Non-contact formic acid vacuum reflow furnace

Abstract

The utility model relates to the technical field of vacuum sintering, in particular to a non-contact formic acid vacuum reflow furnace which comprises a second gate valve, a third gate valve, a fourth gate valve, a fifth gate valve, at least one temperature measuring mechanism, a second preheating area, a welding area and a cooling area. A first gate valve is arranged at the inlet end of the first preheating area, a second gate valve is arranged at the inlet end of the second preheating area, a third gate valve is arranged at the outlet end of the second preheating area, a third gate valve is arranged at the inlet end of the welding area, a fourth gate valve is arranged at the outlet end of the welding area, and a fourth gate valve is arranged at the inlet end of the cooling area. The fifth gate valve is arranged at the outlet end of the cooling area, and the temperature measuring mechanism is arranged on an upper cover of a sealing cavity of the second preheating area and the welding area. The temperature measuring sensor directly measures the temperature of the workpiece, is suitable for non-planar workpieces, avoids the influence of the jig on the temperature of the workpiece, and is more accurate in temperature control.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum sintering, in particular to a non-contact formic acid vacuum reflow furnace. Background Art

[0002] The vacuum gate valve is a valve used to isolate the vacuum pipe and block the airflow. It is an important vacuum component. When packaging semiconductor chips, it needs to be done in a vacuum environment, which can generally be achieved in the form of a vacuum reflow oven. The vacuum reflow oven in the prior art is equipped with multiple temperature zones, which are divided into a preheating zone, a welding zone and a cooling zone. Among them, the preheating zone is protected by nitrogen and is not a completely low-oxygen environment; the welding zone is a vacuum environment. After the chip is welded, the door connecting the welding zone and the cooling zone is opened, and the chip enters the cooling zone from the welding zone. At the same time, the door connecting the welding zone and the preheating zone is opened, and the preheated chip is sent to the welding zone for welding. At present, the existing technology measures the temperature of the fixture, which is not suitable for non-planar workpieces. Summary of the invention

[0003] The utility model provides a non-contact formic acid vacuum reflow furnace, which is used to solve the problems in the prior art that the vacuum sintering furnace cannot directly measure the temperature of a workpiece, is not suitable for non-planar workpieces, and cannot avoid the temperature influence of a fixture on the workpiece.

[0004] The utility model provides a non-contact formic acid vacuum reflow furnace, comprising a second gate valve, a third gate valve, a fourth gate valve, a fifth gate valve, at least one temperature measuring mechanism, a second preheating zone, a welding zone and a cooling zone; the second gate valve is arranged at the inlet end of the second preheating zone, the third gate valve is arranged at the outlet end of the second preheating zone, the third gate valve is arranged at the inlet end of the welding zone, the fourth gate valve is arranged at the outlet end of the welding zone, the fourth gate valve is arranged at the inlet end of the cooling zone, the fifth gate valve is arranged at the outlet end of the cooling zone, and the temperature measuring mechanism is arranged on the upper covers of the sealed cavities of the second preheating zone and the welding zone.

[0005] The non-contact formic acid vacuum reflow furnace according to the utility model further comprises a lifting mechanism, and the lifting mechanism is arranged below the cooling zone.

[0006] According to the non-contact formic acid vacuum reflow furnace of the utility model, it also includes a first preheating zone and a first gate valve. The first preheating zone is arranged in the upper workstation area of ​​the second preheating zone. The first gate valve is arranged at the inlet end of the first preheating zone, and the second gate valve is arranged at the outlet end of the first preheating zone.

[0007] According to the non-contact formic acid vacuum reflow furnace of the utility model, power wheels and guide wheels are arranged on both sides of the first preheating zone, the second preheating zone, the welding zone and the cooling zone.

[0008] According to the non-contact formic acid vacuum reflow furnace of the utility model, transmission mechanisms are provided on both sides of the outside of the first preheating zone, the second preheating zone, the welding zone and the cooling zone, and the transmission mechanism drives the power wheel.

[0009] The non-contact formic acid vacuum reflow furnace according to the utility model further comprises an observation window, and the temperature measuring mechanism is symmetrically arranged around the observation window.

[0010] According to the non-contact formic acid vacuum reflow furnace of the utility model, the transmission mechanism is a roller, a gear, a belt or a chain.

[0011] According to the non-contact formic acid vacuum reflow furnace of the utility model, the first preheating zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage;

[0012] The second preheating zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage;

[0013] The welding zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece welding stage;

[0014] The cooling zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece cooling stage.

[0015] According to the non-contact formic acid vacuum reflow furnace of the utility model, the temperature measuring mechanism includes a temperature measuring sensor, a first fixed block and a second fixed block; the second fixed block is arranged above the first fixed block, the second fixed block is vertically provided with a first threaded hole, the first fixed block is provided with a second threaded hole at a matching position of the first threaded hole, and the temperature measuring sensor is arranged in the first threaded hole.

[0016] According to the non-contact formic acid vacuum reflow furnace of the utility model, the diameter of the first threaded hole is larger than that of the second threaded hole, and an observation port is provided at the lower part of the second fixing block, through which the contact point between the first threaded hole and the second threaded hole is observed.

[0017] The present application has the following advantages: a fixing groove is provided at the lower part of the first fixing block of the temperature measuring mechanism and a protrusion is provided at the matching position of the upper cover of the sealing chamber, which plays the role of fixing the temperature measuring mechanism. The diameter of the first threaded hole of the temperature measuring mechanism is larger than that of the second threaded hole, and an observation port is provided at the contact point of the first threaded hole and the second threaded hole, which is convenient for observing the installation of the temperature measuring sensor and avoiding damage to the temperature measuring sensor. The temperature measuring sensor directly measures the temperature of the workpiece, avoiding the influence of the fixture on the temperature of the workpiece, and the temperature control is more accurate. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 It is a schematic diagram of the main structure of a vacuum sintering furnace;

[0020] Figure 2 It is a schematic diagram of the three-dimensional structure of the welding area;

[0021] Figure 3 It is a schematic diagram of the three-dimensional structure of the lower cavity of the welding area;

[0022] Figure 4 The three-dimensional structure diagram of the temperature measuring mechanism Figure 1 ;

[0023] Figure 5 It is a cross-sectional structural schematic diagram of the temperature measuring mechanism;

[0024] Figure 6 The three-dimensional structure diagram of the temperature measuring mechanism Figure 2 ;

[0025] Figure numerals: 1. first gate valve; 2. second gate valve; 3. third gate valve; 4. fourth gate valve; 5. fourth gate valve; 6. first preheating zone; 7. second preheating zone; 8. welding zone; 9. cooling zone; 61. upper cover of sealing chamber; 62. lower chamber of sealing chamber; 63. temperature measuring mechanism; 64. observation window; 65. lifting mechanism; 621. power wheel; 622. guide wheel; 623. heating plate; 624. heat dissipation water tank; 631. first threaded hole; 632. observation port; 633. second threaded hole; 634. fixing groove; 635. first fixing block; 636. second fixing block. DETAILED DESCRIPTION

[0026] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0027] In the description of the embodiments of the present utility model, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present utility model. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0028] In the description of the embodiments of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific circumstances.

[0029] In the embodiments of the present invention, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0030] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model embodiment. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0031] Combine the following Figure 1-6 A non-contact formic acid vacuum reflow furnace is described in accordance with an embodiment of the utility model, comprising a second gate valve 2, a third gate valve 3, a fourth gate valve 4, a fifth gate valve 5, at least one temperature measuring mechanism 63, a second preheating zone 7, a welding zone 8 and a cooling zone 9; a second gate valve 2 is arranged at the inlet end of the second preheating zone 7, a third gate valve 3 is arranged at the outlet end of the second preheating zone 7, a third gate valve 3 is arranged at the inlet end of the welding zone 8, a fourth gate valve 4 is arranged at the outlet end of the welding zone 8, a fourth gate valve 4 is arranged at the inlet end of the cooling zone 9, a fifth gate valve 5 is arranged at the outlet end of the cooling zone 9, and a temperature measuring mechanism 63 is arranged on the sealed cavity upper cover 61 of the second preheating zone 7 and the welding zone 8.

[0032] In some embodiments, a lifting mechanism 65 is further included, and a lifting mechanism 65 is arranged below the cooling zone 9. A fan is arranged above the cooling zone 9.

[0033] In some embodiments, it also includes a first preheating zone 6 and a first gate valve 1. The first preheating zone 6 is arranged in the upper workstation area of ​​the second preheating zone 7. The first gate valve 1 is arranged at the inlet end of the first preheating zone 6, and the second gate valve 2 is arranged at the outlet end of the first preheating zone 6.

[0034] In some embodiments, power wheels 621 and guide wheels 622 are provided on both sides of the interior of the first preheating zone 6, the second preheating zone 7, the welding zone 8 and the cooling zone 9. A heating plate 623 is provided between the guide wheels 622 on both sides of the interior. That is to say, the first preheating zone 6, the second preheating zone 7 and the welding zone 8 are the same or similar cavities, including a sealed cavity upper cover 61 and a sealed cavity lower cavity 62. A lifting mechanism 65 is provided below the cavity of the cooling zone 9. A vacuum device is provided below the first preheating zone 6, the second preheating zone 7 and the welding zone 8. The heating tubes of the first preheating zone 6, the second preheating zone 7 and the welding zone 8 are infrared heating tubes, non-contact temperature measurement and non-contact heating.

[0035] In some embodiments, transmission mechanisms are provided on both sides of the outside of the first preheating zone 6, the second preheating zone 7, the welding zone 8 and the cooling zone 9, and the transmission mechanisms drive the power wheel 621. Heat dissipation water tanks 624 are also provided on both sides of the outside of the first preheating zone 6, the second preheating zone 7, the welding zone 8 and the cooling zone 9.

[0036] In some embodiments, an observation window 64 is also included, and the temperature measuring mechanism 63 is symmetrically arranged around the observation window 64.

[0037] In some embodiments, the transmission mechanism is a roller, a gear, a belt, or a chain.

[0038] In some embodiments, the first preheating zone 6 is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage;

[0039] The second preheating zone 7 is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage;

[0040] The welding zone 8 is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece welding stage;

[0041] The cooling zone 9 is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece cooling stage.

[0042] In some embodiments, the temperature measuring mechanism 63 includes a temperature measuring sensor, a first fixing block 635 and a second fixing block 636; the second fixing block 636 is arranged above the first fixing block 635, the second fixing block 636 is vertically provided with a first threaded hole 631, the first fixing block 635 is provided with a second threaded hole 633 at a position matching the first threaded hole 631, and the temperature measuring sensor is arranged in the first threaded hole 631. The temperature measuring sensor and the first threaded hole 631 are preferably connected by threads.

[0043] In some embodiments, the diameter of the first threaded hole 631 is larger than that of the second threaded hole 633, and an observation port 632 is provided at the lower portion of the second fixing block 636, and the observation port 632 observes the contact between the first threaded hole 631 and the second threaded hole 633. The diameter of the first threaded hole 631 of the temperature measuring mechanism 63 is larger than that of the second threaded hole 633, and an observation port 632 is provided at the contact between the first threaded hole 631 and the second threaded hole 633, so as to facilitate observation of the installation of the temperature measuring sensor and avoid damage to the temperature measuring sensor.

[0044] A fixing groove 634 is provided at the lower part of the first fixing block 635, and a corresponding structure is provided at a position where the sealing chamber upper cover 61 matches the fixing groove 634. A fixing groove 634 is provided at the lower part of the first fixing block 635 of the temperature measuring mechanism 63, and a protrusion at a matching position of the sealing chamber upper cover 61 is provided, which plays a role in fixing the temperature measuring mechanism 63. Germanium glass is preferably provided below the second threaded hole 633 for temperature measurement. The temperature sensor directly measures the temperature of the workpiece, avoiding the influence of the fixture on the temperature of the workpiece, and the temperature control is more accurate.

[0045] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A non-contact formic acid vacuum reflow furnace, characterized in that: It includes a second gate valve, a third gate valve, a fourth gate valve, a fifth gate valve, at least one temperature measuring mechanism, a second preheating zone, a welding zone and a cooling zone; the second gate valve is arranged at the inlet end of the second preheating zone, the third gate valve is arranged at the outlet end of the second preheating zone, the third gate valve is arranged at the inlet end of the welding zone, the fourth gate valve is arranged at the outlet end of the welding zone, the fourth gate valve is arranged at the inlet end of the cooling zone, the fifth gate valve is arranged at the outlet end of the cooling zone, and the temperature measuring mechanism is arranged on the upper cover of the sealed cavity of the second preheating zone and the welding zone.

2. The non-contact formic acid vacuum reflow furnace according to claim 1, characterized in that: It also includes a lifting mechanism, which is arranged below the cooling zone.

3. The non-contact formic acid vacuum reflow furnace according to claim 1, characterized in that: It also includes a first preheating zone and a first gate valve. The first preheating zone is arranged in the upper station area of ​​the second preheating zone. The first gate valve is arranged at the inlet end of the first preheating zone, and the second gate valve is arranged at the outlet end of the first preheating zone.

4. The non-contact formic acid vacuum reflow furnace according to claim 3, characterized in that: Power wheels and guide wheels are arranged on both sides of the first preheating zone, the second preheating zone, the welding zone and the cooling zone.

5. The non-contact formic acid vacuum reflow furnace according to claim 4, characterized in that: Transmission mechanisms are provided on both sides of the outside of the first preheating zone, the second preheating zone, the welding zone and the cooling zone, and the transmission mechanisms drive the power wheel.

6. The non-contact formic acid vacuum reflow furnace according to claim 1, characterized in that: It also includes an observation window, and the temperature measuring mechanism is symmetrically arranged around the observation window.

7. The non-contact formic acid vacuum reflow furnace according to claim 5, characterized in that: The transmission mechanism is a roller, a gear, a belt or a chain.

8. The non-contact formic acid vacuum reflow furnace according to claim 3, characterized in that: The first preheating zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage; The second preheating zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage; The welding zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece welding stage; The cooling zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece cooling stage.

9. The non-contact formic acid vacuum reflow furnace according to claim 1, characterized in that: The temperature measuring mechanism includes a temperature measuring sensor, a first fixed block and a second fixed block; the second fixed block is arranged above the first fixed block, a first threaded hole is vertically arranged on the second fixed block, a second threaded hole is arranged on the first fixed block at a matching position of the first threaded hole, and the temperature measuring sensor is arranged in the first threaded hole.

10. The non-contact formic acid vacuum reflow furnace according to claim 9, characterized in that: The diameter of the first threaded hole is larger than that of the second threaded hole. The lower part of the second fixing block is provided with an observation port, and the contact point between the first threaded hole and the second threaded hole is observed through the observation port.

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