Crystal growth cavity water cooling structure and crystal growth equipment

Abstract

The utility model discloses a crystal growth cavity water cooling structure and crystal growth equipment, and relates to the technical field of semiconductor crystal growth equipment, the crystal growth cavity water cooling structure comprises a furnace chamber; a first water cooling cavity is formed in the top of the furnace chamber; a first separation structure is arranged in the first water cooling cavity, the first separation structure extends in the spiral direction on the horizontal plane, and the first separation structure and the cavity wall of the first water cooling cavity jointly form a first water cooling channel; a first water outlet is formed in the top of the furnace cavity and communicates with the first end of the first water cooling channel. A first notch is formed in the bottom of the first water cooling cavity and communicates with the second end of the first water cooling channel. And the first notch is used for introducing cooling water. According to the utility model, the top of the furnace chamber is provided with the first water cooling channel, the first notch and the first water outlet, so that cooling water can fully flow through each part in the first water cooling channel, dead water is prevented from being formed, and efficient cooling of the top of the furnace chamber is realized.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor crystal growth equipment, in particular to a crystal growth cavity water cooling structure and crystal growth equipment. Background Art

[0002] Crystal growth equipment is a device used to prepare semiconductor crystal materials, which usually has a crystal growth chamber for creating a crystal growth environment. Since the growth of semiconductor crystals requires a high temperature environment, induction heating is usually used to create high temperature conditions in the crystal growth chamber. Since the heat from induction heating is also transmitted to the crystal growth chamber in the form of thermal radiation, continuous heating for a long time will affect the service life of the crystal growth chamber, and the temperature inside the crystal growth chamber will also be transmitted to the outer wall of the crystal growth chamber. If there is no cooling water to provide cooling, the entire crystal growth chamber will be in a high temperature state, making it difficult for operators to get close to observe the crystal growth.

[0003] Therefore, a cooling water channel is usually required in the crystal growth chamber to take the excess heat out of the crystal growth chamber, so that the temperature inside the crystal growth chamber can reach the temperature required by the crystal growth process, and the surface of the crystal growth chamber can reach a temperature close to that of the cooling water. Among them, the heat radiation in the crystal growth chamber is mainly concentrated on the top of the crystal growth chamber when radiating outward, so the temperature at the top of the crystal growth chamber is the highest temperature in the entire crystal growth chamber.

[0004] The existing crystal growth chamber lacks planning for the cooling water circuit, and the heat exchange between the cooling water and the chamber is insufficient, resulting in low cooling efficiency of the cooling water. In addition, the cooling water at certain locations in the cooling water circuit flows too slowly and easily forms stagnant water, which easily leads to heat accumulation. At the same time, the sediment in the stagnant water will also reduce the cleanliness of the circulating water system and easily cause microbial contamination. Utility Model Content

[0005] The main purpose of the utility model is to provide a crystal growth cavity water cooling structure and crystal growth equipment, aiming to solve the problem that the cooling efficiency of the cooling water path inside the crystal growth cavity is low and dead water is easily formed.

[0006] To achieve the above-mentioned purpose, the crystal growth cavity water-cooling structure proposed in the utility model is applied to crystal growth equipment, and the crystal growth cavity water-cooling structure includes a furnace cavity; a first water-cooling cavity is provided inside the top of the furnace cavity; a first partition structure is provided in the first water-cooling cavity, and the first partition structure extends in a spiral direction on a horizontal plane, and the first partition structure and the cavity wall of the first water-cooling cavity together constitute a first water-cooling channel; a first water outlet is provided at the top of the furnace cavity, and the first water outlet is connected to the first end of the first water-cooling channel; a first notch is provided at the bottom of the first water-cooling cavity, and the first notch is connected to the second end of the first water-cooling channel; the first notch is used to pass cooling water.

[0007] In one embodiment, a cross-sectional area of ​​the first water-cooling channel gradually decreases from the second end of the first water-cooling channel to the first end of the first water-cooling channel.

[0008] In one embodiment, a second water-cooling cavity is provided inside the side wall of the furnace cavity; the second end of the first water-cooling channel is connected to the second water-cooling cavity through a first notch; a first water inlet is provided at the bottom of the furnace cavity, and the first water inlet is connected to the second water-cooling cavity; at least two second partition structures are provided in the second water-cooling cavity, and at least two second partition structures divide the second water-cooling cavity into multiple first sub-cavities; a second notch is provided on the second partition structure, each second notch is connected to two adjacent first sub-cavities, and the second notches on each group of two adjacent second partition structures are staggered in the horizontal plane.

[0009] In one embodiment, the second partition structure is extended along a first direction, and the first direction is a straight line direction or an arc direction; one of each group of two adjacent second notches is arranged at the first end of the corresponding second partition structure, and the other of each group of two adjacent second notches is arranged at the second end of the corresponding second partition structure.

[0010] In one embodiment, the crystal growth chamber water cooling structure also includes a furnace door, which is hinged on the furnace chamber; the interior of the furnace door has a third water cooling cavity; a second water inlet is provided at the bottom of the furnace door, and a second water outlet is provided at the top of the furnace door, and the second water inlet and the second water outlet are both connected to the third water cooling cavity.

[0011] In one embodiment, at least two third partition structures are provided inside the third water-cooling cavity, and the at least two third partition structures divide the third water-cooling cavity into multiple second sub-cavities; third notches are provided on the third partition structures, and each third notch is connected to two adjacent second sub-cavities, and the third notches on each group of two adjacent third partition structures are staggered in the horizontal plane.

[0012] In one embodiment, the third partition structure is extended along the second direction, and the second direction is a straight line direction or an arc direction; one of each group of two adjacent third notches is arranged at the first end of the corresponding third partition structure, and the other of each group of two adjacent third notches is arranged at the second end of the corresponding third partition structure.

[0013] In one embodiment, the crystal growth chamber water cooling structure also includes a water-cooled observation window flange, which is installed on the side wall of the furnace door. A second pipeline is provided inside the water-cooled observation window flange. The second pipeline has a first water inlet end and a first water outlet end. The first water inlet end is connected to the lower side of the water-cooled observation window flange, and the first water outlet end is connected to the upper side of the water-cooled observation window flange.

[0014] In one embodiment, the crystal growth chamber water cooling structure also includes a water-cooled electrode flange, which is installed on the side wall of the furnace chamber; the water-cooled electrodes on the water-cooled electrode flange are used to connect to the two ends of the induction coil respectively to provide power and water cooling to the induction coil; a third pipeline is provided inside the water-cooled electrode flange, and the third pipeline has a second water inlet end and a second water outlet end; the second water inlet end is connected to the lower side of the water-cooled electrode flange, and the second water outlet end is connected to the upper side of the water-cooled electrode flange.

[0015] The utility model also provides a crystal growth device, comprising the above-mentioned crystal growth cavity water cooling structure.

[0016] The technical solution of the utility model adopts a crystal growth cavity water cooling structure, which includes a furnace cavity; a first water cooling cavity is provided inside the top of the furnace cavity; a first partition structure is provided in the first water cooling cavity, the first partition structure extends in a spiral direction on a horizontal plane, and the first partition structure and the cavity wall of the first water cooling cavity together constitute a first water cooling channel; a first water outlet is provided at the top of the furnace cavity, and the first water outlet is connected to the first end of the first water cooling channel; a first notch is provided at the bottom of the first water cooling cavity, and the first notch is connected to the second end of the first water cooling channel; the first notch is used to pass cooling water. The utility model provides a first water cooling channel, a first notch and a first water outlet at the top of the furnace cavity, and the first notch is located below the first water outlet, so that the cooling water can fully flow and fill every area in the first water cooling cavity under the action of gravity before flowing out from the first water outlet, thereby ensuring the time for the cooling water to perform heat exchange and the contact area of ​​the heat exchange, thereby improving the cooling efficiency of the cooling water on the top of the furnace cavity. In addition, compared to the traditional water-cooling cavity technical solution that is only provided with a water inlet and a water outlet, this solution has a spiral first water-cooling channel in the first water-cooling cavity. The first water-cooling channel guides the cooling water to flow along a specific path, which helps to maintain the water flow dynamics in the area away from the first notch and the first water outlet, thereby effectively avoiding the slowdown or stagnation of the local cooling water flow and the formation of dead water. In addition, the first water-cooling channel is designed to be spiral. Since it has an arc-shaped side wall, compared with the water-cooling channel running in a straight line, the spiral first water-cooling channel does not have corners and corners where water is easily accumulated, so it also helps to reduce dead water. The first water-cooling channel of this solution can not only reduce the accumulation of heat in local areas, but also reduce the deposition of sediments in static water areas, thereby improving the cleanliness and reliability of the cooling water system. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0018] Figure 1 A front view of an embodiment of a water cooling structure for a crystal growth chamber provided by the utility model;

[0019] Figure 2 A side view of an embodiment of a water cooling structure for a crystal growth chamber provided by the utility model;

[0020] Figure 3 for Figure 1 Sectional view along AA;

[0021] Figure 4 for Figure 1 Sectional view along the middle line BB;

[0022] Figure 5 for Figure 1 Cross-sectional view at the middle edge CC;

[0023] Figure 6 for Figure 1 Cross-sectional view along DD.

[0024] Description of Figure Numbers:

[0025] 1. Furnace cavity; 11. First water-cooling cavity; 111. First partition structure; 112. First gap; 12. First water outlet; 13. First water inlet; 14. Second water-cooling cavity; 141. Second partition structure; 1411. Second gap; 142. First sub-cavity; 2. Furnace door; 21. Third water-cooling cavity; 211. Third partition structure; 212. Second sub-cavity; 22. Second water inlet; 23. Second water outlet; 3. Water-cooled observation window flange; 31. First water inlet; 32. First water outlet; 4. Water-cooled electrode flange; 41. Second water inlet; 42. Second water outlet.

[0026] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0029] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the utility model.

[0030] Crystal growth equipment is a device used to prepare semiconductor crystal materials, which usually has a crystal growth cavity for creating a crystal growth environment. Since the growth of semiconductor crystals requires a high temperature environment, induction heating is usually used to create high temperature conditions in the crystal growth cavity. The heat from induction heating will also be transferred to the crystal growth cavity in the form of thermal radiation. The high temperature inside the cavity that continues to heat for a long time will affect the crystal growth cavity, and the temperature inside the crystal growth cavity will also be transferred to the outer wall of the crystal growth cavity. If there is no cooling water to provide cooling, the entire crystal growth cavity will be in a high temperature state, and it will be difficult for operators to get close to observe the crystal growth. Therefore, a cooling water channel is usually required in the crystal growth cavity to take the excess heat out of the crystal growth cavity, so that the temperature inside the crystal growth cavity furnace can reach the temperature required for the crystal growth process, and the surface of the crystal growth cavity can reach a temperature close to that of the cooling water. Among them, the heat radiation in the crystal growth cavity is mainly concentrated on the top of the crystal growth cavity when radiating outward, so the temperature at the top of the crystal growth cavity is the highest temperature in the entire crystal growth cavity.

[0031] The existing crystal growth chamber lacks planning for the cooling water circuit, and the heat exchange between the cooling water and the chamber is insufficient, resulting in low cooling efficiency of the cooling water. In addition, the cooling water at certain locations in the cooling water circuit flows too slowly and easily forms stagnant water, which easily leads to heat accumulation. At the same time, the sediment in the stagnant water will also reduce the cleanliness of the circulating water system and easily cause microbial contamination.

[0032] In order to solve the above problems, the utility model provides the following technical solutions.

[0033] The utility model provides a crystal growth cavity water cooling structure.

[0034] See also Figure 1 , 24. In one embodiment of the utility model, the crystal growth cavity water-cooling structure is applied to crystal growth equipment, and the crystal growth cavity water-cooling structure includes a furnace cavity 1; a first water-cooling cavity 11 is provided inside the top of the furnace cavity 1; a first partition structure 111 is provided in the first water-cooling cavity 11, and the first partition structure 111 extends in a spiral direction on a horizontal plane, and the first partition structure 111 and the cavity wall of the first water-cooling cavity 11 together constitute a first water-cooling channel; a first water outlet 12 is provided on the top of the furnace cavity 1, and the first water outlet 12 is connected to the first end of the first water-cooling channel; a first notch 112 is provided at the bottom of the first water-cooling cavity 11, and the first notch 112 is connected to the second end of the first water-cooling channel; the first notch 112 is used to pass cooling water.

[0035] The utility model is provided with a first water cooling channel, a first notch 112 and a first water outlet 12 at the top of the furnace cavity 1, and the first notch 112 is located below the first water outlet 12, so that the cooling water can fully flow and fill every area in the first water cooling cavity 11 under the action of gravity before flowing out from the first water outlet 12, thereby ensuring the time for the cooling water to perform heat exchange and the contact area for heat exchange, thereby improving the cooling efficiency of the cooling water on the top of the furnace cavity 1. In addition, compared with the traditional water cooling cavity technical solution that is only provided with a water inlet and a water outlet, the present solution is provided with a spiral first water cooling channel in the first water cooling cavity 11, and the first water cooling channel guides the cooling water to flow along a specific path, which helps to maintain the water flow dynamics in the area away from the first notch 112 and the first water outlet 12, thereby effectively avoiding the slowdown or stagnation of the local cooling water flow and the formation of dead water. In addition, the first water cooling channel is designed to be spiral. Since it has an arc-shaped side wall, compared with a straight-line water cooling channel, the spiral first water cooling channel does not have corners where water easily accumulates, so it also helps to reduce dead water. The first water cooling channel of this solution can not only reduce the accumulation of heat in local areas, but also reduce the deposition of sediments in static water areas, thereby improving the cleanliness and reliability of the cooling water system.

[0036] See also Figure 4 In the embodiment of the utility model, in order to solve the problem of how to prevent the partial area far from the water inlet from not being reached by cooling water due to the reduction of water pressure, the cross-sectional area of ​​the first water cooling channel gradually decreases from the second end of the first water cooling channel to the first end of the first water cooling channel. In this way, by gradually reducing the cross-sectional area of ​​the first water cooling channel from the second end to the first end, since the cooling water flow rate in the first water cooling channel is constant, the flow rate of the cooling water when flowing along the first water cooling channel is increased, and the water pressure is increased, so that the cooling water can flow to every place in the first water cooling cavity 11 as much as possible.

[0037] See also Figure 3 , 4and 5. In the embodiments of the utility model, in order to solve the heat dissipation and cooling problem of the side wall of the furnace cavity 1, a second water-cooling cavity 14 is provided inside the side wall of the furnace cavity 1; the second end of the first water-cooling channel is connected to the second water-cooling cavity 14 through the first notch 112; a first water inlet 13 is provided at the bottom of the furnace cavity 1, and the first water inlet 13 is connected to the second water-cooling cavity 14; at least two second partition structures 141 are provided in the second water-cooling cavity 14, and at least two second partition structures 141 divide the second water-cooling cavity 14 into a plurality of first sub-cavities 142; a second notch 1411 is provided on the second partition structure 141, and each second notch 1411 is connected to two adjacent first sub-cavities 142, and the second notches 1411 on each group of two adjacent second partition structures 141 are staggered in the horizontal plane. Thus, in this embodiment, a second water-cooling cavity 14 is provided on the side wall of the furnace cavity 1, so that the side wall of the furnace cavity 1 is water-cooled to avoid overheating of the side wall of the furnace cavity 1; and, the first water inlet 13 is provided at the bottom of the furnace cavity 1, and the first notch 112 is at the top of the furnace cavity 1, so that the cooling water can flow fully under the action of gravity to fill every area in the second water-cooling cavity 14 before flowing out from the first water outlet 12, thereby ensuring the heat exchange time of the cooling water and the contact area of ​​the heat exchange, thereby improving the cooling efficiency of the cooling water on the side wall of the furnace cavity 1. In addition, since the second water-cooling cavity 14 also has the problem of slowing down the water flow in the area away from the first notch 112 and the first water inlet, resulting in the formation of dead water, in this embodiment, a second partition structure 141 is provided in the second water-cooling cavity 14 to divide the second water-cooling cavity 14 into multiple first sub-cavities 142, and corresponding second notches 1411 are provided on the second partition structure 141, so that the cooling water forms a specific flow path when flowing through each second notch 1411; and the second notches 1411 on each group of two adjacent second partition structures 141 are staggered on the horizontal plane, which increases the flow path of the cooling water, and can make the flow path cover as many areas as possible in the first sub-cavity 142, which is conducive to promoting the uniform flow of cooling water in the entire first sub-cavity 142 and avoiding the formation of dead water.

[0038] In the above embodiment, the second notches 1411 on each group of two adjacent second partition structures 141 are staggered on the horizontal plane, and there are many optional implementation methods for the staggered arrangement. Figure 3 , 5and 6, as an optional embodiment, the second partition structure 141 is extended along the first direction, the first direction is a straight line direction or an arc direction; one of each group of two adjacent second notches 1411 is set at the first end of the corresponding second partition structure 141, and the other of each group of two adjacent second notches 1411 is set at the second end of the corresponding second partition structure 141. In this way, each group of two adjacent second notches 1411 is respectively set at the two ends of the corresponding second partition structure 141, and the distance between each group of two adjacent second notches 1411 is maximized, so that the flow path of the cooling water is further increased; after adopting this staggered setting method, the cooling water flows in a circuitous manner in the second water-cooling cavity 14, which is conducive to further promoting the uniform flow of the cooling water in the entire first sub-cavity 142 and avoiding the formation of dead water.

[0039] See also Figure 1 and 3 In the embodiment of the utility model, in order to solve the problem of how to avoid overheating of the furnace door, the crystal growth chamber water cooling structure also includes a furnace door 2, which is hinged on the furnace chamber 1; the furnace door 2 has a third water cooling chamber 21 inside; the bottom of the furnace door 2 is provided with a second water inlet 22, and the top of the furnace door 2 is provided with a second water outlet 23, and the second water inlet 22 and the second water outlet 23 are both connected to the third water cooling chamber 21. In this way, by providing the third water cooling chamber 21 inside the furnace door 2, the furnace door 2 is water-cooled to avoid overheating of the furnace door 2; and the second water inlet 22 is provided at the bottom of the furnace door 2, and the second water outlet 23 is provided at the top of the furnace door 2, so that the cooling water can fully flow under the action of gravity to fill every area in the third water cooling chamber 21 before flowing out, thereby ensuring the time for the cooling water to perform heat exchange and the contact area for heat exchange, thereby improving the cooling efficiency of the cooling water on the side wall of the furnace chamber 1.

[0040] See also Figure 1 and 3In the embodiment of the utility model, the third water-cooling cavity 21 also has the problem of slowing down the water flow in the area far away from the second water outlet 23 and the second water inlet, resulting in the formation of dead water. Therefore, in order to solve the above problem, at least two third partition structures 211 are provided inside the third water-cooling cavity 21, and at least two third partition structures 211 divide the third water-cooling cavity 21 into a plurality of second sub-cavities 212; a third notch is provided on the third partition structure 211, each third notch is connected to two adjacent second sub-cavities 212, and the third notches on each group of two adjacent third partition structures 211 are staggered on the horizontal plane. In this way, since the third water-cooling cavity 21 in this embodiment adopts a similar technical solution to that of the second water-cooling cavity 14, the third water-cooling cavity 21 in this embodiment can also allow the cooling water to form a specific flow path extension when flowing through each third notch, so that the flow path covers as many areas in the second sub-cavity 212 as possible, which is conducive to promoting the uniform flow of cooling water in the entire second sub-cavity 212 and avoiding the formation of dead water.

[0041] In the above embodiment, the third notches on each group of two adjacent third partition structures 211 are staggered on the horizontal plane, and the staggered arrangement has multiple optional implementation methods. As an optional implementation method, the third partition structure 211 is extended along the second direction, and the second direction is a straight line direction or an arc direction; one of each group of two adjacent third notches is set at the first end of the corresponding third partition structure 211, and the other of each group of two adjacent third notches is set at the second end of the corresponding third partition structure 211. In this way, each group of two adjacent third notches are respectively set at the two ends of the corresponding third partition structure 211, and the distance between each group of two adjacent third notches is maximized, so that the flow path of the cooling water is further increased; after adopting this staggered arrangement, the cooling water flows in a circuitous manner in the third water-cooling cavity 21, which is conducive to further promoting the uniform flow of cooling water in the entire second sub-cavity 212 and avoiding the formation of dead water.

[0042] See also Figure 1In the embodiment of the utility model, in order to solve the problem of overheating of the water-cooled observation window, the crystal growth chamber water-cooling structure further includes a water-cooled observation window flange 3, the water-cooled observation window flange 3 is installed on the side wall of the furnace door 2, and a second pipeline is arranged inside the water-cooled observation window flange 3, the second pipeline has a first water inlet end 31 and a first water outlet end 32, the first water inlet end 31 is connected to the lower side of the water-cooled observation window flange 3, and the first water outlet end 32 is connected to the upper side of the water-cooled observation window flange 3. In this way, by arranging the second pipeline inside the water-cooled observation window, the external water supply equipment can pass cooling water into the second pipeline, so as to cool down the water-cooled observation window on the water-cooled observation window flange 3; and by arranging the first water inlet end 31 above the first water outlet end 32, the cooling water can fully flow under the action of gravity and fill every area in the second pipeline before flowing out from the first water outlet end 32, thereby ensuring the time for the cooling water to perform heat exchange and the contact area of ​​the heat exchange, thereby improving the cooling efficiency of the cooling water on the water-cooled observation window.

[0043] See also Figure 1 and 2 In an embodiment of the utility model, in order to solve the problem of overheating of the induction coil and the water-cooled electrode flange, the crystal growth chamber water-cooling structure also includes a water-cooled electrode flange 4, which is installed on the side wall of the furnace chamber 1; the water-cooled electrodes on the water-cooled electrode flange 4 are used to be connected to the two ends of the induction coil respectively to provide power and water cooling to the induction coil; a third pipeline is provided inside the water-cooled electrode flange 4, and the third pipeline has a second water inlet end 41 and a second water outlet end 42; the second water inlet end 41 is connected to the lower side of the water-cooled electrode flange 4, and the second water outlet end 42 is connected to the upper side of the water-cooled electrode flange 4. In this way, the water-cooled electrodes on the water-cooled electrode flange 4 are used to provide power and water cooling to the induction coil, thereby achieving water cooling of the induction coil; by providing a third pipeline inside the water-cooled electrode flange 4, an external water supply device can pass cooling water into the third pipeline, thereby cooling the water-cooled electrode flange 4; and by arranging the second water inlet end 41 above the second water outlet end 42, the cooling water can fully flow under the action of gravity and fill every area in the third pipeline before flowing out from the second water outlet end 42, thereby ensuring the heat exchange time of the cooling water and the contact area of ​​the heat exchange, thereby improving the cooling efficiency of the cooling water on the water-cooled electrode flange 4.

[0044] In the embodiment of the utility model, in order to solve the problem of overheating of the bottom of the furnace cavity 1, the bottom of the furnace cavity 1 has a fourth water-cooling cavity, and the cavity wall of the fourth water-cooling cavity is provided with a third water inlet and a third water outlet. In this way, the bottom of the furnace cavity 1 can also be water-cooled, thereby preventing the bottom of the furnace cavity 1 from overheating.

[0045] In an embodiment of the utility model, any of the above-mentioned water inlets, water outlets, water inlet ends and water outlet ends are connected with pagoda joints, which are used to connect to external water supply and cooling equipment, so as to introduce cooling water into the first water-cooling cavity 11, the second water-cooling cavity 14, the third water-cooling cavity 21, the fourth water-cooling cavity, the water-cooled electrode flange 4 and the water-cooled observation window flange 3 and receive refluxed heat exchange water.

[0046] In the embodiment of the utility model, since the flow control of cooling water is very important for the temperature control of the water-cooling structure of the crystal growth chamber, this embodiment provides a flow setting reference value in one case. The case is as follows: the spacing between the upper and lower walls of the first water-cooling chamber 11 at the top of the furnace chamber 1 is set to 10mm, and the spacing between the left and right walls of the second water-cooling chamber 14 on the side wall of the furnace chamber 1 is set to 10mm, and the furnace chamber 1 is made of 316 stainless steel. In this case, since the cross-sectional area of ​​the first water-cooling chamber 11 and the second water-cooling chamber 14 is large, a water pipe with a diameter of 1 inch is used to supply water to the first water inlet 13, and the flow rate of the first water inlet 13 needs to reach 26L / min; the water supply flow rate of the front door of the chamber and the water-cooling coil needs to reach 18L / min, and the water supply flow rate of the water-cooled electrode flange 4, the water-cooled observation window flange 3 and the bottom of the chamber is 8L / min. Of course, this does not limit the flow rate of cooling water introduced into various places of the water-cooling structure of the crystal growth chamber, and the actual flow value can be adjusted accordingly according to different temperature control requirements.

[0047] See also Figure 1 and 4The present invention also proposes a crystal growth device, which includes the above-mentioned crystal growth cavity water cooling structure. The specific structure of the crystal growth cavity water cooling structure refers to the above-mentioned embodiment. Since the present crystal growth device adopts all the technical solutions of all the above-mentioned embodiments, it at least has all the beneficial effects brought by the technical solutions of the above-mentioned embodiments, which will not be repeated here. After adopting the present crystal growth cavity water cooling structure, the present crystal growth device has a first water cooling cavity 11, which can perform water cooling and heat dissipation on the top of the furnace cavity 1; at the same time, since the first notch 112 is lower than the first water outlet 12, the present crystal growth device can ensure the time for the cooling water to perform heat exchange and the contact area for the heat exchange, thereby improving the cooling efficiency of the cooling water on the top of the furnace cavity 1. In addition, the first water cooling channel of the crystal growth device of the present invention can guide the cooling water to flow along a specific path, which helps to maintain the water flow dynamics in the area away from the first notch 112 and the first water outlet 12, thereby effectively avoiding the slowdown or stagnation of the local cooling water flow and the formation of dead water. In addition, the first water cooling channel of the crystal growth device is designed to be spiral. Since the first water cooling channel has an arc-shaped side wall, compared with a straight-line water cooling channel, the spiral first water cooling channel does not have corners where water easily accumulates, thereby helping to reduce dead water. Therefore, the crystal growth device of the utility model not only reduces the accumulation of heat in local areas, but also reduces the deposition of sediments in static water areas, ultimately achieving the effect of improving the cleanliness and reliability of the cooling water system.

[0048] It should be noted that the water cooling of the crystal growth equipment is a closed circulation system. During the water cooling process, the circulating water temperature and flow rate will be monitored. When the temperature of the circulating water after heat exchange exceeds the set value, external cooling equipment such as the chiller starts working to reduce the inlet water temperature to below the preset threshold; if the flow rate does not reach the corresponding preset flow rate, the water pump will increase the speed to increase the flow supply, thereby intelligently adjusting the crystal growth equipment to the appropriate temperature.

[0049] The above description is only an exemplary embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A crystal growth chamber water cooling structure, applied to crystal growth equipment, characterized in that: The crystal growth cavity water cooling structure comprises a furnace cavity; A first water-cooling cavity is provided inside the top of the furnace cavity; a first partition structure is provided in the first water-cooling cavity, the first partition structure extends in a spiral direction on a horizontal plane, and the first partition structure and the cavity wall of the first water-cooling cavity together form a first water-cooling channel; A first water outlet is provided on the top of the furnace cavity, and the first water outlet is connected to the first end of the first water cooling channel; A first notch is provided at the bottom of the first water-cooling cavity, and the first notch is communicated with the second end of the first water-cooling channel; the first notch is used for introducing cooling water.

2. The crystal growth chamber water cooling structure according to claim 1, characterized in that: A cross-sectional area of ​​the first water-cooling channel gradually decreases from the second end of the first water-cooling channel to the first end of the first water-cooling channel.

3. The crystal growth chamber water cooling structure according to claim 1, characterized in that: A second water-cooling cavity is provided inside the side wall of the furnace cavity; The second end of the first water-cooling channel is connected to the second water-cooling cavity through the first notch; a first water inlet is provided at the bottom of the furnace cavity, and the first water inlet is connected to the second water-cooling cavity; At least two second partition structures are provided in the second water-cooling cavity, and the at least two second partition structures divide the second water-cooling cavity into a plurality of first sub-cavities; The second partition structure is provided with a second notch, each of the second notches is communicated with two adjacent first sub-cavities, and the second notches on each group of two adjacent second partition structures are staggered on a horizontal plane.

4. The crystal growth chamber water cooling structure according to claim 3, characterized in that: The second partition structure is extended along a first direction, and the first direction is a straight line direction or an arc direction; One of each group of two adjacent second notches is disposed at the first end of the corresponding second partition structure, and the other of each group of two adjacent second notches is disposed at the second end of the corresponding second partition structure.

5. The crystal growth chamber water cooling structure according to claim 1, characterized in that: The crystal growth chamber water cooling structure further comprises a furnace door, which is hinged on the furnace chamber; The furnace door has a third water-cooling cavity inside; A second water inlet is provided at the bottom of the furnace door, and a second water outlet is provided at the top of the furnace door. Both the second water inlet and the second water outlet are connected to the third water-cooling cavity.

6. The crystal growth chamber water cooling structure according to claim 5, characterized in that: At least two third partition structures are provided inside the third water-cooling cavity, and the at least two third partition structures divide the third water-cooling cavity into a plurality of second sub-cavities; The third partition structure is provided with a third notch, each of the third notches is communicated with two adjacent second sub-cavities, and the third notches on each group of two adjacent third partition structures are staggered on a horizontal plane.

7. The crystal growth chamber water cooling structure according to claim 6, characterized in that: The third partition structure is extended along a second direction, and the second direction is a straight line direction or an arc direction; One of the two adjacent third notches in each group is arranged at the first end of the corresponding third partition structure, and the other of the two adjacent third notches in each group is arranged at the second end of the corresponding third partition structure.

8. The crystal growth chamber water cooling structure according to any one of claims 5 to 7, characterized in that: The crystal growth chamber water cooling structure also includes a water-cooled observation window flange, which is installed on the side wall of the furnace door. A second pipeline is provided inside the water-cooled observation window flange, and the second pipeline has a first water inlet end and a first water outlet end. The first water inlet end is connected to the lower side of the water-cooled observation window flange, and the first water outlet end is connected to the upper side of the water-cooled observation window flange.

9. The crystal growth chamber water cooling structure according to any one of claims 1 to 7, characterized in that: The crystal growth chamber water-cooling structure also includes a water-cooled electrode flange, which is installed on the side wall of the furnace chamber; the water-cooled electrodes on the water-cooled electrode flange are used to be connected to the two ends of the induction coil respectively to provide power and water cooling to the induction coil; a third pipeline is provided inside the water-cooled electrode flange, and the third pipeline has a second water inlet end and a second water outlet end; the second water inlet end is connected to the lower side of the water-cooled electrode flange, and the second water outlet end is connected to the upper side of the water-cooled electrode flange.

10. A crystal growth device, characterized in that: It comprises the crystal growth chamber water cooling structure as claimed in any one of claims 1 to 9.

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