0006] According to a first aspect of the present application, a crucible assembly is provided, comprising: an outer crucible, the top of the outer crucible having a first upper edge, the inner side wall of the first upper edge being in the shape of an arc extending outward and upward; a quartz crucible, the quartz crucible being sleeved in the outer crucible, and the quartz crucible and the outer crucible being separable, the top of the quartz crucible having a second upper edge, the outer side wall of the second upper edge being in the shape of an arc extending outward and upward, the outer side wall of the second upper edge being attached to the inner side wall of the first upper edge, the top of the second upper edge being higher than the top of the first upper edge, the central angle of the outer side wall of the second upper edge being less than 90° and greater than the central angle of the inner side wall of the first upper edge, and the angle between the tangent of the bottom end point of the outer side wall of the second upper edge and the vertical direction is 1.8° to 2.2°.

[0007] In a possible implementation of the first aspect above, the top of the first upper edge and the top of the second upper edge are both horizontal planes.

[0008] In a possible implementation of the first aspect above, the vertical distance between the top of the first upper edge and its bottom is 30 to 45 mm, and the vertical distance between the top of the second upper edge and its bottom is 10 to 15 mm greater than the vertical distance between the top of the first upper edge and its bottom.

[0009] In a possible implementation of the first aspect, the wall thickness of the quartz crucible is 13-17 mm, and the wall thickness of the outer crucible is greater than the wall thickness of the quartz crucible by 0-7 mm.

[0010] In a possible implementation of the first aspect, the outer crucible is integrally formed, and the outer crucible includes, from bottom to top, a first horizontal bottom wall, a first vertical wall, and a first upper edge, and the intersection of the first horizontal bottom wall and the first vertical wall is rounded.

[0011] In a possible implementation of the first aspect, the quartz crucible is integrally formed, and the quartz crucible includes, from bottom to top, a second horizontal bottom wall, a second vertical wall, and a second upper edge, and the intersection of the second horizontal bottom wall and the second vertical wall is rounded.

[0012] In a possible implementation of the first aspect above, the outer crucible is a graphite crucible or a carbon-carbon crucible.

[0013] In a possible implementation of the first aspect above, the inner side wall of the first upper edge is consistent in shape with the outer side wall thereof, and the inner side wall of the second upper edge is consistent in shape with the outer side wall thereof.

[0014] In a possible implementation of the first aspect above, the outer side wall of the first upper edge is a vertical surface, and / or the inner side wall of the second upper edge is a vertical surface.

[0015] According to a second aspect of the present application, a single crystal furnace is provided, comprising: a furnace body; and a crucible assembly, wherein the crucible assembly is arranged in the furnace body, and the crucible assembly is the above-mentioned crucible assembly.

[0016] The above technical solution of the present application has at least one of the following beneficial effects:

[0017] According to the crucible assembly of the present application, the quartz crucible is sleeved in the outer crucible, the inner side wall of the first upper edge of the outer crucible is in the shape of an arc extending outward and upward, the outer side wall of the second upper edge of the quartz crucible is in the shape of an arc extending outward and upward, the outer side wall of the second upper edge is attached to the inner side wall of the first upper edge, so that the first upper edge stably supports the second upper edge, which not only prevents the second upper edge from being softened by high temperature and causing curling inward or even collapse, but also prevents the second upper edge from curling outward; the top of the second upper edge is higher than the top of the first upper edge, and the second upper edge The center angle of the outer wall is less than 90° and greater than the center angle of the inner wall of the first upper edge, and the angle between the tangent of the bottom endpoint of the outer wall of the second upper edge and the vertical direction is 1.8° to 2.2°, so that an inflection point is formed at the bottom of the outer wall of the second upper edge, and the second upper edge is higher than the first upper edge, which can better prevent the second upper edge from curling inward, collapsing, etc., and prevent the quartz crucible from shortening and overflowing silicon, and prevent the debris on the first upper edge from entering the quartz crucible, and the pot mouth of the quartz crucible is too large to affect the heater on the outside. Therefore, the crucible assembly of the present application has a simple and stable structure, is easy to operate, is not prone to risks such as overflowing silicon, deformation of the quartz crucible, collision of the quartz crucible with the guide tube, breaking of the crystal rod, and rupture and leakage of silicon in the quartz crucible, and has high safety, stability and reliability, which prolongs the service life of the product and reduces production costs.

[0018] Furthermore, in the present application, the top of the first upper edge and the top of the second upper edge are both horizontal planes, the vertical distance between the top of the first upper edge and its bottom is 30 to 45 mm, and the vertical distance between the top of the second upper edge and its bottom is 10 to 15 mm greater than the vertical distance between the top of the first upper edge and its bottom, so that the structure is simpler and the processing is more convenient. It can not only prevent the second upper edge from curling outward, but also when the second upper edge is softened by high temperature, under the action of gravity, it can better prevent the second upper edge from curling inward and deforming.

[0019] Furthermore, in the present application, the outer crucible is integrally formed, and the quartz crucible is integrally formed, so that the structure is more stable and reliable, and the service life is longer.

[0020] Furthermore, in the present application, the inner side wall of the first upper edge is consistent in shape with its outer side wall, and the inner side wall of the second upper edge is consistent in shape with its outer side wall, so that the structure is simpler and the processing and manufacturing are more convenient.

[0021] Furthermore, in the present application, the outer side wall of the first upper edge is a vertical surface, and / or the inner side wall of the second upper edge is a vertical surface, thereby not only improving the structural strength of the first upper edge and the second upper edge, but also better preventing the second upper edge from curling inward, collapsing, shortening in height, curling outward, etc.

[0022] In addition, according to the single crystal furnace of the present application, the above-mentioned crucible assembly is adopted, which has a simple and stable structure, is easy to operate, and is not prone to risks such as silicon overflow, quartz crucible deformation, quartz crucible collision with the guide tube, crystal rod breaking, quartz crucible rupture and silicon leakage. It has high safety, stability and reliability, extends the service life of the product, and reduces production costs.

[0023] In addition, in the technical solution of the present application, unless otherwise specified, the technical solution can be implemented by adopting conventional means in the art. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0025] Figure 1 A partial cross-sectional view of a crucible assembly according to an embodiment of the present application;

[0026] Figure 2 A cross-sectional view of a crucible assembly according to an embodiment of the present application;

[0027] Figure 3 A partial cross-sectional view of a crucible assembly according to an embodiment of the present application;

[0028] Figure 4 A partial cross-sectional view of a crucible assembly according to an embodiment of the present application;

[0029] Figure 5 A partial cross-sectional view of a crucible assembly according to an embodiment of the present application.

[0030] Description of the reference numerals in the accompanying drawings:

[0031] Outer crucible 1; first upper edge 11; first horizontal bottom wall 12; first vertical wall 13;

[0032] Quartz crucible 2; second upper edge 21; second horizontal bottom wall 22; second vertical wall 23. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solutions and advantages of the present application clearer, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are part of the embodiments of the present application, rather than all of the embodiments, and are only used to explain the present application, and are not used to limit the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application.

[0034] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "front", "back", "vertical", "horizontal", "inside", "outside", "two ends", "both sides", "bottom", "top" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred elements must have a specific orientation or be constructed and operated in a specific orientation, and therefore cannot be understood as limitations on the present application. In addition, the terms "first", "second", "superior", "inferior", "primary", "secondary" and the like are only used for descriptive purposes and can be simply used to more clearly distinguish different components, but cannot be understood as indicating or implying relative importance.

[0035] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0036] See also Figures 1 to 5 , schematically shows a crucible assembly according to the present application, the crucible assembly comprises an outer crucible 1 and a quartz crucible 2, the quartz crucible 2 is sleeved in the outer crucible 1, and the quartz crucible 2 and the outer crucible 1 are separable.

[0037] Among them, Figure 1As shown, the top of the outer crucible 1 has a first upper edge 11, and the inner side wall of the first upper edge 11 is in the shape of an arc extending outward and upward. The top of the quartz crucible 2 has a second upper edge 21, and the outer side wall of the second upper edge 21 is in the shape of an arc extending outward and upward. The outer side wall of the second upper edge 21 is attached to the inner side wall of the first upper edge 11, and the top of the second upper edge 21 is higher than the top of the first upper edge 11. The central angle of the outer side wall of the second upper edge 21 is b, which is less than 90° and greater than the central angle of the inner side wall of the first upper edge 11. The angle between the tangent of the bottom end point of the outer side wall of the second upper edge 21 and the vertical direction is a, and a is 1.8° to 2.2°.

[0038] That is to say, the bottom endpoint position of the outer side wall of the second upper edge 21 forms an inflection point, the arc of the outer side wall of the second upper edge 21 matches the arc of the inner side wall of the first upper edge 11, the bottom of the arc of the outer side wall of the second upper edge 21 is basically flush with the bottom of the arc of the inner side wall of the first upper edge 11, the top of the arc of the outer side wall of the second upper edge 21 is higher than the top of the arc of the inner side wall of the first upper edge 11, and the top of the second upper edge 21 is higher than the top of the first upper edge 11.

[0039] During the crystal pulling process, the crucible assembly of the present application is arranged in the corresponding furnace body, the heater in the furnace body is located at the outside and bottom of the crucible assembly, the heater heats the crucible assembly, the quartz crucible 2 is sleeved in the outer crucible 1, the inner side wall of the first upper edge 11 of the outer crucible 1 is in the shape of an arc extending outward and upward, the outer side wall of the second upper edge 21 of the quartz crucible 2 is in the shape of an arc extending outward and upward, the outer side wall of the second upper edge 21 is attached to the inner side wall of the first upper edge 11, so that the first upper edge 11 The second upper edge 21 is stably supported, which not only prevents the second upper edge 21 from being softened by high temperature and thus curling inward or even collapsing, but also prevents the second upper edge 21 from curling outward. The second upper edge 21 expands outward, which can resist its inward deformation when it softens by high temperature. The second upper edge 21 expands outward in an arc shape and fits with the inner side wall of the first upper edge 11. Compared with the outward expansion in an inclined straight line, the inner side wall of the first upper edge 11 has more vertical contact with the second upper edge 21. The second upper edge 21 is supported in the vertical direction. When the second upper edge 21 is softened at high temperature, the first upper edge 11 can support the second upper edge 21 in the vertical direction to prevent the second upper edge 21 from being shortened due to edge collapse, which may cause silicon overflow. The top of the second upper edge 21 is higher than the top of the first upper edge 11. The center angle of the outer wall of the second upper edge 21 is less than 90° and greater than the center angle of the inner wall of the first upper edge 11. The tangent of the bottom end point of the outer wall of the second upper edge 21 is perpendicular to the vertical direction. The angle is 1.8° to 2.2°, so that an inflection point is formed at the bottom of the outer wall of the second upper edge 21, and the second upper edge 21 is higher than the first upper edge 11, which can better prevent the second upper edge 21 from curling inward, collapsing, etc., and prevent the height of the quartz crucible 2 from shortening and silicon overflowing. It can also prevent foreign matter on the first upper edge 11 from entering the quartz crucible 2, and the pot mouth of the quartz crucible 2 is too large to affect the heater outside the quartz crucible 2, etc., and it is also convenient to take the quartz crucible 2 out of the outer crucible 1.

[0040] Therefore, the crucible assembly of the present application has a simple and stable structure, is easy to operate, is not prone to risks such as silicon overflow, deformation of the quartz crucible 2, collision of the quartz crucible 2 with the guide tube, breakage of the crystal rod, and rupture and silicon leakage of the quartz crucible 2. It has high safety, stability and reliability, extends the service life of the product, and reduces production costs.

[0041] In some embodiments, the top of the first upper edge 11 and the top of the second upper edge 21 are both horizontal planes. That is, the top of the outer wall of the first upper edge 11 is flush with the top of its inner wall, and the top of the outer wall of the second upper edge 21 is flush with the top of its inner wall. As a result, the structure is simpler and the processing is more convenient.

[0042] Furthermore, a vertical distance between the top of the first upper edge 11 and its bottom is c, c is 30-45 mm, and a vertical distance between the top of the second upper edge 21 and its bottom is d, d is 10-15 mm greater than c.

[0043] That is to say, the first upper edge 11 is 10 to 15 mm higher than the second upper edge 21, and the top of the inner side wall of the first upper edge 11 forms a fulcrum. Therefore, not only can the second upper edge 21 be supported more stably to prevent the second upper edge 21 from curling outward, but also when the second upper edge 21 is softened by high temperature, under the action of gravity, the second upper edge 21 can be better prevented from curling inward, deforming, shortening, etc. When the second upper edge 21 is softened by high temperature, the inner side of the part higher than the first upper edge 11 will be deformed downward and inward due to the internal stress of the material, and the lower part of the outer side will also be deformed downward due to the lack of vertical support of the first upper edge 11. At this time, the outer side of the part of the second upper edge 21 that exceeds the first upper edge 11 will bend downward with the vertex of the inner side wall of the first upper edge 11 as the support point, so that the part of the second upper edge 21 that exceeds the first upper edge 11 is hung on the top of the first upper edge 11, and this hanging can prevent the second upper edge 21 from curling inward and shortening in height.

[0044] In addition, the top of the first upper edge 11 and the top of the second upper edge 21 may also be a curved surface or a combination of a horizontal surface and a curved surface.

[0045] In some embodiments, the wall thickness of the quartz crucible 2 is e, 13-17 mm, and the wall thickness of the outer crucible 1 is f, where f is 0-7 mm thicker than e. In other words, the wall thickness of the outer crucible 1 is 0-7 mm thicker than the wall thickness of the quartz crucible 2. Thus, the outer crucible 1 is ensured to better support the quartz crucible 2, and the structure is more stable and reliable.

[0046] In some embodiments, Figure 2 As shown, the outer crucible 1 is integrally formed, and the outer crucible 1 includes a first horizontal bottom wall 12, a first vertical wall 13 and a first upper edge 11 from bottom to top, and the intersection of the first horizontal bottom wall 12 and the first vertical wall 13 is rounded. The wall thicknesses of the first horizontal bottom wall 12, the first vertical wall 13 and the first upper edge 11 may be the same or different. As a result, the structure is more stable and reliable, and the service life is longer.

[0047] In some embodiments, Figure 2 As shown, the quartz crucible 2 is integrally formed, and the quartz crucible 2 includes, from bottom to top, a second horizontal bottom wall 22, a second vertical wall 23, and a second upper edge 21, and the intersection of the second horizontal bottom wall 22 and the second vertical wall 23 is rounded. The wall thicknesses of the second horizontal bottom wall 22, the second vertical wall 23, and the second upper edge 21 may be the same or different. As a result, the structure is more stable and reliable, and has a longer service life.

[0048] In some embodiments, the outer crucible 1 may be a graphite crucible or a carbon-carbon crucible, thereby achieving higher structural strength and longer service life.

[0049] In some embodiments, Figure 1 As shown, the inner side wall of the first upper edge 11 is consistent with the shape of its outer side wall, and the inner side wall of the second upper edge 21 is consistent with the shape of its outer side wall. In other words, the inner side wall of the first upper edge 11 and its outer side wall are both arc-shaped, and the inner side wall of the second upper edge 21 and its outer side wall are both arc-shaped. As a result, the structure is simpler and the processing and manufacturing are more convenient.

[0050] In some embodiments, Figure 3 As shown, the outer side wall of the first upper edge 11 is a vertical surface, and the inner side wall of the second upper edge 21 is consistent with the shape of its outer side wall. In other words, the inner side wall and the outer side wall of the second upper edge 21 are both arc-shaped, and the wall thickness of the upper part of the first upper edge 11 is increased, thereby improving the structural strength of the first upper edge 11 and ensuring that the first upper edge 11 better supports the second upper edge 21.

[0051] In some embodiments, Figure 4 As shown, the inner side wall of the first upper edge 11 is consistent with the shape of its outer side wall, and the inner side wall of the second upper edge 21 is a vertical surface. In other words, the inner side wall of the first upper edge 11 and its outer side wall are both arc-shaped, and the wall thickness of a part of the second upper edge 21 is increased, thereby not only improving the structural strength of the second upper edge 21, but also better preventing the second upper edge 21 from curling inward, collapsing, shortening in height, curling outward, etc.

[0052] In some embodiments, Figure 5 As shown, the outer side wall of the first upper edge 11 is a vertical surface, and the inner side wall of the second upper edge 21 is a vertical surface. In other words, the wall thickness of the first upper edge 11 and the second upper edge 21 is increased, thereby not only improving the structural strength of the first upper edge 11 and the second upper edge 21, ensuring that the first upper edge 11 better supports the second upper edge 21, but also better preventing the second upper edge 21 from curling inward, collapsing, shortening in height, curling outward, etc.

[0053] According to an embodiment of the present application, a single crystal furnace is provided, including a furnace body and a crucible assembly. The crucible assembly is arranged in the furnace body, the crucible assembly is the above-mentioned crucible assembly, and the furnace body is not shown. It should be noted that a heater, a heat preservation barrel, a water cooling screen, etc. matching the crucible assembly are arranged in the furnace body, and the furnace body, the heater, the heat preservation barrel and the water cooling screen are common mechanisms in the prior art and will not be described in detail here.

[0054] As a result, the structure is simple and stable, the operation is convenient, and the risks of silicon overflow, deformation of the quartz crucible 2, collision of the quartz crucible 2 with the guide tube, breakage of the crystal rod, rupture of the quartz crucible 2 and silicon leakage are not likely to occur. The safety, stability and reliability are high, the service life of the product is extended, and the production cost is reduced.

[0055] Based on the above-mentioned embodiments of the present disclosure, in the absence of explicit negation or conflict, the technical features of one embodiment may be beneficially combined with one or more other embodiments.

[0056] The above are only some embodiments of the present application, which are only used to illustrate the technical solution of the present application, rather than to limit it. It should be understood that, for those skilled in the art, without departing from the creative concept of the present application, it is possible to improve or replace it according to the above description, and all these improvements and replacements should belong to the protection scope of the claims attached to the present application. In this case, all details can be replaced by equivalent elements, and the materials, shapes and sizes can also be arbitrary.

Claims

1. A crucible assembly, characterized in that: include: An outer crucible, wherein the top of the outer crucible has a first upper edge, and the inner side wall of the first upper edge is in an arc shape extending outward and upward; A quartz crucible, wherein the quartz crucible is sleeved in the outer crucible, and the quartz crucible is separable from the outer crucible, the top of the quartz crucible has a second upper edge, the outer side wall of the second upper edge is in an arc shape extending outward and upward, the outer side wall of the second upper edge is attached to the inner side wall of the first upper edge, the top of the second upper edge is higher than the top of the first upper edge, the central angle of the outer side wall of the second upper edge is less than 90° and greater than the central angle of the inner side wall of the first upper edge, and the angle between the tangent of the bottom end point of the outer side wall of the second upper edge and the vertical direction is 1.8° to 2.2°.

2. The crucible assembly according to claim 1, characterized in that: The top of the first upper edge and the top of the second upper edge are both horizontal planes.

3. The crucible assembly according to claim 2, characterized in that: The vertical distance between the top of the first upper edge and the bottom thereof is 30 to 45 mm, and the vertical distance between the top of the second upper edge and the bottom thereof is 10 to 15 mm greater than the vertical distance between the top of the first upper edge and the bottom thereof.

4. The crucible assembly according to claim 3, characterized in that: The wall thickness of the quartz crucible is 13-17 mm, and the wall thickness of the outer crucible is 0-7 mm greater than the wall thickness of the quartz crucible.

5. The crucible assembly according to claim 1, characterized in that: The outer crucible is integrally formed, and comprises a first horizontal bottom wall, a first vertical wall and the first upper edge in sequence from bottom to top, and the intersection of the first horizontal bottom wall and the first vertical wall is rounded.

6. The crucible assembly according to claim 5, characterized in that: The quartz crucible is integrally formed and comprises, from bottom to top, a second horizontal bottom wall, a second vertical wall and the second upper edge, wherein the intersection of the second horizontal bottom wall and the second vertical wall is rounded.

7. The crucible assembly according to claim 1, characterized in that: The outer crucible is a graphite crucible or a carbon-carbon crucible.

8. The crucible assembly according to claim 1, characterized in that: The inner side wall of the first upper edge is consistent with the shape of its outer side wall, and the inner side wall of the second upper edge is consistent with the shape of its outer side wall.

9. The crucible assembly according to claim 1, characterized in that: The outer side wall of the first upper edge is a vertical surface, and / or the inner side wall of the second upper edge is a vertical surface.

10. A single crystal furnace, characterized in that: include: Furnace body; A crucible assembly, wherein the crucible assembly is arranged in the furnace body, and the crucible assembly is the crucible assembly described in any one of claims 1 to 9.

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